1950 lines
224 KiB
XML
1950 lines
224 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<root system="Sic">
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<configs name="System">
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<config default="true" name="IsSimulatorMode" description="Is Simulator Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsATMMode" description="Is ATM Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsCycleMode" description="Is Cycle Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="3" name="CycleCount" description="Cycle Count" max="10000" min="1" paramter="" tag="" unit="" type="Integer" />
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<config default="10" name="DefaultTrayProcessCount" description="默认Tray盘可使用次数 " max="100" min="1" paramter="" tag="" unit="" type="Integer" />
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<config default="true" name="EnablePlatformCycle" visible="false" description="Enable Platform Cycle" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="IsBypassIoATMSensor" visible="false" description="Is Bypass IO ATM Sensor" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="30" name="LiftMotionTimeout" description="Lift Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
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<config default="30" name="DoorMotionTimeout" description="Door Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
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<config default="30" name="SlitValveMotionTimeout" description="Slit Valve Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="true" />
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<config default="true" name="AutoAlignManualTransfer" visible="false" description="Auto Align Manual Transfer" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="AutoPassCooling" visible="false" description="Auto Pass Cooling" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="RequestAWCDataAfterPick" visible="false" description="Request AWC Data After Pick" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="RequestAWCDataAfterPlace" visible="false" description="Request AWC Data After Place" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="1000" name="DataCollectionInterval" description="Data Collection Interval" max="10000" min="20" paramter="" tag="" unit="ms" type="Integer" />
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<config default="180" name="LogsSaveDays" description="Logs Save Days" max="10000" min="1" paramter="" tag="" unit="" type="Integer" />
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<config default="false" name="EnableDataBaseClean" description="Enable DataBase Clean" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="180" name="DataKeepDays" description="Data Keep Days" max="10000" min="1" paramter="" tag="" unit="" type="Integer" />
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<config default="true" name="IsIgnoreSaveDB" description="IO不存储到数据库" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="RecipeCascadeLoading" visible="false" description="启用瀑布流方式加载Recipe" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="RecipeSaveToDB" description="Recipe文件保存到数据库" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
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<config default="true" name="IsPMHostSignalTower" description="是否使用PM PLC控制三色灯；如果设定为False，则使用TM PLC控制三色灯" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
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<config default="false" name="SingleSessionLoginMode" description="是否启用单会话登录模式，即同一个账户同一时间仅允许一个UI登录" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<configs name="Scheduler" visible="false">
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<config default="15" name="WaitLoadTimeOut" description="Wait Load TimeOut" max="1000" min="1" paramter="" tag="" unit="s" type="Double" visible="false" />
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<config default="2" name="WaferCountBelowWhichStartNewProcessJob" description="Wafer Count Below Which Start New Process Job" max="25" min="1" paramter="" tag="" unit="" type="Integer" visible="false" />
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<config default="true" name="GroupWaferBySequence" description="Group Wafer By Sequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
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<config default="false" name="CassetteFromAToB" description="CassetteA取片做完工艺后回到另外一个Cassette" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="IsRunInParallelMode" description="并行模式,从CST取片时考虑两腔体效率" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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</configs>
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<configs name="SetUp">
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<config default="true" name="IsTMInstalled" visible="false" description="Is TM Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="IsLoadLockInstalled" visible="false" description="Is LoadLock Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsUnLoadInstalled" description="Is UnLoad Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="IsBufferInstalled" description="Is Buffer Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsEFEMInstalled" description="Is EFEM Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="IsPM1Installed" description="Is PM1 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="IsPM2Installed" description="Is PM2 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />`
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<config default="false" name="IsAlignerInstalled" description="Is Aligner Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsCassetteALInstalled" description="Is Wafer CassetteL Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsCassetteARInstalled" description="Is Wafer CassetteR Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsCassetteBLInstalled" description="Is Tray Cassette Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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</configs>
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<configs name="Recipe">
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<config default="Sic" name="SupportedChamberType" description="Supported Chamber Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
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<config default="Process,Routine" name="SupportedProcessType" description="Supported Process Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
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<config default="PM1,PM2" name="ChamberModules" description="Chamber Modules" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
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<config default="false" name="ResetEditorPassword" description="重置Recipe编辑器锁定密码" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="600" name="EditorAutoLockTimeout" description="Recipe编辑器自动锁定超时时间" max="100000" min="5" paramter="" tag="" unit="s" type="Integer" visible="false" />
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<config default="8C6976E5B5410415BDE908BD4DEE15DFB167A9C873FC4BB8A81F6F2AB448A918" name="EditorPassword" description="Recipe编辑器锁定密码" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
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</configs>
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<configs name="SignalTower" visible="false">
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<config default="red=1;yellow=2;green=3;blue=4;white=5;buzzer=6" name="Light" description="设置灯的种类，顺序" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
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<config default="System.IsAlarm=System in alarm status;System.IsIdle=System in idle status" name="Trigger" description="设置触发灯塔的项" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
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<config default="System.IsAlarm=on,off,off,off,off;System.IsIdle=off,on,off,off,off;" name="Value" description="设置灯塔触发的逻辑关系" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
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</configs>
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<configs name="FDC" visible="false">
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<config default="Process" name="DataGroupName" description="FDC data group" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
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<config default="1000" name="DelayTime" description="Step Delay time before collection data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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<config default="100" name="SampleInterval" description="interval time collection sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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</configs>
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</configs>
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<configs name="PM">
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<config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="120" name="PrepareTransferTimeout" description="Prepare Transfer Timeout" max="10000" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="120" name="HandoffTransferTimeout" description="Handoff Transfer Timeout" max="10000" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="120" name="PostTransferTimeout" description="Post Transfer Timeout" max="10000" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="1200" name="ProcessTimeout" visible="false" description="Process Timeout" max="100000" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="1" name="OperationResetTime" visible="false" description="Operation Reset Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" />
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<config default="2" name="OperationTimeout" visible="false" description="Operation Timeout" max="10000" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="960" name="AtmPressureBase" description="Atm Pressure Base" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
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<config default="302" name="VacuumPressureBase" description="Vacuum Pressure Base" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
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<config default="false" name="IsAtmIdleRoutine" visible="false" description="是否以Recipe的形式运行ATM Idle" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsVacIdleRoutine" visible="false" description="是否以Recipe的形式运行VAC Idle" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsProcessIdleRoutine" visible="false" description="是否Recipe的形式运行Process Idle" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsPumpRoutine" visible="false" description="是否Recipe的形式运行Pump" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsVentRoutine" visible="false" description="是否Recipe的形式运行Vent" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsPurgeRoutine" visible="false" description="是否Recipe的形式运行Purge" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsCleanRoutine" visible="false" description="是否Recipe的形式运行Clean" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsExchangeMOTCSRoutine" visible="false" description="是否Recipe的形式运行ExchangeTCS" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsExchangeMOTMARoutine" visible="false" description="是否Recipe的形式运行ExchangeTMA" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsIsolationRoutine" visible="false" description="是否Recipe的形式运行Isolation" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsLeakCheckRoutine" visible="false" description="是否Recipe的形式运行LeakCheck" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsAbortRoutine" visible="false" description="是否Recipe的形式运行Abort" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="15" name="LidMotionTimeout" visible="false" description="LidMotionTimeout" max="100" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="180" name="LidEnableOpenAfterHeatDisbaleTime" description="在加热停止多少分钟后才能执行开腔" max="1000" min="1" paramter="" tag="" unit="Minute" type="Integer" />
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<configs name="RecipeConfig">
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<configs name="SHFlow_SHTotalFlow">
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<configs name="Ar/H2Switch">
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<config default="Ar" name="Default" description="Default Value" max="" min="" paramter="Ar;H2" tag="ReadOnlySelection" unit="" type="String" visible="true" />
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</configs>
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<configs name="SHTotalFlow">
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<config default="140000" name="Default" description="Default Value" max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
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<config default="200000" name="Max" description="Maximum Value" max="200000" min="200000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
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</configs>
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<!--CarrayGasFlow CarrayGasFlow(M40)-->
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<configs name="CarrayGasFlow(M40)">
