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1.增加PM2 SVID

This commit is contained in:
HCL 2024-04-26 13:30:19 +08:00
parent b5cb743aed
commit bd42622863
10 changed files with 307 additions and 31 deletions
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3
Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
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@ -353,7 +353,7 @@
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DORPressVacSW" infoText="" warningText="Warning2 DOR Press ATM [DI-7]" alarmText="" />
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Warning3 Gas Box Door Not Closed [DI-33]" alarmText="" />
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning4 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW" infoText="" warningText="Warning5 Spare2 Flow Low -U13 [DI-47]" alarmText="" />
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Warning6 ReactorWaterLeak [DI-48]" alarmText="" />
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Warning7 Gas Box Water Leak [DI-60]" alarmText="" />
<IoSensor id="SensorShutterUpLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterUpLimitSW" infoText="" warningText="Warning8 ShutterUpLimit [DI-61]" alarmText="" />
@ -387,6 +387,7 @@
<IoSensor id="SensorTransformerFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TransformerFlowSW" infoText="" warningText="" alarmText="Alarm14 Transformer Cooling Water Low Flow -U14 [DI-25]" />
<IoSensor id="SensorSpare1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare1FlowSW" infoText="" warningText="" alarmText="Alarm15 Spare1 Flow Low-U12 [DI-26]" />
<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW" infoText="" warningText="Warning5 Spare2 Flow Low -U13 [DI-47]" alarmText="" />
<IoSensor id="SensorInletTotalFlowLowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowLowSW" infoText="" warningText="" alarmText="Alarm16 Chamber Cooling Water Pressure Low [DI-27]" />
<IoSensor id="SensorInletTotalFlowHighSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowHighSW" infoText="" warningText="" alarmText="Alarm17 Chamber Cooling Water Pressure High [DI-28]" />
<IoSensor id="SensorPMH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2DetectorSW" infoText="" warningText="" alarmText="Alarm19 PM H2 Leak Detect [DI-30]" />

3
Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml
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@ -355,7 +355,7 @@
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DORPressVacSW" infoText="" warningText="Warning2 DOR Press ATM [DI-7]" alarmText="" />
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Warning3 Gas Box Door Not Closed [DI-33]" alarmText="" />
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning4 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare3FlowSW" infoText="" warningText="Waring5 Spare3 Flow Low -U13 [DI-47]" alarmText="" />
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Warning6 ReactorWaterLeak [DI-48]" alarmText="" />
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Warning7 Gas Box Water Leak [DI-60]" alarmText="" />
<IoSensor id="SensorShutterUpLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterUpLimitSW" infoText="" warningText="Warning8 ShutterUpLimit [DI-61]" alarmText="" />
@ -389,6 +389,7 @@
<IoSensor id="SensorTransformerFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TransformerFlowSW" infoText="" warningText="" alarmText="Alarm14 Transformer Cooling Water Low Flow -U14 [DI-25]" />
<IoSensor id="SensorSpare1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW" infoText="" warningText="" alarmText="Alarm15 Spare2 Flow Low-U12 [DI-26]" />
<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare3FlowSW" infoText="" warningText="Waring5 Spare3 Flow Low -U13 [DI-47]" alarmText="" />
<IoSensor id="SensorInletTotalFlowLowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowLowSW" infoText="" warningText="" alarmText="Alarm16 Chamber Cooling Water Pressure Low [DI-27]" />
<IoSensor id="SensorInletTotalFlowHighSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowHighSW" infoText="" warningText="" alarmText="Alarm17 Chamber Cooling Water Pressure High [DI-28]" />
<IoSensor id="SensorPMH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2DetectorSW" infoText="" warningText="" alarmText="Alarm19 PM H2 Leak Detect [DI-30]" />

332
SicRT/Config/Gem.exml
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@ -13,7 +13,7 @@
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1010001" Name="Rt.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="System Status"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1010002" Name="System.IsOnline" Unit="" Default="" Min="" Max="" HostVisible="true" Description="System IsOnline" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1010003" Name="SystemAlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="System Alarm Info"/>
<!-- Load-->
<!-- 编号预留100个-->
@ -25,7 +25,7 @@
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020006" Name="System.SensorLoadDoorOpened.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load SlitValve Opened"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020007" Name="TM.LLTrayPresence.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Tray Presence"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1020008" Name="Scheduler.TimeLoad" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Cooling Remain Time" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1020009" Name="LoadAlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Alarm Info"/>
<!-- Load阀门-->
<!-- 编号预留100个-->
@ -42,8 +42,8 @@
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030002" Name="TM.IsOnline" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Online"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1030003" Name="TM.TMPressure.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Chamber Pressure"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030004" Name="TM.TMLidClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Lid Closed"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1030005" Name="TMRobot.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TMRobot Status"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1030006" Name="TMAlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Alarm Info"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1030005" Name="TMRobot.State" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TMRobot Status"/>
<!-- TM阀MFC-->
<!-- 编号预留100个-->
@ -73,7 +73,7 @@
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1040007" Name="Scheduler.TimeBuffer1" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Bottom Cooling Remain Time" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1040008" Name="Scheduler.TimeBuffer2" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Middle Cooling Remain Time" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1040009" Name="Scheduler.TimeBuffer3" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Top Cooling Remain Time" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1040010" Name="BufferAlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Alarm Info"/>
<!-- PM1-->
<!-- 编号预留100个-->
@ -83,7 +83,7 @@
