574 lines
22 KiB
C#
574 lines
22 KiB
C#
using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.DBCore;
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using MECF.Framework.Common.Equipment;
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using SicModules.PMs.Routines.Base;
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namespace SicModules.PMs.Routines
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{
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public class PMLeakCheckRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetMFCMode,
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SetPCMode,
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SetM1to16,
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SetPC,
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SetGroupJ,
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SetM291519to38,
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SetGasOut,
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SetTv,
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SetGasIn1, //V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetMfc19to26,
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SetTVCloseMode,
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SetTvPositionToZero,
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SetGasIn2,
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SetGroupJOpen,
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SetM291519to26,
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OpenFinal2,
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CloseFinal2,
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SetMfcFinal2,
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SetEPV1,
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SetEPV2,
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SetTvMode,
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SetTVEnable,
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SetTVPressMode,
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SetTv1,
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WaitTv1,
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SetM2toM40,
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SetTVPositionMode,
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SetTVPositionMode_1,
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SetTVPositionMax,
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SetTVPositionMax_1,
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SetTVPressMode1,
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SetM2TOM40Default,
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SetM2toM40_1,
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SetTvOpen,
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SetTvModeToPress,
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SetTVtoCurrent,
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RoutinePre,
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SetPressureUp,
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SetPressureDown,
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WaitPressureDown,
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WaitPressureUp,
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VentPumpOpen,
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PressureToMax,
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PressureToMin,
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StartLoop,
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EndLoop,
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SetMfc28to31,
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SetReactorPress,
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CloseFinanl1,
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CloseFinanl2,
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CloseEPV2,
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SetTVCloseMode2,
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CLoseTvvvv,
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SetEPVVV2,
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CLoseEPV1,
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CheckPM1000,
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WaitPressUpTo1000,
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WaitPressUpTo1020,
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SetPressUpOrDown1,
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SetPressUpOrDown2,
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SetMfc28to40Special,
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WaitPmPressureUp,
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SetMfc28to40Default,
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SetV75,
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SetV76,
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SetV751,
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SetV761,
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SetPC567Close,
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SetPC567Mode,
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SetPC567Default,
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OpenEPV2,
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WaitPressUpTo20,
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SetMfc291519to38,
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WaitPressUpTo0,
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SetMfc291519to38ToDefault,
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WaitPressDownTo20,
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SetPmPressureTo20,
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CloseMfcFinal1,
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CloseMfcFinal2,
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CloseMfc2915,
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CheckFinal1Open,
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DoLeakCheck,
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CalcLeakCheck,
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SetTVClose,
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CloseTV,
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CloseV27,
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CloseV28,
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CloseV69,
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CloseV70,
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SetGroupV25,
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SetV31,
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SetV32,
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SetV35V36,
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SetV92V93V95,
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SetV94,
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SetV96,
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SetV68,
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SetM32M35M37,
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SetM36,
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SetM38,
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CloseM32M35M37,
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CloseM36,
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CloseM38,
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CloseGasIn1,
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SetTVCloseMode1,
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CLoseTV1,
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SetEPV2_1,
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SetEPV2_2,
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SetTVEnable_2,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay13,
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TimeDelay14,
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TimeDelay15,
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TimeDelay16,
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TimeDelay17,
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}
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enum LeakCheckType
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{
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ChamberOnly,
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ChamberAndGasline,
