using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using System; using System.Collections.Generic; using System.Diagnostics; namespace SicPM1.Routines { public class PMPurgeRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupA, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetMFCMode, SetPCMode, SetM1to16, SetPC, SetGroupJ, CloseGroupJ, SetM291519to38, SetGasOut, SetTv, SetGasIn1, //V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, SetGasIn2, SetGroupJOpen, SetM291519to26, SetM291519to26_1, OpenFinal2, IsOpenFinal1, IsOpenFinal2, IsCloseFinal1, IsCloseFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetTvMode, SetTVEnable, SetTVPressMode, SetTVPressMode1, SetTv1, WaitTv1, SetTVPositionMode, SetTVPositionMode_1, SetTVPositionMax, SetTVPositionMax_1, SetTvOpen, SetTvModeToPress, SetTVtoCurrent, RoutinePre, SetPressureUp, SetPressureDown, WaitPressureDown, WaitPressureUp, VentPumpOpen, PressureToMax, PressureToMin, StartLoop, EndLoop, SetMfc28to31, SetReactorPress, CloseFinanl1, CloseFinanl2, CloseEPV2, SetTVCloseMode2, CLoseTvvvv, SetEPVVV2, CLoseEPV1, CheckPM1000, WaitPressUpTo1000, WaitPressUpTo1020, SetPressUpOrDown1, SetPressUpOrDown2, SetMfc28to40Special, WaitPmPressureUp, SetMfc27to40Default, SetV75, SetV76, SetV31, SetV32, SetV35V36, SetV65, SetV751, SetV761, SetM2toM40, SetM2toM40_1, SetM2TOM40Default, SetV92V93V95, SetV94, SetV96, SetV68, SetM32M35M37, SetM36, SetM38, SetPC567Close, SetPC567Mode, SetPC567Default, OpenEPV2, WaitPressUpTo20, SetMfc291519to38, WaitPressUpTo0, SetMfc291519to38ToDefault, WaitPressDownTo20, SetPmPressureTo20, CloseMfcFinal1, CloseMfcFinal2, CloseMfc2915, CheckFinal1Open, SetGroupV25, Mfc36, SetM39, CloseMfc1to16, CloseMfc2to26, CloseJ, CheckTVOpen1, CheckTVOpen2, CheckEPV1Open1, CheckEPV2Open1, CheckEPV2Open2, CloseM32M35M37, CloseM36, CloseM38, CloseGasIn1, WaitPmPressureUp1, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay12, TimeDelay14, TimeDelay18, TimeDelay19, TimeDelay20, TimeDelay21, TimeDelay22, Notify1, Notify2 } private ModuleName moduleName; private PM1Module _pm1Module; private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private int _EPV2OpenTimeDelay = 10; private double _ventBasePressure; private double _pumpBasePressure; private int _pressureLoopCount; //Loop次数 private int _pressureMinDelay; private int _pressureMaxDelay; private int _pressureMinTimeout; private int _pressureMaxTimeout; private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private int _EPV12TimeSapn = 10; private int _waitChamberTo1000TimeOut = 300; //等待腔体压力上升到1000的超时时间 private bool _needFinalValveOpen = false; private Stopwatch _swTimer = new Stopwatch(); public PMPurgeRoutine(ModuleName module, PM1Module pm1) : base(module, pm1) { moduleName = module; _pm1Module = pm1; Name = "Purge"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); } public override Result Start(params object[] objs) { Reset(); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _pressureLoopCount = SC.GetValue($"PM.{Module}.Purge.CyclePurgeCount"); _pumpBasePressure = SC.GetValue($"PM.{Module}.Purge.PumpBasePressure"); _pressureMinDelay = SC.GetValue($"PM.{Module}.Purge.PumpDelayTime"); _pressureMinTimeout = SC.GetValue($"PM.{Module}.Purge.PumpTimeout"); _ventBasePressure = SC.GetValue($"PM.{Module}.Purge.VentBasePressure"); _pressureMaxDelay = SC.GetValue($"PM.{Module}.Purge.VentDelayTime"); _pressureMaxTimeout = SC.GetValue($"PM.{Module}.Purge.VentTimeout"); _needFinalValveOpen = SC.GetValue($"PM.{Module}.Purge.NeedFinalValveOpen"); //Clean succeed 清掉 _pmIoInterLock.DoLidCloseRoutineSucceed = false; _pmIoInterLock.DoLidOpenRoutineSucceed = false; if (!_pmIoInterLock.SetPMPurgeRoutineRunning(true, out string reason)) { EV.PostAlarmLog(Module, $"can not Purge,{reason}"); return Result.FAIL; } currentPressureUpOrDown = PressureUpOrDown.None; _finalOpen = false; _swTimer.Restart(); Notify($"Start LoopCount:{_pressureLoopCount}"); return Result.RUN; } public override Result Monitor() { try { //CheckRoutineTimeOut(); //关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //旋转停止,加热停止 SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); //关闭V72,打开V25 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); //打开V31,打开V32 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //打开V35,打开V36 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); //关闭B/C/E/F/H/K 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); //打开D/G 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); ////打开V65 //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout); //设置MFC和PC的模式 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); //打开J阀门 SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout); //M1-M16设定为default值(M2、M9、M15除外) SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); //设置所有PC到默认值 SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); //设置M2,M9,M15,M19-M26 3s ramp 到default 值 SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM26, 3); //打开EPV2 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay1, 3); //设置蝶阀Enable SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5); //设置蝶阀为压力模式 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5); //伺服压力设定值到0mbar SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout); //M2、M9、M15、M19-M40 MFC 5s ramp 到0 SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40,0, 5); //等待腔体压力Pump到设定值 WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout); TimeDelay((int)RoutineStep.TimeDelay2, 3); //蝶阀设置为位置模式,开度设置为最大 SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout); SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout); //Final2阀对应的MFC 3s Ramp到Default值 SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); //打开Final2阀 SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); //打开V68 SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay3, 1); //打开V92,V93和V95,再打开V94,在打开V96 SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 1); SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 1); SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 1); TimeDelay((int)RoutineStep.TimeDelay4, 3); SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout); ////开V94,V96需等到腔体压力大于950 //WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 950, _throttleTimeout); SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay5, 3); SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout); //循环开始 Loop((int)RoutineStep.StartLoop, _pressureLoopCount); //M2、M9、M15、M19-M40 MFC 3s ramp 到 default 值 SetMfcToDefaultByGroup((int)RoutineStep.SetM2TOM40Default, MfcGroupName.M2toM40, 3); //设置蝶阀为压力模式 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5); //使用动态流量伺服到300mbar SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Uping); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _ventBasePressure); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _ventBasePressure, _pmPressureMaxDiff, _pressureMaxTimeout); TimeDelay((int)RoutineStep.TimeDelay6, _pressureMaxDelay); //M2、M9、M15、M19-M40 MFC 3s ramp 0 SetMfcByGroup((int)RoutineStep.SetM2toM40_1, MfcGroupName.M2toM40, 0, 3); //伺服到0mbar SetThrottlePressureAndWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout); TimeDelay((int)RoutineStep.TimeDelay7, 3); //蝶阀设置为位置模式,开度设置为最大 SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode_1, _IoThrottle, _throttleTimeout); SetThrottleSetPositionNoWait((int)RoutineStep.SetTVPositionMax_1, _IoThrottle, 100, _throttleTimeout); TimeDelay((int)RoutineStep.TimeDelay8, _pressureMinDelay); EndLoop((int)RoutineStep.EndLoop); //M2,M9,M15,M19-M26 3s ramp 到0 SetMfcByGroup((int)RoutineStep.SetM291519to26_1, MfcGroupName.M2toM26, 0,3); //M27-M40 MFC 3s ramp 到 default 值 SetMfcToDefaultByGroup((int)RoutineStep.SetMfc27to40Default, MfcGroupName.M27toM40, 3); //关闭J阀门 SetIoValueByGroup((int)RoutineStep.CloseGroupJ, IoGroupName.J, false, _IoValueOpenCloseTimeout); //关闭先关蝶阀,再EPV2 SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode2, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.CLoseTvvvv, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay9, 1); SetIoValueByGroup((int)RoutineStep.SetEPVVV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); //等待反应腔压力到达1020 NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!"); WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1000, _ventBasePressure, _waitChamberTo1000TimeOut); if (_needFinalValveOpen) { //打开Final1阀 SetIoValueByGroup((int)RoutineStep.IsOpenFinal1, IoGroupName.Final1WithOutV94, true, _IoValueOpenCloseTimeout); //打开Final2阀 SetIoValueByGroup((int)RoutineStep.IsOpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); } else { //关闭Final1阀 SetIoValueByGroup((int)RoutineStep.IsCloseFinal1, IoGroupName.Final1WithOutV94, false, _IoValueOpenCloseTimeout); //关闭Final2阀 SetIoValueByGroup((int)RoutineStep.IsCloseFinal2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout); } } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); SetRoutineSuccessedDo(); return Result.DONE; } public override void Abort() { _pmIoInterLock.DoLidOpenRoutineRunning = false; PmDevice._ioThrottleValve.StopRamp(); PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All)); PmDevice.SetRotationServo(0, 0); base.Abort(); } private void SetRoutineSuccessedDo() { _pmIoInterLock.DoLidOpenRoutineRunning = false; _pmIoInterLock.SetLidOpenRoutineSucceed(true, out string reason); _pmIoInterLock.DoLidCloseRoutineSucceed = false; } //private void CheckRoutineTimeOut() //{ // if (_routineTimeOut > 10) // { // if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) // { // EV.PostAlarmLog(Module,$"Routine TimeOut! over {_routineTimeOut} s"); // throw (new RoutineFaildException()); // } // } //} } }