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050005" Name="PM1.PT2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PT2 FeedBack" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050006" Name="System.SensorReactorADoorClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SlitValve Closed"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050007" Name="System.SensorReactorADoorOpened.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SlitValve Opened"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1050008" Name="PM1AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Alarm Info"/>
<!--PM1 MFC-->
<!-- 编号预留200个-->
@ -103,29 +103,29 @@
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050114" Name="PM1.Mfc14.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc14 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050115" Name="PM1.Mfc15.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc15 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050116" Name="PM1.Mfc16.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc16 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050117" Name="PM1.Mfc17.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc17 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050118" Name="PM1.Mfc18.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc18 Flow" />
<!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050117" Name="PM1.Mfc17.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc17 Flow" />-->
<!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050118" Name="PM1.Mfc18.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc18 Flow" />-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050119" Name="PM1.Mfc19.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc19 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050120" Name="PM1.Mfc20.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc20 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050121" Name="PM1.Mfc21.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc21 Flow" />
<!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050121" Name="PM1.Mfc21.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc21 Flow" />-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050122" Name="PM1.Mfc22.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc21 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050123" Name="PM1.Mfc23.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc23 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050124" Name="PM1.Mfc24.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc24 Flow" />
<!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050124" Name="PM1.Mfc24.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc24 Flow" />-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050125" Name="PM1.Mfc25.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc25 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050126" Name="PM1.Mfc26.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc26 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050127" Name="PM1.Mfc27.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc27 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050128" Name="PM1.Mfc28.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc28 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050129" Name="PM1.Mfc29.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc29 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050130" Name="PM1.Mfc30.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc30 Flow" />
<!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050130" Name="PM1.Mfc30.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc30 Flow" />-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050131" Name="PM1.Mfc31.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc31 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050132" Name="PM1.Mfc32.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc31 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050133" Name="PM1.Mfc33.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc33 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050134" Name="PM1.Mfc34.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc34 Flow" />
<!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050134" Name="PM1.Mfc34.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc34 Flow" />-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050135" Name="PM1.Mfc35.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc35 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050136" Name="PM1.Mfc36.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc36 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050137" Name="PM1.Mfc37.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc37 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050138" Name="PM1.Mfc38.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc38 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050139" Name="PM1.Mfc39.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc39 Flow" />
<!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050139" Name="PM1.Mfc39.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc39 Flow" />-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050140" Name="PM1.Mfc40.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc40 Flow" />
<!-- PM1用气量-->
@ -273,11 +273,11 @@
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051120" Name="PM1.SensorForeline1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Foreline1Flow_U6 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051121" Name="PM1.SensorPowerRod1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater PowerRod1Flow_U7 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051122" Name="PM1.SensorPowerRod2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater PowerRod2Flow_U8 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051123" Name="PM2.SensorForeline2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Foreline2Flow_U9 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051123" Name="PM1.SensorForeline2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Foreline2Flow_U9 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051124" Name="PM1.SensorElectrodeWFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater ElectrodeWFlow_U10 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051125" Name="PM1.SensorTMPump1FlowTemp.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater TMPump1Flow_U11 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051126" Name="PM1.SensorSpare1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Spare1_U12 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051127" Name="PPM1.SensorSpare2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Spare2_U13 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051127" Name="PM1.SensorSpare2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Spare2_U13 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051128" Name="PM1.SensorTransformerFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater TransformerFlow_U14 Sensor" />
<!--PM1 测温-->
@ -342,33 +342,307 @@
