321 lines
12 KiB
C#
321 lines
12 KiB
C#
using System;
|
||
using System.Diagnostics;
|
||
using Aitex.Core.RT.Device;
|
||
using Aitex.Core.RT.Event;
|
||
using Aitex.Core.RT.Routine;
|
||
using Aitex.Core.RT.SCCore;
|
||
using MECF.Framework.Common.DBCore;
|
||
using MECF.Framework.Common.Equipment;
|
||
using SicModules.Devices;
|
||
|
||
namespace SicModules.LLs
|
||
{
|
||
public class LoadLockLeakCheckRoutine : LoadLockBaseRoutine
|
||
{
|
||
enum RoutineStep
|
||
{
|
||
SlowPump,
|
||
CloseSlowValve,
|
||
FastPump,
|
||
PumpDelay,
|
||
CloseFastValve,
|
||
CheckDoor,
|
||
RunPumpRoutine,
|
||
ContinuePump,
|
||
ClosePumpValve,
|
||
DoLeakCheck,
|
||
DoLeakCheckDelay,
|
||
CalcLeakCheck,
|
||
StartLoop,
|
||
LoopVent,
|
||
LoopPump,
|
||
StopLoop,
|
||
SlowPumpP, FastPumpP, PumpDelayP, CloseFastValveP, CloseSlowValveP, SlowVentV, CloseFastVentValveV, VentDelayV,
|
||
|
||
TimeDelay1,
|
||
TimeDelay2
|
||
}
|
||
|
||
private LoadLockPumpRoutine _pumpRoutine;
|
||
private LoadLockVentRoutine _ventRoutine;
|
||
|
||
private int _paramContinuePumpTime;
|
||
private int _paramLeakCheckTime;
|
||
private double _beginPressure;
|
||
private double _pumpBasePressure;
|
||
private double _pumpSwitchPressure;
|
||
private int _pumpTimeout;
|
||
private int _ventTimeout;
|
||
private int _routineTimeOut;
|
||
private double _leakSpec;
|
||
private int _purgeCount;
|
||
|
||
private double _beginTime;
|
||
private int _calTimes; //第几次计算LeakCheck的值（每60秒计算一次）
|
||
|
||
|
||
private double _ventBasePressure;
|
||
private int _pumpDelayTime;
|
||
private int _ventDelayTime;
|
||
|
||
private IoInterLockEx _tmIoInterLock;
|
||
|
||
private Stopwatch _swTimer = new Stopwatch();
|
||
|
||
public int ElapsedTime
|
||
{
|
||
get { return _swTimer.IsRunning ? (int)(_swTimer.ElapsedMilliseconds / 1000) : 0; }
|
||
}
|
||
|
||
public LoadLockLeakCheckRoutine(ModuleName module)
|
||
{
|
||
Module = module.ToString();
|
||
Name = "LeakCheck";
|
||
|
||
_tmIoInterLock = DEVICE.GetDevice<IoInterLockEx>("TM.IoInterLock");
|
||
|
||
|
||
_pumpRoutine = new LoadLockPumpRoutine(module);
|
||
_ventRoutine = new LoadLockVentRoutine(module);
|
||
}
|
||
|
||
internal void Init(int pumpTime, int leakCheckTime)
|
||
{
|
||
_paramContinuePumpTime = pumpTime;
|
||
_paramLeakCheckTime = leakCheckTime;
|
||
}
|
||
|
||
internal void Init()
|
||
{
|
||
_paramContinuePumpTime = SC.GetValue<int>("LoadLock.LeakCheck.PumpDelayTime");
|
||
_paramLeakCheckTime = SC.GetValue<int>("LoadLock.LeakCheck.LeakCheckDelayTime");
|
||
}
|
||
|
||
public override Result Start(params object[] objs)
|
||
{
|
||
Reset();
|
||
_swTimer.Restart();
|
||
|
||
_pumpRoutine.Init();
|
||
_ventRoutine.Init();
|
||
|
||
|
||
string reason;
|
||
if (!LoadLockDevice.SetFastVentValve(false, out reason) || !LoadLockDevice.SetSlowVentValve(false, out reason))
|
||
{
|
||
EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
|
||
return Result.FAIL;
|
||
}
|
||
|
||
bool isAtmMode = SC.GetValue<bool>("System.IsATMMode");
|
||
|
||
_pumpSwitchPressure = SC.GetValue<double>("LoadLock.Pump.SlowFastPumpSwitchPressure");
|
||
_pumpBasePressure = SC.GetValue<double>("LoadLock.LeakCheck.PumpBasePressure");
|
||
_ventBasePressure = SC.GetValue<double>("LoadLock.LeakCheck.VentBasePressure");
|
||
|
||