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<config default="5000" name="Default" description="Default Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
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<config default="100000" name="Max" description="Maximum Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
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</configs>
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<configs name="SHTotalFlowSplitRatio">
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<config default="18:46:84" name="Default" description="Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="true" />
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</configs>
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<configs name="FlowSetMode">
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<config default="Ramp" name="Default" description="Default Value" max="" min="" paramter="Ramp;Jump" tag="ReadOnlySelection" unit="" type="String" visible="true" />
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</configs>
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</configs>
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<configs name="Pressure_Rotation">
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<configs name="PressureSet">
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<config default="300" name="Default" description="Default Value" max="1100" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
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<config default="1100" name="Max" description="Maximum Value" max="1100" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
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</configs>
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<configs name="RotationSet">
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<config default="300" name="Default" description="Default Value" max="1000" min="0" paramter="" tag="" unit="rpm" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="rpm" type="Integer" visible="false" />
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<config default="1000" name="Max" description="Maximum Value" max="1000" min="1000" paramter="" tag="" unit="rpm" type="Integer" visible="false" />
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</configs>
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</configs>
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<configs name="Temperature_ControlMode">
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<configs name="PSUControlMode">
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<config default="Power" name="Default" description="Default Value" max="" min="" paramter="PyroAuto;PyroFollow;Power" tag="ReadOnlySelection" unit="" type="String" />
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</configs>
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<configs name="PSUSetMode">
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<config default="Ramp" name="Default" description="Default Value" max="" min="" paramter="Ramp;Jump" tag="ReadOnlySelection" unit="" type="String" visible="true" />
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</configs>
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<configs name="SCRControlMode">
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<config default="Power" name="Default" description="Default Value" max="" min="" paramter="Pyro;Power" tag="ReadOnlySelection" unit="" type="String" visible="true" />
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</configs>
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<configs name="SCRSetMode">
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<config default="Ramp" name="Default" description="Default Value" max="" min="" paramter="Ramp;Jump" tag="ReadOnlySelection" unit="" type="String" visible="true" />
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</configs>
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</configs>
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<configs name="Temperature_TempSetting">
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<configs name="PSUInnerTempSet">
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<config default="50" name="Default" description="Default Value" max="1720" min="0" paramter="" tag="" unit="℃" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="℃" type="Integer" visible="false" />
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<config default="1720" name="Max" description="Maximum Value" max="1800" min="0" paramter="" tag="" unit="℃" type="Integer" visible="false" />
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</configs>
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<configs name="PSUMiddleTempSet">
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<config default="0" name="Default" description="Default Value" max="1720" min="0" paramter="" tag="" unit="℃" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="℃" type="Integer" visible="false" />
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<config default="1720" name="Max" description="Maximum Value" max="1800" min="0" paramter="" tag="" unit="℃" type="Integer" visible="false" />
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</configs>
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<configs name="PSUOuterTempSet">
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<config default="0" name="Default" description="Default Value" max="1720" min="0" paramter="" tag="" unit="℃" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="℃" type="Integer" visible="false" />
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<config default="1720" name="Max" description="Maximum Value" max="1800" min="0" paramter="" tag="" unit="℃" type="Integer" visible="false" />
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</configs>
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<configs name="SCRTempSet">
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<config default="0" name="Default" description="Default Value" max="1650" min="0" paramter="" tag="" unit="℃" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="℃" type="Integer" visible="false" />
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<config default="1650" name="Max" description="Maximum Value" max="2000" min="0" paramter="" tag="" unit="℃" type="Integer" visible="false" />
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</configs>
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</configs>
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<configs name="Temperature_HeaterOutput">
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<configs name="PSUInnerRatioSet">
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<config default="5" name="Default" description="Default Value" max="100" min="0" paramter="" tag="" unit="%" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="%" type="Integer" visible="false" />
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<config default="100" name="Max" description="Maximum Value" max="100" min="100" paramter="" tag="" unit="%" type="Integer" visible="false" />
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</configs>
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<configs name="PSUMiddleRatioSet">
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<config default="16" name="Default" description="Default Value" max="100" min="0" paramter="" tag="" unit="%" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="%" type="Integer" visible="false" />
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<config default="100" name="Max" description="Maximum Value" max="100" min="100" paramter="" tag="" unit="%" type="Integer" visible="false" />
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</configs>
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<configs name="PSUOuterRatioSet">
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<config default="25" name="Default" description="Default Value" max="100" min="0" paramter="" tag="" unit="%" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="%" type="Integer" visible="false" />
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<config default="100" name="Max" description="Maximum Value" max="100" min="100" paramter="" tag="" unit="%" type="Integer" visible="false" />
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</configs>
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<configs name="PSU2OutputLimitHigh">
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<config default="100" name="Default" description="Default Value" max="100" min="0" paramter="" tag="" unit="%" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="%" type="Integer" visible="false" />
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<config default="100" name="Max" description="Maximum Value" max="100" min="100" paramter="" tag="" unit="%" type="Integer" visible="false" />
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</configs>
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<configs name="SCRUpperRatioSet">
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<config default="12" name="Default" description="Default Value" max="100" min="0" paramter="" tag="" unit="%" type="String" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="%" type="Integer" visible="false" />
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<config default="100" name="Max" description="Maximum Value" max="100" min="100" paramter="" tag="" unit="%" type="Integer" visible="false" />
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</configs>
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<configs name="SCRMiddleRatioSet">
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<config default="6" name="Default" description="Default Value" max="100" min="0" paramter="" tag="" unit="%" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="%" type="Integer" visible="false" />
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<config default="100" name="Max" description="Maximum Value" max="100" min="100" paramter="" tag="" unit="%" type="Integer" visible="false" />
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</configs>
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<configs name="SCRLowerRatioSet">
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<config default="8" name="Default" description="Default Value" max="100" min="0" paramter="" tag="" unit="%" type="Integer" visible="true" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="%" type="Integer" visible="false" />
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<config default="100" name="Max" description="Maximum Value" max="100" min="100" paramter="" tag="" unit="%" type="Integer" visible="false" />
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</configs>
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</configs>
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<configs name="SHFlow_SiSource_SiSourceTotalFlow">
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<configs name="SiSourceTotalFlow">
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<config default="140000" name="Default" description="Default Value" max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
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<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
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<config default="200000" name="Max" description="Maximum Value" max="200000" min="200000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
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</configs>
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</configs>
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<configs name="SHFlow_SiSource_SiH4Flow">
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<configs name="SiH4FlowMode">
|
||
<config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent;Run" tag="ReadOnlySelection" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="SiH4Flow(M14)">
|
||
<config default="25" name="Default" description="Default Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="50" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
||
<config default="500" name="Max" description="Maximum Value" max="500" min="500" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_SiSource_TCSFlow">
|
||
<configs name="TCSFlowMode">
|
||
<config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent;Run" tag="ReadOnlySelection" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="TCSBubbLowFlow(M11)">
|
||
<config default="50" name="Default" description="Default Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="100" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000" name="Max" description="Maximum Value" max="1000" min="1000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="TCSBubbHighFlow(M10)">
|
||
<config default="150" name="Default" description="Default Value" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="5000" name="Max" description="Maximum Value" max="5000" min="5000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="TCSPushFlow(M12)">
|
||
<config default="100" name="Default" description="Default Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="100" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000" name="Max" description="Maximum Value" max="1000" min="1000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="TCSBubbPressure(PC3)">