<!-- PM1 工艺-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1051801" Name="PM1.SelectedRecipeName" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Name"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1051802" Name="PM1.RecipeTotalTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Total Time"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1051803" Name="PM1.RecipeTotalElapseTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Total Elapse Time"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051802" Name="PM1.RecipeTotalTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Total Time"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051803" Name="PM1.RecipeTotalElapseTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Total Elapse Time"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1051804" Name="PM1.RecipeStepName" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Step Name"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="I8" Id="1051805" Name="PM1.RecipeStepNumber" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Step Number" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051806" Name="PM1.RecipeStepTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Step Time" />
<!-- PM2-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1060001" Name="PM2.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Status"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060002" Name="PM2.IsOnline" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 IsOnline" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060003" Name="PM2.PT1.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PT1 FeedBack" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060005" Name="PM2.PT2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PT2 FeedBack" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060006" Name="System.SensorReactorBDoorClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SlitValve Closed"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060007" Name="System.SensorReactorBDoorOpened.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SlitValve Opened"/>
<!--PM2 MFC-->
<!-- 编号预留200个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060101" Name="PM2.Mfc1.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc1 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060102" Name="PM2.Mfc2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc2 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060103" Name="PM2.Mfc3.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc3 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060104" Name="PM2.Mfc4.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc4 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060105" Name="PM2.Mfc5.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc5 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060106" Name="PM2.Mfc6.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc6 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060107" Name="PM2.Mfc7.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc7 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060108" Name="PM2.Mfc8.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc8 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060109" Name="PM2.Mfc9.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc9 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060110" Name="PM2.Mfc10.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc10 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060111" Name="PM2.Mfc11.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc11 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060112" Name="PM2.Mfc12.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc11 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060113" Name="PM2.Mfc13.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc13 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060114" Name="PM2.Mfc14.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc14 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060115" Name="PM2.Mfc15.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc15 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060116" Name="PM2.Mfc16.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc16 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060119" Name="PM2.Mfc19.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc19 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060120" Name="PM2.Mfc20.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc20 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060122" Name="PM2.Mfc22.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc21 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060123" Name="PM2.Mfc23.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc23 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060125" Name="PM2.Mfc25.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc25 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060126" Name="PM2.Mfc26.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc26 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060127" Name="PM2.Mfc27.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc27 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060128" Name="PM2.Mfc28.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc28 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060129" Name="PM2.Mfc29.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc29 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060131" Name="PM2.Mfc31.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc31 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060132" Name="PM2.Mfc32.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc31 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060133" Name="PM2.Mfc33.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc33 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060135" Name="PM2.Mfc35.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc35 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060136" Name="PM2.Mfc36.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc36 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060137" Name="PM2.Mfc37.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc37 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060138" Name="PM2.Mfc38.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc38 Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060140" Name="PM2.Mfc40.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc40 Flow" />
<!-- PM2用气量-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060301" Name="PM2.GasRealTimeFlow.Ar_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Ar Run Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060302" Name="PM2.GasRealTimeFlow.Ar_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Ar Vent Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060303" Name="PM2.GasRealTimeFlow.C2H4_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 C2H4 Run Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060304" Name="PM2.GasRealTimeFlow.C2H4_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 C2H4 Vent Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060305" Name="PM2.GasRealTimeFlow.H2_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 H2 Run Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060306" Name="PM2.GasRealTimeFlow.H2_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 H2 Vent Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060307" Name="PM2.GasRealTimeFlow.HCL_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 HCL Run Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060308" Name="PM2.GasRealTimeFlow.HCL_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 