407 lines
16 KiB
C#
407 lines
16 KiB
C#
using Aitex.Core.Common.DeviceData;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.Util;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using SicPM1.Routines;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
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namespace SicPM1.RecipeExecutions
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{
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public class CleanRecipe : PMBaseRoutine
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{
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public enum RoutineStep
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{
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SetServoUp,
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SetChamberPressure,
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EnableRotation,
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OpenH2Valve,
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EnableHeater,
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PcCalibartion,
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RunStepOne,
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Wait,
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CheckCondition,
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WaitTempReach,
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}
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enum RecipeRunningState
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{
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Error,
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RecipeCompleted,
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ExecStep,
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TimeWait,
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ConditionWait,
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StepCompleted,
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Paused,
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}
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private string _recipeName;
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private object _recipeLocker = new object();
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private bool _isPSUHeaterJumpMode;
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private bool _isSCRHeaterJumpMode;
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private bool _isMFCJumpMode;
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private int _currentStepNumber;
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private DeviceTimer _stepTimer = new DeviceTimer();
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private DeviceTimer _recipeTimer = new DeviceTimer();
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private RecipeRunningState _state = RecipeRunningState.ExecStep;
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private PMServoToPressure _pmServoToPressure;
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public CleanRecipe(ModuleName module, PM1Module pm1) : base(module, pm1)
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{
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Module = module.ToString();
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Name = "CleanRecipe";
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_pmServoToPressure = new PMServoToPressure(module, pm1);
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}
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public void Init(string recipeName)
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{
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if (!recipeName.Contains("Sic\\Clean\\") && recipeName!="")
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{
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recipeName = "Sic\\Clean\\" + recipeName;
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}
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_recipeName = recipeName;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (!RecipeParser.Parse(_recipeName, Module, out var recipeHead, out var recipeSteps, out string reason))
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{
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Stop($"Load recipe {_recipeName} failed, {reason}");
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return Result.FAIL;
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}
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if (WaferManager.Instance.CheckHasWafer(PmDevice.Module, 0))
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{
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EV.PostWarningLog(Module, $"can not run clean recipe, Has wafer at {Module}");
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return Result.FAIL;
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}
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if (!PmDevice.Pump.IsOn || PmDevice.Pump.IsError)
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{
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EV.PostWarningLog(Module, $"can not run process, pump state is not correct");
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return Result.FAIL;
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}
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if (!PmDevice._ioThrottleValve.TVValveEnable)
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{
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EV.PostWarningLog(Module, $"can not run process, TV is not enable");
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return Result.FAIL;
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}
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if (PmDevice._ioThrottleValve.ControlModeFeedback != PressureCtrlMode.TVPressureCtrl)
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{
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EV.PostWarningLog(Module, $"can not run process, TV is not Pressure Ctrol Mode");
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return Result.FAIL;
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}
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if (!PmDevice.CheckIOValueByGroup(IoGroupName.I, true))
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{
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EV.PostAlarmLog(Module, $"can not run process,I valves is not open!");
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return Result.FAIL;
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}
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if (!PmDevice.CheckIOValueByGroup(IoGroupName.E, false))
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{
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EV.PostAlarmLog(Module, $"can not run process,E valves is not closed!");
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return Result.FAIL;
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}
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if (!PmDevice.CheckIOValueByGroup(IoGroupName.K, false))
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{
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EV.PostAlarmLog(Module, $"can not run process,K valves is not closed!");
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return Result.FAIL;
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}
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if (!PmDevice.CheckIOValueByGroup(IoGroupName.VentPump, true))
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{
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EV.PostAlarmLog(Module, $"can not run process,V72 is not open!");
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return Result.FAIL;
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}
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if (!PmDevice.PSU1.AllHeatEnable)
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{
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EV.PostAlarmLog(Module, $"can not run process,Heater is disable!");
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return Result.FAIL;
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}
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_currentStepNumber = 0;
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PmDevice.RecipeRunningInfo.RecipeName = _recipeName;
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PmDevice.RecipeRunningInfo.Head = recipeHead;
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PmDevice.RecipeRunningInfo.RecipeStepList = recipeSteps;
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PmDevice.RecipeRunningInfo.TotalTime = CalcRecipeTime();
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_state = RecipeRunningState.ExecStep;
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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SetConfinementRingUpAndWait((int)RoutineStep.SetServoUp, 30);
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ExecuteRoutine((int)RoutineStep.SetChamberPressure, _pmServoToPressure);
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EnableRotation((int)RoutineStep.EnableRotation, 5);
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OpenH2Valve((int)RoutineStep.OpenH2Valve, PmDevice, 2);
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EnableHeater((int)RoutineStep.EnableHeater, PmDevice, 5);
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MonitorRecipeRunInfo();
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lock (_recipeLocker)
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{
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try
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{
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switch (_state)
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{
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case RecipeRunningState.ExecStep:
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if (_currentStepNumber == 0)
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{
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_recipeTimer.Start(int.MaxValue);
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}
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_stepTimer.Start(PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime * 1000);
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Notify($"Running step {_currentStepNumber + 1} : {PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName}");
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//执行工艺程序命令
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foreach (var recipeCmd in PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands.Keys)
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{
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if (recipeCmd == "SusHeaterSetMode")
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{
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd] == "Jump")
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_isPSUHeaterJumpMode = true;
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else
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_isPSUHeaterJumpMode = false;
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continue;
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}
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if (recipeCmd == "WWHeaterSetMode")
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{
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd] == "Jump")
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_isSCRHeaterJumpMode = true;
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else
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_isSCRHeaterJumpMode = false;
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continue;
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}
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if (recipeCmd == "FlowSetMode")
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{
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd] == "Jump")
