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1更新dll [63e1367]，修改TCS补液功能，库中备注当前使用的分支 

2修改Routine
3修改MFC相关配置项
4新增PM2和仿真新增IO,PM2的Device中配置V66 V67阀
This commit is contained in:
hanqiangqiang 2024-05-07 11:19:06 +08:00
parent 248aad4ea1
commit d14b95e40b
19 changed files with 54 additions and 29 deletions
Show Stats Download Patch File Download Diff File Expand all files Collapse all files

2
Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml
View File

@ -78,6 +78,8 @@
<IoValve id="V61" display="DoppingFinal" schematicId="V61" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DoppingFinalFB(V61)" doOpen="DO_DoppingFinal(V61)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V62" display="SilaneFinal" schematicId="V62" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SilaneFinalFB(V62)" doOpen="DO_SilaneFinal(V62)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V63" display="PropaneFinal" schematicId="V63" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PropaneFinalFB(V63)" doOpen="DO_PropaneFinal(V63)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V66" display="GasRingH2Purge" schematicId="V66" unit="" isNc="true" isDefaultOpen="true" diOpen="DI_GasRingH2PurgeFB(V66)" doOpen="DO_GasRingH2Purge(V66)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V67" display="GasRingArPurge" schematicId="V67" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_GasRingArPurgeFB(V67)" doOpen="DO_GasRingArPurge(V67)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V68" display="ChamBodyArPurge" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_ChamBodyArPurgeFB(V68)" doOpen="DO_ChamBodyArPurge(V68)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V69" display="ReactorLeakCheck" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ReactorLeakCheckFB(V69)" doOpen="DO_ReactorLeakCheck(V69)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V70" display="TMPressBalance" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPressBalanceFB(V70)" doOpen="DO_TMPressBalance(V70)" diCloseSensor="" diOpenSensor="" />

2
Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml
View File

@ -126,6 +126,8 @@
<DI_ITEM Index="192" Name="DI_DoppingFinalFB(V61)" BufferOffset="192" Addr="192" Description="" />
<DI_ITEM Index="193" Name="DI_SilaneFinalFB(V62)" BufferOffset="193" Addr="193" Description="" />
<DI_ITEM Index="194" Name="DI_PropaneFinalFB(V63)" BufferOffset="194" Addr="194" Description="" />
<DI_ITEM Index="197" Name="DI_GasRingH2PurgeFB(V66)" BufferOffset="197" Addr="197" Description="" />
<DI_ITEM Index="198" Name="DI_GasRingArPurgeFB(V67)" BufferOffset="198" Addr="198" Description="" />
<DI_ITEM Index="199" Name="DI_ChamBodyArPurgeFB(V68)" BufferOffset="199" Addr="199" Description="" />
<DI_ITEM Index="200" Name="DI_SHPurgeFinalFB(V87)" BufferOffset="200" Addr="200" Description="" />
<DI_ITEM Index="201" Name="DI_OuterGasFinalFB(V88)" BufferOffset="201" Addr="201" Description="" />

5
Modules/SicModules/PMs/PMModuleDevice.cs
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@ -60,6 +60,7 @@ namespace SicModules.PMs
V32,
V35V36,
V65,
V67,
V68,
Final1WithOutV94
};
@ -1075,6 +1076,10 @@ namespace SicModules.PMs
{
lst = new List<string> { "V65" };
}
else if (eGroupName == IoGroupName.V67)
{
lst = new List<string> { "V67" };
}
else if (eGroupName == IoGroupName.V68)
{
lst = new List<string> { "V68" };

4
Modules/SicModules/PMs/Routines/PMCleanRoutine.cs
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@ -21,6 +21,7 @@ namespace SicModules.PMs.Routines
VentPumpOpen,
ArSupply,
SetGroupA,
SetGroupB,
SetGroupC,
SetGroupE,
@ -141,6 +142,7 @@ namespace SicModules.PMs.Routines
SetV92V93V95,
SetV94,
SetV96,
SetV67,
SetV68,
SetM32M35M37,
SetM36,
@ -293,6 +295,7 @@ namespace SicModules.PMs.Routines
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
//打开D/G 阀门
SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
@ -348,6 +351,7 @@ namespace SicModules.PMs.Routines
SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
//打开V68
SetIoValueByGroup((int)RoutineStep.SetV67, IoGroupName.V67, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
TimeDelay((int)RoutineStep.TimeDelay3, 1);

1
Modules/SicModules/PMs/Routines/PMLeakCheckRoutine.cs
View File

@ -325,6 +325,7 @@ namespace SicModules.PMs.Routines
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
//打开D/G 阀门
SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);