HCL Vent Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060309" Name="PM2.GasRealTimeFlow.PN2_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PN2 Run Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060310" Name="PM2.GasRealTimeFlow.PN2_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PN2 Vent Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060311" Name="PM2.GasRealTimeFlow.SiH4_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SiH4 Run Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060312" Name="PM2.GasRealTimeFlow.SiH4_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SiH4 Vent Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060313" Name="PM2.GasRealTimeFlow.TCS_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TCS Run Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060314" Name="PM2.GasRealTimeFlow.TCS_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TCS Vent Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060315" Name="PM2.GasRealTimeFlow.TMA_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TMA Run Flow" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060316" Name="PM2.GasRealTimeFlow.TMA_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TMA Vent Flow" />
<!-- PM2压力计-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060401" Name="PM2.Pressure1.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure1 Value" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060402" Name="PM2.Pressure2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure2 Value" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060403" Name="PM2.Pressure3.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure3 Value" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060404" Name="PM2.Pressure4.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure4 Value" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060405" Name="PM2.Pressure5.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure5 Value" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060406" Name="PM2.Pressure6.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure6 Value" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060407" Name="PM2.Pressure7.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure7 Value" />
<!-- PM2阀门-->
<!-- 编号预留300个-->
<!-- <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060501" Name="PM2.V1.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V1 Status" />-->
<!-- <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060502" Name="PM2.V1s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V1s Status" />-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060549" Name="PM2.V25.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V25 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060553" Name="PM2.V27.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V27 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060561" Name="PM2.V31.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V31 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060563" Name="PM2.V32.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V32 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060565" Name="PM2.V33.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V33 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060566" Name="PM2.V33s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V33s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060569" Name="PM2.V35.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V35 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060571" Name="PM2.V36.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V36 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060573" Name="PM2.V37.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V37 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060574" Name="PM2.V37s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V37s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060577" Name="PM2.V39.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V39 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060578" Name="PM2.V39s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V39s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060579" Name="PM2.V40.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V40 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060580" Name="PM2.V40s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V40s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060581" Name="PM2.V41.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V41 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060583" Name="PM2.V42.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V42 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060585" Name="PM2.V43.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V43 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060586" Name="PM2.V43s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V43s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060589" Name="PM2.V45.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V45 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060591" Name="PM2.V46.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V46 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060592" Name="PM2.V46s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V46s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060595" Name="PM2.V48.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V48 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060596" Name="PM2.V48s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V48s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060597" Name="PM2.V49.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V49 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060599" Name="PM2.V50.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V50 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060600" Name="PM2.V50s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V50s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060601" Name="PM2.V51.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V51 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060602" Name="PM2.V51s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V51s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060603" Name="PM2.V52.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V52 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060604" Name="PM2.V52s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V52s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060605" Name="PM2.V53.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V53 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060606" Name="PM2.V53s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V53s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060607" Name="PM2.V54.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V54 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060608" Name="PM2.V54s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V54s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060609" Name="PM2.V55.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V55 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060611" Name="PM2.V56.