using System.Collections.Generic; using Aitex.Core.Common; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Sorter.Common; using SicRT.Modules.Schedulers; using SicRT.Scheduler; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Schedulers; using MECF.Framework.Common.SubstrateTrackings; namespace SicRT.Modules { public class ReturnAllWafer : SchedulerModuleFactory { //private bool needAligner = false; Dictionary _checkPosition = new Dictionary() { {ModuleName.PM1, 1}, {ModuleName.LoadLock, 1}, {ModuleName.UnLoad, 1}, {ModuleName.WaferRobot, 1}, {ModuleName.TrayRobot, 1}, {ModuleName.TMRobot, 1}, {ModuleName.Aligner, 1}, }; public ReturnAllWafer() { } public Result Start() { if (!_tmRobot.IsAvailable) { EV.PostWarningLog("Scheduler", "can not return wafer, TmRobort is not available!"); return Result.FAIL; } if (!_trayRobot.IsAvailable) { EV.PostWarningLog("Scheduler", "can not return wafer, TrayRobort is not available!"); return Result.FAIL; } if (!_waferRobot.IsAvailable) { EV.PostWarningLog("Scheduler", "can not return wafer, WaferRobort is not available!"); return Result.FAIL; } if (!_load.IsAvailable) { EV.PostWarningLog("Scheduler", "can not return wafer, Load is not available!"); return Result.FAIL; } if (!_unload.IsAvailable) { EV.PostWarningLog("Scheduler", "can not return wafer, UnLoad is not available!"); return Result.FAIL; } if (!_buffer.IsAvailable) { EV.PostWarningLog("Scheduler", "can not return wafer, Buffer is not available!"); return Result.FAIL; } return Result.RUN; } public Result Monitor() { MonitorModuleTasks(); if (MonitorTaskDone()) { return Result.DONE; } return Result.RUN; } public Result MonitorModuleTasks() { //Load和UnLoad不能同时抽气 //System.Diagnostics.Debug.Assert(!((_tmRobot.IsInPumping && _load.IsInPumping) || (_tmRobot.IsInPumping && _unload.IsInPumping) || (_unload.IsInPumping && _load.IsInPumping)), $"检测到 _load.IsInPumping :{_load.IsInPumping}, _unload.IsInPumping :{_unload.IsInPumping}, _tmRobot.IsInPumping :{_tmRobot.IsInPumping}"); MonitorPMTask(); MonitorLoadTask(); MonitorUnLoadTask(); MonitorBufferTask(); MonitorAlignerTask(); MonitorTmRobotTask(); MonitorWaferRobotTask(); MonitorTrayRobotTask(); return Result.RUN; } private bool MonitorTaskDone() { foreach (var positions in _checkPosition) { for (int i = 0; i < positions.Value; i++) { if (CheckWaferCouldBeReturn(positions.Key, i)) { return false; } } } if (_buffer.HasWafer(0) || _buffer.HasWafer(1) || _buffer.HasWafer(2)) return false; if (_buffer.HasTrayAndExceedProcessCount(0) || _buffer.HasTrayAndExceedProcessCount(1) || _buffer.HasTrayAndExceedProcessCount(2)) return false; if (!_tmRobot.IsAvailable) return false; if (!_waferRobot.IsAvailable) return false; if (!_trayRobot.IsAvailable) return false; return true; } private void MonitorTmRobotTask() { if (!