更新库文件，更新Maintain默认配置
This commit is contained in:
SIC1016\caipeilun
parent
4dffed2e5f
commit
140f378ede
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@ -7,7 +7,7 @@
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<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2023/12/29 16:06:22" Enable="False" />
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<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2023/12/29 16:06:03" Enable="False" />
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<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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</MaintainerParent>
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<MaintainerParent Name="Unload模块">
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<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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@ -100,7 +100,7 @@
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<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="尾排系统">
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<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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@ -115,250 +115,10 @@
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<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="Load模块">
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<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2024/1/26 16:13:13" Enable="True" />
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<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2024/1/26 16:13:15" Enable="True" />
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<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2024/1/26 16:13:17" Enable="True" />
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<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2024/1/26 16:13:19" Enable="True" />
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</MaintainerParent>
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</Maintainer>
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<Maintainer Type="Thickness" Name="Schedule" Description="周期维护(监控生长膜厚)
Schedule Preventive Maintenance" Index="0" Module="PM1" Enable="True" StartDate="2024/1/27 14:52:14" Threshold="1" TimeDisplayUnit="Hours">
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<MaintainerParent Name="冷却水系统">
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<MaintainerItem Name="厂务进水压力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="PM模块">
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<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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</MaintainerParent>
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<MaintainerParent Name="TM模块">
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<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="Load模块">
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<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="Unload模块">
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<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="EFFM模块">
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<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="温控系统">
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<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="真空系统">
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<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="Gas Box">
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<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="液体源">
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<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="传送系统">
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<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="强电系统">
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<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="弱电系统">
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<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="尾排系统">
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<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="排风系统">
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<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="IPC">
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<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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</Maintainer>
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<Maintainer Type="Process" Name="Schedule" Description="周期维护（监控工艺时间）
Schedule Preventive Maintenance" Index="1" Module="PM1" Enable="True" StartDate="2023/12/31 0:00:00" Threshold="360000" TimeDisplayUnit="Hours">
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<MaintainerParent Name="冷却水系统">
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<MaintainerItem Name="厂务进水压力" Id="0" MaintainedDateLatest="2024/1/29 9:01:50" Enable="True" />
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<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2024/1/29 9:03:36" Enable="False" />
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<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="PM模块">
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<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2024/1/29 9:02:50" Enable="False" />
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<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2024/1/29 9:03:43" Enable="False" />
