Sic08/Modules/Mainframe
Han Qiang Qiang f8c64c1030 Merge branch 'ProcessHistoryData' into feature/测温重构
# Conflicts:
#	Modules/Mainframe/SicModules.csproj
#	SicRT/Properties/AssemblyInfo.cs
#	ThirdParty/MECF.Framework/MECF.Framework.Common.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
#	ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
#	ThirdParty/MECF.Framework/Sicentury.Core.dll
2023-12-15 10:27:01 +08:00
..
Aligners 更新库文件(Commit 90fa346),优化HiWin Aligner执行命令错误后的信息。 2023-08-22 17:56:16 +08:00
Buffers 修改一些Routine的Start方法和Monitor方法,改为重载基类的StartBody方法和MonitorBody方法。 2023-04-20 16:52:42 +08:00
Cassettes 删除久的Coating,修改加热配置项数据类型 2023-06-01 16:56:20 +08:00
Config Merge branch 'ProcessHistoryData' into feature/测温重构 2023-12-15 10:27:01 +08:00
Devices 添加IoN2HighDoping类,配置气阀控制PN2气体 2023-11-19 12:17:29 +08:00
EFEMs 1.修改一些错误 2023-12-08 14:13:19 +08:00
LLs 1.取消Load Servo压力Pump延时 2023-09-06 15:48:27 +08:00
PMs 修正Recipe中的C3H8设置项识别错误,全部默认到Purge的问题。 2023-11-17 14:13:53 +08:00
Properties Add project files. 2023-03-03 15:42:13 +08:00
TMs 1.修改Purge中Vent超时时间 2023-11-06 13:37:35 +08:00
UnLoads 1TM和仿真添加DI-45,添加DI-45对应的Seneor 2023-12-11 11:00:23 +08:00
SicModules.csproj Merge branch 'Sic8ToSic6' into ProcessHistoryData 2023-12-15 09:47:21 +08:00