using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.Routine; using Aitex.Core.Util; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using SicPM1.Routines; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs; namespace SicPM1.RecipeExecutions { public class CleanRecipe : PMBaseRoutine { public enum RoutineStep { SetServoUp, SetChamberPressure, EnableRotation, OpenH2Valve, EnableHeater, PcCalibartion, RunStepOne, Wait, CheckCondition, WaitTempReach, } enum RecipeRunningState { Error, RecipeCompleted, ExecStep, TimeWait, ConditionWait, StepCompleted, Paused, } private string _recipeName; private object _recipeLocker = new object(); private bool _isPSUHeaterJumpMode; private bool _isSCRHeaterJumpMode; private bool _isMFCJumpMode; private int _currentStepNumber; private DeviceTimer _stepTimer = new DeviceTimer(); private DeviceTimer _recipeTimer = new DeviceTimer(); private RecipeRunningState _state = RecipeRunningState.ExecStep; private PMServoToPressure _pmServoToPressure; public CleanRecipe(ModuleName module, PM1Module pm1) : base(module, pm1) { Module = module.ToString(); Name = "CleanRecipe"; _pmServoToPressure = new PMServoToPressure(module, pm1); } public void Init(string recipeName) { if (!recipeName.Contains("Sic\\Clean\\") && recipeName!="") { recipeName = "Sic\\Clean\\" + recipeName; } _recipeName = recipeName; } public override Result Start(params object[] objs) { Reset(); if (!RecipeParser.Parse(_recipeName, Module, out var recipeHead, out var recipeSteps, out string reason)) { Stop($"Load recipe {_recipeName} failed, {reason}"); return Result.FAIL; } if (WaferManager.Instance.CheckHasWafer(PmDevice.Module, 0)) { EV.PostWarningLog(Module, $"can not run clean recipe, Has wafer at {Module}"); return Result.FAIL; } if (!PmDevice.Pump.IsOn || PmDevice.Pump.IsError) { EV.PostWarningLog(Module, $"can not run process, pump state is not correct"); return Result.FAIL; } if (!PmDevice._ioThrottleValve.TVValveEnable) { EV.PostWarningLog(Module, $"can not run process, TV is not enable"); return Result.FAIL; } if (PmDevice._ioThrottleValve.ControlModeFeedback != PressureCtrlMode.TVPressureCtrl) { EV.PostWarningLog(Module, $"can not run process, TV is not Pressure Ctrol Mode"); return Result.FAIL; } if (!PmDevice.CheckIOValueByGroup(IoGroupName.I, true)) { EV.PostAlarmLog(Module, $"can not run process,I valves is not open!"); return Result.FAIL; } if (!PmDevice.CheckIOValueByGroup(IoGroupName.E, false)) { EV.PostAlarmLog(Module, $"can not run process,E valves is not closed!"); return Result.FAIL; } if (!PmDevice.CheckIOValueByGroup(IoGroupName.K, false)) { EV.PostAlarmLog(Module, $"can not run process,K valves is not closed!"); return Result.FAIL; } if (!PmDevice.CheckIOValueByGroup(IoGroupName.VentPump, true)) { EV.PostAlarmLog(Module, $"can not run process,V72 is not open!"); return Result.FAIL; } if (!PmDevice.PSU1.AllHeatEnable) { EV.PostAlarmLog(Module, $"can not run process,Heater is disable!"); return Result.FAIL; } _currentStepNumber = 0; PmDevice.RecipeRunningInfo.RecipeName = _recipeName; PmDevice.RecipeRunningInfo.Head = recipeHead; PmDevice.RecipeRunningInfo.RecipeStepList = recipeSteps; PmDevice.RecipeRunningInfo.TotalTime = CalcRecipeTime(); _state = RecipeRunningState.ExecStep; return Result.RUN; } public override Result Monitor() { try { SetConfinementRingUpAndWait((int)RoutineStep.SetServoUp, 30); ExecuteRoutine((int)RoutineStep.SetChamberPressure, _pmServoToPressure); EnableRotation((int)RoutineStep.EnableRotation, 5); OpenH2Valve((int)RoutineStep.OpenH2Valve, PmDevice, 2); EnableHeater((int)RoutineStep.EnableHeater, PmDevice, 5); MonitorRecipeRunInfo(); lock (_recipeLocker) { try { switch (_state) { case RecipeRunningState.ExecStep: if (_currentStepNumber == 0) { _recipeTimer.Start(int.MaxValue); } _stepTimer.Start(PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime * 1000); Notify($"Running step {_currentStepNumber + 1} : {PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName}"); //执行工艺程序命令 foreach (var recipeCmd in PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands.Keys) { if (recipeCmd == "SusHeaterSetMode") { if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd] == "Jump") _isPSUHeaterJumpMode = true; else _isPSUHeaterJumpMode = false; continue; } if (recipeCmd == "WWHeaterSetMode") { if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd] == "Jump") _isSCRHeaterJumpMode = true; else _isSCRHeaterJumpMode = false; continue; } if (recipeCmd == "FlowSetMode") { if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd] == "Jump") _isMFCJumpMode = true; else _isMFCJumpMode = false; continue; } if (IsCmdSkip(recipeCmd)) // 不是注册的方法，需要跳过 continue; if (!OP.CanDoOperation($"{Module}.