290 lines
9.6 KiB
C#
290 lines
9.6 KiB
C#
using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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using SicModules.LLs;
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using SicModules.TMs.Routines.Base;
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using IoInterLock = SicModules.Devices.IoInterLock;
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namespace SicModules.TMs.Routines
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{
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public class TMPurgeRoutine : TMBaseRoutine
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{
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enum RoutineStep
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{
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StartLoop,
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LoopPump,
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LoopVent,
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StopLoop,
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//Pump
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CloseV77,
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CloseV80,
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SlowPump,
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FastPump,
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VaccumDelay,
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CloseValves,
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CLoseSlowValue,
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//Vent
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CloseV81,
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CloseV82,
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SetMFC1,
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SetMFC2,
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OpenSlowVent,
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OpenFastVent,
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OpenVent,
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TimeStayATM,
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CloseSlowVent
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}
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//private TMPumpRoutine _pumpRoutine;
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//private TMVentRoutine _ventRoutine;
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private TM _tm;
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private IoSensor _bufferLid;
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private IoSensor _tmLid;
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private Devices.IoPump _pumpType;
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private LoadLock _ll;
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private IoInterLock _tmIoInterLock;
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private Stopwatch _swTimer = new Stopwatch();
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private int _routineTimeOut;
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private int _purgeCount;
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private double _slowFastPumpSwitchPressure;
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private double _pumpDelayTime;
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private double _pumpBasePressure;
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private int _pumpTimeOut;
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private double _ventBasePressure;
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private double _slowFastVentSwitchPressure;
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private int _ventTimeOut;
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private double _mfc60Default1;
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private double _mfc60Default2;
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private IoMFC _mfc60;
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private double _ventDelayTime;
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public TMPurgeRoutine()
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{
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Module = ModuleName.TM.ToString();
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Name = "Purge";
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_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ Module}");
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_ll = DEVICE.GetDevice<SicLoadLock>($"LoadLock.LoadLock");
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_bufferLid = DEVICE.GetDevice<IoSensor>($"Buffer.BufferLidClosed");
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_tmLid = DEVICE.GetDevice<IoSensor>($"TM.TMLidClosed");
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_pumpType = DEVICE.GetDevice<Devices.IoPump>($"TM.TMPump1");
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_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
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_mfc60 = DEVICE.GetDevice<IoMFC>($"TM.Mfc60");
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//_pumpRoutine = new TMPumpRoutine();
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//_ventRoutine = new TMVentRoutine();
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (objs.Length == 2 && int.TryParse(objs[0].ToString(), out int purgeCount) && int.TryParse(objs[1].ToString(), out int pumpDelayTime))
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{
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_purgeCount = purgeCount;
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_pumpDelayTime = pumpDelayTime;
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_ventBasePressure = SC.GetValue<double>("TM.PressureBalance.BalancePressure");
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}
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else
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{
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_purgeCount = SC.GetValue<int>("TM.Purge.CyclePurgeCount");
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_pumpDelayTime = SC.GetValue<int>("TM.Purge.PumpDelayTime");
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_ventBasePressure = SC.GetValue<double>("TM.Purge.VentBasePressure");
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}
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_routineTimeOut = SC.GetValue<int>("TM.Purge.RoutineTimeOut");
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_slowFastPumpSwitchPressure = SC.GetValue<double>("TM.Purge.SlowFastPumpSwitchPressure");
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_pumpBasePressure = SC.GetValue<double>("TM.Purge.PumpBasePressure");
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_pumpTimeOut = SC.GetValue<int>("TM.Purge.PumpTimeOut");
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_ventDelayTime = SC.GetValue<int>("TM.Purge.VentDelayTime");
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_mfc60Default1 = SC.GetValue<double>("TM.Purge.Mfc60Default1");
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_mfc60Default2 = SC.GetValue<double>("TM.Purge.Mfc60Default2");
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_slowFastVentSwitchPressure = SC.GetValue<double>("TM.Purge.SlowFastVentSwitchPressure");
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_ventTimeOut = SC.GetValue<int>("TM.Purge.VentTimeout");
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ModuleName[] modules = new ModuleName[] { ModuleName.LoadLock, ModuleName.PM1, ModuleName.PM2, ModuleName.UnLoad };
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foreach (var moduleName in modules)