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<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2024/1/29 9:01:56" Enable="True" />
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<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2024/1/29 9:02:53" Enable="True" />
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<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2024/1/29 9:03:20" Enable="True" />
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<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2024/1/29 9:02:56" Enable="False" />
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<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2024/1/29 9:03:12" Enable="True" />
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<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2024/1/29 9:02:55" Enable="True" />
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<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2024/1/29 9:03:05" Enable="False" />
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<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2024/1/29 9:03:08" Enable="True" />
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</MaintainerParent>
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<MaintainerParent Name="TM模块">
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<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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</MaintainerParent>
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<MaintainerParent Name="Unload模块">
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<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="EFFM模块">
|
||||
<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="温控系统">
|
||||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2024/1/29 9:03:03" Enable="False" />
|
||||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2024/1/29 9:03:10" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2024/1/29 9:03:14" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2024/1/29 9:03:24" Enable="False" />
|
||||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2024/1/29 9:03:17" Enable="True" />
|
||||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="真空系统">
|
||||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2024/1/29 9:03:22" Enable="True" />
|
||||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2024/1/29 9:03:48" Enable="False" />
|
||||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Gas Box">
|
||||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2024/1/29 9:03:38" Enable="True" />
|
||||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2024/1/29 9:03:45" Enable="True" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="液体源">
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2024/1/29 9:03:32" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2024/1/29 9:03:40" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="传送系统">
|
||||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="强电系统">
|
||||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="弱电系统">
|
||||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2024/1/29 9:03:33" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="尾排系统">
|
||||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2024/1/29 9:03:52" Enable="True" />
|
||||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="排风系统">
|
||||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="IPC">
|
||||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Load模块">
|
||||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2024/1/29 9:03:50" Enable="True" />
|
||||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2024/1/29 9:02:59" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2024/1/29 9:03:28" Enable="False" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2024/1/29 9:03:26" Enable="False" />
|
||||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2024/1/26 16:13:13" Enable="False" />
|
||||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2024/1/26 16:13:15" Enable="False" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2024/1/26 16:13:17" Enable="False" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2024/1/26 16:13:19" Enable="False" />
|
||||
</MaintainerParent>
|
||||
</Maintainer>
|
||||
<Maintainer Type="Plan" Name="Schedule" Description="周期维护（监控系统时间）
Schedule Preventive Maintenance" Index="1" Module="PM1" Enable="True" StartDate="2024/1/29 9:49:54" Threshold="360000" TimeDisplayUnit="Hours">
|
||||
|
|
@ -370,20 +130,20 @@
|
|||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="PM模块">
|
||||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
|
|
@ -412,31 +172,31 @@
|
|||
</MaintainerParent>
|
||||
<MaintainerParent Name="温控系统">
|
||||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="真空系统">
|
||||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Gas Box">
|
||||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="液体源">
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
|
|
@ -467,7 +227,7 @@
|
|||
</MaintainerParent>
|
||||
<MaintainerParent Name="尾排系统">
|
||||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
|
|
@ -490,20 +250,20 @@
|
|||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="PM模块">
|
||||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
|
|
@ -532,31 +292,31 @@
|
|||
</MaintainerParent>
|
||||
<MaintainerParent Name="温控系统">
|
||||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="真空系统">
|
||||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Gas Box">
|
