using System.Collections.Generic; using System.Diagnostics; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using SicModules.PMs.Routines.Base; namespace SicModules.PMs.Routines { public class PMCleanRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, VentPumpClose_1, VentPumpOpen, ArSupply, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetM1to16, SetPC, SetGroupJ, SetGroupJ_1, SetM291519to38, SetGasOut, SetTv, SetGasIn1, //V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, SetGasIn2, SetGroupJOpen, SetM291519to26, OpenFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetEPV2_1, SetEPV2_2, SetEPV2_3, SetTvMode, RoutinePre, V27Open, V27Close, PressureTo1050, SetPressureUp, SetPressureUp1, SetPressureUp2, SetPressureDown, PressureToMax, PressureToMin, SetPressUpOrDown1, SetPressUpOrDown2, WaitPressureDown, WaitPressureUp, SetMFCMode, SetPCMode, WaitPmTo1050, SetTvOpen, SetTvModeToPress, SetEPV22, SetV76, SetV75, SetTVto300, CheckPM1000, SetMfc28to40Special, WaitPressUpTo1000, SetMfc28to40Default, SetPC567Close, SetPC567Mode, SetPC567Default, OpenEPV2, WaitV27Open, SetTvTo1150, WaitPressUpTo20, SetMfc28to31To0, WaitPressUpTo0, SetMfc28to31ToDefault, WaitPressDownTo20, CheckPMPt21000, SetPressureDown1, SetMfc28to31Default1, CheckFinal1Open, SetGroupV25, CloseGroupV25, SetM39, CheckEPV1Open1, CheckEPV2Open1, CheckTVOpen1, CheckEPV1Open2, SetTVEnable_1, SetTVEnable_2, SetTVPressMode, SetTv1, SetM2toM40, SetV31, SetV32, SetV35V36, SetV65, WaitTv1, SetTVPositionMode, SetTVPositionMode_1, SetTVPositionMax, SetTVPositionMax_1, SetTVPressMode1, SetTVPressMode2, SetM2TOM40Default, SetM2toM40_1, SetMfc2to40Default, SetV92V93V95, SetV94, SetV96, SetV68, SetM32M35M37, SetM36, SetM38, WaitPmPressureUp1, SetTVCloseMode1, CLoseTV1, StartLoop, EndLoop, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay18, TimeDelay20, TimeDelay21, TimeDelay22, Notify1, Notify2, Notify3, Notify4, } private ModuleName moduleName; private PMModule _pmModule; private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout = 20; //旋转停止超时 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private int _pressureMaxDelay = 10; //到低压保持时间（采用固定值10s） private int _pressureMinDelay = 10; //到高压保持时间（采用固定值10s） private double _pressureMax; //Loop压力上限可设置600-800） private double _pressureMin; //Loop压力下限可设置 0-400） private int _pressureMinTimeout; private int _pressureMaxTimeout; private int _pressureLoopCount; //Loop次数 private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力 private int _pmCleanTime = 20; private Stopwatch _swTimer = new Stopwatch(); public PMCleanRoutine(ModuleName module, PMModule pm) : base(module, pm) { moduleName = module; _pmModule = pm; Name = "Clean"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); } public override Result Start(params object[] objs) { Reset(); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _pressureLoopCount = SC.GetValue($"PM.{Module}.Clean.CycleCleanCount"); _pressureMin = SC.GetValue($"PM.{Module}.Clean.PumpBasePressure"); _pressureMinDelay = SC.GetValue($"PM.{Module}.Clean.PumpDelayTime"); _pressureMinTimeout = SC.GetValue($"PM.{Module}.Clean.PumpTimeout"); _pressureMax = SC.GetValue($"PM.{Module}.Clean.VentBasePressure"); _pressureMaxDelay = SC.GetValue($"PM.{Module}.Clean.VentDelayTime"); _pressureMaxTimeout = SC.GetValue($"PM.{Module}.Clean.VentTimeout"); _pmCleanTime = SC.GetValue($"PM.{Module}.Clean.CleanTime"); _throttleFinalPressure = SC.GetValue($"PM.{Module}.Clean.FinalPressure"); //Purge Succeed 清掉 _pmIoInterLock.DoLidOpenRoutineSucceed = false; _pmIoInterLock.DoLidCloseRoutineSucceed = false; if (!_pmIoInterLock.SetPMCleanRoutineRunning(true, out string reason)) { EV.PostAlarmLog(Module, $"can not Clean,{reason}"); return Result.FAIL; } _checkPMPt2Over1000 = false; _checkPMPressureOver1000 = false; _finalOpen = false; currentPressureUpOrDown = PressureUpOrDown.None; _swTimer.Restart(); Notify($"Start LoopCount:{_pressureLoopCount}"); return Result.RUN; } public override Result Monitor() { try { //CheckRoutineTimeOut(); //关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //旋转停止,加热停止 SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); //关闭V72,打开V25 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); //打开V31,打开V32 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //打开V35,打开V36 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); //关闭B/C/E/F/H/K 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); //打开D/G 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); ////打开V65 //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout); //设置MFC和PC的模式 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); //打开J阀门 SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout); //M1-M16设定为default值(M2、M9、M15除外) SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); //设置所有PC到默认值 SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); //设置M2,M9,M15,M19-M26 3s ramp 到default 值 SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM26, 3); //打开EPV2 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay1, 3); //设置蝶阀Enable SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable_1, _IoThrottle, 5); //设置蝶阀为压力模式 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5); //伺服压力设定值到0mbar SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _throttleTimeout); //M2、M9、M15、M19-M40 MFC 5s ramp 到0 SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40, 0, 5); //等待腔体压力Pump到设定值 WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pressureMin, _pmPressureMaxDiff, _throttleTimeout); TimeDelay((int)RoutineStep.TimeDelay2, 3); //蝶阀设置为位置模式,开度设置为最大 SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout); TimeDelay((int)RoutineStep.TimeDelay11, 3); SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout); //Final2阀对应的MFC 3s Ramp到Default值 SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); //打开Final2阀 SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); //打开V68 SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay3, 1); //打开V92,V93和V95,再打开V94,在打开V96 SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 1); SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 1); SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 1); TimeDelay((int)RoutineStep.TimeDelay4, 3); SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout); //循环开始 Loop((int)RoutineStep.StartLoop, _pressureLoopCount); //M2、M9、M15、M19-M40 MFC 3s ramp 到 default 值 SetMfcToDefaultByGroup((int)RoutineStep.SetM2TOM40Default, MfcGroupName.M2toM40, 3); //先关蝶阀,再关闭EPV2 SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode1, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.CLoseTV1, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay5, 1); SetIoValueByGroup((int)RoutineStep.SetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Uping); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout); ////设置蝶阀为压力模式 //SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5); ////使用动态流量伺服到300mbar //SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Uping); //SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax); //WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout); TimeDelay((int)RoutineStep.TimeDelay6, _pressureMaxDelay); //打开EPV2 SetIoValueByGroup((int)RoutineStep.SetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay7, 1); //设置蝶阀Enable SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable_2, _IoThrottle, 5); //设置蝶阀为压力模式 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5); //M2、M9、M15、M19-M40 MFC 3s ramp 0 SetMfcByGroup((int)RoutineStep.SetM2toM40_1, MfcGroupName.M2toM40, 0, 3); //伺服到0mbar SetThrottlePressureAndWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _throttleTimeout); //TimeDelay((int)RoutineStep.TimeDelay8, 3); ////蝶阀设置为位置模式,开度设置为最大 //SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode_1, _IoThrottle, _throttleTimeout); //SetThrottleSetPositionNoWait((int)RoutineStep.SetTVPositionMax_1, _IoThrottle, 100, _throttleTimeout); //TimeDelay((int)RoutineStep.TimeDelay9, _pressureMinDelay); EndLoop((int)RoutineStep.EndLoop); //M27-M40 MFC 3s ramp 到 default 值 SetMfcToDefaultByGroup((int)RoutineStep.SetMfc2to40Default, MfcGroupName.M2toM40, 3); //打开J阀门 SetIoValueByGroup((int)RoutineStep.SetGroupJ_1, IoGroupName.J, true, _IoValueOpenCloseTimeout); //打开V72,关闭V25 SetIoValueByGroup((int)RoutineStep.VentPumpClose_1, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.CloseGroupV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout); //设置蝶阀为压力模式 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode2, _IoThrottle, 5); //压力伺服到300mbar SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp2, _IoThrottle, _throttleFinalPressure); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.SetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); SetRoutineRuningDo(); SetRoutineSuccessedDo(); return Result.DONE; } public override void Abort() { SetRoutineRuningDo(); PmDevice._ioThrottleValve.StopRamp(); PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All)); PmDevice.SetRotationServo(0, 0); base.Abort(); } private void SetRoutineRuningDo() { _pmIoInterLock.DoLidCloseRoutineRunning = false; } private void SetRoutineSuccessedDo() { _pmIoInterLock.SetLidClosedRoutineSucceed(true, out string reason); _pmIoInterLock.DoLidOpenRoutineSucceed = false; } //private void CheckRoutineTimeOut() //{ // if (_routineTimeOut > 10) // { // if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) // { // EV.PostAlarmLog(Module,$"Routine TimeOut! over {_routineTimeOut} s"); // throw (new RoutineFaildException()); // } // } //} } }