Sic10/Modules/SicModules/LLs/LoadLockModule.cs

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using System;
using System.Threading;
using System.Threading.Tasks;
using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using SicModules.LLs.Routines;
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namespace SicModules.LLs
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{
public class LoadLockModule : LoadLockModuleBase
{
public enum STATE
{
NotInstall,
Init,
Idle,
Homing,
Pump,
Vent,
MoveLift,
Purge,
LeakCheck,
Transfer,
Error,
PrepareTransfer,
OpenDoor,
CloseDoor,
Cooling,
Separating,
Grouping,
RotationHomeOffset,
}
public enum MSG
{
Home,
Reset,
Abort,
Error,
Transfer,
PrepareTransfer,
MoveLift,
Pump,
Vent,
Purge,
LeakCheck,
OpenDoor,
CloseDoor,
Cooling,
SetOnline,
SetOffline,
ToInit,
Separate,
Group,
RelativeHomeOffset,
}
private R_TRIG _trigAlarm = new R_TRIG();
public bool IsAlarm
{
get
{
return FsmState == (int)STATE.Error;
}
}
public override bool IsReady
{
get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
}
public override bool IsError
{
get { return FsmState == (int)STATE.Error; }
}
public override bool IsInit
{
get { return FsmState == (int)STATE.Init; }
}
public bool IsBusy
{
get { return !IsInit && !IsError && !IsReady; }
}
public override bool IsIdle
{
get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
}
public int CurrentRoutineLoop
{
get
{
if (FsmState == (int)STATE.Purge)
{
return _purgeRoutine.LoopCounter + 1;
}
else if (FsmState == (int)STATE.LeakCheck)
{
return _leakCheckRoutine.LoopCounter + 1;
}
return 0;
}
}
public int CurrentRoutineLoopTotal
{
get
{
if (FsmState == (int)STATE.Purge)
{
return _purgeRoutine.LoopTotalTime;
}
else if (FsmState == (int)STATE.LeakCheck)
{
return _leakCheckRoutine.LoopTotalTime;
}
return 0;
}
}
public bool JobDone
{
get
{
if (_llDevice != null)
{
return _llDevice.JobDone;
}
return false;
}
}
public event Action<string> OnEnterError;
private bool _isInit;
public SicLoadLock _llDevice { get; set; }
private LoadHomeRoutine _homeRoutine;
private LoadLockPumpRoutine _pumpRoutine;
private LoadLockVentRoutine _ventRoutine;
private LoadLockPurgeRoutine _purgeRoutine;
private LoadLockLeakCheckRoutine _leakCheckRoutine;
private LoadLockServoToRoutine _llServoTo;
private LoadLockPrepareTransferRoutine _prepareTransferRoutine;
//private LoadLockLiftRoutine _loadLockLiftRoutine;
private LoadLockGroupRoutine _loadLockGroupRoutine;
private LoadSeparateRoutine _loadSeparateRoutine;
private LoadRotationHomeOffsetRoutine _loadRotationHomeOffsetRoutine;
public LoadLockModule(ModuleName module) : base(1)
{
Module = module.ToString();
Name = module.ToString();
IsOnline = false;
EnumLoop<STATE>.ForEach((item) =>
{
MapState((int)item, item.ToString());
});
EnumLoop<MSG>.ForEach((item) =>
{
MapMessage((int)item, item.ToString());
});
EnableFsm(50, IsInstalled ? STATE.Init : STATE.NotInstall);
}
public override bool Initialize()
{
InitRoutine();
InitDevice();
InitFsm();
InitOp();
InitData();
return base.Initialize();
}
private void InitRoutine()
{
ModuleName module = ModuleHelper.Converter(Module);
_pumpRoutine = new LoadLockPumpRoutine(module);
_homeRoutine = new LoadHomeRoutine(module);
_ventRoutine = new LoadLockVentRoutine(module);
_purgeRoutine = new LoadLockPurgeRoutine(module);
_leakCheckRoutine = new LoadLockLeakCheckRoutine(module);
_llServoTo = new LoadLockServoToRoutine(module);
_prepareTransferRoutine = new LoadLockPrepareTransferRoutine(module);
_loadLockGroupRoutine = new LoadLockGroupRoutine(module);
_loadSeparateRoutine = new LoadSeparateRoutine(module);
_loadRotationHomeOffsetRoutine = new LoadRotationHomeOffsetRoutine();
}
private void InitDevice()
{
_llDevice = DEVICE.GetDevice<SicLoadLock>($"{Module}.{Module}");
}
private void InitFsm()
{
//Error
AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);
AnyStateTransition(FSM_MSG.ALARM, FsmOnError, STATE.Error);
AnyStateTransition(MSG.ToInit, FsmToInit, STATE.Init);
//EnterExitTransition<STATE, FSM_MSG>(STATE.Error, FsmEnterError, FSM_MSG.NONE, FsmExitError);
//Home
Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);
Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
Transition(STATE.Homing, MSG.Error, null, STATE.Init);
Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);
EnterExitTransition((int)STATE.Homing, FsmEnterIdle, (int)FSM_MSG.NONE, FsmExitIdle);
Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
//PrepareTransfer
Transition(STATE.Idle, MSG.PrepareTransfer, FsmStartPrepareTransfer, STATE.PrepareTransfer);
Transition(STATE.PrepareTransfer, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
Transition(STATE.PrepareTransfer, MSG.Abort, FsmAbortTask, STATE.Idle);
//Online
Transition(STATE.Idle, MSG.SetOnline, FsmStartSetOnline, STATE.Idle);
Transition(STATE.Idle, MSG.SetOffline, FsmStartSetOffline, STATE.Idle);
//Pump
Transition(STATE.Idle, MSG.Pump, FsmStartPump, STATE.Pump);
Transition(STATE.Pump, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
Transition(STATE.Pump, MSG.Abort, FsmAbortTask, STATE.Idle);
//Vent
Transition(STATE.Idle, MSG.Vent, FsmStartVent, STATE.Vent);
Transition(STATE.Vent, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
Transition(STATE.Vent, MSG.Abort, FsmAbortTask, STATE.Idle);
//Purge
Transition(STATE.Idle, MSG.Purge, FsmStartPurge, STATE.Purge);
Transition(STATE.Purge, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
Transition(STATE.Purge, MSG.Abort, FsmAbortTask, STATE.Idle);
//Leak Check
Transition(STATE.Idle, MSG.LeakCheck, FsmStartLeakCheck, STATE.LeakCheck);
Transition(STATE.LeakCheck, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
Transition(STATE.LeakCheck, MSG.Abort, FsmAbortTask, STATE.Idle);
//Separate
Transition(STATE.Idle, MSG.Separate, FsmStartSeparate, STATE.Separating);
Transition(STATE.Separating, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
Transition(STATE.Separating, MSG.Abort, FsmAbortTask, STATE.Idle);
//Group
Transition(STATE.Idle, MSG.Group, FsmStartGroup, STATE.Grouping);
Transition(STATE.Grouping, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
Transition(STATE.Grouping, MSG.Abort, FsmAbortTask, STATE.Idle);
//LoadRotationHome
Transition(STATE.Idle, MSG.RelativeHomeOffset, FsmStartRelativeHomeOffset, STATE.RotationHomeOffset);
Transition(STATE.RotationHomeOffset, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
Transition(STATE.RotationHomeOffset, MSG.Abort, FsmAbortTask, STATE.Idle);
}
private void InitOp()
{
OP.Subscribe($"{Name}.Home", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.Home);
});
OP.Subscribe($"{Name}.Pump", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.Pump);
});
OP.Subscribe($"{Name}.Vent", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.Vent);
});
OP.Subscribe($"{Name}.Purge", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.Purge);
});
OP.Subscribe($"{Name}.LeakCheck", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.LeakCheck, args);
});
OP.Subscribe($"{Name}.MoveLift", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.MoveLift, args[0]);
});
OP.Subscribe($"{Name}.OpenDoor", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.OpenDoor);
});
OP.Subscribe($"{Name}.CloseDoor", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.CloseDoor);
});
OP.Subscribe($"{Name}.Reset", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.Reset);
});
OP.Subscribe($"{Name}.Group", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.Group);
});
OP.Subscribe($"{Name}.Separate", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.Separate);
});
OP.Subscribe($"{Name}.RotationRelativeHomeOffset", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.RelativeHomeOffset);
});
OP.Subscribe($"{Name}.Abort", (string cmd, object[] args) =>
{
return CheckToPostMessage((int)MSG.Abort);
});
OP.Subscribe($"{Module}.SetOnline", (string cmd, object[] args) => PutOnline());
OP.Subscribe($"{Module}.SetOffline", (string cmd, object[] args) => PutOffline());
}
private void InitData()
{
DATA.Subscribe($"{Name}.Status", () => StringFsmStatus);
DATA.Subscribe($"{Name}.IsOnline", () => IsOnline);
DATA.Subscribe($"{Name}.IsBusy", () => IsBusy);
