526 lines
20 KiB
C#
526 lines
20 KiB
C#
using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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using Aitex.Core.Common.DeviceData;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using MECF.Framework.Common.Equipment;
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using SicModules.PMs.RecipeExecutions;
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using SicModules.PMs.Routines.Base;
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namespace SicModules.PMs.Routines.EditableRoutine
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{
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public enum RoutineType
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{
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AtmRoutine,
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VacRoutine,
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ProcessIdleRoutine,
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PumpRoutine,
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VentRoutine,
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PurgeRoutine,
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CleanRoutine,
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ExchangeMORoutine,
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IsolationRoutine,
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LeakCheckRoutine,
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AbortRoutine
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}
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public partial class EditableRoutine : PMBaseRoutine
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{
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enum RecipeRunningState
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{
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Error,
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RecipeCompleted,
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ExecStep,
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TimeWait,
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ConditionWait,
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StepCompleted,
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}
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//当前步
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private int _curStepNumber;
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//当前循环开始步
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public int CurStartLoopStep;
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//当前循坏步已循坏次数
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public int CurStepLoopNumber;
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//当前循坏步总数
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public int CurStepLoopTotalCount;
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private Stopwatch _swTimer = new Stopwatch();
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private DeviceTimer _stepTimer = new DeviceTimer();
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private string _recipeName;
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private IoInterLock _pmInterLock;
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private RoutineType _routineType;
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private RecipeRunningInfo _recipeRunningInfo = new RecipeRunningInfo();
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private RecipeRunningState _state = RecipeRunningState.ExecStep;
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private bool _isPSUHeaterJumpMode;
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private bool _isSCRHeaterJumpMode;
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private bool _isMFCJumpMode;
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public EditableRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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Name = "EditableRoutine";
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_pmInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public void Init(string recipeName, RoutineType routineType)
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{
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_recipeName = recipeName;
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_routineType = routineType;
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}
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public bool SetRoutineRunning(bool eValue,out string reason)
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{
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reason = string.Empty;
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if(_routineType == RoutineType.ProcessIdleRoutine)
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{
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if (!_pmInterLock.SetPMProcessIdleRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.CleanRoutine)
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{
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if (!_pmInterLock.SetPMCleanRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.PurgeRoutine)
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{
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if (!_pmInterLock.SetPMPurgeRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.PumpRoutine)
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{
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if (!_pmInterLock.SetPMPumpRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.VentRoutine)
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{
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if (!_pmInterLock.SetPMVentRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.ExchangeMORoutine)
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{
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if (!_pmInterLock.SetPMExchangeMoRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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return true;
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}
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public override Result Start(params object[] param)
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{
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Reset();
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//解析Recipe
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if (!EditableRoutineParser.Parse(_recipeName, Module, out var recipeHead, out var recipeSteps, out string reason))
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{
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Stop($"Load Routine {_recipeName} failed, {reason}");
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return Result.FAIL;
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}
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if(!SetRoutineRunning(true,out reason))
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{
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EV.PostAlarmLog(Module, $"can not run Routine, {reason}");
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return Result.FAIL;
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}
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if (_routineType == RoutineType.PurgeRoutine)
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{
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_pmInterLock.DoLidCloseRoutineSucceed = false;
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}
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else if (_routineType == RoutineType.CleanRoutine)
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{
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_pmInterLock.DoLidOpenRoutineSucceed = false;
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}
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//设置当前Step
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_curStepNumber = 0;
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CurStartLoopStep = 0;
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CurStepLoopNumber = 0;
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CurStepLoopTotalCount = 0;
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_recipeRunningInfo.RecipeName = _recipeName;
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_recipeRunningInfo.Head = recipeHead;
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_recipeRunningInfo.RecipeStepList = recipeSteps;
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_state = RecipeRunningState.ExecStep;
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_swTimer.Restart();
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Notify($"Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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string reason;
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try
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{
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switch (_state)
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{
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case RecipeRunningState.ExecStep:
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{
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Notify($"Running step {_curStepNumber + 1} : {_recipeRunningInfo.RecipeStepList[_curStepNumber].StepName}");
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if (_recipeRunningInfo.RecipeStepList[_curStepNumber].EndBy == EnumEndByCondition.ByTime)
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{
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//开启Step计时器
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_stepTimer.Start(_recipeRunningInfo.RecipeStepList[_curStepNumber].StepTime * 1000);
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_state = RecipeRunningState.TimeWait;
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}
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else
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{
