1.补全Gem 事件DV路径
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@ -231,7 +231,11 @@ namespace SicModules.PMs.RecipeExecutions
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_dbCallback.RecipeUpdateStatus(PmDevice.RecipeRunningInfo.InnerId.ToString(), "InProcess");
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//手动工艺时LotID和SequenceID可能是string.Empty
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GemManager.Instance.Equipment?.TriggerEvent("PMRecipeStart", new string[] { "ChamberID", "RecipeID","LotID","SequenceID"}, new object[] {PmDevice.Module, PmDevice.RecipeRunningInfo.RecipeName, PmDevice.GetWaferLotID(), PmDevice.GetWaferSequenceID()});
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//补全路径
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string recipeID = PmDevice.RecipeRunningInfo.RecipeName + ".rcp";
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string squenceID = $"Sequence\\{PmDevice.GetWaferSequenceID()}.seq";
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GemManager.Instance.Equipment?.TriggerEvent("PMRecipeStart", new string[] { "ChamberID", "RecipeID","LotID","SequenceID"}, new object[] {PmDevice.Module, recipeID, PmDevice.GetWaferLotID(), squenceID});
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WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0,
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WaferProcessStatus.InProcess);
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@ -716,8 +720,13 @@ namespace SicModules.PMs.RecipeExecutions
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Notify("Finished");
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GrowCheck();
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//手动工艺时LotID和SequenceID可能是string.Empty
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GemManager.Instance.Equipment?.TriggerEvent("PMRecipeComplete", new string[] { "ChamberID", "RecipeID", "LotID", "SequenceID" }, new object[] { PmDevice.Module, PmDevice.RecipeRunningInfo.RecipeName, PmDevice.GetWaferLotID(), PmDevice.GetWaferSequenceID() });
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//补全路径
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string recipeID = PmDevice.RecipeRunningInfo.RecipeName + ".rcp";
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string squenceID = $"Sequence\\{PmDevice.GetWaferSequenceID()}.seq";
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GemManager.Instance.Equipment?.TriggerEvent("PMRecipeComplete", new string[] { "ChamberID", "RecipeID", "LotID", "SequenceID" }, new object[] { PmDevice.Module, recipeID, PmDevice.GetWaferLotID(), squenceID });
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return Result.DONE;
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}
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@ -834,8 +843,13 @@ namespace SicModules.PMs.RecipeExecutions
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PmDevice.RecipeRunningInfo.TotalTime = 0;
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PmDevice.RecipeRunningInfo.TotalElapseTime = 0;
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//手动工艺时LotID和SequenceID可能是string.Empty
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GemManager.Instance.Equipment?.TriggerEvent("PMRecipeAbort", new string[] { "ChamberID", "RecipeID", "LotID", "SequenceID" }, new object[] { PmDevice.Module, PmDevice.RecipeRunningInfo.RecipeName, PmDevice.GetWaferLotID(), PmDevice.GetWaferSequenceID() });
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//补全路径
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string recipeID = PmDevice.RecipeRunningInfo.RecipeName + ".rcp";
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string squenceID = $"Sequence\\{PmDevice.GetWaferSequenceID()}.seq";
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GemManager.Instance.Equipment?.TriggerEvent("PMRecipeAbort", new string[] { "ChamberID", "RecipeID", "LotID", "SequenceID" }, new object[] { PmDevice.Module, recipeID, PmDevice.GetWaferLotID(), squenceID });
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//PMDevice.Rf.SetPowerOnOff(false, out _);
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//PMDevice.Microwave.SetPowerOnOff(false, out _);
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@ -833,6 +833,8 @@ namespace SicRT.Modules
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foreach (var cj in cjList)
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{
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string squenceID = cj.LotWafers != null ? cj.LotWafers[0].PPID : string.Empty;
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//补全路径
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squenceID = $"Sequence\\{squenceID}.seq";
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GemManager.Instance.Equipment?.TriggerEvent("JobAbort", new string[] { "LotID", "SequenceID" }, new object[] { cj.LotName, squenceID });
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}
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}
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@ -1006,6 +1008,8 @@ namespace SicRT.Modules
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cj.SetState(EnumControlJobState.Executing);
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string squenceID = cj.LotWafers != null ? cj.LotWafers[0].PPID : string.Empty;
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//补全路径
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squenceID = $"Sequence\\{squenceID}.seq";
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GemManager.Instance.Equipment?.TriggerEvent("JobStart", new string[] { "LotID","SequenceID"}, new object[] { cj.LotName, squenceID});
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}
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}
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@ -1689,8 +1693,10 @@ namespace SicRT.Modules
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_loadWaferInfo.Remove(_load.GetWaferInfo(0).WaferInnerID.ToString());
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//补全路径
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string squenceID = $"Sequence\\{_load.GetWaferInfo(0).PPID}.seq";
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GemManager.Instance.Equipment?.TriggerEvent("JobComplete", new string[] { "LotID", "SequenceID" },
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new object[] { _load.GetWaferInfo(0).LotId,_load.GetWaferInfo(0).PPID });
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new object[] { _load.GetWaferInfo(0).LotId, squenceID });
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return;
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}
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