_routineTimeOut = SC.GetValue<int>("LoadLock.LeakCheck.RoutineTimeOut");
|
||
_leakSpec = SC.GetValue<double>("LoadLock.LeakCheck.LeakSpec");
|
||
_purgeCount= SC.GetValue<int>("LoadLock.LeakCheck.CyclePurgeCount");
|
||
|
||
_pumpTimeout = SC.GetValue<int>("LoadLock.Pump.RoutineTimeOut");
|
||
_ventTimeout = SC.GetValue<int>("LoadLock.Vent.RoutineTimeOut");
|
||
|
||
_pumpDelayTime = SC.GetValue<int>("LoadLock.Pump.PumpDelayTime");
|
||
_ventDelayTime = SC.GetValue<int>("LoadLock.Vent.VentDelayTime");
|
||
|
||
if (isAtmMode)
|
||
{
|
||
EV.PostInfoLog(Module, $"system in atm mode, {Module} pump skipped");
|
||
return Result.DONE;
|
||
}
|
||
if (!LoadLockDevice.CheckLidClose())
|
||
{
|
||
EV.PostAlarmLog(Module, $"Can not leakCheck, lid is open");
|
||
return Result.FAIL;
|
||
}
|
||
if (!TMDevice.SetFastPumpValve(false, out reason))
|
||
{
|
||
EV.PostAlarmLog(Module, $"can not leakCheck, TM fast pump value can not close");
|
||
return Result.FAIL;
|
||
}
|
||
if (!TMDevice.CheckSlitValveClose(ModuleName.LoadLock))
|
||
{
|
||
EV.PostAlarmLog(Module, $"Can not leakCheck, slit valve is open");
|
||
return Result.FAIL;
|
||
}
|
||
|
||
if (!_tmIoInterLock.SetLLLeakCheckRoutineRunning(true, out reason))
|
||
{
|
||
EV.PostAlarmLog(Module, $"can not LeakCheck,{reason}");
|
||
return Result.FAIL;
|
||
}
|
||
|
||
Notify("Start");
|
||
return Result.RUN;
|
||
}
|
||
|
||
public override Result Monitor()
|
||
{
|
||
try
|
||
{
|
||
CheckRoutineTimeOut();
|
||
|
||
Loop((int)RoutineStep.StartLoop, _purgeCount);
|
||
SlowPump((int)RoutineStep.SlowPumpP, _pumpSwitchPressure, _pumpTimeout);
|
||
FastPump((int)RoutineStep.FastPumpP, _pumpBasePressure, _pumpTimeout);
|
||
TimeDelay((int)RoutineStep.PumpDelayP, _pumpDelayTime);
|
||
CloseFastPumpValve((int)RoutineStep.CloseFastValveP);
|
||
CloseSlowPumpValve((int)RoutineStep.CloseSlowValveP);
|
||
|
||
TimeDelay((int)RoutineStep.TimeDelay1, 1);
|
||
SlowVent((int)RoutineStep.SlowVentV, _ventBasePressure, _ventTimeout);
|
||
TimeDelay((int)RoutineStep.VentDelayV, _ventDelayTime);
|
||
CloseVentValveAndWait((int)RoutineStep.CloseFastVentValveV);
|
||
TimeDelay((int)RoutineStep.TimeDelay2, 1);
|
||
|
||
EndLoop((int)RoutineStep.StopLoop);
|
||
|
||
SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _pumpTimeout);
|
||
FastPump((int)RoutineStep.FastPump, _pumpBasePressure, _pumpTimeout);
|
||
TimeDelay((int)RoutineStep.PumpDelay, _paramContinuePumpTime);
|
||
CloseFastPumpValve((int)RoutineStep.CloseFastValve);
|
||
CloseSlowPumpValve((int)RoutineStep.CloseSlowValve);
|
||
DoLeakCheck((int)RoutineStep.DoLeakCheck, _paramLeakCheckTime);
|
||
//CalcLeackCheckPerMinute(_paramLeakCheckTime);
|
||
TimeDelay((int)RoutineStep.DoLeakCheckDelay, _paramLeakCheckTime);
|
||
CalcLeakCheck((int)RoutineStep.CalcLeakCheck, _paramLeakCheckTime);
|
||
|
||
}
|
||
catch (RoutineBreakException)
|
||
{
|
||
return Result.RUN;
|
||
}
|
||
catch (RoutineFaildException)
|
||
{
|
||
return Result.FAIL;
|
||
}
|
||
|
||
|
||
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
|
||
_tmIoInterLock.DoLLLeakCheckRoutineRunning = false;
|
||
|
||
_swTimer.Stop();
|
||
return Result.DONE;
|
||
}
|
||
|
||
public override void Abort()
|
||
{
|
||
Notify($"{Module} leak check aborted");
|
||
|
||
_tmIoInterLock.DoLLLeakCheckRoutineRunning = false;
|
||
|
