SL
|
fe9280864b
|
refactor(PMModule): 移除PMModule对象中,工艺时温度变化率过大报警监测,该逻辑在IoTC对象中实现。
系统配置项PM.PMx.Heater.AETempRasingFastIsAlarm的默认值改为false。
|
2024-07-12 14:41:03 +08:00 |
SIC1016\caipeilun
|
35a96c712c
|
pm2添加压力平衡报警,更新版本1.2.12.83
|
2024-07-02 14:09:02 +08:00 |
SIC1016\caipeilun
|
4104710b33
|
新增压力平衡报警,当pt1 pt2的压力值超过设定值时警告或报警。
|
2024-07-02 08:38:24 +08:00 |
HCL
|
6d0b44510a
|
1.补全Gem 事件DV路径
|
2024-06-19 16:06:45 +08:00 |
HCL
|
3a3103fb3a
|
更新Common库[b58d3c8]
1.JobStart等Gem事件增加DV SequenceID
2.PMProcessStart等Gem事件增加DV SequenceID,LotID
|
2024-06-19 11:08:23 +08:00 |
HCL
|
dafc75a35e
|
Merge branch 'Gem'
# Conflicts:
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
|
2024-05-31 13:20:42 +08:00 |
HCL
|
31ea487953
|
1.修改事件
|
2024-05-31 13:14:06 +08:00 |
HCL
|
12f4b2ab82
|
1.Preprocess等待温度超时修改为600s
|
2024-05-20 16:18:50 +08:00 |
HCL
|
85690ab62e
|
1.修正一些命名问题
|
2024-05-17 14:57:33 +08:00 |
HCL
|
12e19d04c1
|
1.添加Gem配置文件
|
2024-05-17 10:39:05 +08:00 |
HCL
|
a5f22676d4
|
1.修正PostProcess结束后DO-PostProcessRunning未设置false的问题
|
2024-05-15 16:46:21 +08:00 |
HCL
|
40fd197e9d
|
1.增加Warning日志输出
|
2024-05-06 13:44:35 +08:00 |
HCL
|
277212c292
|
1.在PreProcess、Procss、PostProcess过程中检查对应的DO-PreProcessRunning、DO-ProcessRunning、DO-PostProcessRunning信号,
- 若为false则PM宕机
|
2024-04-29 16:50:55 +08:00 |
hanqiangqiang
|
6a580025df
|
整理PM Device配置的xml格式
|
2024-02-21 11:09:34 +08:00 |
hanqiangqiang
|
c02e54dbb9
|
1PM新增DI-73,AI-26,AI-27点位
2监控加热带温区AI-26,AI-27超温报警
3增加配置控制报警输出等级
4仿真添加相应点位
|
2024-02-21 11:02:19 +08:00 |
HCL
|
1a0cd1025a
|
1.添加TM DO09、DO11、DO13、DO15与DI-31的互锁
|
2024-02-01 14:23:15 +08:00 |
hanqiangqiang
|
32bbc38ab3
|
PM Interlock配置中移除DI-33
|
2024-01-25 13:15:50 +08:00 |
hanqiangqiang
|
afd6cf9af7
|
修改PM和TM闸板阀,打开和关闭时的检测逻辑
|
2024-01-15 08:59:10 +08:00 |
hanqiangqiang
|
92ef20477e
|
添加DI_ApcButterflyError报警输出
|
2023-12-28 16:03:57 +08:00 |
hanqiangqiang
|
2840a964c1
|
1.PM添加DO_TVReset,TV阀右键时通过控制DO来进行复位
2.PM主界面添加按钮事件触发TVReset
|
2023-12-28 15:20:21 +08:00 |
SL
|
b064e627a8
|
更新库文件558af89d,优化三色灯控制逻辑;修正加载Interlock配置文件时引发集合改变异常的的问题。
优化修正JobDone信息输出的逻辑。
|
2023-12-27 16:25:59 +08:00 |
hanqiangqiang
|
4e2ee1a124
|
1更新dll [9a5bcb7],对测温部分进行重写
2添加Common配置项,作为公共配置项
3在ToolLoader中初始化Common配置项
4修改SC配置项,整理测温配置层级,使用昂坤作为默认配置项
|
2023-12-15 16:20:08 +08:00 |
hanqiangqiang
|
0ddd2e72a8
|
1更新dll [305b17a],使用合并后的最新dll,添加ProcessHistory
2添加ProcessHistory显示界面
3添加ProcessHistory配置的XML
4添加ProcessHistory配置的XML初始化解析
|
2023-12-15 15:10:07 +08:00 |
hanqiangqiang
|
a373257ebe
|
Merge branch 'develop' into 兼容自动版本-MFC5-C2H4增加配置
# Conflicts:
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
