Sic10/Modules/SicModules/SicModules.csproj

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<?xml version="1.0" encoding="utf-8"?>
<Project ToolsVersion="15.0" xmlns="http://schemas.microsoft.com/developer/msbuild/2003">
<Import Project="$(MSBuildExtensionsPath)\$(MSBuildToolsVersion)\Microsoft.Common.props" Condition="Exists('$(MSBuildExtensionsPath)\$(MSBuildToolsVersion)\Microsoft.Common.props')" />
<PropertyGroup>
<Configuration Condition=" '$(Configuration)' == '' ">Debug</Configuration>
<Platform Condition=" '$(Platform)' == '' ">AnyCPU</Platform>
<ProjectGuid>{424E9610-FA50-49CD-B5BE-BAF256DBF327}</ProjectGuid>
<OutputType>Library</OutputType>
<AppDesignerFolder>Properties</AppDesignerFolder>
<RootNamespace>SicModules</RootNamespace>
<AssemblyName>SicModules</AssemblyName>
<TargetFrameworkVersion>v4.8</TargetFrameworkVersion>
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<FileAlignment>512</FileAlignment>
<Deterministic>true</Deterministic>
<TargetFrameworkProfile />
<LangVersion>latestmajor</LangVersion>
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</PropertyGroup>
<PropertyGroup Condition=" '$(Configuration)|$(Platform)' == 'Debug|AnyCPU' ">
<DebugSymbols>true</DebugSymbols>
<DebugType>full</DebugType>
<Optimize>false</Optimize>
<OutputPath>bin\Debug\</OutputPath>
<DefineConstants>DEBUG;TRACE</DefineConstants>
<ErrorReport>prompt</ErrorReport>
<WarningLevel>4</WarningLevel>
</PropertyGroup>
<PropertyGroup Condition=" '$(Configuration)|$(Platform)' == 'Release|AnyCPU' ">
<DebugType>pdbonly</DebugType>
<Optimize>true</Optimize>
<OutputPath>bin\Release\</OutputPath>
<DefineConstants>TRACE</DefineConstants>
<ErrorReport>prompt</ErrorReport>
<WarningLevel>4</WarningLevel>
</PropertyGroup>
<ItemGroup>
<Reference Include="DePacker">
<HintPath>..\..\ThirdParty\dlls\DePacker.dll</HintPath>
</Reference>
<Reference Include="Global">
<HintPath>..\..\ThirdParty\dlls\Global.dll</HintPath>
</Reference>
<Reference Include="InfoHelp">
<HintPath>..\..\ThirdParty\dlls\InfoHelp.dll</HintPath>
</Reference>
<Reference Include="MECF.Framework.Common">
<HintPath>..\..\ThirdParty\MECF.Framework\MECF.Framework.Common.dll</HintPath>
</Reference>
<Reference Include="MECF.Framework.RT.Core">
<HintPath>..\..\ThirdParty\MECF.Framework\MECF.Framework.RT.Core.dll</HintPath>
</Reference>
<Reference Include="MECF.Framework.RT.EquipmentLibrary">
<HintPath>..\..\ThirdParty\MECF.Framework\MECF.Framework.RT.EquipmentLibrary.dll</HintPath>
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</Reference>
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<Reference Include="Newtonsoft.Json, Version=12.0.0.0, Culture=neutral, PublicKeyToken=30ad4fe6b2a6aeed, processorArchitecture=MSIL">
<SpecificVersion>False</SpecificVersion>
<HintPath>..\..\ThirdParty\MECF.Framework\Newtonsoft.Json.dll</HintPath>
</Reference>
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<Reference Include="SessionLayer">
<HintPath>..\..\ThirdParty\dlls\SessionLayer.dll</HintPath>
</Reference>
<Reference Include="System" />
<Reference Include="System.Core" />
<Reference Include="System.Runtime.Serialization" />
<Reference Include="System.Runtime.Serialization.Formatters.Soap" />
<Reference Include="System.Xml.Linq" />
<Reference Include="System.Data.DataSetExtensions" />
<Reference Include="Microsoft.CSharp" />
<Reference Include="System.Data" />
<Reference Include="System.Net.Http" />