DATA.Subscribe($"{Name}.CurrentRoutineLoop", () => CurrentRoutineLoop);
DATA.Subscribe($"{Name}.CurrentRoutineLoopTotal", () => CurrentRoutineLoopTotal);
DATA.Subscribe($"{Module}.IsAlarm", () => IsAlarm);
/*DATA.Subscribe($"{Name}.LeakCheckElapseTime", () =>
{
if (FsmState == (int)STATE.LeakCheck)
return _leakCheckRoutine.ElapsedTime;
return 0;
});*/
/*DATA.Subscribe($"{Name}.AtATM", () =>
{
if (_llDevice.CheckAtm())
{
return true;
}
return false;
});*/
DATA.Subscribe($"{Name}.UnderVAC", () =>
{
if (_llDevice.CheckVacuum())
{
return true;
}
return false;
});
DATA.Subscribe($"{Name}.LidState", () =>
{
if (_llDevice.CheckLidClose())
{
return "Closed";
}
return "Open";
});
}
private bool FsmOnError(object[] param)
{
IsOnline = false;
if (FsmState == (int)STATE.Error)
{
return false;
}
if (FsmState == (int)STATE.Init)
return false;
return true;
}
private bool FsmReset(object[] param)
{
if (FsmState == (int)STATE.Error)
{
EV.ClearAlarmEvent();
}
if (!_isInit)
{
PostMsg(MSG.ToInit);
return false;
}
return true;
}
private bool FsmExitError(object[] param)
{
return true;
}
private bool FsmEnterError(object[] param)
{
if (OnEnterError != null)
OnEnterError(Module);
return true;
}
private bool FsmStartHome(object[] param)
{
Result ret = StartRoutine(_homeRoutine);
if (ret == Result.FAIL || ret == Result.DONE)
return false;
return ret == Result.RUN;
}
private bool FsmMonitorHomeTask(object[] param)
{
Result ret = MonitorRoutine();
if (ret == Result.FAIL)
{
PostMsg(MSG.Error);
return false;
}
if (ret == Result.DONE)
{
_isInit = true;
return true;
}
return false;
}
private bool FsmAbortTask(object[] param)
{
AbortRoutine();
return true;
}
private bool FsmExitIdle(object[] param)
{
return true;
}
private bool FsmEnterIdle(object[] param)
{
return true;
}
private bool FsmToInit(object[] param)
{
return true;
}
private bool FsmStartPrepareTransfer(object[] param)
{
QueueRoutine.Clear();
ModuleName mod = (ModuleName)param[0];
if (mod == ModuleName.TrayRobot || mod == ModuleName.WaferRobot)
{
//if ((EnumTransferType)param[2] == EnumTransferType.Place)
{
QueueRoutine.Enqueue(_prepareTransferRoutine);
}
}
if (mod == ModuleName.TMRobot)
{
double tragetPressure = SC.GetConfigItem("TM.PressureBalance.BalancePressure").DoubleValue;
if (tragetPressure > 20) //20mbar以上需要充到一定气压
{
QueueRoutine.Enqueue(_prepareTransferRoutine);
}
else
{
_pumpRoutine.Init();
QueueRoutine.Enqueue(_pumpRoutine);
}
}
else
{
QueueRoutine.Enqueue(_ventRoutine);
}
Result ret = StartRoutine();
if (ret == Result.FAIL || ret == Result.DONE)
return false;
return ret == Result.RUN;
}
private bool FsmMonitorTask(object[] param)
{
Result ret = MonitorRoutine();
if (ret == Result.FAIL)
{
PostMsg(MSG.Error);
return false;
}
return ret == Result.DONE;
}
private bool FsmStartSetOffline(object[] param)
{
IsOnline = false;
return true;
}
private bool FsmStartSetOnline(object[] param)
{
IsOnline = true;
return true;
}
private bool FsmStartPump(object[] param)
{
Result ret = StartRoutine(_pumpRoutine);
if (ret == Result.FAIL || ret == Result.DONE)
return false;
return ret == Result.RUN;
}
private bool FsmStartVent(object[] param)
{
Result ret = StartRoutine(_ventRoutine);
if (ret == Result.FAIL || ret == Result.DONE)
return false;
return ret == Result.RUN;
}
private bool FsmStartPurge(object[] param)
{
Result ret = StartRoutine(_purgeRoutine, param);
if (ret == Result.FAIL || ret == Result.DONE)
return false;
return ret == Result.RUN;
}
private bool FsmStartLeakCheck(object[] param)
{
if (param != null && param.Length >= 2)
{
_leakCheckRoutine.Init((int)param[0], (int)param[1]);
}
else
{
_leakCheckRoutine.Init();
}
Result ret = StartRoutine(_leakCheckRoutine);
if (ret == Result.FAIL || ret == Result.DONE)
return false;
return ret == Result.RUN;
}
//private bool FsmStartSeparate(object[] param)
//{
// Result ret = StartRoutine(_loadLockSeparateRoutine);
// if (ret == Result.FAIL || ret == Result.DONE)
// return false;
// return ret == Result.RUN;
//}
private bool FsmStartRelativeHomeOffset(object[] param)
{
Result ret = StartRoutine(_loadRotationHomeOffsetRoutine);
if (ret == Result.FAIL || ret == Result.DONE)
