using System.Diagnostics; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks; using SicModules.Devices; using SicModules.LLs; namespace SicModules.TMs.Routines { public class TMPumpRoutine : TMBaseRoutine { enum RoutineStep { //CheckForelinePressure, //RequestPump, //StartDelay, //RequestPumpDelay, //Pump, //PumpDelay, //Delay, CloseV77, CloseV80, SlowPump, FastPump, VaccumDelay, CloseValves, CLoseSlowValue, } //private SicTM _tm; private IoSensor _bufferLid; private IoSensor _tmLid; private Devices.IoPump _pumpType; private LoadLock _ll; private IoInterLockEx _tmIoInterLock; private double _forelineBasePressure; private double _pumpBasePressure; private double _slowFastPumpSwitchPressure; private int _waitForelineTimeout; private int _slowPumpTimeout; private int _fastPumpTime; private int _pumpDelayTime; private int _routineTimeOut; private bool _useSettingValue; private Stopwatch _swTimer = new Stopwatch(); public TMPumpRoutine() { Module = ModuleName.TM.ToString(); Name = "Pump"; //_tm = DEVICE.GetDevice($"{ ModuleName.System.ToString()}.{ Module}"); _ll = DEVICE.GetDevice($"LoadLock.LoadLock"); _bufferLid = DEVICE.GetDevice($"Buffer.BufferLidClosed"); _tmLid = DEVICE.GetDevice($"TM.TMLidClosed"); _pumpType = DEVICE.GetDevice($"TM.TMPump1"); _tmIoInterLock = DEVICE.GetDevice("TM.IoInterLock"); } public void Init() { _useSettingValue = false; } public void Init(double basePressure, int pumpDelayTime) { _pumpBasePressure = basePressure; _pumpDelayTime = pumpDelayTime; _useSettingValue = true; } public override Result Start(params object[] objs) { Reset(); _forelineBasePressure = SC.GetValue("TM.ForelinePressureBase"); _slowFastPumpSwitchPressure = SC.GetValue("TM.Pump.SlowFastPumpSwitchPressure"); _waitForelineTimeout = SC.GetValue("TM.WaitForelinePressureTimeout"); _slowPumpTimeout = SC.GetValue("TM.Pump.PumpSlowTimeout"); _fastPumpTime = SC.GetValue("TM.Pump.FastPumpTimeout"); _routineTimeOut = SC.GetValue("TM.Pump.RoutineTimeOut"); if (!_useSettingValue) { _pumpBasePressure = SC.GetValue("TM.Pump.PumpBasePressure"); _pumpDelayTime = SC.GetValue("TM.Pump.PumpDelayTime"); } string reason; if (!TMDevice.SetFastPumpValve(false, out reason) || !TMDevice.SetFastVentValve(false, out reason)) { EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}"); return Result.FAIL; } if (SC.GetValue("System.IsATMMode")) { EV.PostInfoLog(Module, $"system in atm mode, {TMDevice.Module} pump skipped"); return Result.DONE; } if (SC.ContainsItem("TM.RunPumpRoutineEventBelowBasePressure") && !SC.GetValue("TM.RunPumpRoutineEventBelowBasePressure")) { if (TMDevice.ChamberPressure < _pumpBasePressure) { EV.PostInfoLog(Module, $"{TMDevice.Module} already under pump base pressure"); return Result.DONE; } } ModuleName[] modules = new ModuleName[] { ModuleName.LoadLock, ModuleName.PM1, ModuleName.PM2 }; foreach (var moduleName in modules) { if (!TMDevice.CheckSlitValveClose(moduleName)) { EV.PostAlarmLog(Module, $"Can not pump, {moduleName} slit valve not closed"); return Result.FAIL; } } if (!_bufferLid.Value) { EV.PostAlarmLog(Module, $"Can not pump,Buffer lid is not closed"); return Result.FAIL; } if (!_tmLid.Value) { EV.PostAlarmLog(Module, $"Can not pump,TM lid is not closed"); return Result.FAIL; } if (_pumpType.IsAlarm) { EV.PostAlarmLog(Module, $"can not pump,TM pump alarm"); return Result.FAIL; } if (!_pumpType.IsRunning) { EV.PostAlarmLog(Module, $"can not pump,TM pump is not running"); return Result.FAIL; } if (!TMDevice.SetTmToLLVent(false, out _)) { EV.PostAlarmLog(Module, $"can not pump,can not close v85!"); } if (!_tmIoInterLock.SetTMPumpRoutineRunning(true, out reason)) { EV.PostAlarmLog(Module, $"can not pump,{reason}"); return Result.FAIL; } _swTimer.Restart(); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { CheckRoutineTimeOut(); //CheckForelinePressure((int)RoutineStep.CheckForelinePressure, _tm, _forelineBasePressure, _waitForelineTimeout); //关闭V77 CloseTMVent((int)RoutineStep.CloseV77); //关闭V80 //CloseBufferVent((int)RoutineStep.CloseV80); //打开V82,等待压力低于200mbar(可配置) OpenSlowPump((int)RoutineStep.SlowPump, TMDevice, _slowFastPumpSwitchPressure, _slowPumpTimeout); //打开V81,压力达到0mbar(可配置) OpenFastPump((int)RoutineStep.FastPump, TMDevice, _pumpBasePressure, _fastPumpTime); //等待5s(可配置) TimeDelay((int)RoutineStep.VaccumDelay, _pumpDelayTime); //关闭 CloseFastPump((int)RoutineStep.CloseValves, TMDevice); CloseSlowPump((int)RoutineStep.CLoseSlowValue, TMDevice); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { TMDevice.SetFastPumpValve(false, out _); TMDevice.SetSlowPumpValve(false, out _); return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _tmIoInterLock.DoTmPumpDownRoutineRunning = false; return Result.DONE; } public override void Abort() { _tmIoInterLock.DoTmPumpDownRoutineRunning = false; //_tm.SetFastPumpValve(false, out _); //_tm.SetSlowPumpValve(false, out _); base.Abort(); } private void CheckRoutineTimeOut() { if (_routineTimeOut > 10) { if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) { EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s"); throw (new RoutineFaildException()); } } } //public void CheckPressure(int id, TM tm, double basePressure, int timeout) //{ // Tuple ret = ExecuteAndWait(id, () => // { // Notify($"Check {tm.Name} pressure "); // return true; // }, () => // { // return tm.ForelinePressure <= basePressure; // }, timeout * 1000); // if (ret.Item1) // { // if (ret.Item2 == Result.FAIL) // { // throw (new RoutineFaildException()); // } // else if (ret.Item2 == Result.TIMEOUT) //timeout // { // Stop($"{tm.Name} pressure can not lower than {basePressure} in {timeout} seconds"); // throw (new RoutineFaildException()); // } // else // throw (new RoutineBreakException()); // } //} //public void CheckForelinePressure(int id, TM tm, double basePressure, int timeout) //{ // Tuple ret = ExecuteAndWait(id, () => // { // Notify($"Check {tm.Name} foreline pressure "); // return true; // }, () => // { // return tm.ForelinePressure <= basePressure; // }, timeout * 1000); // if (ret.Item1) // { // if (ret.Item2 == Result.FAIL) // { // throw (new RoutineFaildException()); // } // else if (ret.Item2 == Result.TIMEOUT) //timeout // { // Stop($"{tm.Name} foreline pressure can not lower than {basePressure} in {timeout} seconds"); // throw (new RoutineFaildException()); // } // else // throw (new RoutineBreakException()); // } //} } }