<Reference Include="System.Xml" />
<Reference Include="Tools">
<HintPath>..\..\ThirdParty\dlls\Tools.dll</HintPath>
</Reference>
</ItemGroup>
<ItemGroup>
<Compile Include="Aligners\AlignerAlignRoutine.cs" />
<Compile Include="Aligners\AlignerBaseRoutine.cs" />
<Compile Include="Aligners\AlignerHomeRoutine.cs" />
<Compile Include="Aligners\AlignerModule.cs" />
<Compile Include="Aligners\AlignerModuleBase.cs" />
<Compile Include="Aligners\SicAligner.cs" />
<Compile Include="Buffers\BufferModule.cs" />
<Compile Include="Buffers\BufferModuleBase.cs" />
<Compile Include="Buffers\BufferCoolingRoutine.cs" />
<Compile Include="Buffers\BufferHomeRoutine.cs" />
<Compile Include="Buffers\SicBuffer.cs" />
<Compile Include="Cassettes\CassetteModule.cs" />
<Compile Include="Cassettes\CassetteModuleBase.cs" />
<Compile Include="Cassettes\SicCassette.cs" />
<Compile Include="Devices\IoInterLockEx.cs" />
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<Compile Include="Devices\IoLoadRotation.cs" />
<Compile Include="Devices\IoPump.cs" />
<Compile Include="Devices\SicAds.cs" />
<Compile Include="Devices\SiemensIoProvider.cs" />
<Compile Include="Devices\TcAds.cs" />
<Compile Include="EFEMs\EfemBaseRoutine.cs" />
<Compile Include="EFEMs\TrayRobotHomeRoutine.cs" />
<Compile Include="EFEMs\WaferRobotHomeRoutine.cs" />
<Compile Include="EFEMs\TrayRobotModule.cs" />
<Compile Include="EFEMs\WaferRobotModule.cs" />
<Compile Include="EFEMs\EFEMModule.cs" />
<Compile Include="EFEMs\EFEMModuleBase.cs" />
<Compile Include="EFEMs\EfemSlitValveRoutine.cs" />
<Compile Include="EFEMs\EFEMHomeRoutine.cs" />
<Compile Include="EFEMs\SicEFEM.cs" />
<Compile Include="EFEMs\SicEfemRobot.cs" />
<Compile Include="EFEMs\TrayRobotPickRoutine.cs" />
<Compile Include="EFEMs\TrayRobotPlaceRoutine.cs" />
<Compile Include="EFEMs\TrayRobotMapRoutine.cs" />
<Compile Include="EFEMs\WaferRobotPlaceRoutine.cs" />
<Compile Include="EFEMs\WaferRobotMapRoutine.cs" />
<Compile Include="EFEMs\WaferRobotPickRoutine.cs" />
<Compile Include="LLs\LoadHomeRoutine.cs" />
<Compile Include="LLs\LoadLockBaseRoutine.cs" />
<Compile Include="LLs\LoadLockClawRoutine.cs" />
<Compile Include="LLs\LoadLockGroupRoutine.cs" />
<Compile Include="LLs\LoadLockLeakCheckRoutine.cs" />
<Compile Include="LLs\LoadLockLiftRoutine.cs" />
<Compile Include="LLs\LoadLockModule.cs" />
<Compile Include="LLs\LoadLockModuleBase.cs" />
<Compile Include="LLs\LoadLockPrepareTransferRoutine.cs" />
<Compile Include="LLs\LoadLockPumpRoutine.cs" />
<Compile Include="LLs\LoadLockPurgeRoutine.cs" />
<Compile Include="LLs\LoadLockServoToRoutine.cs" />
<Compile Include="LLs\LoadLockTrayAlignerRoutine.cs" />
<Compile Include="LLs\LoadLockTrayClawRoutine.cs" />
<Compile Include="LLs\LoadLockVentRoutine.cs" />
<Compile Include="LLs\LoadRotationHomeOffsetRoutine.cs" />
<Compile Include="LLs\LoadSeparateRoutine.cs" />
<Compile Include="LLs\SicLoadLock.cs" />
<Compile Include="PMs\PMModule.cs" />
<Compile Include="PMs\PMModuleDevice.cs" />
<Compile Include="PMs\PMModuleInterlock.cs" />
<Compile Include="PMs\RecipeExecutions\CleanRecipe.cs" />
<Compile Include="PMs\RecipeExecutions\Fdc.cs" />
<Compile Include="PMs\RecipeExecutions\IRecipeDBCallback.cs" />
<Compile Include="PMs\RecipeExecutions\IRecipeExecutor.cs" />
<Compile Include="PMs\RecipeExecutions\PostProcess.cs" />
<Compile Include="PMs\RecipeExecutions\PreProcess.cs" />