||||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="液体源">
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
|
|
@ -587,241 +347,7 @@
|
|||
</MaintainerParent>
|
||||
<MaintainerParent Name="尾排系统">
|
||||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="排风系统">
|
||||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="IPC">
|
||||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
</Maintainer>
|
||||
<Maintainer Type="Process" Name="Schedule" Description="周期维护（监控工艺时间）
Schedule Preventive Maintenance" Index="2" Module="PM2" Enable="True" StartDate="2020/1/1 0:00:00" Threshold="3600" TimeDisplayUnit="Hours">
|
||||
<MaintainerParent Name="冷却水系统">
|
||||
<MaintainerItem Name="厂务进水压力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2024/1/29 9:02:38" Enable="True" />
|
||||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="PM模块">
|
||||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="TM模块">
|
||||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Load模块">
|
||||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Unload模块">
|
||||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="EFFM模块">
|
||||
<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="温控系统">
|
||||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="真空系统">
|
||||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Gas Box">
|
||||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="液体源">
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="传送系统">
|
||||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="强电系统">
|
||||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="弱电系统">
|
||||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="尾排系统">
|
||||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="排风系统">
|
||||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="IPC">
|
||||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
</Maintainer>
|
||||
<Maintainer Type="Thickness" Name="Schedule" Description="周期维护(监控生长膜厚)
Schedule Preventive Maintenance" Index="4" Module="PM2" Enable="True" StartDate="2024/1/27 14:52:26" Threshold="1" TimeDisplayUnit="Hours">
|
||||
<MaintainerParent Name="冷却水系统">
|
||||
<MaintainerItem Name="厂务进水压力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="PM模块">
|
||||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2024/1/27 14:51:36" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2024/1/27 14:51:38" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2024/1/27 14:51:40" Enable="True" />
|
||||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2024/1/29 9:02:21" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2024/1/27 14:52:05" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2024/1/27 14:51:47" Enable="True" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2024/1/27 14:51:43" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="TM模块">
|
||||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Unload模块">
|
||||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="EFFM模块">
|
||||
<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="温控系统">
|
||||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2024/1/27 14:51:57" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2024/1/27 14:52:01" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2024/1/27 14:51:51" Enable="True" />
|
||||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2024/1/27 14:51:59" Enable="True" />
|
||||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2024/1/27 14:51:53" Enable="True" />
|
||||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="真空系统">
|
||||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2024/1/27 14:52:10" Enable="True" />
|
||||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2024/1/27 14:52:03" Enable="True" />
|
||||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Gas Box">
|
||||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2024/1/27 14:52:14" Enable="True" />
|
||||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2024/1/27 14:52:22" Enable="True" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="液体源">
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2024/1/27 14:52:08" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2024/1/27 14:52:19" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="传送系统">
|
||||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="强电系统">
|
||||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="弱电系统">
|
||||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2024/1/27 14:52:12" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="尾排系统">
|
||||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2024/1/27 14:52:26" Enable="True" />
|
||||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
|
|
@ -834,12 +360,6 @@
|
|||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="Load模块">
|
||||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2024/1/27 14:51:45" Enable="True" />
|
||||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2024/1/27 14:51:55" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2024/1/27 14:51:49" Enable="True" />
|
||||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2024/1/27 14:52:24" Enable="True" />
|
||||
</MaintainerParent>
|
||||
</Maintainer>
|
||||
<Maintainer Type="Plan" Name="Monthly" Description="月度维护
Monthly Preventive Maintenance" Index="10" Module="System" Enable="True" StartDate="2023/12/31 0:00:00" Threshold="2592000" TimeDisplayUnit="Days">
|
||||
<MaintainerParent Name="冷却水系统">
|
||||
|
|
@ -967,15 +487,15 @@
|
|||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="PM模块">
|