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V56 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060615" Name="PM2.V58.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V58 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060616" Name="PM2.V58s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V58s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060617" Name="PM2.V59.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V59 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060619" Name="PM2.V60.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V60 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060621" Name="PM2.V61.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V61 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060623" Name="PM2.V62.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V62 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060625" Name="PM2.V63.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V63 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060635" Name="PM2.V68.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V68 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060637" Name="PM2.V69.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V69 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060639" Name="PM2.V70.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V70 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060643" Name="PM2.V72.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V72 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060645" Name="PM2.V73.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V73 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060647" Name="PM2.V74.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V74 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060649" Name="PM2.V75.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V75 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060651" Name="PM2.V76.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V76 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060673" Name="PM2.V87.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V87 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060675" Name="PM2.V88.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V88 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060677" Name="PM2.V89.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V89 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060679" Name="PM2.V90.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V90 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060681" Name="PM2.V91.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V91 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060683" Name="PM2.V92.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V92 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060685" Name="PM2.V93.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V93 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060687" Name="PM2.V94.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V94 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060689" Name="PM2.V95.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V95 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060691" Name="PM2.V96.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V96 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060693" Name="PM2.V97.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V97 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060697" Name="PM2.V99.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V99 Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060698" Name="PM2.V99s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V99s Status" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060721" Name="PM2.V111.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V111 Status" />
<!-- PM2 EPV2-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060801" Name="PM2.EPV2.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 EPV2 Status" />
<!-- PM2 蝶阀-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060901" Name="PM2.TV.TVValveEnable" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TV Enable" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060902" Name="PM2.TV.PositionFeedback" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TV Position" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060903" Name="PM2.TV.PressureFeedback" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TV Pressure" />
<!-- PM2 加热带-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061001" Name="PM2.LineHeater.HeatTailFilter" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater HeatTailFilter" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061002" Name="PM2.LineHeater.HeatTailPipe" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater HeatTailPipe" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061003" Name="PM2.LineHeater.TMAPanelTemp_ATC_1" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater TMAPanelTemp_ATC_1" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061004" Name="PM2.LineHeater.TCSPanelTemp_ATC_2" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater TCSPanelTemp_ATC_2" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061005" Name="PM2.LineHeater.insidePanelTemp_ATC_3" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater insidePanelTemp_ATC_3" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061006" Name="PM2.LineHeater.outsidePanelTemp_ATC_4" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater outsidePanelTemp_ATC_4" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061007" Name="PM2.LineHeater.outsideSHTemp_ATC_5" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater outsideSHTemp_ATC_5" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061008" Name="PM2.LineHeater.LeakBypassTemp_ATC_6" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater LeakBypassTemp_ATC_6" />
<!-- PM2 冷却水-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061101" Name="PM2.CoolingWater.SHFlowTemp_U1.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater SHFlowTemp_U1 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061102" Name="PM2.CoolingWater.TopFlow_U2.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TopFlow_U2 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061103" Name="PM2.CoolingWater.MiddleFlow1_U3.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater MiddleFlow1_U3 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061104" Name="PM2.CoolingWater.MiddleFlow2_U4.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater MiddleFlow2_U4 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061105" Name="PM2.CoolingWater.BottomFlow_U5.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater BottomFlow_U5 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061106" Name="PM2.CoolingWater.Foreline1Flow_U6.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Foreline1Flow_U6 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061107" Name="PM2.CoolingWater.PowerRod1Flow_U7.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater PowerRod1Flow_U7 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061108" Name="PM2.CoolingWater.PowerRod2Flow_U8.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater PowerRod2Flow_U8 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061109" Name="PM2.CoolingWater.Foreline2Flow_U9.