141 lines
4.7 KiB
C#
141 lines
4.7 KiB
C#
using System;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicModules.PMs.Routines.Base;
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namespace SicModules.PMs.Routines
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{
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public class PMServoToPressure : PMBaseRoutine
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{
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enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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SetM1to16,
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SetM19to38,
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TimeDelayForMFC,
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SetTvOpen,
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SetTvMode,
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SetTVto1050,
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TimeDelayForTV,
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SetPressUpOrDown2,
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SetPressureUp,
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WaitPressureUp,
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SetTvPressure,
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SetEPV22,
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TimeDelay5,
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}
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private ModuleName moduleName;
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private PMModule _pm1Module;
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private IoThrottleValve2 _IoThrottle;
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private double _throTagertPressure; //蝶阀目标压力
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private double _throttleRate; //蝶阀调节速率
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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//private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
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//private int _rotationCloseTimeout = 20; //旋转停止超时
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//private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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//private int _EPV2OpenDelayTime = 9;
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private bool _isEPV2Open = false;
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private bool _isBTVOpen = false;
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public PMServoToPressure(ModuleName module, PMModule pm1) : base(module, pm1)
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{
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moduleName = module;
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_pm1Module = pm1;
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Name = "Servo To Pressure";
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}
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public void Init(double targetPressure)
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{
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_throTagertPressure = targetPressure;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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//_throTagertPressure = SC.GetValue<double>($"TM.PressureBalance.BalancePressure");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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//_EPV2OpenDelayTime = SC.GetValue<int>($"PM.{Module}.TimeDelayAlterEPV2Open");
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currentPressureUpOrDown = PressureUpOrDown.None;
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_isEPV2Open = _pm1Module.EPV2.Status;
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_isBTVOpen = _IoThrottle.TVValveEnable;
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if(Math.Abs(_throTagertPressure - _pm1Module.GetChamberPressure()) <= _pmPressureMaxDiff)
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{
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return Result.DONE;
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}
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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if (SC.GetValue<bool>("System.IsATMMode"))
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{
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return Result.DONE;
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}
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if (!_isEPV2Open)
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{
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SetIoValueByGroup((int)RoutineStep.SetEPV22, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay5, 2);
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}
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if (!_isBTVOpen)
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{
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SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10);
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTvMode, _IoThrottle, 10);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetTVto1050, _IoThrottle, 1050);
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TimeDelay((int)RoutineStep.TimeDelayForTV, 2);
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}
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SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2,PressureUpOrDown.Dowing);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _throTagertPressure);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _throTagertPressure, _pmPressureMaxDiff, _throttleTimeout);
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SetThrottlePressureAndWait((int)RoutineStep.SetTvPressure, _IoThrottle, _throTagertPressure, _pmPressureMaxDiff, _throttleTimeout);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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public override void Abort()
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{
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base.Abort();
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}
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}
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}
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