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_state = RecipeRunningState.ConditionWait;
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}
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//执行工艺程序命令
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foreach (var recipeCmd in _recipeRunningInfo.RecipeStepList[_curStepNumber].RecipeCommands.Keys)
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{
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if (recipeCmd == "SusHeaterSetMode")
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{
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if (_recipeRunningInfo.RecipeStepList[_curStepNumber].RecipeCommands[recipeCmd] == "Jump")
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{
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_isPSUHeaterJumpMode = true;
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}
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else
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{
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_isPSUHeaterJumpMode = false;
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}
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continue;
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}
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if (recipeCmd == "WWHeaterSetMode")
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{
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if (_recipeRunningInfo.RecipeStepList[_curStepNumber].RecipeCommands[recipeCmd] == "Jump")
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{
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_isSCRHeaterJumpMode = true;
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}
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else
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{
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_isSCRHeaterJumpMode = false;
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}
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continue;
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}
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if (recipeCmd == "FlowSetMode")
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{
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if (_recipeRunningInfo.RecipeStepList[_curStepNumber].RecipeCommands[recipeCmd] == "Jump")
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{
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_isMFCJumpMode = true;
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}
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else
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{
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_isMFCJumpMode = false;
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}
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continue;
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}
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// 不是注册的方法，需要跳过
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if (IsCmdSkip(recipeCmd))
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{
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continue;
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}
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if (!OP.CanDoOperation($"{Module}.{recipeCmd}", out reason, _recipeRunningInfo.RecipeStepList[_curStepNumber].RecipeCommands[recipeCmd]))
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{
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EV.PostAlarmLog(Module, $"Can not execute {recipeCmd}, {reason}");
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return Result.FAIL;
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}
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else
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{
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int time = (int)_recipeRunningInfo.RecipeStepList[_curStepNumber].StepTime * 1000;
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if (recipeCmd.StartsWith("TC1") && _isPSUHeaterJumpMode)
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{
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time = 1;
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}
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if (recipeCmd.StartsWith("TC2") && _isSCRHeaterJumpMode)
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{
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time = 1;
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}
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if (recipeCmd.StartsWith("Mfc") && recipeCmd.EndsWith(".Ramp") && _isMFCJumpMode)
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{
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time = 1;
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}
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if (recipeCmd == "TV.SetPressure"
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|| recipeCmd == "PMServo.SetActualSpeed"
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|| recipeCmd.StartsWith("Pressure") && recipeCmd.EndsWith(".Ramp")
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|| recipeCmd.StartsWith("Mfc") && recipeCmd.EndsWith(".Ramp"))
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{
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if (_curStepNumber >= 1)
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{
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int previousStepNumber = _curStepNumber - 1;
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if (_recipeRunningInfo.RecipeStepList[previousStepNumber].RecipeCommands.ContainsKey(recipeCmd))
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{
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string previousValue = _recipeRunningInfo.RecipeStepList[previousStepNumber].RecipeCommands[recipeCmd];
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string currentValue = _recipeRunningInfo.RecipeStepList[_curStepNumber].RecipeCommands[recipeCmd];
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if (previousValue == currentValue)
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{
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time = 1;
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}
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}
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}
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}
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if (recipeCmd.EndsWith(AITValveOperation.GVTurnValve)) // 阀门
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{
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OP.DoOperation($"{Module}.{recipeCmd}", _recipeRunningInfo.RecipeStepList[_curStepNumber].RecipeCommands[recipeCmd]);
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}
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else
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{
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OP.DoOperation($"{Module}.{recipeCmd}", out _, time, _recipeRunningInfo.RecipeStepList[_curStepNumber].RecipeCommands[recipeCmd]);
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}
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}
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}
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if (CurStepLoopNumber == 0)
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{
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if (_recipeRunningInfo.RecipeStepList[_curStepNumber].IsLoopStartStep)
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{
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CurStartLoopStep = _curStepNumber;
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CurStepLoopNumber = 0;
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CurStepLoopTotalCount = _recipeRunningInfo.RecipeStepList[_curStepNumber].LoopCount;
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}
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}
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}
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break;
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case RecipeRunningState.TimeWait:
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{
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if (_stepTimer.IsTimeout())
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{
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_state = RecipeRunningState.StepCompleted;
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}
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}
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break;
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case RecipeRunningState.ConditionWait:
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{
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//设置的压力
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double.TryParse(_recipeRunningInfo.RecipeStepList[_curStepNumber].RecipeCommands["TV.SetPressure"], out double setPressure);
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//实时反馈的压力
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double feedBackPressure = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV").PressureFeedback;
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double _pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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if (Math.Abs(setPressure - feedBackPressure) <= _pmPressureMaxDiff)
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{
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_state = RecipeRunningState.StepCompleted;
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}
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}
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break;
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case RecipeRunningState.StepCompleted:
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{
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if (_recipeRunningInfo.RecipeStepList[_curStepNumber].IsLoopEndStep)
