1.添加PMRecipeComplete事件
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@ -737,21 +737,29 @@ namespace SicModules.PMs.RecipeExecutions
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break;
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case RecipeRunningState.RecipeCompleted:
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{
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//更新PM的Runtime
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if (!_hasRecordRunTime)
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{
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_hasRecordRunTime = true;
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//更新PM的Runtime
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if (!_hasRecordRunTime)
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{
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_hasRecordRunTime = true;
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RuntimeDataRecorder.UpdateElapseTimePM(Module,
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(int)_recipeTimer.GetElapseTime() / 1000);
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}
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}
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_recipeTimer.Stop();
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Notify("Finished");
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GrowCheck();
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return Result.DONE;
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}
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_recipeTimer.Stop();
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Notify("Finished");
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GrowCheck();
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//手动工艺时LotID和SequenceID可能是string.Empty
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//补全路径
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string recipeID = PmDevice.RecipeRunningInfo.RecipeName + ".rcp";
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string squenceID = $"Sequence\\{PmDevice.GetWaferSequenceID()}.seq";
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GemManager.Instance.Equipment?.TriggerEvent("PMRecipeComplete", new string[] { "ChamberID", "RecipeID", "LotID", "SequenceID" }, new object[] { PmDevice.Module, recipeID, PmDevice.GetWaferLotID(), squenceID });
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return Result.DONE;
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}
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case RecipeRunningState.Error:
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{
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