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_isMFCJumpMode = true;
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else
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_isMFCJumpMode = false;
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continue;
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}
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if (IsCmdSkip(recipeCmd)) // 不是注册的方法，需要跳过
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continue;
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if (!OP.CanDoOperation($"{Module}.{recipeCmd}", out string reason, PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd]))
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{
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EV.PostAlarmLog(Module, $"Can not execute {recipeCmd}, {reason}");
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return Result.FAIL;
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}
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else
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{
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int time = (int)PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime * 1000;
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if (recipeCmd.StartsWith("TC1") && _isPSUHeaterJumpMode)
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{
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time = 1;
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}
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if (recipeCmd.StartsWith("TC2") && _isSCRHeaterJumpMode)
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{
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time = 1;
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}
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if (recipeCmd.StartsWith("Mfc") && recipeCmd.EndsWith(".Ramp") && !PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsDummyStep)
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{
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if (_isMFCJumpMode)
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{
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time = 1;
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}
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}
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if ((recipeCmd == "TV.SetPressure"
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|| recipeCmd == "PMServo.SetActualSpeed"
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|| recipeCmd.StartsWith("Pressure") && recipeCmd.EndsWith(".Ramp")
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|| recipeCmd.StartsWith("Mfc") && recipeCmd.EndsWith(".Ramp"))
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&& !PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsDummyStep)
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{
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if (_currentStepNumber >= 1)
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{
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int previousStepNumber = _currentStepNumber - 1;
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if (PmDevice.RecipeRunningInfo.RecipeStepList[previousStepNumber].IsDummyStep)
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previousStepNumber = _currentStepNumber - 2;
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if (PmDevice.RecipeRunningInfo.RecipeStepList[previousStepNumber].RecipeCommands.ContainsKey(recipeCmd))
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{
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string previousValue = PmDevice.RecipeRunningInfo.RecipeStepList[previousStepNumber].RecipeCommands[recipeCmd];
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string currentValue = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd];
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if (previousValue == currentValue)
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{
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time = 1;
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}
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}
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}
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}
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OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, time, PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd]);
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}
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}
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].EndBy == EnumEndByCondition.ByTime)
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_state = RecipeRunningState.TimeWait;
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else
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_state = RecipeRunningState.ConditionWait;
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break;
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case RecipeRunningState.TimeWait:
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if (_stepTimer.IsTimeout())
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{
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_state = RecipeRunningState.StepCompleted;
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}
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break;
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case RecipeRunningState.ConditionWait:
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{
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if (_stepTimer.IsTimeout())
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{
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_state = RecipeRunningState.StepCompleted;
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}
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}
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break;
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case RecipeRunningState.StepCompleted:
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_currentStepNumber++;
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if (_currentStepNumber >= PmDevice.RecipeRunningInfo.RecipeStepList.Count)
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{
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_currentStepNumber = PmDevice.RecipeRunningInfo.RecipeStepList.Count - 1;
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_state = RecipeRunningState.RecipeCompleted;
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}
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else
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{
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_state = RecipeRunningState.ExecStep;
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}
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break;
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case RecipeRunningState.RecipeCompleted:
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{
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_recipeTimer.Stop();
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Notify("Finished");
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return Result.DONE;
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}
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}
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return Result.RUN;
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}
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catch (Exception ex)
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{
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LOG.Write(ex);
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return Result.FAIL;
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}
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}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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catch (Exception ex)
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{
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LOG.Write(ex, String.Format("CleanRecipe has exception"));
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throw (ex);
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}
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Notify("Finished");
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return Result.DONE;
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}
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protected void EnableHeater(int id, PMModuleBase pm, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Set {pm.Name} Heater Enable");
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if (!pm.EnableHeater(true, out string reason))
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{
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Stop($"Set {pm.Name} Heater Enable failed, {reason}");
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return false;
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}
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return true;
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}, () =>
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{
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return pm.CheckHeaterEnable();
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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if (ret.Item2 == Result.TIMEOUT)
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{
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Stop($"Set {pm.Name} Heater Enable timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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{
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throw (new RoutineBreakException());
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}
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}
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}
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protected int CalcRecipeTime()
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{
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double total = 0;
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for (int i = 0; i < PmDevice.RecipeRunningInfo.RecipeStepList.Count; i++)
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{
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if (!PmDevice.RecipeRunningInfo.RecipeStepList[i].IsDummyStep) // 不统计虚拟Step的时间
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{
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total += PmDevice.RecipeRunningInfo.RecipeStepList[i].StepTime;
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}
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}
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return (int)total;
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}
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private void MonitorRecipeRunInfo()
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{
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try
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{
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PmDevice.RecipeRunningInfo.StepNumber = _currentStepNumber + 1;
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PmDevice.RecipeRunningInfo.StepName = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName;
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PmDevice.RecipeRunningInfo.StepTime = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime;
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PmDevice.RecipeRunningInfo.TotalElapseTime = _recipeTimer.GetElapseTime() / 1000;
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}
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catch (Exception ex)
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{
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}
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}
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}
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}
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