<Compile Include="PMs\RecipeExecutions\Process.cs" />
<Compile Include="PMs\RecipeExecutions\ProcessCalculate.cs" />
<Compile Include="PMs\RecipeExecutions\RecipeDBCallback.cs" />
<Compile Include="PMs\RecipeExecutions\RecipeEndDataItem.cs" />
<Compile Include="PMs\RecipeExecutions\RecipeHead.cs" />
<Compile Include="PMs\RecipeExecutions\RecipeParser.cs" />
<Compile Include="PMs\RecipeExecutions\RecipeRunningInfo.cs" />
<Compile Include="PMs\RecipeExecutions\RecipeStep.cs" />
<Compile Include="PMs\RecipeExecutions\SicRecipeFileContext.cs" />
<Compile Include="PMs\Routines\PMMfcRorRoutine.cs" />
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<Compile Include="PMs\Routines\Recipe\PMMacroRoutine.cs" />
<Compile Include="PMs\Routines\Recipe\PostPMMacroRoutine.cs" />
<Compile Include="PMs\Routines\Recipe\PrePMMacroRoutine.cs" />
<Compile Include="PMs\Routines\Recipe\RecipeParser.cs" />
<Compile Include="PMs\Routines\Base\PMBaseRoutine.cs" />
<Compile Include="PMs\Routines\PMButttomSectionMoveRoutine.cs" />
<Compile Include="PMs\Routines\PMChamberMoveBodyRoutine.cs" />
<Compile Include="PMs\Routines\PMCleanRoutine.cs" />
<Compile Include="PMs\Routines\PMExchangeMoRoutine.cs" />
<Compile Include="PMs\Routines\PMHomeRoutine.cs" />
<Compile Include="PMs\Routines\PMLeakCheckRoutine.cs" />
<Compile Include="PMs\Routines\PMPcCalibrationRoutine.cs" />
<Compile Include="PMs\Routines\PMPostTransferRoutine.cs" />
<Compile Include="PMs\Routines\PMPrepareTransferRoutine.cs" />
<Compile Include="PMs\Routines\PMProcessAbortRoutine.cs" />
<Compile Include="PMs\Routines\PMProcessRoutine.cs" />
<Compile Include="PMs\Routines\PMPumpRoutine.cs" />
<Compile Include="PMs\Routines\PMPurgeRoutine.cs" />
<Compile Include="PMs\Routines\PMServoToPressure.cs" />
<Compile Include="PMs\Routines\PMStopHeatEnableRoutine.cs" />
<Compile Include="PMs\Routines\PMToAtmIdleRoutine.cs" />
<Compile Include="PMs\Routines\PMToIsolationRoutine.cs" />
<Compile Include="PMs\Routines\PMToProcessIdleRoutine.cs" />
<Compile Include="PMs\Routines\PMVacIdleRoutine.cs" />
<Compile Include="PMs\Routines\PMVentRoutine.cs" />
<Compile Include="PMs\Utilities\UnitAlarmItem.cs" />
<Compile Include="PMs\Utilities\XmlConfig.cs" />
<Compile Include="Properties\AssemblyInfo.cs" />
<Compile Include="TMs\TMHomeRoutine.cs" />
<Compile Include="TMs\TMServoRoutine.cs" />
<Compile Include="TMs\SicTM.cs" />
<Compile Include="TMs\SicTMRobot.cs" />
<Compile Include="TMs\TMBaseRoutine.cs" />
<Compile Include="TMs\TMLeakcheckRoutine.cs" />
<Compile Include="TMs\TMModule.cs" />
<Compile Include="TMs\TMModuleBase.cs" />
<Compile Include="TMs\TMPressureBalancePidRoutine.cs" />
<Compile Include="TMs\TMPressureBalanceRoutine.cs" />
<Compile Include="TMs\TMPumpRoutine.cs" />
<Compile Include="TMs\TMPurgeRoutine.cs" />
<Compile Include="TMs\TMRobotExtendRoutine.cs" />
<Compile Include="TMs\TMRobotGoToRoutine.cs" />
<Compile Include="TMs\TMRobotHomeRoutine.cs" />
<Compile Include="TMs\TMRobotPickAndPlaceRoutine.cs" />
<Compile Include="TMs\TMRobotPickRoutine.cs" />
<Compile Include="TMs\TMRobotPlaceRoutine.cs" />
<Compile Include="TMs\TMRobotRetractRoutine.cs" />
<Compile Include="TMs\TMSlitValveRoutine.cs" />
<Compile Include="TMs\TMVentRoutine.cs" />
<Compile Include="TMs\TMVerifySlitValveRoutine.cs" />
<Compile Include="UnLoads\SicUnLoad.cs" />
<Compile Include="UnLoads\UnLoadBaseRoutine.cs" />