{recipeCmd}", out string reason, PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd])) { EV.PostAlarmLog(Module, $"Can not execute {recipeCmd}, {reason}"); return Result.FAIL; } else { int time = (int)PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime * 1000; if (recipeCmd.StartsWith("TC1") && _isPSUHeaterJumpMode) { time = 1; } if (recipeCmd.StartsWith("TC2") && _isSCRHeaterJumpMode) { time = 1; } if (recipeCmd.StartsWith("Mfc") && recipeCmd.EndsWith(".Ramp") && !PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsDummyStep) { if (_isMFCJumpMode) { time = 1; } } if ((recipeCmd == "TV.SetPressure" || recipeCmd == "PMServo.SetActualSpeed" || recipeCmd.StartsWith("Pressure") && recipeCmd.EndsWith(".Ramp") || recipeCmd.StartsWith("Mfc") && recipeCmd.EndsWith(".Ramp")) && !PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsDummyStep) { if (_currentStepNumber >= 1) { int previousStepNumber = _currentStepNumber - 1; if (PmDevice.RecipeRunningInfo.RecipeStepList[previousStepNumber].IsDummyStep) previousStepNumber = _currentStepNumber - 2; if (PmDevice.RecipeRunningInfo.RecipeStepList[previousStepNumber].RecipeCommands.ContainsKey(recipeCmd)) { string previousValue = PmDevice.RecipeRunningInfo.RecipeStepList[previousStepNumber].RecipeCommands[recipeCmd]; string currentValue = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd]; if (previousValue == currentValue) { time = 1; } } } } OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, time, PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd]); } } if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].EndBy == EnumEndByCondition.ByTime) _state = RecipeRunningState.TimeWait; else _state = RecipeRunningState.ConditionWait; break; case RecipeRunningState.TimeWait: if (_stepTimer.IsTimeout()) { _state = RecipeRunningState.StepCompleted; } break; case RecipeRunningState.ConditionWait: { if (_stepTimer.IsTimeout()) { _state = RecipeRunningState.StepCompleted; } } break; case RecipeRunningState.StepCompleted: _currentStepNumber++; if (_currentStepNumber >= PmDevice.RecipeRunningInfo.RecipeStepList.Count) { _currentStepNumber = PmDevice.RecipeRunningInfo.RecipeStepList.Count - 1; _state = RecipeRunningState.RecipeCompleted; } else { _state = RecipeRunningState.ExecStep; } break; case RecipeRunningState.RecipeCompleted: { _recipeTimer.Stop(); Notify("Finished"); return Result.DONE; } } return Result.RUN; } catch (Exception ex) { LOG.Write(ex); return Result.FAIL; } } } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } catch (Exception ex) { LOG.Write(ex, String.Format("CleanRecipe has exception")); throw (ex); } Notify("Finished"); return Result.DONE; } protected void EnableHeater(int id, PMModuleBase pm, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set {pm.Name} Heater Enable"); if (!pm.EnableHeater(true, out string reason)) { Stop($"Set {pm.Name} Heater Enable failed, {reason}"); return false; } return true; }, () => { return pm.CheckHeaterEnable(); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } if (ret.Item2 == Result.TIMEOUT) { Stop($"Set {pm.Name} Heater Enable timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected int CalcRecipeTime() { double total = 0; for (int i = 0; i < PmDevice.RecipeRunningInfo.RecipeStepList.Count; i++) { if (!PmDevice.RecipeRunningInfo.RecipeStepList[i].IsDummyStep) // 不统计虚拟Step的时间 { total += PmDevice.RecipeRunningInfo.RecipeStepList[i].StepTime; } } return (int)total; } private void MonitorRecipeRunInfo() { try { PmDevice.RecipeRunningInfo.StepNumber = _currentStepNumber + 1; PmDevice.RecipeRunningInfo.StepName = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName; PmDevice.RecipeRunningInfo.StepTime = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime; PmDevice.RecipeRunningInfo.TotalElapseTime = _recipeTimer.GetElapseTime() / 1000; } catch (Exception ex) { } } } }