|
||
<config default="1900" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
<config default="3000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_SiSource_HClFlow">
|
||
<configs name="HClFlowMode ">
|
||
<config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent;Run" tag="ReadOnlySelection" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="HClFlow(M13)">
|
||
<config default="100" name="Default" description="Default Value" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="5000" name="Max" description="Maximum Value" max="5000" min="5000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_SiSource_SiSourceSplit">
|
||
<configs name="SiSourceSplitRatio">
|
||
<config default="18:46:84" name="Default" description="Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="SiSourcePushPressure(PC6)">
|
||
<config default="1260" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="3000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="SiSourceInnerFlow(M23)">
|
||
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="10000" name="Max" description="Maximum Value" max="10000" min="10000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="SiSourceMiddleFlow(M22)">
|
||
<config default="3000" name="Default" description="Default Value" max="20000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="2000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="20000" name="Max" description="Maximum Value" max="20000" min="20000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="SiSourceOuterFlow(M9)">
|
||
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
<config default="10000" name="Max" description="Maximum Value" max="10000" min="10000" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_CSource_CSourceTotalFlow">
|
||
<configs name="CSourceTotalFlow">
|
||
<config default="8000" name="Default" description="Default Value" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000000" name="Max" description="Maximum Value" max="1000000" min="1000000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_CSource_C2H4Flow">
|
||
<configs name="C2H4FlowMode ">
|
||
<config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent;Run" tag="ReadOnlySelection" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="C2H4Flow(M16)">
|
||
<config default="25" name="Default" description="Default Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="50" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
||
<config default="500" name="Max" description="Maximum Value" max="500" min="500" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<!--<configs name="V99 "><config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent" tag="ReadOnlySelection" unit="" type="String" visible="true" /></configs><configs name="BalanceCFlow"><config default="3" name="Default" description="Default Value" max="50" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" /><config default="0.75" name="Min" description="Minimum Value" max="10" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" /><config default="50" name="Max" description="Maximum Value" max="50" min="50" paramter="" tag="" unit="sccm" type="Integer" visible="false" /></configs>-->
|
||
</configs>
|
||
<configs name="SHFlow_CSource_CSourceSplit">
|
||
<configs name="CSourceSplitRatio">
|
||
<config default="18:46:84" name="Default" description="Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="CSourcePushPressure(PC7)">
|
||
<config default="1260" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
<config default="3000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="CSourceInnerFlow(M26)">
|
||
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="10000" name="Max" description="Maximum Value" max="10000" min="10000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="CSourceMiddleFlow(M25)">
|
||
<config default="3000" name="Default" description="Default Value" max="20000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="2000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="20000" name="Max" description="Maximum Value" max="20000" min="20000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="CSourceOuterFlow(M15)">
|
||
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="10000" name="Max" description="Maximum Value" max="10000" min="10000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_Dope_DopeTotalFlow">
|
||
<configs name="DopeTotalFlow">
|
||
<config default="1000" name="Default" description="Default Value" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000000" name="Max" description="Maximum Value" max="1000000" min="1000000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_Dope_N2Flow">
|
||
<configs name="N2FlowMode">
|
||
<config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent;Run" tag="ReadOnlySelection" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="N2ActualFlow">
|
||
<config default="25" name="Default" description="Default Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
||
<config default="1000000" name="Max" description="Maximum Value" max="1000000" min="1000000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="N2LowFlow(M4)">
|
||
<config default="50" name="Default" description="Default Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="50" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
||
<config default="500" name="Max" description="Maximum Value" max="500" min="500" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="DilutFlowForN2(M3)">
|
||
<config default="200" name="Default" description="Default Value" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="5000" name="Max" description="Maximum Value" max="5000" min="5000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="DilutedN2Flow(M6)">
|
||
<config default="75" name="Default" description="Default Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="50" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
||
<config default="500" name="Max" description="Maximum Value" max="500" min="500" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="N2PostDilutPressure(PC1)">
|
||
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
<config default="3000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="N2HighFlowMode">
|
||
<config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent;Run" tag="ReadOnlySelection" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="N2HighFlow(M5)">
|
||
<config default="380" name="Default" description="Default Value" max="20000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="2000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="20000" name="Max" description="Maximum Value" max="20000" min="20000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_Dope_TMAFlow">
|
||
<configs name="TMAFlowMode ">
|
||
<config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent;Run" tag="ReadOnlySelection" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="TMABubbFlow(M7)">
|
||
<config default="50" name="Default" description="Default Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="50" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
||
<config default="500" name="Max" description="Maximum Value" max="500" min="500" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="TMAPushFlow(M8)">
|
||
<config default="50" name="Default" description="Default Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="100" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000" name="Max" description="Maximum Value" max="1000" min="1000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="TMABubbPressure(PC2)">
|
||
<config default="900" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
<config default="3000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_Dope_DopeSplit">
|
||
<configs name="DopeSplitRatio">
|
||
<config default="18:46:84" name="Default" description="Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="true" />
|
||
</configs>
|
||
<configs name="DopePushPressure(PC5)">
|
||
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
<config default="3000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="DopeInnerFlow(M20)">
|
||
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="10000" name="Max" description="Maximum Value" max="10000" min="10000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="DopeMiddleFlow(M19)">
|
||
<config default="3000" name="Default" description="Default Value" max="20000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="2000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="20000" name="Max" description="Maximum Value" max="20000" min="20000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="DopeOuterFlow(M2)">
|
||
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="10000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="SHFlow_SHPushFlow">
|
||
<configs name="SHPushTotalFlow">
|
||
<config default="0" name="Default" description="Default Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000000" name="Max" description="Maximum Value" max="1000000" min="1000000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="SHInnerFlow">
|
||
<config default="0" name="Default" description="Default Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000000" name="Max" description="Maximum Value" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="SHMiddleFlow">
|
||
<config default="0" name="Default" description="Default Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000000" name="Max" description="Maximum Value" max="1000000" min="1000000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="SHOuterFlow">
|
||
<config default="0" name="Default" description="Default Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000000" name="Max" description="Maximum Value" max="1000000" min="1000000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="InnerPushFlow(M29)">
|
||
<config default="15000" name="Default" description="Default Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="100000" name="Max" description="Maximum Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="MiddlePushFlow(M31)">
|
||
<config default="4500" name="Default" description="Default Value" max="30000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="3000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="30000" name="Max" description="Maximum Value" max="30000" min="30000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="OuterPushFlow(M28)">
|
||
<config default="7500" name="Default" description="Default Value" max="50000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="50000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="50000" name="Max" description="Maximum Value" max="50000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="Purge_SHPeripheryPurge">
|
||
<configs name="SHPurgeFlow(M27)">
|
||
<config default="2000" name="Default" description="Default Value" max="50000" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
||
<config default="0" name="Min" description="Minimum Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="50000" name="Max" description="Maximum Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="OpticPurgeFlow(M33)">
|
||
<config default="500" name="Default" description="Default Value" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="5000" name="Max" description="Maximum Value" max="5000" min="5000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="Purge_ChamberPeripheryPurge">
|
||
<configs name="GasRingPurgeFlow(M32)">
|
||
<config default="800" name="Default" description="Default Value" max="20000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="2000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="20000" name="Max" description="Maximum Value" max="20000" min="20000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="ChamberPurgeFlow(M35)">
|
||
<config default="1000" name="Default" description="Default Value" max="30000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="3000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="30000" name="Max" description="Maximum Value" max="30000" min="30000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="RotationUpPurgeFlow(M36)">
|
||
<config default="1000" name="Default" description="Default Value" max="30000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="3000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="30000" name="Max" description="Maximum Value" max="30000" min="30000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="ShutterPurgeFlow(M37)">
|
||
<config default="600" name="Default" description="Default Value" max="20000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="20000" name="Max" description="Maximum Value" max="20000" min="20000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="HeaterWFPurgeFlow(M38)">
|
||
<config default="1000" name="Default" description="Default Value" max="20000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="3000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="20000" name="Max" description="Maximum Value" max="20000" min="20000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="Purge_VentFlow">
|
||
<configs name="TotalVentFlow">
|
||
<config default="2000" name="Default" description="Default Value" max="20000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="9999999" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="1000000" name="Max" description="Maximum Value" max="9999999" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="VentPushFlow(M1)">
|
||