<Compile Include="UnLoads\UnLoadClawRoutine.cs" />
<Compile Include="UnLoads\UnLoadHomeRoutine.cs" />
<Compile Include="UnLoads\UnLoadLeakCheckRoutine.cs" />
<Compile Include="UnLoads\UnLoadCoolingRoutine.cs" />
<Compile Include="UnLoads\UnLoadLiftRoutine.cs" />
<Compile Include="UnLoads\UnLoadModule.cs" />
<Compile Include="UnLoads\UnLoadModuleBase.cs" />
<Compile Include="UnLoads\UnLoadPrepareTransferRoutine.cs" />
<Compile Include="UnLoads\UnLoadPumpRoutine.cs" />
<Compile Include="UnLoads\UnLoadPurgeRoutine.cs" />
<Compile Include="UnLoads\UnLoadSeparateRoutine.cs" />
<Compile Include="UnLoads\UnLoadServoToRoutine.cs" />
<Compile Include="UnLoads\UnLoadVentRoutine.cs" />
</ItemGroup>
<ItemGroup>
<None Include="Config\TM\DeviceModelSystem.xml">
<SubType>Designer</SubType>
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
</ItemGroup>
<ItemGroup>
<None Include="Config\TM\IODefinePlatform.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
</ItemGroup>
<ItemGroup>
<None Include="Config\TM\interlock.xml">
<SubType>Designer</SubType>
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\PM1\_ioDefinePM1.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\PM1\DeviceModelPM1.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\PM1\interlockPM1.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\PM2\_ioDefinePM2.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\PM2\DeviceModelPM2.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\PM2\interlockPM2.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\Ar_Run.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\Ar_Vent.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\C2H4_Run.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\C2H4_Vent.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\H2_Run.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\H2_Vent.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\HCL_Run.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\HCL_Vent.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\PN2_Run.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\PN2_Vent.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\SiH4_Run.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\SiH4_Vent.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\TCS_Run.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\TCS_Vent.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\TMA_Run.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\PM\MfcCalculation\TMA_Vent.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
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<None Include="Config\PM\MfcRor\MfcRor.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
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<Content Include="Config\Recipe\Sic\Clean\RecipeFormat.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</Content>
<None Include="Config\Recipe\Sic\Content\RecipeFormat.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\Recipe\Sic\Process\RecipeFormat.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<Content Include="Config\Recipe\Sic\Routine\RecipeFormat.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</Content>
<Content Include="Config\TM\UnitAlarmDefine\TMUnitAlarmDefine.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</Content>
</ItemGroup>
<Import Project="$(MSBuildToolsPath)\Microsoft.CSharp.targets" />
</Project>