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{
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CurStepLoopNumber++;
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if (CurStepLoopNumber >= CurStepLoopTotalCount)
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{
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CurStartLoopStep = 0;
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CurStepLoopNumber = 0;
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CurStepLoopTotalCount = 0;
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_curStepNumber++;
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}
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else
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{
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_curStepNumber = CurStartLoopStep;
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}
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}
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else
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{
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_curStepNumber++;
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}
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//判断最后一步是否执行完
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if (_curStepNumber >= _recipeRunningInfo.RecipeStepList.Count)
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{
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_state = RecipeRunningState.RecipeCompleted;
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}
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else
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{
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_state = RecipeRunningState.ExecStep;
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}
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}
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break;
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case RecipeRunningState.RecipeCompleted:
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{
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if (!SetRoutineRunning(false, out reason))
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{
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EV.PostAlarmLog(Module, $"can not run Routine, {reason}");
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return Result.FAIL;
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}
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//设置Succeed状态
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if (_routineType == RoutineType.PurgeRoutine)
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{
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_pmInterLock.SetLidOpenRoutineSucceed(true, out reason);
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}
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else if (_routineType == RoutineType.CleanRoutine)
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{
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_pmInterLock.SetLidClosedRoutineSucceed(true, out reason);
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}
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_curStepNumber = 0;
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CurStartLoopStep = 0;
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CurStepLoopNumber = 0;
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CurStepLoopTotalCount = 0;
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Notify("Finished");
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return Result.DONE;
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}
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case RecipeRunningState.Error:
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{
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if (!SetRoutineRunning(false, out reason))
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{
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EV.PostAlarmLog(Module, $"can not run Routine, {reason}");
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return Result.FAIL;
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}
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return Result.DONE;
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}
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default:
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break;
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}
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}
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catch (Exception ex)
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{
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PmDevice.SetHeaterStopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetRotationStopRamp();
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if (!SetRoutineRunning(false, out reason))
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{
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EV.PostAlarmLog(Module, $"can not run Process, {reason}");
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return Result.FAIL;
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}
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LOG.Write(ex);
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return Result.FAIL;
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}
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return Result.RUN;
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}
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public override void Abort()
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{
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if (!SetRoutineRunning(false, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not run Process, {reason}");
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}
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//根据Routine类型执行Abort
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SetRoutineAbort();
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base.Abort();
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}
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private List<string> _lstGroup1 = new List<string>() { "V46", "V46s", "V73" };
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private List<string> _lstGroup2 = new List<string>() { "V46", "V46s" };
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private List<string> _lstGroup3 = new List<string>() { "V43", "V43s", "V45" };
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//默认为TMA换源参数
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private int mfc7Or10 = 7;
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private int mfc8Or12 = 8;
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private int mfc11 = 11;
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private int pc2Or3 = 2;
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public void SetRoutineAbort()
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{
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if (_routineType == RoutineType.ProcessIdleRoutine)
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{
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetHeaterStopRamp();
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PmDevice.SetRotationStopRamp();
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PmDevice.SetRotationServo(0, 0);
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}
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else if (_routineType == RoutineType.CleanRoutine)
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{
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetRotationServo(0, 0);
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}
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else if (_routineType == RoutineType.PurgeRoutine)
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{
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetRotationServo(0, 0);
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}
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else if (_routineType == RoutineType.PumpRoutine)
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{
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PmDevice.SetRotationServo(0, 0);
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}
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else if (_routineType == RoutineType.VentRoutine)
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{
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetRotationServo(0, 0);
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}
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else if (_routineType == RoutineType.ExchangeMORoutine)
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{
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PmDevice.SetIoValue(_lstGroup1, false);
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PmDevice.SetIoValue(_lstGroup2, false);
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PmDevice.SetMfcValueToDefault(new List<int> { mfc7Or10 });
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PmDevice.SetMfcValueToDefault(new List<int> { mfc8Or12 });
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PmDevice.SetMfcValueToDefault(new List<int> { mfc11 });
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PmDevice.SetPCValueToDefault(new List<int> { pc2Or3 });
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PmDevice.SetRotationServo(0, 0);
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}
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else if (_routineType == RoutineType.VacRoutine)
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{
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PmDevice.SetRotationServo(0, 0);
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}
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}
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}
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}
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