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
<config default="10000" name="Max" description="Maximum Value" max="10000" min="10000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="VentPreExhaustPressure(PC4)">
|
||
<config default="1200" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="true" />
|
||
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
<config default="3000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
|
||
</configs>
|
||
</configs>
|
||
</configs>
|
||
<configs name="PM1">
|
||
<config default="false" name="BypassInterlock" description="Bypass Interlock" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="BypassEnableTable" description="Bypass EnableTable" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="Sic" visible="false" name="RecipeChamberType" description="Recipe Chamber Type" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="" name="LastRecipeName" description="last recipe name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="127.0.01:102" name="SiemensIP" description="Siemens IP Address,Default IP:192.168.1.105:102" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="S1500" visible="false" name="SiemensType" description="Siemens Type" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="5" name="ThrottlePressureMaxDiff" description="蝶阀调节值与实际压力的差值小于此数值则表示到位" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="120" name="ThrottlePressureTimeout" description="蝶阀调节值超时时间" max="2000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="5" name="ThrottlePressureRate" description="蝶阀每秒调节速率(mbar/每秒)" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="5" name="ThrottlePositionRate" description="蝶阀每秒调节速率(百分比/每秒)" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="300" visible="false" name="RotationCloseTimeout" description="关闭旋转超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="0" name="ThrottlePositionDefaultValue" description="蝶阀位置模式默认值" max="100" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
<config default="1100" name="ThrottlePressureDefaultValue" description="蝶阀压力模式默认值" max="1500" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
<config default="400" name="ThrottlePositionModeMaxPressure" description="蝶阀允许位置模式需要的最大压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1000*10,3000*10,3000*10,4000*10,6000*10,8000*10,10000*10,12000*10,14000*10,2500*10" name="MFC28DynamicFlow" description="MFC28 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="500*10,2000*10,2500*10,3500*10,5500*10,7500*10,9500*10,11500*10,13000*10,2000*10" name="MFC29DynamicFlow" description="MFC29 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="1000*10,3000*10,5000*10,6000*10,8000*10,10000*10,12000*10,14000*10,16000*10,4000*10" name="MFC31DynamicFlow" description="MFC31 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC40DynamicFlow" description="MFC40 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="false" name="PreTransferPSUEnable" description="传盘是否开启PSU加热" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="true" name="PreTransferSCREnable" description="传盘是否开启SCR加热" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="ReactorSuspectorCheckEnable" description="传盘后是否检查ReactorSuspectorCheck Sensor" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="50" name="ReactorPressRisingRateLimit" description="腔体压力上升速率超速报警" max="1000" min="0" paramter="" tag="" unit="mbar/s" type="Double" />
|
||
<config default="1020" name="PressureForV27ForceOpen" description="Pressure For V27 Switch" max="1150" min="850" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="960" name="PressureForV27ForceClose" description="Pressure For V27 Switch" max="1150" min="850" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="20" name="TCSFluidInfusionTime" description="TCS补液时间" max="600" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="Sic\Routine\ATMIdle" name="AtmIdleFileName" description="ATM Idle Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\VACIdle" name="VacIdleFileName" description="VAC Idle Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\ProcessIdle" name="ProcessIdleFileName" description="Process Idle Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\Pump" name="PumpFileName" description="Pump Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\Vent" name="VentFileName" description="Vent Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\\Routine\Purge" name="PurgeFileName" description="Purge Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\\Routine\Clean" name="CleanFileName" description="Clean Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\ExchangeMOTCS" name="ExchangeMOTCSFileName" description="ExchangeTCS Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\ExchangeMOTMA" name="ExchangeMOTMAFileName" description="ExchangeTMA Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\Isolation" name="IsolationFileName" description="Isolation Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\LeakCheck" name="LeakCheckFileName" description="LeakCheck Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\Abort" name="AbortFileName" description="Abort Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="" name="OpenLidCountDownTime" visible="false" description="临时保存开腔倒计时开始时间" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="TMAEnable" description="TMA是否选装" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="C2H4" name="ChType" description="CH Type" max="" min="" paramter="C2H4;C3H8" tag="ReadOnlySelection" unit="" type="String" visible="false"/>
|
||
<configs name="Heater">
|
||
<config default="false" name="PSUOuterAutoEnable" description="PSU Outer是否为Auto控制" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="10" name="TempRampRate" description="TC温度每秒调节速率(℃/每秒)" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="0.1" name="AmpereRampRate" description="TC1功率每秒调节速率(%/每秒)" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="0.1" name="KWRampRate" description="TC2功率每秒调节速率(%/每秒)" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="20" name="PyroWarmEffectFromTime" description="Pyro温度报警在进入Process状态下多久才有效" max="1800" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="PyroWarmEffectEndTime" description="Pyro温度报警在结束Process状态前多久才有效" max="1800" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="50" name="PyroWarmMaxDiff" description="Pyro的MidlleTemp,OuterTemp任意两个温度差大于此数值需要报警" max="1000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="600" name="PyroWarmBaseTemp" visible="false" description="Pyro温度报警需要满足BaseTemp" max="2000" min="200" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="true" name="PyroWarmIsAlarm" visible="false" description="Pyro温度差过大报警类型为Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="1700" name="PSUTempHighLimit" description="PSU Temp High Limit(℃)" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="900" name="PSUTempLowLimit" description="PSU Temp Low Limit(℃)" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="1700" name="SCRTempHighLimit" visible="false" description="SCR Temp High Limit(℃)" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="900" name="SCRTempLowLimit" visible="false" description="SCR Temp Low Limit(℃)" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="0.5" name="PSU1ResistanceMax" description="Max PSU Inner Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="PSU2ResistanceMax" description="Max PSU Middle Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="PSU3ResistanceMax" description="Max PSU Outer Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="SCR1ResistanceMax" description="Max SCR Upper Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="SCR2ResistanceMax" description="Max SCR Middle Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="SCR3ResistanceMax" description="Max SCR Lower Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="6" name="ResistanceMonitorHysteresis" description="电阻检测迟滞时间，当电阻持续超限指定时间后，再产生报警" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="Warning" name="InProcessResistanceFailAlarmLevel" description="工艺过程中检测到电阻超限时产生报警的等级" max="" min="" paramter="Alarm;Warning" tag="ReadOnlySelection" unit="" type="String" />
|
||
<config default="1" name="InProcessResistanceMonitorIgnoreDuration" description="工艺启动后和结束前的指定时间内忽略电阻超限检查" max="100" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
|
||
<config default="true" visible="false" name="AETempRasingFastIsAlarm" description="AETemp温度上升过快报警类型为Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="100" visible="false" name="SCRTempRasingRate" description="SCRTemp每秒的上升速率,超过此范围报警" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="20" name="AETempMiddleRasingRate" description="AETemp Middle每秒的上升速率,超过此范围报警" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="20" name="AETempOuterRasingRate" description="AETemp Outer每秒的上升速率,超过此范围报警" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<!--<config default="5" name="AETempFrequency" description="AETemp 采样频率" max="300" min="0" paramter="" tag="" unit="s" type="Double" />-->
|
||
<config default="850" name="PlacePVTempLimit" description="往PM放盘时,需要等待温度低于此数值" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="900" name="PickPVTempLimit" description="从PM取盘时,需要等待温度低于此数值" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="1.0" name="PSU1Y" description="底部恒功率模式控制方案PSU1百分比" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="1.0" name="PSU2Y" description="底部恒功率模式控制方案PSU2百分比" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="1.0" name="PSU3Y" description="底部恒功率模式控制方案PSU3百分比" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="0.5" name="PSU1Power" description="底部恒功率模式控制方案PSU1功率" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="6.0" name="PSU2Power" description="底部恒功率模式控制方案PSU2功率" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="6.0" name="PSU3Power" description="底部恒功率模式控制方案PSU3功率" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
|
||
<!--
|
||
<config default="false" name="PSU2OutputLimitHighTuningByRecipe" description="PSU2输出限幅上限值由Recipe调节" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="1600" name="PSU2OutputLimitHighTuningTemp" description="PSU2输出限幅上限值生效温度" max="2500" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="100" name="PSU2OutputLimitHigh" description="PSU2输出限幅上限值" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="0" name="PSU2OutputLimitLow" description="PSU2输出限幅下限值" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
-->
|
||
</configs>
|
||
<configs name="ITAUPSA">
|
||
<config default="false" name="EnableDevice" description="PM1 UPSA install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="192.168.1.106" name="Address" description="PM1 UPSA address 192.168.1.106" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="PM1 UPSA device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="PM1 UPSA log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<configs name="ITAUPSB">
|
||
<config default="false" name="EnableDevice" description="PM1 UPSB install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="192.168.1.116" name="Address" description="PM1 UPSB address 192.168.1.116" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="PM1 UPSB device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="PM1 UPSB log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<configs name="EATONUPS">
|
||
<config default="false" name="EnableDevice" description="PM1 EATONUPS install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="192.168.1.106" name="Address" description="PM1 EATONUPS address 192.168.1.106" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="PM1 EATONUPS device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="PM1 EATONUPS log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<configs name="ProcessIdle">
|
||
<config default="10" name="RotationSpeed" description="电机设置转速" max="1000" min="0" paramter="" tag="" unit="rpm" type="Integer" />
|
||
<config default="200" name="FinalPressure" description="最后保持的压力" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PressureBalanceTime" description="压力平衡时间" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="true" name="PSUHeaterEnable" description="PSU加热是否启用" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
<config default="0" name="PSUHeaterMode" description="PSU HeatMode:0为Power,1为TC,2为Pyro" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="false" />
|
||
<config default="5" name="PSUInnerRatio" description="PSU Inner Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="16" name="PSUMiddleRatio" description="PSU Middle Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="25" name="PSUOuterRatio" description="PSU Outer Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="true" name="SCRHeaterEnable" description="SCR加热是否启用" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
<config default="0" name="SCRHeaterMode" description="SCR HeatMode:0为Power,1为TC,2为Pyro" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="false" />
|
||
<config default="12" name="SCRUpperRatio" description="SCR Upper Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="6" name="SCRMiddleRatio" description="SCR Middle Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="8" name="SCRLowerRatio" description="SCR Lower Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="600" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="30" name="MFC1to16RampTime" description="Process Abort后MFC1到16Ramp到Default值的时间" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="30" name="MFC19to40RampTime" description="Process Abort后MFC19到40Ramp到Default值的时间" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Pump">