||||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
|
|
@ -1002,7 +522,7 @@
|
|||
</MaintainerParent>
|
||||
<MaintainerParent Name="EFFM模块">
|
||||
<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="温控系统">
|
||||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
|
|
@ -1031,7 +551,7 @@
|
|||
<MaintainerParent Name="液体源">
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="传送系统">
|
||||
|
|
@ -1087,15 +607,15 @@
|
|||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="PM模块">
|
||||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
|
|
@ -1122,7 +642,7 @@
|
|||
</MaintainerParent>
|
||||
<MaintainerParent Name="EFFM模块">
|
||||
<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="温控系统">
|
||||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
|
|
@ -1151,7 +671,7 @@
|
|||
<MaintainerParent Name="液体源">
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="传送系统">
|
||||
|
|
@ -1742,11 +1262,11 @@
|
|||
</MaintainerParent>
|
||||
<MaintainerParent Name="Gas Box">
|
||||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="液体源">
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
|
|
@ -1862,11 +1382,11 @@
|
|||
</MaintainerParent>
|
||||
<MaintainerParent Name="Gas Box">
|
||||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
</MaintainerParent>
|
||||
<MaintainerParent Name="液体源">
|
||||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||||
|
|
@ -1925,21 +1445,21 @@
|
|||
<AllMaintainItemConfigs>
|
||||
<MaintainItems Name="冷却水系统" Description="" Index="0">
|
||||
<MaintainItem Name="厂务进水压力" Id="0" Index="0" Description="进水压力：0.35Mpa" DefaultRecord="进水压力=" FilePath="" />
|
||||
<MaintainItem Name="厂务进水温度" Id="0" Index="1" Description="冷却水常温：20-25℃工艺时：<35℃" DefaultRecord="冷却水常温=
工艺时=" FilePath="" />
|
||||
<MaintainItem Name="冷却水流量" Id="0" Index="2" Description="参照附件1" DefaultRecord="" FilePath="x1.txt" />
|
||||
<MaintainItem Name="冷却水流量报警设置" Id="0" Index="3" Description="参照附件1" DefaultRecord="" FilePath="x1.txt" />
|
||||
<MaintainItem Name="厂务进水温度" Id="0" Index="1" Description="冷却水常温：20-25℃
工艺时：<35℃" DefaultRecord="冷却水常温=
工艺时=" FilePath="" />
|
||||
<MaintainItem Name="冷却水流量" Id="0" Index="2" Description="参照附件1" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="冷却水流量报警设置" Id="0" Index="3" Description="参照附件1" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="冷却水温度报警设置" Id="0" Index="4" Description="水温上限设定：45℃(UI→Configuration→PM→CoolingWater)" DefaultRecord="水温设定=" FilePath="" />
|
||||
</MaintainItems>
|
||||
<MaintainItems Name="PM模块" Description="PM模块" Index="1">
|
||||
<MaintainItem Name="Middle层维护" Id="0" Index="0" Description="参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="x2.txt" />
|
||||
<MaintainItem Name="Show Head层维护" Id="0" Index="1" Description="参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="x2.txt" />
|
||||
<MaintainItem Name="Middle层维护" Id="0" Index="0" Description="参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="Show Head层维护" Id="0" Index="1" Description="参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="旋转机构" Id="0" Index="2" Description="600转时电流<2.5A" DefaultRecord="600转时电流=" FilePath="" />
|
||||
<MaintainItem Name="旋转机构" Id="1" Index="3" Description="加减速度为3rpm/s" DefaultRecord="加减速度=" FilePath="" />
|
||||
<MaintainItem Name="旋转机构" Id="2" Index="4" Description="噪音情况:无异常声音" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="旋转机构" Id="3" Index="5" Description="Wobble测试：Wobble 结果小于 0.2 mm" DefaultRecord="Wobble 结果=" FilePath="" />
|
||||
<MaintainItem Name="升降机构" Id="0" Index="6" Description="上下运动顺畅" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="升降机构" Id="2" Index="7" Description="皮带无磨损、变形、错位" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="升降机构" Id="3" Index="8" Description="位置确认：Chamber Body 平面—Up Position=52mm
Up Position—Down Position=30mm" DefaultRecord="Up Position=
Down Position=" FilePath="" />
|
||||
<MaintainItem Name="升降机构" Id="3" Index="8" Description="位置确认：
Chamber Body 平面—Up Position=52mm
Up Position—Down Position=30mm" DefaultRecord="Up Position=
Down Position=" FilePath="" />
|
||||
<MaintainItem Name="升降机构" Id="1" Index="9" Description="驱动电机表面温度低于60度" DefaultRecord="表面温度=" FilePath="" />
|
||||
<MaintainItem Name="腔体内部检查" Id="0" Index="10" Description="检查GasRingPurge通道接触情况（密封接触、无错位）" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="腔体内部检查" Id="1" Index="11" Description="密封Oring（腔体密封、GasConnector密封）安装正常，无漏装、变形、磨损" DefaultRecord="" FilePath="" />
|
||||
|
|
@ -1983,7 +1503,7 @@
|
|||
<MaintainItems Name="真空系统" Description="真空系统" Index="7">
|
||||
<MaintainItem Name="PM真空泵" Id="0" Index="0" Description="BP电流：2-3A
BP温度：<65℃
MP电流：6-8A
MP温度：<75℃
N2 Flow：17-81 Pam3/s
Water Flow：3.5-8L/min"" DefaultRecord="BP电流=
BP温度=
MP电流=
MP温度=
N2 Flow=
Water Flow=" FilePath="" />
|
||||
<MaintainItem Name="TM真空泵" Id="0" Index="1" Description="MP：0.4-0.8KW
N2 Flow：17-20 Pam3/s
Water Flow：1.5 - 3.0 L/min" DefaultRecord="MP=
N2 Flow=
Water Flow=" FilePath="" />
|
||||
<MaintainItem Name="控压能力" Id="0" Index="2" Description="蝶阀控压能力：控压精度在±1 mbar" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="控压能力" Id="0" Index="2" Description="蝶阀控压能力：控压精度<±1 mbar" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="控压能力" Id="1" Index="3" Description="清洁蝶阀阀片" DefaultRecord="" FilePath="" />
|
||||
<MaintainItem Name="安全泄压" Id="0" Index="4" Description="PM ATM Idle可维持在1050-1090mbar之间
当腔体压力>1095mbar时，设备自动关闭Final Valve" DefaultRecord="" FilePath="" />
|
||||
</MaintainItems>
|
||||
|
|
|
|||
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Reference in New Issue