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Foreline2Flow_U9 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061110" Name="PM2.CoolingWater.ElectrodeWFlow_U10.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater ElectrodeWFlow_U10 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061111" Name="PM2.CoolingWater.Spare1_U11.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TMPump1Flow_U11 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061112" Name="PM2.CoolingWater.Spare2_U12.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Spare1_U12 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061113" Name="PM2.CoolingWater.Spare3_U13.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Spare2_U13 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061114" Name="PM2.CoolingWater.TransformerFlow_U14.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TransformerFlow_U14 Temperature" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061115" Name="PM2.SensorSHFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater SHFlowTemp_U1 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061116" Name="PM2.SensorChamTopFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TopFlow_U2 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061117" Name="PM2.SensorChamMiddleFlow1SW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater MiddleFlow1_U3 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061118" Name="PM2.SensorChamMiddleFlow2SW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater MiddleFlow2_U4 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061119" Name="PM2.SensorChamBottomFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater BottomFlow_U5 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061120" Name="PM2.SensorForeline1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Foreline1Flow_U6 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061121" Name="PM2.SensorPowerRod1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater PowerRod1Flow_U7 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061122" Name="PM2.SensorPowerRod2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater PowerRod2Flow_U8 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061123" Name="PM2.SensorForeline2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Foreline2Flow_U9 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061124" Name="PM2.SensorElectrodeWFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater ElectrodeWFlow_U10 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061125" Name="PM2.SensorTMPump1FlowTemp.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TMPump1Flow_U11 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061126" Name="PM2.SensorSpare1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Spare1_U12 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061127" Name="PM2.SensorSpare2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Spare2_U13 Sensor" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061128" Name="PM2.SensorTransformerFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TransformerFlow_U14 Sensor" />
<!--PM2 测温-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061201" Name="PM2.Temp.Inner" Unit="℃" Default="" Min="" Max="" HostVisible="true" Description="PM2 Inner Temperature"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061202" Name="PM2.Temp.Middle" Unit="℃" Default="" Min="" Max="" HostVisible="true" Description="PM2 Middle Temperature"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061203" Name="PM2.Temp.Outer" Unit="℃" Default="" Min="" Max="" HostVisible="true" Description="PM2 Outer Temperature"/>
<!-- PM2 PSU-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061301" Name="PM2.PSU1.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU1 Resistance" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061302" Name="PM2.PSU1.OutputArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU1 Arms" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061303" Name="PM2.PSU1.OutputVoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU1 Voltage" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061304" Name="PM2.PSU1.OutputPowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU1 Power" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061305" Name="PM2.PSU2.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU2 Resistance" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061306" Name="PM2.PSU2.OutputArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU2 Arms" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061307" Name="PM2.PSU2.OutputVoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU2 Voltage" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061308" Name="PM2.PSU2.OutputPowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU2 Power" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061309" Name="PM2.PSU3.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU3 Resistance" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061310" Name="PM2.PSU3.OutputArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU3 Arms" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061311" Name="PM2.PSU3.OutputVoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU3 Voltage" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061312" Name="PM2.PSU3.OutputPowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU3 Power" />
<!-- PM2 SCR-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061401" Name="PM2.SCR1.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR1 Resistance" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061402" Name="PM2.SCR1.ArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR1 Arms" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061403" Name="PM2.SCR1.VoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR1 Voltage" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061404" Name="PM2.SCR1.PowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR1 Power" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061405" Name="PM2.SCR2.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR2 Resistance" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061406" Name="PM2.SCR2.ArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR2 Arms" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061407" Name="PM2.SCR2.VoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR2 Voltage" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061408" Name="PM2.SCR2.PowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR2 Power" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061409" Name="PM2.SCR3.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR3 Resistance" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061410" Name="PM2.SCR3.ArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR3 Arms" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061411" Name="PM2.SCR3.VoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR3 Voltage" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061412" Name="PM2.SCR3.PowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR3 Power" />