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ChamberAndGaslineToFacility,
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}
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private ModuleName moduleName;
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private IoThrottleValve2 _IoThrottle;
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private IoInterLock _pmIoInterLock;
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List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
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private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private double _pressureMax; //Loop压力上限可设置600-800）
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private double _pressureMin; //Loop压力下限可设置 0-400）
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private int _pressureLoopCount; //Loop次数
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private int _pressureMinDelay;
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private int _pressureMaxDelay;
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private int _pressureMinTimeout;
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private int _pressureMaxTimeout;
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private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private int _paramContinuePumpTime;
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private int _paramLeakCheckTime;
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private double _beginPressure;
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private double _beginTime;
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private int _calTimes; //第几次计算LeakCheck的值（每60秒计算一次）
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private double _leakSpec;
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private int _routineTimeOut;
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//private int _EPV2OpenDelayTime = 9;
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private bool _useSettingValue = false;
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private Stopwatch _swTimer = new Stopwatch();
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public int ElapsedTime
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{
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get { return _swTimer.IsRunning ? (int)(_swTimer.ElapsedMilliseconds / 1000) : 0; }
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}
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public PMLeakCheckRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
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{
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Module = module.ToString();
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Name = "Leak Check";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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}
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internal void Init(int pumpTime, int leakCheckTime)
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{
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_paramContinuePumpTime = pumpTime;
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_paramLeakCheckTime = leakCheckTime;
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_useSettingValue = true;
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}
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internal void Init()
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{
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_useSettingValue = false;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_swTimer.Restart();
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pressureLoopCount = SC.GetValue<int>($"PM.{Module}.LeakCheck.CyclePurgeCount");
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_pressureMin = SC.GetValue<double>($"PM.{Module}.LeakCheck.PumpBasePressure");
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_pressureMinDelay = SC.GetValue<int>($"PM.{Module}.LeakCheck.PumpDelayTime");
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_pressureMinTimeout = SC.GetValue<int>($"PM.{Module}.LeakCheck.PumpTimeout");
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_pressureMax = SC.GetValue<double>($"PM.{Module}.LeakCheck.VentBasePressure");
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_pressureMaxDelay = SC.GetValue<int>($"PM.{Module}.LeakCheck.VentDelayTime");
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_pressureMaxTimeout = SC.GetValue<int>($"PM.{Module}.LeakCheck.VentTimeout");
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.LeakCheck.RoutineTimeOut");
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//_EPV2OpenDelayTime = SC.GetValue<int>($"PM.{Module}.TimeDelayAlterEPV2Open");
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if (!_useSettingValue)
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{
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_paramContinuePumpTime = SC.GetValue<int>($"PM.{Module}.LeakCheck.ContinuePumpTime");
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_paramLeakCheckTime = SC.GetValue<int>($"PM.{Module}.LeakCheck.LeakCheckDelayTime");
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}
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_leakSpec = SC.GetValue<double>($"PM.{Module}.LeakCheck.LeakSpec");
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if (!PmDevice.SetIOValueByGroup(IoGroupName.V70, false))
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{
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EV.PostAlarmLog(Module, "Can not close V70-1");
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return Result.FAIL;
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}
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Notify($"Start LoopCount:{_pressureLoopCount}");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//旋转停止,加热停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//关闭V72,打开V25
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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//打开V31,打开V32
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//打开V35,打开V36
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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//关闭B/C/E/F/H/K 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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//打开D/G 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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//设置MFC和PC的模式
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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//M1-M16设定为default值(M2、M9、M15除外)
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
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//设置所有PC到默认值
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//设置M2,M9,M15,M19-M26 3s ramp 到default 值
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SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM26, 3);
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//打开V68
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SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
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//打开J阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//打开EPV2
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay1, 3);
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//设置蝶阀Enable
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
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//设置蝶阀为压力模式
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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//伺服压力设定值到0mbar
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SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _throttleTimeout);
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//M2、M9、M15、M19-M40 MFC 3s ramp到0
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SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40, 0, 3);
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//等待腔体压力Pump到设定值
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WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pressureMin, _pmPressureMaxDiff, _throttleTimeout);
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TimeDelay((int)RoutineStep.TimeDelay8, 3);
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//蝶阀设置为位置模式,开度设置为最大