|
||
<config default="1" name="PumpBasePressure" description="Pump Base Pressure" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="300" name="PumpDelayTime" description="Pump To Base Pressure Timeout" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="600" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Vent">
|
||
<config default="1000" name="VentBasePressure" description="Vent Base Pressure" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="300" name="VentTimeout" description="Vent到设定压力超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="600" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="VacIdle" visible="false">
|
||
<config default="0" name="PumpPressure" description="PumpPressure" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="300" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Purge">
|
||
<config default="50" name="CyclePurgeCount" description="循环次数" max="1000" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="0" name="PumpBasePressure" description="Pump压力值" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="Pump到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="PumpTimeout" description="Pump超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="Vent压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="3" name="VentDelayTime" description="Vent到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="VentTimeout" description="Vent超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="WaitPressureTimeout" description="等待压力超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="false" name="NeedFinalValveOpen" description="Final Valve是否需要打开" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
</configs>
|
||
<configs name="Clean">
|
||
<config default="50" name="CycleCleanCount" description="循环次数" max="1000" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="1" name="PumpBasePressure" description="Pump压力值" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="Pump到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="PumpTimeout" description="Pump超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="Vent压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="3" name="VentDelayTime" description="Vent到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="VentTimeout" description="Vent超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" visible="false" name="CleanTime" description="吹扫时间" max="1000" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="200" name="FinalPressure" description="最后保持的压力" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
</configs>
|
||
<configs name="MoExchange">
|
||
<config default="50" name="CycleCount" description="循环次数" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="30" name="PumpTime" description="换源Pump保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="30" name="VentTime" description="换源Vent保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="LeakCheck">
|
||
<config default="50" name="CyclePurgeCount" description="循环次数" max="1000" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="1" name="PumpBasePressure" description="Pump压力值" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="Pump到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="PumpTimeout" description="Pump超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="Vent压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="3" name="VentDelayTime" description="Vent到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="VentTimeout" description="Vent超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="ContinuePumpTime" description="Pm压力达到0之后继续Pump时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="LeakCheckDelayTime" description="Leak Check Delay Time" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="0.5" name="LeakSpec" description="LeakSpec" max="100" min="0" paramter="" tag="" unit="mbar/min" type="Double" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="MFC">
|
||
<config default="1.5" name="MinScale" description="MFC Min Scale" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<configs name="Mfc1">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc2">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc3">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc4">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc5">
|
||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
<config default="false" name="IsInstalled" description="MFC5是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
||
</configs>
|
||
<configs name="Mfc6">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc7">
|
||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc8">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc9">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc10">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc11">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc12">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc13">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="HCL" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc14">
|
||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="SiH4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc15">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc16">
|
||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc19">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc20">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc22">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc23">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc25">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc26">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc27">
|
||
<config default="200000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc28">
|
||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc29">
|
||
<config default="15000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc31">
|
||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc32">
|
||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc33">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc35">
|
||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc36">
|
||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc37">
|
||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc38">
|
||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc40">
|
||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="PC">
|
||
<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<configs name="PC1">
|
||
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC2">
|
||
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC3">
|
||
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1900" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC4">
|
||
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1200" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC5">
|
||
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC6">
|
||
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC7">
|
||
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="ConfinementRing">
|
||
<config default="0" name="UpPos" description="隔热罩上位置坐标" max="100" min="-100" paramter="" tag="" unit="mm" type="Double" />
|
||
<config default="0" name="DownPos" description="隔热罩下位置坐标" max="100" min="-100" paramter="" tag="" unit="mm" type="Double" />
|
||
<config default="180" name="MoveSpeed" description="隔热罩移动速度" max="500" min="0" paramter="" tag="" unit="mm/min" type="Double" />
|
||
</configs>
|
||
<configs name="DryRun" visible="false">
|
||
<config default="false" name="IsDryRun" description="是否空跑工艺" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
<config default="10" name="DryRunDelayTime" description="空跑工艺，保持多长时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="PreProcess">
|
||
<config default="200" name="ChamberPressure" description="反应腔的目标压力" max="1050" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="RampDelayTime" description="Ramp到目标值所需时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="850" name="ProcessBeginTempCondition" description="等待温度到达此数值后开始工艺" max="1700" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="5" name="ServoBeforeUpDelay" description="隔热罩升起前延迟时间" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Process">
|
||
<config default="-50" name="TempOffset" description="温度的偏移量，用于过冲" max="100" min="-100" paramter="" tag="" unit="℃" type="Double" />
|
||
</configs>
|
||
<configs name="ChamberDoor" visible="false">
|
||
<config default="10" name="MoveTimeout" description="开关闸板阀超时时间" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="MainPump" visible="false">
|
||
<config default="10" name="StartTimeout" description="Start Timeout" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="ResetErrorTimeout" description="Reset Error Timeout" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Efficiency">
|
||
<config default="1" name="TCS-Eff" description="TCS Bubbling efficiency for recipe" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="TMA-Eff" description="TMA Bubbling efficiency for recipe" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="TMAFlowRatio" description="TMA流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="TCSFlowRatio" description="TCS流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="HCLFlowRatio" description="HCL流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="C2H4/C3H8FlowRatio" description="C2H4/C3H8流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="SiH4FlowRatio" description="SiH4流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PN2FlowRatio" description="PN2流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="ArFlowRatio" description="Ar流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="H2FlowRatio" description="H2流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
</configs>
|
||
|
||
<configs name="CoolingWater">
|
||
<config default="5" name="WarningOffset" description="超温警告偏移，当水温超过（报警值-Offset）时，产生警告" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="5" name="WarningDelay" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="10" name="AlarmDelay" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="3" name="FilterDuration" description="温度采样值滤波时间，对指定时长内的采样数据求算术平均值作为报警判断" max="10" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="45" name="SHFlowTemp" description="U1 DO196 喷淋头超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ChamTopFlowTemp" description="U2 DO197 PM中间法兰超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ChamMiddleFlow1Temp" description="U3 DO198 PM腔中部1超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ChamMiddleFlow2Temp" description="U4 DO195 PM腔中部2超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ChamBottomFlowTemp" description="U5 DO199 PM腔下部超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="SpareFlowTemp" description="U6 DO200 PM腔底部超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="PowerRod1FlowTemp" description="U7 DO201 下电极超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="PowerRod2FlowTemp" description="U8 DO202 下电极和磁流体超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ForelineFlowTemp" description="U9 DO203 真空管道和方口法兰超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ElectrodeWFlowTemp" description="U10 DO204 侧壁电极超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="TMPump1FlowTemp" description="U11 DO205 TM干泵超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="Spare1FlowTemp" description="U12 DO207 备用1超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="Spare2FlowTemp" description="U13 DO208 备用2超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="TransformerFlowTemp" description="U14 DO206 变压器超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
</configs>
|
||
|
||
<configs name="IdleService" visible="false">
|
||
<config default="false" name="IdleFirstEnable" description="IdleService是否启用首次Clean" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="IdlePurgeEnable" description="IdleService是否启用Purge Clean" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="CountCleanEnable" description="是否启用每运行多少炉需要执行Recipe" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="" name="IdleFirstRecipe" description="IdleService首次运行Recipe的文件名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="" name="IdlePurgeRecipe" description="IdleService后续运行Recipe的文件名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="" name="CountCleanRecipe" description="每运行多少炉需要执行Recipe的文件名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="60" name="IdleFirstTime" description="第一次待机多长时间调用Recipe" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="60" name="IdlePurgeTime" description="后续每隔多长时间调用Recipe" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="5" name="CleanRunCount" description="每运行多少炉需要执行Clean Recipe" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="0" name="CurrentRunCount" description="当前炉计数" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="PT">
|
||
<config default="0" name="PT1_Offset" description="PT1 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT1_K" description="PT1 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT2_Offset" description="PT2 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT2_K" description="PT2 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT3_Offset" description="PT3 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT3_K" description="PT3 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT4_Offset" description="PT4 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT4_K" description="PT4 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT9_Offset" description="PT9 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT9_K" description="PT9 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT10_Offset" description="PT10 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT10_K" description="PT10 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