return false;
return ret == Result.RUN;
}
private bool FsmStartGroup(object[] param)
{
Result ret = StartRoutine(_loadLockGroupRoutine);
if (ret == Result.FAIL || ret == Result.DONE)
return false;
return ret == Result.RUN;
}
private bool FsmStartSeparate(object[] param)
{
Result ret = StartRoutine(_loadSeparateRoutine);
if (ret == Result.FAIL || ret == Result.DONE)
return false;
return ret == Result.RUN;
}
public override bool Home(out string reason)
{
CheckToPostMessage((int)MSG.Home);
reason = string.Empty;
return true;
}
public override int InvokeCooling(int time)
{
if (CheckToPostMessage((int)MSG.Cooling, time))
return (int)MSG.Cooling;
return (int)FSM_MSG.NONE;
}
public override int InvokeVent()
{
if (CheckToPostMessage((int)MSG.Vent))
return (int)MSG.Vent;
return (int)FSM_MSG.NONE;
}
public override int InvokePump()
{
if (CheckToPostMessage((int)MSG.Pump))
return (int)MSG.Pump;
return (int)FSM_MSG.NONE;
}
public override int InvokePurge(params object[] objs)
{
if (CheckToPostMessage((int)MSG.Purge,objs))
return (int)MSG.Purge;
return (int)FSM_MSG.NONE;
}
public override bool CheckAcked(int entityTaskToken)
{
return FsmState == (int)STATE.Idle && CheckAllMessageProcessed();
//return true;
}
public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
{
//CheckToPostMessage(MSG.InTransfer);
}
public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
{
//if (FsmState == (int)STATE.InTransfer)
// CheckToPostMessage(MSG.TransferComplete);
}
public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
{
reason = string.Empty;
if (CheckToPostMessage((int)MSG.PrepareTransfer, robot, targetSlot, transferType))
return true;
return false;
}
public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
{
reason = string.Empty;
return true;
}
public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
{
reason = string.Empty;
return true;
}
public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType,
out string reason)
{
reason = string.Empty;
return (_llDevice.CheckVacuum() && !SC.GetValue<bool>("System.IsATMMode"))
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|| (_llDevice.CheckAtm() && SC.GetValue<bool>("System.IsATMMode"));
}
public override bool CheckReadyForMap(ModuleName robot, Hand blade, out string reason)
{
reason = string.Empty;
return true;
}
public override bool CheckSlitValveClosed()
{
return _llDevice.CheckSlitValveClosed();
}
public override bool CheckTrayPlaced()
{
return _llDevice.CheckTrayPlaced();
}
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public override bool CheckLiftUp()
{
return _llDevice.CheckLiftUp();
}
public override bool CheckLiftDown()
{
return _llDevice.CheckLiftDown();
}
public override bool CheckTrayClamped()
{
throw new NotImplementedException();
}
public override bool CheckTrayUnClamped()
{
throw new NotImplementedException();
}
public override bool CheckWaferClamped()
{
return _llDevice.CheckWaferClamped();
}
public override bool CheckWaferUnClamped()
{
throw new NotImplementedException();
}
public override bool CheckWaferPlaced()
{
throw new NotImplementedException();
}
private bool PutOnline()
{
IsOnline = true;
return true;
}
private bool PutOffline()
{
IsOnline = false;
return true;
}
public void InvokeOffline()
{
PutOffline();
}
public void InvokeOnline()
{
PutOnline();
}
private CancellationTokenSource NotifyModuleOfflineCancellation = new CancellationTokenSource();
private Task NotifyModuleOfflineTask(int delayTime)
{
var t1 = Task.Run(async () =>
{
await Task.Delay(delayTime, NotifyModuleOfflineCancellation.Token).ContinueWith(x => EV.PostWarningLog(Module, $"{Module} is still in offline"), NotifyModuleOfflineCancellation.Token);
});
return t1;
}
public override int InvokeGroupWaferTray()
{
if (CheckToPostMessage((int)MSG.Group))
return (int)MSG.Group;
return (int)FSM_MSG.NONE;
}
public override int InvokeSeparateWaferTray()
{
if (CheckToPostMessage((int)MSG.Separate))
return (int)MSG.Separate;
return (int)FSM_MSG.NONE;
}
public int InvokeError()
{
if (CheckToPostMessage((int)MSG.Error))
return (int)MSG.Error;
return (int)FSM_MSG.NONE;
}
}
}