<!-- PM2 隔热罩-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061501" Name="PM2.ConfinementRing.RingCurPos" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Current Position"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061502" Name="PM2.ConfinementRing.RingDownPos" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Set Down Position"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061503" Name="PM2.ConfinementRing.RingUpPos" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Set Up Position"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061504" Name="PM2.ConfinementRing.RingIsServoOn" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing ServoOn"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061505" Name="PM2.ConfinementRing.RingServoError" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Error"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061506" Name="PM2.ConfinementRing.RingDownSensor" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Down Sensor"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061507" Name="PM2.ConfinementRing.RingUpSensor" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Up Sensor"/>
<!-- PM2 磁流体-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1061601" Name="PM2.ServoStatus" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Servo Status"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061602" Name="PM2.PMServo.ServoEnable" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Servo Enable" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061603" Name="PM2.PMServo.ServoError" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Servo Error" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061604" Name="PM2.PMServo.ActualSpeedFeedback" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Servo Speed" />
<!-- PM2 干泵-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061701" Name="PM2.Pump.DryPump1Running" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 DryPump Running" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061702" Name="PM2.Pump.DryPump1Warning" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 DryPump Warning" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061703" Name="PM2.Pump.DryPumpAlarm" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 DryPump Alarm" />
<!-- PM2 工艺-->
<!-- 编号预留100个-->
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1061801" Name="PM2.SelectedRecipeName" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Name"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061802" Name="PM2.RecipeTotalTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Total Time"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061803" Name="PM2.RecipeTotalElapseTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Total Elapse Time"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1061804" Name="PM2.RecipeStepName" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Step Name"/>
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="I8" Id="1061805" Name="PM2.RecipeStepNumber" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Step Number" />
<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061806" Name="PM2.RecipeStepTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Step Time" />
<!-- DV-->
<Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010001" Name="SystemAlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="System Alarm Info"/>
<Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010002" Name="LoadAlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Alarm Info"/>
<Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010003" Name="TMAlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Alarm Info"/>
<Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010004" Name="BufferAlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Alarm Info"/>
<Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010005" Name="PM1AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Alarm Info"/>
<Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010006" Name="PM2AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Alarm Info"/>
</Variables>
<Events>
<Event Connection="*" Name="TMAlarm_SET" Id="2004201" Description="TMAlarm set event" Variables="TMAlarmInfo" />
<Event Connection="*" Name="TMAlarm_CLEAR" Id="2004202" Description="TMAlarm clear event" Variables=""/>
<Event Connection="*" Name="TMAlarm_SET" Id="3010001" Description="TMAlarm set event" Variables="TMAlarmInfo" />
<Event Connection="*" Name="TMAlarm_CLEAR" Id="3010002" Description="TMAlarm clear event" Variables=""/>
<Event Connection="*" Name="BufferAlarm_SET" Id="2004501" Description="BufferAlarm set event" Variables="BufferAlarmInfo" />
<Event Connection="*" Name="BufferAlarm_CLEAR" Id="2004502" Description="BufferAlarm clear event" Variables=""/>
<Event Connection="*" Name="BufferAlarm_SET" Id="3010003" Description="BufferAlarm set event" Variables="BufferAlarmInfo" />
<Event Connection="*" Name="BufferAlarm_CLEAR" Id="3010004" Description="BufferAlarm clear event" Variables=""/>
<Event Connection="*" Name="PM1Alarm_SET" Id="2005301" Description="PM1Alarm set event" Variables="PM1AlarmInfo" />
<Event Connection="*" Name="PM1Alarm_CLEAR" Id="2005302" Description="PM1Alarm clear event" Variables=""/>
<Event Connection="*" Name="PM1Alarm_SET" Id="3010005" Description="PM1Alarm set event" Variables="PM1AlarmInfo" />
<Event Connection="*" Name="PM1Alarm_CLEAR" Id="3010006" Description="PM1Alarm clear event" Variables=""/>
<Event Connection="*" Name="LoadAlarm_SET" Id="2012201" Description="LoadAlarm set event" Variables="LoadAlarmInfo" />
<Event Connection="*" Name="LoadAlarm_CLEAR" Id="2012202" Description="LoadAlarm clear event" Variables=""/>
<Event Connection="*" Name="LoadAlarm_SET" Id="3010007" Description="LoadAlarm set event" Variables="LoadAlarmInfo" />
<Event Connection="*" Name="LoadAlarm_CLEAR" Id="3010008" Description="LoadAlarm clear event" Variables=""/>
</Events>
<Alarms>
<!-- ALCD: 0 = Not used, 1 = Personal safety, 2 = Equipment safety, 3 = Parameter control warning, 4 = Parameter control error, 5 = Irrecoverable error, 6 = Equipment status warning, 7 = Attention flags, 8 = Data integrity, >8 = Other categories -->
<Alarm Name="TMAlarm" ALTX="TM Alarm" ALCD="0" ALID="3004200" SetEvent="TMAlarm_SET" ClearEvent="TMAlarm_CLEAR" Description="TM alarm occurred" />
<Alarm Name="BufferAlarm" ALTX="Buffer Alarm" ALCD="0" ALID="3004500" SetEvent="BufferAlarm_SET" ClearEvent="BufferAlarm_CLEAR" Description="Buffer alarm occurred" />
<Alarm Name="PM1Alarm" ALTX="PM1 Alarm" ALCD="0" ALID="3005300" SetEvent="PM1Alarm_SET" ClearEvent="PM1Alarm_CLEAR" Description="PM1 alarm occurred" />
<Alarm Name="LoadAlarm" ALTX="Load Alarm" ALCD="0" ALID="3012200" SetEvent="LoadAlarm_SET" ClearEvent="LoadAlarm_CLEAR" Description="Load alarm occurred" />
<Alarm Name="TMAlarm" ALTX="TM Alarm" ALCD="0" ALID="4010001" SetEvent="TMAlarm_SET" ClearEvent="TMAlarm_CLEAR" Description="TM alarm occurred" />
<Alarm Name="BufferAlarm" ALTX="Buffer Alarm" ALCD="0" ALID="4010002" SetEvent="BufferAlarm_SET" ClearEvent="BufferAlarm_CLEAR" Description="Buffer alarm occurred" />
<Alarm Name="PM1Alarm" ALTX="PM1 Alarm" ALCD="0" ALID="4010003" SetEvent="PM1Alarm_SET" ClearEvent="PM1Alarm_CLEAR" Description="PM1 alarm occurred" />
<Alarm Name="LoadAlarm" ALTX="Load Alarm" ALCD="0" ALID="4010004" SetEvent="LoadAlarm_SET" ClearEvent="LoadAlarm_CLEAR" Description="Load alarm occurred" />
</Alarms>
</Equipment>

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