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{
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if (!_tm.CheckSlitValveClose(moduleName))
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{
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EV.PostAlarmLog(Module, $"Can not Purge, {moduleName} slit valve not closed");
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return Result.FAIL;
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}
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}
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if (!_bufferLid.Value)
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{
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EV.PostAlarmLog(Module, $"Can not Purge,Buffer lid is not open");
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return Result.FAIL;
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}
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if (!_tmLid.Value)
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{
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EV.PostAlarmLog(Module, $"Can not Purge,TM lid is not open");
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return Result.FAIL;
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}
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if (_pumpType.IsAlarm)
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{
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EV.PostAlarmLog(Module, $"can not Purge,TM pump alarm");
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return Result.FAIL;
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}
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if (!_pumpType.IsRunning)
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{
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EV.PostAlarmLog(Module, $"can not Purge,TM pump is not running");
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return Result.FAIL;
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}
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if (!_tmIoInterLock.SetTMPurgeRoutineRunning(true, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not Purge,{reason}");
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return Result.FAIL;
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}
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if (SC.GetValue<bool>("System.IsATMMode"))
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{
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return Result.DONE;
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}
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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Loop((int)RoutineStep.StartLoop, _purgeCount);
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//ExecuteRoutine((int)RoutineStep.LoopPump, _pumpRoutine);
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//ExecuteRoutine((int)RoutineStep.LoopVent, _ventRoutine);
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//先Pump
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{
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//关闭V77
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CloseTMVent((int)RoutineStep.CloseV77);
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//关闭V80
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//CloseBufferVent((int)RoutineStep.CloseV80);
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//打开V82,等待压力低于200mbar(可配置)
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OpenSlowPump((int)RoutineStep.SlowPump, _tm, _slowFastPumpSwitchPressure, _pumpTimeOut);
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//打开V81,压力达到0mbar(可配置)
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OpenFastPump((int)RoutineStep.FastPump, _tm, _pumpBasePressure, _pumpTimeOut);
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//等待5s(可配置)
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TimeDelay((int)RoutineStep.VaccumDelay, _pumpDelayTime);
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//关闭
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CloseFastPump((int)RoutineStep.CloseValves, _tm);
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CloseSlowPump((int)RoutineStep.CLoseSlowValue, _tm);
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}
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//再Vent
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{
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//关闭V80
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//CloseBufferVent((int)RoutineStep.CloseV80);
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//关闭V81
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CloseFastPump((int)RoutineStep.CloseV81);
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//关闭V82
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CloseSlowPump((int)RoutineStep.CloseV82);
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//设定MFC60慢充流量
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SetMFCToSetPoint((int)RoutineStep.SetMFC1, _mfc60, _mfc60Default1);
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////打开V77,等待压力大于200mbar
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//OpenSlowVent((int)RoutineStep.OpenSlowVent, _tm, _slowFastVentSwitchPressure, _slowVentTimeout);
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////设定MFC60快充流量
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//SetMFCToSetPoint((int)RoutineStep.SetMFC2, _mfc60, _mfc60Default2);
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//等待压力大于1020mbar
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//OpenFastVent((int)RoutineStep.OpenFastVent, _tm, _ventBasePressure, _fastVentTime);
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//充气过程中检查是否到达打开快充流量的条件
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OpenVent((int)RoutineStep.OpenVent, _tm, _ventBasePressure, _slowFastVentSwitchPressure, _mfc60Default2, _ventTimeOut);
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//等待5s
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TimeDelay((int)RoutineStep.TimeStayATM, _ventDelayTime);
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//关闭V77
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CloseSlowVentValve((int)RoutineStep.CloseSlowVent, _tm);
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}
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EndLoop((int)RoutineStep.StopLoop);
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//关闭V81
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CloseFastPump((int)RoutineStep.CloseV81);
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//关闭V82
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CloseSlowPump((int)RoutineStep.CloseV82);
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//关闭V77
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CloseSlowVentValve((int)RoutineStep.CloseSlowVent, _tm);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_tmIoInterLock.DoTmCyclePurgeRoutineRunning = false;
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return Result.DONE;
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}
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public override void Abort()
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{
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_tmIoInterLock.DoTmCyclePurgeRoutineRunning = false;
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//_pumpRoutine.Abort();
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//_ventRoutine.Abort();
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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}
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}
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