_tmRobot.IsAvailable) return; foreach (var pm in _lstPms) { if (pm.IsWaitTransfer(ModuleName.TMRobot)) pm.StopWaitTransfer(ModuleName.TMRobot); } if (_buffer.IsWaitTransfer(ModuleName.TMRobot)) _buffer.StopWaitTransfer(ModuleName.TMRobot); if (_load.IsWaitTransfer(ModuleName.TMRobot)) _load.StopWaitTransfer(ModuleName.TMRobot); if (_unload.IsWaitTransfer(ModuleName.TMRobot)) _unload.StopWaitTransfer(ModuleName.TMRobot); MonitorTmRobotPMTask(); MonitorTmRobotBufferTask(); MonitorTmRobotLoadTask(); MonitorTmRobotUnLoadTask(); } private void MonitorWaferRobotTask() { foreach (var cass in _lstWaferCassettes) { if (cass.IsWaitTransfer(ModuleName.WaferRobot)) cass.StopWaitTransfer(ModuleName.WaferRobot); } if (_aligner.IsWaitTransfer(ModuleName.WaferRobot)) _aligner.StopWaitTransfer(ModuleName.WaferRobot); if (_load.IsWaitTransfer(ModuleName.WaferRobot)) _load.StopWaitTransfer(ModuleName.WaferRobot); if (_unload.IsWaitTransfer(ModuleName.WaferRobot)) _unload.StopWaitTransfer(ModuleName.WaferRobot); MonitorWaferRobotCassetteTask(); MonitorWaferRobotAligerTask(); MonitorWaferRobotLoadTask(); MonitorWaferRobotUnLoadTask(); } private void MonitorTrayRobotTask() { if (_cassetteBL.IsWaitTransfer(ModuleName.TrayRobot)) _cassetteBL.StopWaitTransfer(ModuleName.TrayRobot); if (_load.IsWaitTransfer(ModuleName.TrayRobot)) _load.StopWaitTransfer(ModuleName.TrayRobot); MonitorTrayRobotLoadTask(); MonitorTrayRobotCassetteTask(); } private void MonitorTmRobotLoadTask() { if (!_load.IsAvailable) return; if (!_tmRobot.IsAvailable) return; //place Robot有次数耗尽的Tray无Wafer,Load无Tray bool canPlace = _tmRobot.HasTrayAndExceedProcessCount(0) && _tmRobot.NoWafer(0) && _load.NoTray(0); if (canPlace) { if (_load.IsReadyForPlace(ModuleName.TMRobot, 0)) { if (_tmRobot.Place(_load.Module, 0, Hand.Blade1)) { _load.WaitTransfer(ModuleName.TMRobot); return; } } } } private void MonitorTmRobotUnLoadTask() { if (!_unload.IsAvailable) return; if (!_tmRobot.IsAvailable) return; //UnLoad取盘只关心LoadLock是否有空位 //place Robot有Wafer,UnLoad无Tray无Wafer bool canPlaceUnLoad = _tmRobot.HasWafer(0) && _unload.NoTray(0) && _unload.NoWafer(0); if (canPlaceUnLoad) { if (_unload.IsReadyForPlace(ModuleName.TMRobot, 0)) { if (_tmRobot.Place(_unload.Module, 0, Hand.Blade1)) { _unload.WaitTransfer(ModuleName.TMRobot); return; } } } if (!_unload.IsAvailable) return; if (!_tmRobot.IsAvailable) return; //pick UnLoad有Tray,TM无Tray,UnLoad分离完成 bool canPickUnLoad = _tmRobot.NoTray(0) && _unload.HasTray(0) && _unload.CheckWaferTraySeparated(); if (canPickUnLoad) { if (_unload.IsReadyForPick(ModuleName.TMRobot, 0) && !_load.IsInPumping) { if (_tmRobot.Pick(_unload.Module, 0, Hand.Blade1)) { _unload.WaitTransfer(ModuleName.TMRobot); return; } } } } private void MonitorTmRobotBufferTask() { if (!_tmRobot.IsAvailable) return; if (!_buffer.IsAvailable) return; //place 次数未耗尽的Tray放入Buffer中 bool canPalce = _tmRobot.NoWafer(0) && _tmRobot.HasTrayAndNotExceedProcessCount(0); if (canPalce) { SlotItem bufferEmptySlot = null; for (int i = 0; i < 3; i++) { if (_buffer.NoTray(i) && _buffer.NoWafer(i)) { bufferEmptySlot = new SlotItem(ModuleName.Buffer, i); break; } } if (bufferEmptySlot == null) { return; } if (_buffer.IsReadyForPlace(ModuleName.TMRobot, bufferEmptySlot.Slot)) { if (_tmRobot.Place(_buffer.Module, bufferEmptySlot.Slot, Hand.Blade1)) { _buffer.WaitTransfer(ModuleName.TMRobot); return; } } } if (!