using System.Linq; using Aitex.Core.Common; using Aitex.Core.RT.Device; using Aitex.Core.RT.Fsm; using Aitex.Core.Util; using Aitex.Sorter.Common; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Schedulers; using MECF.Framework.Common.SubstrateTrackings; using SicModules.LLs; using SicModules.UnLoads; using SicRT.Equipments.Systems; using SicRT.Modules.Schedulers; namespace SicRT.Scheduler { public class SchedulerUnLoad : SchedulerModule { public override bool IsAvailable { get { return _unL.IsIdle && _unL.IsOnline && CheckTaskDone() && _unL.CheckSlitValveClosed(); } } public override bool IsOnline { get { return _unL.IsOnline; } } public override bool IsError { get { return _unL.IsError; } } private UnLoadModuleBase _unL = null; private ModuleName _taskRobot; private int _taskSlot; private int _entityTaskToken = (int)FSM_MSG.NONE; private bool _separated = false; private bool _purged = false; private bool _coolingCompleted = false; private DeviceTimer _timerCooling = new DeviceTimer(); public bool IsInPumping { get => _task == TaskType.Pump || _task == TaskType.Purge || _task == TaskType.PrepareTransfer; } public SchedulerUnLoad(ModuleName module) : base(module.ToString()) { _module = module.ToString(); _unL = Singleton.Instance.Modules[module] as UnLoadModuleBase; } public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot) { _task = TaskType.PrepareTransfer; _taskRobot = robot; _taskSlot = slot; LogTaskStart(_task, $"{robot} {type} slot {slot + 1}"); return _unL.PrepareTransfer(robot, Hand.Blade1, slot, type, out _); } internal bool CheckAtAtm() { SicLoadLock deviceLL = DEVICE.GetDevice($"{_module}.{_module}"); return deviceLL.CheckAtm(); } internal bool CheckAtVacuum() { SicLoadLock deviceLL = DEVICE.GetDevice($"{_module}.{_module}"); return deviceLL.CheckVacuum(); } internal void SetJobStatue() { SicLoadLock deviceLL = DEVICE.GetDevice($"{_module}.{_module}"); //deviceLL.SetJobDoneStatus(); } public override bool IsReadyForPick(ModuleName robot, int slot) { if (robot == ModuleName.WaferRobot) { return _unL.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Pick, out _) && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot); } else if (robot == ModuleName.TMRobot) { return _unL.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Pick, out _) && WaferManager.Instance.CheckHasTray(ModuleHelper.Converter(_module), slot); } return false; } public override bool IsReadyForPlace(ModuleName robot, int slot) { return _unL.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Place, out _) && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot) && WaferManager.Instance.CheckNoTray(ModuleHelper.Converter(_module), slot); } public bool Vent() { _task = TaskType.Vent; _entityTaskToken = _unL.InvokeVent(); LogTaskStart(_task, $"{Module} vent to ATM"); return _entityTaskToken != (int)FSM_MSG.NONE; } public bool Pump() { _entityTaskToken = _unL.InvokePump(); if (_entityTaskToken != (int)FSM_MSG.NONE) { _task = TaskType.Pump; LogTaskStart(_task, $"{Module} pump to Vaccum"); return true; } return false; } public override bool Cooling(bool coolingType, int coolingTime) { _entityTaskToken = _unL.InvokeCooling(coolingTime); if (_entityTaskToken != (int)FSM_MSG.NONE) { _task = TaskType.Cooling; LogTaskStart(_task, $"{Module} cooling {coolingTime} seconds"); } _coolingCompleted = _entityTaskToken != (int)FSM_MSG.NONE; return _entityTaskToken != (int)FSM_MSG.NONE; } public bool Purge(params object[] objs) { _entityTaskToken = _unL.InvokePurge(objs); if (_entityTaskToken != (int)FSM_MSG.NONE) { _task = TaskType.Purge; LogTaskStart(_task, $"{Module} purge for new job"); _purged = true; return true; } return false; } public bool Monitor() { return true; } public bool GroupWaferTray() { _entityTaskToken = _unL.InvokeGroupWaferTray(); if (_entityTaskToken != (int)FSM_MSG.NONE) { _task = TaskType.Group; LogTaskStart(_task, $"{Module} start group wafer and tray"); } return _entityTaskToken != (int)FSM_MSG.NONE; } public bool SeparateWaferTray() { _entityTaskToken = _unL.InvokeSeparateWaferTray(); if (_entityTaskToken != (int)FSM_MSG.NONE) { _task = TaskType.Separate; LogTaskStart(_task, $"{Module} start separate wafer and tray"); } _separated = _entityTaskToken != (int)FSM_MSG.NONE; return _entityTaskToken != (int)FSM_MSG.NONE; } public void ResetPurgedAndSeparatedStatus() { _coolingCompleted = false; _separated = false; _purged = false; } public bool CheckCoolingCompleted() { return _coolingCompleted; } public override bool CheckWaferTraySeparated() { return _separated; } public bool CheckPurged() { return _purged; } public override bool CheckSlitValveClosed() { return _unL.CheckSlitValveClosed(); } public int? GetWaferPurgeCount(int slot) { if (!WaferManager.Instance.CheckHasWafer(Module, slot)) return null; var wi = WaferManager.Instance.GetWafer(Module, slot); if (wi.ProcessJob?.Sequence == null) return null; if (wi.NextSequenceStep >= wi.ProcessJob.Sequence.Steps.Count) return null; if (!wi.ProcessJob.Sequence.Steps[wi.NextSequenceStep].StepModules.Contains(Module)) return null; if (!wi.ProcessJob.Sequence.Steps[wi.NextSequenceStep].StepParameter.ContainsKey("PurgeCount")) return null; if (int.TryParse(wi.ProcessJob.Sequence.Steps[wi.NextSequenceStep].StepParameter["PurgeCount"].ToString(), out int purgeCount)) { return purgeCount; } return null; } public int? GetWaferPumpDelayTime(int slot) { if (!WaferManager.Instance.CheckHasWafer(Module, slot)) return null; var wi = WaferManager.Instance.GetWafer(Module, slot); if (wi.ProcessJob?.Sequence == null) return null; if (wi.NextSequenceStep >= wi.ProcessJob.Sequence.Steps.Count) return null; if (!wi.ProcessJob.Sequence.Steps[wi.NextSequenceStep].StepModules.Contains(Module)) return null; if (!wi.ProcessJob.Sequence.Steps[wi.NextSequenceStep].StepParameter.ContainsKey("PumpDelayTime")) return null; if (int.TryParse(wi.ProcessJob.Sequence.Steps[wi.NextSequenceStep].StepParameter["PumpDelayTime"].ToString(), out int pumpDelayTime)) { return pumpDelayTime; } return null; } public bool CheckTaskDone() { var taskSucceed = false; switch (_task) { case TaskType.None: taskSucceed = true; break; case TaskType.PrepareTransfer: taskSucceed = _unL.CheckAcked(_entityTaskToken); break; case TaskType.Cooling: taskSucceed = _unL.CheckAcked(_entityTaskToken); break; case TaskType.Vent: taskSucceed = _unL.CheckAcked(_entityTaskToken); break; case TaskType.Pump: taskSucceed = _unL.CheckAcked(_entityTaskToken); break; case TaskType.Group: taskSucceed = _unL.CheckAcked(_entityTaskToken); break; case TaskType.Purge: taskSucceed = _unL.CheckAcked(_entityTaskToken); break; case TaskType.Separate: taskSucceed = _unL.CheckAcked(_entityTaskToken); break; } return SuperCheckTaskDone(taskSucceed, _unL.IsIdle | _unL.IsError); } } }