14
Modules/SicModules/PMs/Routines/PMProcessAbortRoutine.cs
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@ -24,6 +24,7 @@ namespace SicModules.PMs.Routines
SetPC,
SetV32,
SetV35V36,
SetV67,
SetV68,
SetV65,
SetGroupB,
@ -109,6 +110,10 @@ namespace SicModules.PMs.Routines
//打开V32
SetIoValueByGroupNoWait((int)RoutineStep.SetV32, IoGroupName.V32, true);
//打开V67 V68
SetIoValueByGroupNoWait((int)RoutineStep.SetV67, IoGroupName.V67, true);
SetIoValueByGroupNoWait((int)RoutineStep.SetV68, IoGroupName.GasIn1, true);
//打开V35,打开V36
SetIoValueByGroupNoWait((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true);
@ -127,14 +132,13 @@ namespace SicModules.PMs.Routines
////打开V65
//SetIoValueByGroupNoWait((int)RoutineStep.SetV65, IoGroupName.V65, true);
//打开V68
SetIoValueByGroupNoWait((int)RoutineStep.SetV68, IoGroupName.GasIn1, true);
//关闭V72,打开V25
SetIoValueByGroupNoWait((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false);
//SetIoValueByGroupNoWait((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false);
TimeDelay((int)RoutineStep.TimeDelay2, 2);
SetIoValueByGroupNoWait((int)RoutineStep.SetGroupV25, IoGroupName.V25, true);
//TimeDelay((int)RoutineStep.TimeDelay2, 2);
//SetIoValueByGroupNoWait((int)RoutineStep.SetGroupV25, IoGroupName.V25, true);
}
catch (RoutineBreakException)

3
Modules/SicModules/PMs/Routines/PMPurgeRoutine.cs
View File

@ -132,6 +132,7 @@ namespace SicModules.PMs.Routines
SetV92V93V95,
SetV94,
SetV96,
SetV67,
SetV68,
SetM32M35M37,
SetM36,
@ -316,6 +317,7 @@ namespace SicModules.PMs.Routines
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
//打开D/G 阀门
SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
@ -371,6 +373,7 @@ namespace SicModules.PMs.Routines
SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
//打开V68
SetIoValueByGroup((int)RoutineStep.SetV67, IoGroupName.V67, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
TimeDelay((int)RoutineStep.TimeDelay3, 1);

2
Modules/SicModules/PMs/Routines/PMToIsolationRoutine.cs
View File

@ -16,6 +16,7 @@ namespace SicModules.PMs.Routines
VentPumpClose,
ArSupply,
SetGroupA,
SetGroupB,
SetGroupC,
SetGroupE,
@ -150,6 +151,7 @@ namespace SicModules.PMs.Routines
//SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
//打开D/G 阀门
SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);

48
SicRT/Config/System.sccfg
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@ -703,8 +703,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc2">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -782,8 +782,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc15">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -860,8 +860,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc33">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -926,20 +926,20 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC5">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC6">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC7">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -1278,8 +1278,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc2">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -1357,8 +1357,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc15">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -1435,8 +1435,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc33">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -1501,20 +1501,20 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC5">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC6">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC7">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>

2
SicSimulator/Config/_ioDefinePM.xml
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@ -125,6 +125,8 @@
<DI_ITEM Index="192" Name="DI_DoppingFinalFB(V61)" BufferOffset="192" Addr="192" Description="" Visible ="false" />
<DI_ITEM Index="193" Name="DI_SilaneFinalFB(V62)" BufferOffset="193" Addr="193" Description="" Visible ="false" />
<DI_ITEM Index="194" Name="DI_PropaneFinalFB(V63)" BufferOffset="194" Addr="194" Description="" Visible ="false" />
<DI_ITEM Index="197" Name="DI_GasRingH2PurgeFB(V66)" BufferOffset="197" Addr="197" Description="" />
<DI_ITEM Index="198" Name="DI_GasRingArPurgeFB(V67)" BufferOffset="198" Addr="198" Description="" />
<DI_ITEM Index="199" Name="DI_ChamBodyArPurgeFB(V68)" BufferOffset="199" Addr="199" Description="" Visible ="false" />
<DI_ITEM Index="200" Name="DI_SHPurgeFinalFB(V87)" BufferOffset="200" Addr="200" Description="" Visible ="false" />
<DI_ITEM Index="201" Name="DI_OuterGasFinalFB(V88)" BufferOffset="201" Addr="201" Description="" Visible ="false" />

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