</configs>
|
||
<configs name="WaterTemp">
|
||
<config default="0" name="U1_Water" description="SHFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U2_Water" description="ChamTopFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U3_Water" description="ChamMiddleFlow1" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U4_Water" description="ChamMiddleFlow2" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U5_Water" description="ChamBottomFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U6_Water" description="Foreline1.Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U7_Water" description="PowerRod1Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U8_Water" description="PowerRod2Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U9_Water" description="Foreline2.Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U10_Water" description="Electrode-W.Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U11_Water" description="TMPump1Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U12_Water" description="Spare1" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U13_Water" description="Spare2" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U14_Water" description="TransformerFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
</configs>
|
||
<configs name="RotationAlarm">
|
||
<config default="true" name="WarningOrAlarm" description="True:Alarm, False:Warning" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="3" name="Threshold" description="Threshold of rotation speed." max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="3" name="Times" description="Out of gauge times, calculate one time per second." max="100" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
</configs>
|
||
|
||
<configs name="LineHeaterTemp">
|
||
<config default="0" name="加热带温区1" description="HeatTMAHigh 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区2" description="HeatTCSPanel 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区3" description="HeatinsidePanel 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区4" description="HeatoutsidePane 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区5" description="HeatoutsideSH 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区6" description="HeatLeakBypass 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
</configs>
|
||
</configs>
|
||
|
||
|
||
|
||
<configs name="PM2">
|
||
<config default="false" name="BypassInterlock" description="Bypass Interlock" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="BypassEnableTable" description="Bypass EnableTable" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="Sic" visible="false" name="RecipeChamberType" description="Recipe Chamber Type" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="" name="LastRecipeName" description="last recipe name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="127.0.0.1:102" name="SiemensIP" description="Siemens IP Address,Default IP:192.168.1.205:102" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="S1500" visible="false" name="SiemensType" description="Siemens Type" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="5" name="ThrottlePressureMaxDiff" description="蝶阀调节值与实际压力的差值小于此数值则表示到位" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="120" name="ThrottlePressureTimeout" description="蝶阀调节值超时时间" max="2000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="5" name="ThrottlePressureRate" description="蝶阀每秒调节速率(mbar/每秒)" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="5" name="ThrottlePositionRate" description="蝶阀每秒调节速率(百分比/每秒)" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="300" visible="false" name="RotationCloseTimeout" description="关闭旋转超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="0" name="ThrottlePositionDefaultValue" description="蝶阀位置模式默认值" max="100" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
<config default="1100" name="ThrottlePressureDefaultValue" description="蝶阀压力模式默认值" max="1500" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
<config default="400" name="ThrottlePositionModeMaxPressure" description="蝶阀允许位置模式需要的最大压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1000*10,3000*10,3000*10,4000*10,6000*10,8000*10,10000*10,12000*10,14000*10,2500*10" name="MFC28DynamicFlow" description="MFC28 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="500*10,2000*10,2500*10,3500*10,5500*10,7500*10,9500*10,11500*10,13000*10,2000*10" name="MFC29DynamicFlow" description="MFC29 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="1000*10,3000*10,5000*10,6000*10,8000*10,10000*10,12000*10,14000*10,16000*10,4000*10" name="MFC31DynamicFlow" description="MFC31 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC40DynamicFlow" description="MFC40 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="false" name="PreTransferPSUEnable" description="传盘是否开启PSU加热" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="true" name="PreTransferSCREnable" description="传盘是否开启SCR加热" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="ReactorSuspectorCheckEnable" description="传盘后是否检查ReactorSuspectorCheck Sensor" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="50" name="ReactorPressRisingRateLimit" description="腔体压力上升速率超速报警" max="1000" min="0" paramter="" tag="" unit="mbar/s" type="Double" />
|
||
<config default="1020" name="PressureForV27ForceOpen" description="Pressure For V27 Switch" max="1150" min="850" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="960" name="PressureForV27ForceClose" description="Pressure For V27 Switch" max="1150" min="850" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="20" name="TCSFluidInfusionTime" description="TCS补液时间" max="600" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="Sic\Routine\ATMIdle" name="AtmIdleFileName" description="ATM Idle Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\VACIdle" name="VacIdleFileName" description="VAC Idle Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\ProcessIdle" name="ProcessIdleFileName" description="Process Idle Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\Pump" name="PumpFileName" description="Pump Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\Vent" name="VentFileName" description="Vent Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\\Routine\Purge" name="PurgeFileName" description="Purge Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\\Routine\Clean" name="CleanFileName" description="Clean Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\ExchangeMOTCS" name="ExchangeMOTCSFileName" description="ExchangeTCS Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\ExchangeMOTMA" name="ExchangeMOTMAFileName" description="ExchangeTMA Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\Isolation" name="IsolationFileName" description="Isolation Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\LeakCheck" name="LeakCheckFileName" description="LeakCheck Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="Sic\Routine\Abort" name="AbortFileName" description="Abort Routine文件路径" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
|
||
<config default="" name="OpenLidCountDownTime" visible="false" description="临时保存开腔倒计时开始时间" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="TMAEnable" description="TMA是否选装" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="C2H4" name="ChType" description="CH Type" max="" min="" paramter="C2H4;C3H8" tag="ReadOnlySelection" unit="" type="String" visible="false"/>
|
||
<configs name="Heater">
|
||
<config default="false" name="PSUOuterAutoEnable" description="PSU Outer是否为Auto控制" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="10" name="TempRampRate" description="TC温度每秒调节速率(℃/每秒)" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="0.1" name="AmpereRampRate" description="TC1功率每秒调节速率(%/每秒)" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="0.1" name="KWRampRate" description="TC2功率每秒调节速率(%/每秒)" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="20" name="PyroWarmEffectFromTime" description="Pyro温度报警在进入Process状态下多久才有效" max="1800" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="PyroWarmEffectEndTime" description="Pyro温度报警在结束Process状态前多久才有效" max="1800" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="50" name="PyroWarmMaxDiff" description="Pyro的MidlleTemp,OuterTemp任意两个温度差大于此数值需要报警" max="1000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="600" name="PyroWarmBaseTemp" visible="false" description="Pyro温度报警需要满足BaseTemp" max="2000" min="200" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="true" name="PyroWarmIsAlarm" visible="false" description="Pyro温度差过大报警类型为Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="1700" name="PSUTempHighLimit" description="PSU Temp High Limit(℃)" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="900" name="PSUTempLowLimit" description="PSU Temp Low Limit(℃)" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="1700" name="SCRTempHighLimit" visible="false" description="SCR Temp High Limit(℃)" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="900" name="SCRTempLowLimit" visible="false" description="SCR Temp Low Limit(℃)" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="LineHeaterTempHighLimit" description="气柜加热带温度上限；设为0表示忽略报警" max="100" min="0" paramter="" tag="" unit="℃" visible="true" type="Double" />
|
||
<config default="0.5" name="PSU1ResistanceMax" description="Max PSU Inner Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="PSU2ResistanceMax" description="Max PSU Middle Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="PSU3ResistanceMax" description="Max PSU Outer Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="SCR1ResistanceMax" description="Max SCR Upper Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="SCR2ResistanceMax" description="Max SCR Middle Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="0.5" name="SCR3ResistanceMax" description="Max SCR Lower Resistance Max Limit" max="1000" min="0" paramter="" tag="" unit="Ω" type="Double" />
|
||
<config default="6" name="ResistanceMonitorHysteresis" description="电阻检测迟滞时间，当电阻持续超限指定时间后，再产生报警" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="Warning" name="InProcessResistanceFailAlarmLevel" description="工艺过程中检测到电阻超限时产生报警的等级" max="" min="" paramter="Alarm;Warning" tag="ReadOnlySelection" unit="" type="String" />
|
||
<config default="1" name="InProcessResistanceMonitorIgnoreDuration" description="工艺启动后和结束前的指定时间内忽略电阻超限检查" max="100" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
|
||
<config default="true" visible="false" name="AETempRasingFastIsAlarm" description="AETemp温度上升过快报警类型为Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="100" visible="false" name="SCRTempRasingRate" description="SCRTemp每秒的上升速率,超过此范围报警" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="20" name="AETempMiddleRasingRate" description="AETemp Middle每秒的上升速率,超过此范围报警" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="20" name="AETempOuterRasingRate" description="AETemp Outer每秒的上升速率,超过此范围报警" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<!--<config default="5" name="AETempFrequency" description="AETemp 采样频率" max="300" min="0" paramter="" tag="" unit="s" type="Double" />-->
|
||
<config default="850" name="PlacePVTempLimit" description="往PM放盘时,需要等待温度低于此数值" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="900" name="PickPVTempLimit" description="从PM取盘时,需要等待温度低于此数值" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="1.0" name="PSU1Y" description="底部恒功率模式控制方案PSU1百分比" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="1.0" name="PSU2Y" description="底部恒功率模式控制方案PSU2百分比" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="1.0" name="PSU3Y" description="底部恒功率模式控制方案PSU3百分比" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="0.5" name="PSU1Power" description="底部恒功率模式控制方案PSU1功率" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="6.0" name="PSU2Power" description="底部恒功率模式控制方案PSU2功率" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="6.0" name="PSU3Power" description="底部恒功率模式控制方案PSU3功率" max="99999" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
|
||
<!--
|
||
<config default="false" name="PSU2OutputLimitHighTuningByRecipe" description="PSU2输出限幅上限值由Recipe调节" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="1600" name="PSU2OutputLimitHighTuningTemp" description="PSU2输出限幅限值生效温度" max="2500" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="100" name="PSU2OutputLimitHigh" description="PSU2输出限幅上限值" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
<config default="0" name="PSU2OutputLimitLow" description="PSU2输出限幅下限值" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Double" />
|
||
-->
|
||
</configs>
|
||
<configs name="ITAUPSA">
|
||
<config default="false" name="EnableDevice" description="PM2 UPSA install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="192.168.2.106" name="Address" description="PM2 UPSA address 192.168.2.106" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="PM2 UPSA device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="PM2 UPSA log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<configs name="ITAUPSB">
|
||