_tmRobot.IsAvailable) return; if (!_buffer.IsAvailable) return; //pick 当前步(UnLoad没有Wafer),Buffer有Tray,机械手没有Tray bool canPick = _tmRobot.NoTray(0) && _unload.NoTray(0) && _unload.NoWafer(0); if (canPick) { for (int i = 0; i < 3; i++) { if (_buffer.HasTray(i) && _buffer.HasWafer(i)) { if (_buffer.IsReadyForPick(ModuleName.TMRobot, i)) { if (_tmRobot.Pick(_buffer.Module, i, Hand.Blade1)) { _buffer.WaitTransfer(ModuleName.TMRobot); return; } } } if (_buffer.HasTrayAndExceedProcessCount(i)) { if (_buffer.IsReadyForPick(ModuleName.TMRobot, i)) { if (_tmRobot.Pick(_buffer.Module, i, Hand.Blade1)) { _buffer.WaitTransfer(ModuleName.TMRobot); return; } } } } } } private void MonitorTmRobotPMTask() { if (!_tmRobot.IsAvailable) return; //pick from pm if (_tmRobot.NoWafer(0) && _tmRobot.NoTray(0) && _unload.NoWafer(0) && _unload.NoTray(0)) { Hand pickBlade = Hand.Blade1; ModuleName pickPm = ModuleName.System; foreach (var schedulerPm in _lstPms) { //增加温度低于900才能Pick的限制 if (!schedulerPm.IsAvailable || GetModule(schedulerPm.Module).NoWafer(0) || _tmRobot.HasWafer((int)pickBlade)) { continue; } if(!schedulerPm.CheckPMToTMRobotTemp()) { continue; } pickPm = schedulerPm.Module; break; } if (pickPm != ModuleName.System) { SchedulerModule pm = GetModule(pickPm.ToString()); if (pm.IsReadyForPick(ModuleName.TMRobot, 0)) { if (_tmRobot.Pick(pm.Module, 0, pickBlade)) { pm.WaitTransfer(ModuleName.TMRobot); return; } } } } } private void MonitorWaferRobotLoadTask() { if (!_waferRobot.IsAvailable) return; if (!_load.IsAvailable) return; bool canPick = _waferRobot.NoWafer(0) && _load.HasWafer(0); //&& _load.CheckWaferTraySeparated(); if (canPick) { if (_load.IsReadyForPick(ModuleName.WaferRobot, 0)) { if (_waferRobot.Pick(_load.Module, 0, Hand.Blade1)) { _load.WaitTransfer(ModuleName.WaferRobot); return; } } } } private void MonitorWaferRobotUnLoadTask() { if (!_waferRobot.IsAvailable) return; if (!_unload.IsAvailable) return; //pick UnLoad有Wafer没有Tray,Robot没有Wafer,步骤都完成了或者下一步的模块没有片子 (其它:UnLoad 夹爪夹住,顶针下降,SlitValve都关了,大气) bool canPick = _waferRobot.NoWafer(0) && _unload.HasWafer(0) && _unload.NoTray(0); if (canPick) { if (_unload.IsReadyForPick(ModuleName.WaferRobot, 0)) { if (_waferRobot.Pick(_unload.Module, 0, Hand.Blade1)) { _unload.WaitTransfer(ModuleName.WaferRobot); return; } } } } private void MonitorWaferRobotAligerTask() { if (_load.HasWafer(0) && _load.GetWaferInfo(0).NextStation != (int)ModuleName.Aligner) _load.GetWaferInfo(0).NextStation = (int)ModuleName.Aligner; if (_unload.HasWafer(0) && _unload.GetWaferInfo(0).NextStation != (int)ModuleName.Aligner) _unload.GetWaferInfo(0).NextStation = (int)ModuleName.Aligner; if (_waferRobot.HasWafer(0) && _waferRobot.GetWaferInfo(0).NextStation != (int)ModuleName.Aligner && _waferRobot.GetWaferInfo(0).NextStation != (int)ModuleName.System) _waferRobot.GetWaferInfo(0).NextStation = (int)ModuleName.Aligner; if (!_waferRobot.IsAvailable) return; if (!