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SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
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TimeDelay((int)RoutineStep.TimeDelay11, 3);
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SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
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TimeDelay((int)RoutineStep.TimeDelay9, 3);
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//循环开始
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Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
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//M2、M9、M15、M19-M40 MFC 3s ramp 到 default 值
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SetMfcToDefaultByGroup((int)RoutineStep.SetM2TOM40Default, MfcGroupName.M2toM40, 3);
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//先关蝶阀,再关闭EPV2
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode1, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.CLoseTV1, _IoThrottle, 8);
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TimeDelay((int)RoutineStep.TimeDelay5, 1);
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SetIoValueByGroup((int)RoutineStep.SetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Uping);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout);
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TimeDelay((int)RoutineStep.TimeDelay6, _pressureMaxDelay);
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//打开EPV2
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SetIoValueByGroup((int)RoutineStep.SetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay7, 1);
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//设置蝶阀Enable
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable_2, _IoThrottle, 5);
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//设置蝶阀为压力模式
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5);
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//M2、M9、M15、M19-M40 MFC 3s ramp 0
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SetMfcByGroup((int)RoutineStep.SetM2toM40_1, MfcGroupName.M2toM40, 0, 3);
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//伺服到0mbar
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SetThrottlePressureAndWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _throttleTimeout);
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EndLoop((int)RoutineStep.EndLoop);
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//依次关闭Final1
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SetIoValueByGroup((int)RoutineStep.CloseGasIn1, IoGroupName.GasIn1, false, _IoValueOpenCloseTimeout);
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Delay((int)RoutineStep.TimeDelay13, 5);
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//关闭M32,M35,M36,M37,M38
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SetMfcByGroup((int)RoutineStep.CloseM32M35M37, MfcGroupName.M32M35M37, 0, 5);
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SetMfcByGroup((int)RoutineStep.CloseM36, MfcGroupName.M36, 0, 5);
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SetMfcByGroup((int)RoutineStep.CloseM38, MfcGroupName.M38, 0, 5);
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Delay((int)RoutineStep.TimeDelay14, 5);
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//关闭Final1阀
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SetIoValueByGroup((int)RoutineStep.CloseFinanl1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout);
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//关闭Final2
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SetIoValueByGroup((int)RoutineStep.CloseFinal2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout);
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//延时
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TimeDelay((int)RoutineStep.TimeDelay15, _paramContinuePumpTime);
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//先关蝶阀,再关闭EPV2
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode2, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.CLoseTvvvv, _IoThrottle, 8);
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TimeDelay((int)RoutineStep.TimeDelay16, 1);
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SetIoValueByGroup((int)RoutineStep.SetEPVVV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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//计算漏率
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DoLeakCheck((int)RoutineStep.DoLeakCheck, _paramLeakCheckTime);
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TimeDelay((int)RoutineStep.TimeDelay17, _paramLeakCheckTime);
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CalcLeakCheck((int)RoutineStep.CalcLeakCheck, _paramLeakCheckTime);
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//CalcLeackCheckPerMinute(_paramLeakCheckTime);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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_swTimer.Stop();
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return Result.DONE;
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}
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public override void Abort()
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{
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//Stop($"{Module} leak check aborted");
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_swTimer.Stop();
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetRotationServo(0, 0);
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base.Abort();
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}
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private void CheckRoutineTimeOut()
|
||
{
|
||
if (_routineTimeOut > 10)
|
||
{
|
||
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
||
{
|
||
EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
|
||
throw (new RoutineFaildException());
|
||
}
|
||
}
|
||
}
|
||
|
||
public void DoLeakCheck(int id, double time)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
Notify($"Keep pressure for {time} seconds");
|
||
|
||
_beginTime = _swTimer.ElapsedMilliseconds;
|
||
//_beginPressure = PmDevice.ChamberPressure;
|
||
_beginPressure = PmDevice._ioThrottleValve.PressureFeedback;
|
||
|
||
_calTimes = 1;
|
||
return true;
|
||
});
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void CalcLeackCheckPerMinute(int time)
|
||
{
|
||
//大于LeakCheck时间,
|
||
if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= time)
|
||
{
|
||
int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
|
||
double endPressure = PmDevice.ChamberPressure;
|
||
double leakSpan = endPressure - _beginPressure;
|
||
double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
|
||
if (leakRate > _leakSpec)
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module);
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
|
||
}
|
||
else
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module);
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
|
||
}
|
||
}
|
||
else
|
||
{
|
||
if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= 60 * _calTimes)
|
||
{
|
||
_calTimes++;
|
||
int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
|
||
double endPressure = PmDevice.ChamberPressure;
|
||
double leakSpan = endPressure - _beginPressure;
|
||
double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
|
||
if (leakRate > _leakSpec)
|
||
{
|
||
EV.PostInfoLog(Module, $"Leak check Failed Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2} ,Rate over {_leakSpec}");
|
||
|
||
throw (new RoutineFaildException());
|
||
}
|
||
EV.PostInfoLog(Module, $"Leak check Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2}");
|
||
}
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
|
||
public void CalcLeakCheck(int id, int time)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
//double endPressure = PmDevice.ChamberPressure;
|
||
double endPressure = PmDevice._ioThrottleValve.PressureFeedback;
|
||
double leakSpan = endPressure - _beginPressure;
|
||
double leakRate = (endPressure - _beginPressure) / (time / 60.0);
|
||
if (leakRate > _leakSpec)
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module);
|
||
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
return false;
|
||
}
|
||
else
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module);
|
||
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
return true;
|
||
}
|
||
});
|
||
}
|
||
}
|
||
}
|