<config default="false" name="EnableDevice" description="PM2 UPSB install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="192.168.2.116" name="Address" description="PM2 UPSB address 192.168.2.116" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="PM2 UPSB device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="PM2 UPSB log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<configs name="EATONUPS">
|
||
<config default="false" name="EnableDevice" description="PM2 EATONUPS install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="192.168.1.206" name="Address" description="PM2 EATONUPS address 192.168.1.206" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="PM2 EATONUPS device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="PM2 EATONUPS log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<configs name="ProcessIdle">
|
||
<config default="10" name="RotationSpeed" description="电机设置转速" max="1000" min="0" paramter="" tag="" unit="rpm" type="Integer" />
|
||
<config default="200" name="FinalPressure" description="最后保持的压力" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PressureBalanceTime" description="压力平衡时间" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="true" name="PSUHeaterEnable" description="PSU加热是否启用" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
<config default="0" name="PSUHeaterMode" description="PSU HeatMode:0为Power,1为TC,2为Pyro" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="false" />
|
||
<config default="5" name="PSUInnerRatio" description="PSU Inner Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="16" name="PSUMiddleRatio" description="PSU Middle Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="25" name="PSUOuterRatio" description="PSU Outer Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="true" name="SCRHeaterEnable" description="SCR加热是否启用" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
<config default="0" name="SCRHeaterMode" description="SCR HeatMode:0为Power,1为TC,2为Pyro" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="false" />
|
||
<config default="12" name="SCRUpperRatio" description="SCR Upper Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="6" name="SCRMiddleRatio" description="SCR Middle Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="8" name="SCRLowerRatio" description="SCR Lower Ratio" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="600" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="30" name="MFC1to16RampTime" description="Process Abort后MFC1到16Ramp到Default值的时间" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="30" name="MFC19to40RampTime" description="Process Abort后MFC19到40Ramp到Default值的时间" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Pump">
|
||
<config default="1" name="PumpBasePressure" description="Pump Base Pressure" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="300" name="PumpDelayTime" description="Pump To Base Pressure Timeout" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="600" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Vent">
|
||
<config default="1000" name="VentBasePressure" description="Vent Base Pressure" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="300" name="VentTimeout" description="Vent到设定压力超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="600" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="VacIdle" visible="false">
|
||
<config default="0" name="PumpPressure" description="PumpPressure" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="300" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Purge">
|
||
<config default="50" name="CyclePurgeCount" description="循环次数" max="1000" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="0" name="PumpBasePressure" description="Pump压力值" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="Pump到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="PumpTimeout" description="Pump超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="Vent压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="3" name="VentDelayTime" description="Vent到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="VentTimeout" description="Vent超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="WaitPressureTimeout" description="等待压力超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="false" name="NeedFinalValveOpen" description="Final Valve是否需要打开" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
</configs>
|
||
<configs name="Clean">
|
||
<config default="50" name="CycleCleanCount" description="循环次数" max="1000" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="1" name="PumpBasePressure" description="Pump压力值" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="Pump到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="PumpTimeout" description="Pump超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="Vent压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="3" name="VentDelayTime" description="Vent到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="VentTimeout" description="Vent超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" visible="false" name="CleanTime" description="吹扫时间" max="1000" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="200" name="FinalPressure" description="最后保持的压力" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
</configs>
|
||
<configs name="MoExchange">
|
||
<config default="50" name="CycleCount" description="循环次数" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="30" name="PumpTime" description="换源Pump保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="30" name="VentTime" description="换源Vent保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="LeakCheck">
|
||
<config default="50" name="CyclePurgeCount" description="循环次数" max="1000" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="1" name="PumpBasePressure" description="Pump压力值" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="Pump到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="PumpTimeout" description="Pump超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="Vent压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="3" name="VentDelayTime" description="Vent到达压力后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="VentTimeout" description="Vent超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="ContinuePumpTime" description="Pm压力达到0之后继续Pump时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="LeakCheckDelayTime" description="Leak Check Delay Time" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="0.5" name="LeakSpec" description="LeakSpec" max="100" min="0" paramter="" tag="" unit="mbar/min" type="Double" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="MFC">
|
||
<config default="1.5" name="MinScale" description="MFC Min Scale" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<configs name="Mfc1">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc2">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc3">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc4">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc5">
|
||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
<config default="false" name="IsInstalled" description="MFC5是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
||
</configs>
|
||
<configs name="Mfc6">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc7">
|
||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc8">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc9">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc10">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc11">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc12">
|
||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc13">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="HCL" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc14">
|
||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="SiH4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc15">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc16">
|
||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc19">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc20">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc22">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc23">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc25">
|
||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc26">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc27">
|
||
<config default="200000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc28">
|
||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc29">
|
||
<config default="15000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc31">
|
||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc32">
|
||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc33">
|
||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc35">
|
||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc36">
|
||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc37">
|
||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc38">
|
||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="Mfc40">
|
||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="PC">
|
||
<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<configs name="PC1">
|
||
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC2">
|
||
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC3">
|
||
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1900" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC4">
|
||
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1200" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC5">
|
||
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC6">
|
||
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
<configs name="PC7">
|
||
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="ConfinementRing">
|
||
<config default="0" name="UpPos" description="隔热罩上位置坐标" max="100" min="-100" paramter="" tag="" unit="mm" type="Double" />
|
||
<config default="0" name="DownPos" description="隔热罩下位置坐标" max="100" min="-100" paramter="" tag="" unit="mm" type="Double" />
|
||
<config default="180" name="MoveSpeed" description="隔热罩移动速度" max="500" min="0" paramter="" tag="" unit="mm/min" type="Double" />
|
||
</configs>
|
||
<configs name="DryRun" visible="false">
|
||
<config default="false" name="IsDryRun" description="是否空跑工艺" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
<config default="10" name="DryRunDelayTime" description="空跑工艺，保持多长时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="PreProcess">
|
||
<config default="200" name="ChamberPressure" description="反应腔的目标压力" max="1050" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="RampDelayTime" description="Ramp到目标值所需时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="850" name="ProcessBeginTempCondition" description="等待温度到达此数值后开始工艺" max="1700" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="5" name="ServoBeforeUpDelay" description="隔热罩升起前延迟时间" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Process">
|
||
<config default="-50" name="TempOffset" description="温度的偏移量，用于过冲" max="100" min="-100" paramter="" tag="" unit="℃" type="Double" />
|
||
</configs>
|
||
<configs name="ChamberDoor" visible="false">
|
||
<config default="10" name="MoveTimeout" description="开关闸板阀超时时间" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="MainPump" visible="false">
|
||
<config default="10" name="StartTimeout" description="Start Timeout" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="ResetErrorTimeout" description="Reset Error Timeout" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Efficiency">
|
||
<config default="1" name="TCS-Eff" description="TCS Bubbling efficiency for recipe" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="TMA-Eff" description="TMA Bubbling efficiency for recipe" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="TMAFlowRatio" description="TMA流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="TCSFlowRatio" description="TCS流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="HCLFlowRatio" description="HCL流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="C2H4/C3H8FlowRatio" description="C2H4/C3H8流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="SiH4FlowRatio" description="SiH4流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PN2FlowRatio" description="PN2流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="ArFlowRatio" description="Ar流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="H2FlowRatio" description="H2流量计算需要乘以的系数" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
</configs>
|
||
|
||
<configs name="CoolingWater">
|
||
<config default="5" name="WarningOffset" description="超温警告偏移，当水温超过（报警值-Offset）时，产生警告" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="5" name="WarningDelay" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="10" name="AlarmDelay" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="3" name="FilterDuration" description="温度采样值滤波时间，对指定时长内的采样数据求算术平均值作为报警判断" max="10" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="45" name="SHFlowTemp" description="U1 DO196 喷淋头超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ChamTopFlowTemp" description="U2 DO197 PM中间法兰超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ChamMiddleFlow1Temp" description="U3 DO198 PM腔中部1超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ChamMiddleFlow2Temp" description="U4 DO195 PM腔中部2超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ChamBottomFlowTemp" description="U5 DO199 PM腔下部超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="Foreline1FlowTemp" description="U6 DO200 PM腔底部超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="PowerRod1FlowTemp" description="U7 DO201 下电极超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="PowerRod2FlowTemp" description="U8 DO202 下电极和磁流体超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="Foreline2FlowTemp" description="U9 DO203 真空管道和方口法兰超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="ElectrodeWFlowTemp" description="U10 DO204 侧壁电极超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="Spare1FlowTemp" description="U11 DO205 TM干泵超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="Spare2FlowTemp" description="U12 DO207 备用1超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="Spare3FlowTemp" description="U13 DO208 备用2超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="45" name="TransformerFlowTemp" description="U14 DO206 变压器超温报警" max="90" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