_aligner.IsAvailable) return; //place 任务还没完成,下一步是Aligner,Robot有片子,Aligner没片子 bool canPlaceAligner = _aligner.NoWafer(0) && _waferRobot.HasWafer(0) && _waferRobot.GetWaferInfo(0).NextStation == (int)ModuleName.Aligner; if (canPlaceAligner) { if (_aligner.IsReadyForPlace(ModuleName.WaferRobot, 0)) { if (_waferRobot.Place(_aligner.Module, 0, Hand.Blade1)) { _aligner.WaitTransfer(ModuleName.WaferRobot); return; } } } if (!_waferRobot.IsAvailable) return; if (!_aligner.IsAvailable) return; //pick Robot没片子,Aligner有片子 bool canPickAligner = _aligner.HasWafer(0) && _waferRobot.NoWafer(0); if (canPickAligner) { if (_aligner.IsReadyForPick(ModuleName.WaferRobot, 0)) { if (_waferRobot.Pick(_aligner.Module, 0, Hand.Blade1)) { _aligner.WaitTransfer(ModuleName.WaferRobot); return; } } } } private void MonitorWaferRobotCassetteTask() { if (!_waferRobot.IsAvailable) return; //place bool canPlaceCassette = _waferRobot.HasWafer(0)&& _waferRobot.GetWaferInfo(0).NextStation!=(int)ModuleName.Aligner; if (canPlaceCassette) { var wafer = _waferRobot.GetWaferInfo(0); if (wafer.OriginStation == (int)ModuleName.CassAL) { if (_cassetteAL.IsReadyForPlace(ModuleName.WaferRobot, wafer.OriginSlot) && WaferManager.Instance.CheckNoWafer(ModuleName.CassAL, wafer.OriginSlot)) { if (_waferRobot.Place(_cassetteAL.Module, wafer.OriginSlot, Hand.Blade1)) { _cassetteAL.WaitTransfer(ModuleName.WaferRobot); return; } } } else if (wafer.OriginStation == (int)ModuleName.CassAR) { if (_cassetteAR.IsReadyForPlace(ModuleName.WaferRobot, wafer.OriginSlot) && WaferManager.Instance.CheckNoWafer(ModuleName.CassAR, wafer.OriginSlot)) { if (_waferRobot.Place(_cassetteAR.Module, wafer.OriginSlot, Hand.Blade1)) { _cassetteAR.WaitTransfer(ModuleName.WaferRobot); return; } } } } } private void MonitorTrayRobotLoadTask() { if (!_trayRobot.IsAvailable) return; if (!_load.IsAvailable) return; //先取Wafer再取石墨盘 bool canPick = _load.HasTray(0) && _load.NoWafer(0); if (canPick) { SlotItem emptyTraySlot = GetTrayOrignSlot(ModuleName.LoadLock, 0); if (emptyTraySlot != null) { if (_load.IsReadyForPick(ModuleName.TrayRobot, 0)) { if (_trayRobot.Pick(_load.Module, 0, Hand.Blade1)) { _load.WaitTransfer(ModuleName.TrayRobot); return; } } } } } private void MonitorTrayRobotCassetteTask() { if (!_trayRobot.IsAvailable) return; if (!_cassetteBL.IsAvailable) return; //place Robot有盘 其它逻辑跟Load的Pick一致 bool canPlace = _trayRobot.HasTray(0); if (canPlace) { SlotItem slotItem = GetTrayOrignSlot(ModuleName.TrayRobot, 0); //GetEmptyTraySlot(13); if (slotItem != null) { if (_cassetteBL.IsReadyForPlace(ModuleName.TrayRobot, slotItem.Slot)) { if (_trayRobot.Place(slotItem.Module, slotItem.Slot, Hand.Blade1)) { _cassetteBL.WaitTransfer(ModuleName.TrayRobot); return; } } } } } private void MonitorBufferTask() { if (!_buffer.IsAvailable) { return; } if (!_buffer.IsReadyForPick(ModuleName.TMRobot, 0)) { _buffer.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0); } } private void MonitorAlignerTask() { if (!