using System.Diagnostics; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; namespace SicModules.UnLoads.Routines { public class UnLoadPumpRoutine : UnLoadBaseRoutine { enum RoutineStep { CheckForelinePressure, RequestPump, RequestPumpDelay, SlowPump, CloseSlowValve, FastPump, PumpDelay, CloseFastValve, Delay, TimeDelay1, } private double _pumpBasePressure = 0; private double _pumpSwitchPressure = 100; private int _slowPumpTimeout; private int _fastPumpTimeout; private int _pumpDelayTime= 5; private int _routineTimeOut; private bool _useSettingValue; private Stopwatch _swTimer = new Stopwatch(); public UnLoadPumpRoutine() { Module = ModuleName.UnLoad.ToString(); Name = "Pump"; } public void Init() { _useSettingValue = false; } public void Init(double basePressure, int pumpDelayTime) { _pumpBasePressure = basePressure; _pumpDelayTime = pumpDelayTime; _useSettingValue = true; } public override Result Start(params object[] objs) { Reset(); string reason; if (!UnLoadDevice.SetFastVentValve(false, out reason) || !UnLoadDevice.SetSlowVentValve(false, out reason)) { EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}"); return Result.FAIL; } bool isAtmMode = SC.GetValue("System.IsATMMode"); _pumpSwitchPressure = SC.GetValue("UnLoad.Pump.SlowFastPumpSwitchPressure"); _slowPumpTimeout = SC.GetValue("UnLoad.Pump.SlowPumpTimeout"); _fastPumpTimeout = SC.GetValue("UnLoad.Pump.FastPumpTimeout"); _routineTimeOut = SC.GetValue("UnLoad.Pump.RoutineTimeOut"); if (!_useSettingValue) { _pumpBasePressure = SC.GetValue("UnLoad.Pump.PumpBasePressure"); _pumpDelayTime = SC.GetValue("UnLoad.Pump.PumpDelayTime"); } if (!TMDevice.SetFastPumpValve(false, out reason)) { EV.PostAlarmLog(Module, $"can not pump, TM fast pump value can not close"); return Result.FAIL; } if (isAtmMode) { EV.PostInfoLog(Module, $"system in atm mode, {Module} pump skipped"); return Result.DONE; } if (SC.ContainsItem("UnLoad.RunPumpRoutineEventBelowBasePressure") && !SC.GetValue("UnLoad.RunPumpRoutineEventBelowBasePressure")) { if (UnLoadDevice.ChamberPressure < _pumpBasePressure) { EV.PostInfoLog(Module, $"{Module} already under pump base pressure"); return Result.DONE; } } if (!UnLoadDevice.CheckLidClose()) { EV.PostAlarmLog(Module, $"Can not pump, lid is open"); return Result.FAIL; } if (!TMDevice.CheckSlitValveClose(ModuleName.UnLoad)) { EV.PostAlarmLog(Module, $"Can not pump, slit valve is open"); return Result.FAIL; } if (!TMDevice.SetTmToUnLoadVent(false, out _)) { EV.PostAlarmLog(Module, $"can not pump,can not close v85!"); } if (!EFEMDevice.CheckSlitValveClose(ModuleName.UnLoad,ModuleName.WaferRobot)) { EV.PostAlarmLog(Module, $"Can not pump, slit valve is open"); return Result.FAIL; } if (!TmIoInterLock.SetUnloadPumpRoutineRunning(true, out reason)) { EV.PostAlarmLog(Module, $"can not pump,{reason}"); return Result.FAIL; } _swTimer.Restart(); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { CheckRoutineTimeOut(); SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout); FastPump((int)RoutineStep.FastPump, _pumpBasePressure, _fastPumpTimeout); TimeDelay((int)RoutineStep.PumpDelay, _pumpDelayTime); CloseFastPumpValve((int)RoutineStep.CloseFastValve); CloseSlowPumpValve((int)RoutineStep.CloseSlowValve); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { UnLoadDevice.SetSlowPumpValve(false, out _); UnLoadDevice.SetFastPumpValve(false, out _); return Result.FAIL; } TmIoInterLock.SetUnloadPumpRoutineRunning(false, out _); Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); return Result.DONE; } public override void Abort() { //UnLoadDevice.SetSlowPumpValve(false, out _); //UnLoadDevice.SetFastPumpValve(false, out _); base.Abort(); } private void CheckRoutineTimeOut() { if (_routineTimeOut > 10) { if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) { EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s"); throw (new RoutineFaildException()); } } } } }