||
_swTimer.Stop();
|
||
|
||
LeakCheckDataRecorder.Add((int)_swTimer.ElapsedMilliseconds / 1000, _beginPressure, TMDevice.ChamberPressure, 0, Result.FAIL.ToString(), "", Module);
|
||
|
||
base.Abort();
|
||
}
|
||
|
||
private void CheckRoutineTimeOut()
|
||
{
|
||
if (_routineTimeOut > 10)
|
||
{
|
||
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
||
{
|
||
EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
|
||
throw (new RoutineFaildException());
|
||
}
|
||
}
|
||
}
|
||
|
||
|
||
|
||
public void DoLeakCheck(int id, double time)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
Notify($"Keep pressure for {time} seconds");
|
||
|
||
_beginTime = _swTimer.ElapsedMilliseconds;
|
||
_beginPressure = LoadLockDevice.ChamberPressure;
|
||
_calTimes = 1;
|
||
return true;
|
||
});
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void CalcLeackCheckPerMinute(int time)
|
||
{
|
||
//大于LeakCheck时间,
|
||
if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= time)
|
||
{
|
||
int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
|
||
double endPressure = LoadLockDevice.ChamberPressure;
|
||
double leakSpan = endPressure - _beginPressure;
|
||
double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
|
||
if (leakRate > _leakSpec)
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), Module, Module);
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
|
||
}
|
||
else
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), Module, Module);
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
|
||
}
|
||
}
|
||
else
|
||
{
|
||
if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= 60 * _calTimes)
|
||
{
|
||
_calTimes++;
|
||
int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
|
||
double endPressure = LoadLockDevice.ChamberPressure;
|
||
double leakSpan = endPressure - _beginPressure;
|
||
double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
|
||
if (leakRate > _leakSpec)
|
||
{
|
||
EV.PostInfoLog(Module, $"Leak check Failed Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2} ,Rate over {_leakSpec}");
|
||
|
||
throw (new RoutineFaildException());
|
||
}
|
||
EV.PostInfoLog(Module, $"Leak check Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2}");
|
||
}
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void CalcLeakCheck(int id, int time)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
double endPressure = LoadLockDevice.ChamberPressure ; //
|
||
double leakSpan = endPressure - _beginPressure;
|
||
double leakRate = (endPressure - _beginPressure) / (time / 60.0);
|
||
if (leakRate > _leakSpec)
|
||
{
|
||
LeakCheckDataRecorder.Add(time, _beginPressure, endPressure, leakRate, Result.FAIL.ToString(), "", Module);
|
||
EV.PostInfoLog(Module,$"{Module} leakcheck result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2} mbar, end: {endPressure:F2} mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
return false;
|
||
}
|
||
else
|
||
{
|
||
LeakCheckDataRecorder.Add(time, _beginPressure, endPressure, leakRate, Result.Succeed.ToString(), "", Module);
|
||
EV.PostInfoLog(Module,$"{Module} leakcheck result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2} mbar, end: {endPressure:F2} mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
return true;
|
||
}
|
||
});
|
||
}
|
||
}
|
||
}
|