_aligner.IsAvailable) { return; } if (_aligner.HasWafer(0) && _aligner.GetWaferInfo(0).NextStation==(int)ModuleName.Aligner) { _aligner.Aligning(); _aligner.GetWaferInfo(0).NextStation = (int)ModuleName.System; } } private void MonitorPMTask() { foreach (var pm in _lstPms) { if (!pm.IsAvailable) continue; if (pm.NoTray(0) && pm.NoWafer(0)) continue; if (!pm.IsReadyForPick(ModuleName.TMRobot, 0)) { pm.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Pick, 0); } } } private void MonitorLoadTask() { if (!_load.IsAvailable) { return; } //bool canExcute = _load.HasWafer(0) ; //if (canExcute) //{ // if (!_load.CheckWaferTraySeparated()) // { // _load.SeparateWaferTray(); // return; // } //} if (_load.HasWafer(0)) { if (/*_load.CheckWaferTraySeparated() &&*/ !_load.IsReadyForPick(ModuleName.WaferRobot, 0) && !_unload.IsInPumping && !_tmRobot.IsInPumping) { _load.PrepareTransfer(ModuleName.WaferRobot, EnumTransferType.Pick, 0); return; } } else if (_load.HasTray(0)) { if (/*_load.CheckWaferTraySeparated() &&*/ !_load.IsReadyForPick(ModuleName.TrayRobot, 0) && !_unload.IsInPumping && !_tmRobot.IsInPumping) { _load.PrepareTransfer(ModuleName.TrayRobot, EnumTransferType.Pick, 0); return; } } else if (_tmRobot.HasTrayAndExceedProcessCount(0) && _tmRobot.NoWafer(0)) { if (!_load.IsReadyForPlace(ModuleName.TMRobot, 0) && !_unload.IsInPumping && !_tmRobot.IsInPumping) { _load.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0); return; } } } private void MonitorUnLoadTask() { if (!_unload.IsAvailable) { return; } bool canExcuteUnLoad = _unload.HasWafer(0); if (canExcuteUnLoad) { if (!_unload.CheckWaferTraySeparated()) { _unload.SeparateWaferTray(); return; } } if (_unload.HasTray(0)) { if (/*_unload.CheckWaferTraySeparated() && */!_unload.IsReadyForPick(ModuleName.TMRobot, 0) && !_load.IsInPumping && !_tmRobot.IsInPumping) { _unload.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Pick, 0); return; } } else if (_unload.HasWafer(0)) { if (_unload.CheckWaferTraySeparated() && !_unload.IsReadyForPick(ModuleName.WaferRobot, 0) && !_load.IsInPumping && !_tmRobot.IsInPumping) { _unload.PrepareTransfer(ModuleName.WaferRobot, EnumTransferType.Pick, 0); return; } } else { if (!_unload.IsReadyForPlace(ModuleName.TMRobot, 0) && !_load.IsInPumping && !_tmRobot.IsInPumping) { _unload.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0); return; } } } private SlotItem GetEmptyTraySlot() { for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.CassBL).Length; i++) { if (WaferManager.Instance.CheckNoTray(ModuleName.CassBL, i)) { return new SlotItem(ModuleName.CassBL, i); } } return null; } private SlotItem GetTrayOrignSlot(ModuleName module, int slot) { var wafer = GetModule(module).GetWaferInfo(slot); if (wafer != null && GetModule(module).HasTray(slot) && _cassetteBL.NoTray(wafer.TrayOriginSlot)) { return new SlotItem(ModuleName.CassBL, wafer.TrayOriginSlot); } return null; } private bool CheckWaferCouldBeReturn(ModuleName module, int slot) { var wafer = WaferManager.Instance.GetWafer(module, slot); if (!wafer.IsEmpty) { return true; } else if (wafer.TrayState == WaferTrayStatus.Normal) { return true; } return false; } } }