|
2023-12-08 10:49:42 +08:00 |
hanqiangqiang
|
3e4a6b13ed
|
PM新增DO-128 Interlock
|
2023-11-27 14:38:33 +08:00 |
hanqiangqiang
|
94820d5a40
|
1真值表添加配置项
|
2023-11-22 15:34:05 +08:00 |
hanqiangqiang
|
cabcb2d10f
|
1更新dll,重新整理LineHeater数据输出
2修改LineHeater配置和界面及后台绑定
|
2023-11-22 13:17:17 +08:00 |
hanqiangqiang
|
91647fae5e
|
1添加MFC5 配置参数
2在PM中修改MFC5配置的控制流程
3添加C2H4-C3H8配置参数和流量系数
4修改真值表系统配置流量系数
5更新dll
|
2023-11-22 10:43:52 +08:00 |
HCL
|
8715d180ca
|
1.修改Purge中Vent超时时间
|
2023-11-06 13:34:04 +08:00 |
hanqiangqiang
|
404b104a62
|
修改TM vent超时问题,由于Routine流程中不区分慢充超时和快充超时,因此统一系统配置参数超时时间VentTimeout
|
2023-11-06 11:32:16 +08:00 |
hanqiangqiang
|
ea14fba22d
|
修改LineHeaterTemp节点名称
整理PMMotionView界面
|
2023-11-06 10:17:12 +08:00 |
hanqiangqiang
|
630d829164
|
修改加热带配置名称
|
2023-11-06 09:38:32 +08:00 |
hanqiangqiang
|
bd88c226aa
|
更新dll [b1c6da9],GaxBoxTemp注册温度数据
在调度器中使用Poll获取LineHeater状态
|
2023-11-03 16:56:25 +08:00 |
hanqiangqiang
|
33c1b595ae
|
启动前检测LineHeater
添加气柜温度显示
|
2023-11-03 16:18:56 +08:00 |
hanqiangqiang
|
1bb09587e1
|
更新dll [007352e],修改气柜检测
添加SC配置
修改PM的Device配置
|
2023-11-03 11:33:54 +08:00 |
HCL
|
703978676c
|
1.解决检测MFC流量报警时机偶尔不准确问题
|
2023-11-02 14:57:00 +08:00 |
HCL
|
586a6a2c31
|
1.修改ROR M11配置文件的错误
2.ROR时间间隔和基础压力可统一设置
|
2023-10-31 10:27:06 +08:00 |
HCL
|
15f20b57e8
|
1.修改Clean流程
|
2023-10-31 08:45:24 +08:00 |
HCL
|
2c86ce0c2b
|
1.解决MFC ROR测试重做上次MFC ROR流程的问题
|
2023-10-25 08:51:23 +08:00 |
HCL
|
52fc4e12f3
|
1.修改
|
2023-10-24 09:56:37 +08:00 |
HCL
|
30558a39ad
|
1.补加Vent修改
|
2023-10-24 09:52:35 +08:00 |
HCL
|
2b0464bfa0
|
1.修改TM Purge逻辑,在Vent最终压力的过程中检测是否开启快充流量
|
2023-10-24 09:43:48 +08:00 |
HCL
|
19bf9ab668
|
1.PM K阀组增加V111控制
|
2023-10-18 11:44:16 +08:00 |
SIC1016\caipeilun
|
0bc0dba996
|
优化: TM开闸板阀时腔体压力直接使用PT1的Feedback,不另外建立IoPressureMeter3s
*错误:TM使用IoPressureMeter3s类,DATA会注册PM1.ChamberPressure.Value,树状图会覆盖掉PM1.ChamberPressure,从而数值不正确
|
2023-10-13 14:51:09 +08:00 |
HCL
|
1f03a766e2
|
1.TM Purge检查功能优化
|
2023-10-12 11:59:33 +08:00 |
HCL
|
484932e024
|
1.TM增加DO_TMCyclePurgeRoutineSuccessed,TM Purge后置为true,TM开腔后该DO置为false,
TM Online时需检查该DO为true
|
2023-10-11 11:52:21 +08:00 |
SIC1016\caipeilun
|
2cee36908e
|
修复:
1.TM purge时 vent延时绑定错误
2.vent延时默认值改为10s,与pump延时一致
|
2023-10-09 17:09:09 +08:00 |
SIC1016\caipeilun
|
d2de10a6ef
|
修复 EFEM SlitValueRoutine 触发时提示文本缺失名称
|
2023-10-07 14:49:49 +08:00 |
SIC1016\caipeilun
|
80e6472050
|
修复Interlock项: do-100 和 do-49触发前 di-9 必须为0
|
2023-10-07 14:43:41 +08:00 |
SIC1016\caipeilun
|
275b922308
|
新增 TM的interlock DO-47 48 17 8 10 12 14 16
要求对应腔体压差小于50
|
2023-10-07 14:40:28 +08:00 |