</configs>
|
||
|
||
<configs name="IdleService" visible="false">
|
||
<config default="false" name="IdleFirstEnable" description="IdleService是否启用首次Clean" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="IdlePurgeEnable" description="IdleService是否启用Purge Clean" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="CountCleanEnable" description="是否启用每运行多少炉需要执行Recipe" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="" name="IdleFirstRecipe" description="IdleService首次运行Recipe的文件名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="" name="IdlePurgeRecipe" description="IdleService后续运行Recipe的文件名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="" name="CountCleanRecipe" description="每运行多少炉需要执行Recipe的文件名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="60" name="IdleFirstTime" description="第一次待机多长时间调用Recipe" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="60" name="IdlePurgeTime" description="后续每隔多长时间调用Recipe" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="5" name="CleanRunCount" description="每运行多少炉需要执行Clean Recipe" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="0" name="CurrentRunCount" description="当前炉计数" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="PT">
|
||
<config default="0" name="PT1_Offset" description="PT1 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT1_K" description="PT1 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT2_Offset" description="PT2 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT2_K" description="PT2 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT3_Offset" description="PT3 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT3_K" description="PT3 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT4_Offset" description="PT4 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT4_K" description="PT4 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT9_Offset" description="PT9 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT9_K" description="PT9 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="PT10_Offset" description="PT10 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="1" name="PT10_K" description="PT10 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
</configs>
|
||
<configs name="WaterTemp">
|
||
<config default="0" name="U1_Water" description="SHFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U2_Water" description="ChamTopFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U3_Water" description="ChamMiddleFlow1" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U4_Water" description="ChamMiddleFlow2" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U5_Water" description="ChamBottomFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U6_Water" description="Foreline1.Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U7_Water" description="PowerRod1Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U8_Water" description="PowerRod2Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U9_Water" description="Foreline2.Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U10_Water" description="Electrode-W.Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U11_Water" description="TMPump1Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U12_Water" description="Spare1" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U13_Water" description="Spare2" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
<config default="0" name="U14_Water" description="TransformerFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
|
||
</configs>
|
||
<configs name="RotationAlarm">
|
||
<config default="true" name="WarningOrAlarm" description="True:Alarm, False:Warning" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="3" name="Threshold" description="Threshold of rotation speed." max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="3" name="Times" description="Out of gauge times, calculate one time per second." max="100" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
</configs>
|
||
<configs name="LineHeaterTemp">
|
||
<config default="0" name="加热带温区1" description="HeatTMAHigh 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区2" description="HeatTCSPanel 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区3" description="HeatinsidePanel 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区4" description="HeatoutsidePane 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区5" description="HeatoutsideSH 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="70" name="加热带温区6" description="HeatLeakBypass 温度上限，设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
</configs>
|
||
</configs>
|
||
</configs>
|
||
|
||
<configs name="TM">
|
||
<config default="false" name="BypassInterlock" description="Bypass Interlock" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="BypassEnableTable" description="Bypass EnableTable" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="200" name="ProcessPressure" description="传盘压力基准" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="20" name="VacuumPressureBaseOffset" description="传盘压力Offset" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="127.0.0.1:102" name="SiemensIP" description="Siemens IP Address,Default IP: 192.168.1.102" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="S1500" name="SiemensType" visible="false" description="Siemens Type" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="960" name="AtmPressureBase" description="判断大气压的时候，压力值需要大于该值" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1" name="VacuumPressureBase" description="判断真空的时候，压力值需要小于该值" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1100" name="VentMaxPressure" description="腔体到达此压力自动关闭Vent阀门" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="5" name="MaxPressureDiffOpenSlitValve" description="闸板阀允许打开的最大压力差" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="5" name="TMPressureBigThanPM" description="闸板阀打开前TM的压力需要高于PM的数值" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="true" name="NeedPressureBalance" visible="false" description="开闸板阀是否需要压力平衡" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="PressureBalanceUsePid" description="压力平衡方式是否启用PID" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="1100" name="ForelinePressureBase" description="抽气的时候，Foreline压力值需要小于该值" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" visible="false" />
|
||
<config default="true" name="RunPumpRoutineEventBelowBasePressure" description="即使在低压，仍然继续抽" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="100" name="WaitForelinePressureTimeout" description="抽气的时候，foreline压力多久达不到底压，则报错" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
|
||
<config default="600" name="WaitPumpTimeout" description="等待真空泵的时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="true" name="PM1SlitValveEnabled" description="PM1是否参与控制slitvalve" max="" min="" paramter="" tag="" unit="" visible="false" type="Bool" />
|
||
<config default="true" name="PM2SlitValveEnabled" description="PM2是否参与控制slitvalve" max="" min="" paramter="" tag="" unit="" visible="false" type="Bool" />
|
||
<config default="true" name="LoadLockSlitValveEnabled" description="LoadLock是否参与控制slitvalve" max="" min="" paramter="" tag="" unit="" visible="false" type="Bool" />
|
||
<config default="true" name="UnLoadSlitValveEnabled" description="UnLoad是否参与控制slitvalve" max="" min="" paramter="" tag="" unit="" visible="false" type="Bool" />
|
||
<config default="true" name="BufferSlitValveEnabled" description="Buffer是否参与控制slitvalve" max="" min="" paramter="" tag="" unit="" visible="false" type="Bool" />
|
||
<config default="false" name="IsVerifyValveEnabled" description="TM是否set slit valve" max="0" min="0" paramter="" tag="" unit="" visible="false" type="Bool" />
|
||
<config default="100" name="LoadLockWarnTemp" description="LoadLock高于此温度报警" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" visible="false" />
|
||
<config default="100" name="BufferWarnTemp" description="Buffer高于此温度报警" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" visible="false" />
|
||
<config default="5" name="OpenSlitValveDelayTimeForPM" description="与PM的连通阀打开后等待多长时间开启闸板阀" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10000" name="MFCFlowWhenV77Open" description="与PM的连通时MFC60流量设置" max="10000" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
<config default="10" name="HomeTimeout" description="home time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="8" name="TrayNum" description="Tray num for Coating(统计Coating时最多Tray的数量)" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
<configs name="Home">
|
||
<config default="250" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Pump">
|
||
<config default="200" name="SlowFastPumpSwitchPressure" description="抽气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1" name="PumpBasePressure" description="抽气的底压" max="100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="300" name="FastPumpTimeout" description="快抽抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="PumpSlowTimeout" description="慢抽抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="PumpDelayTime" description="抽气到底压后，继续抽气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="600" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Vent">
|
||
<config default="200" name="SlowFastVentSwitchPressure" description="充气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="980" name="VentBasePressure" description="充气的底压" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="500" name="VentTimeout" description="慢充快充总的Vent超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3" name="VentDelayTime" description="充气到大气压后，继续充气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="15000" name="Mfc60Default1" description="Mfc60慢充流量" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25000" name="Mfc60Default2" description="Mfc60快充流量" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="600" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="BufferMaxTemp" visible="false" description="TM Vent需满足Buffer腔温度不超过此设定值" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
</configs>
|
||
<configs name="Purge">
|
||
<config default="3" name="CyclePurgeCount" description="来回循环的次数" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="200" name="SlowFastPumpSwitchPressure" description="抽气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0" name="PumpBasePressure" description="抽气的底压" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="抽气到底压后，继续抽气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="PumpTimeOut" description="抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="充气的底压" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="VentDelayTime" description="充气到大气压后，继续充气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="500" name="VentTimeout" description="慢充快充总的Vent超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="200" name="SlowFastVentSwitchPressure" description="充气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="15000" name="Mfc60Default1" description="Mfc60慢充流量" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="25000" name="Mfc60Default2" description="Mfc60快充流量" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="LeakCheck">
|
||
<config default="1" name="CyclePurgeCount" description="来回循环的次数" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="200" name="SlowFastPumpSwitchPressure" description="抽气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1" name="PumpBasePressure" description="抽气的底压" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="抽气到底压后，继续抽气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="充气的底压" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1000" name="VentDelayTime" description="充气到大气压后，继续充气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="PumpTimeOut" description="抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="LeakCheckDelayTime" description="LeakCheck时，保持多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="0.5" name="LeakSpec" description="LeakSpec" max="100" min="0" paramter="" tag="" unit="mbar/min" type="Double" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="PressureBalance">
|
||
<config default="5" name="PidP" description="Balance Pressure For Proportional" max="100" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
|
||
<config default="9" name="PidI" description="Balance Pressure For Integral" max="100" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
|
||
<config default="-2" name="PidD" description="Balance Pressure For Derivative" max="100" min="-100" paramter="" tag="" unit="" type="Double" visible="false" />
|
||
<config default="300" name="BalanceTimeout" description="PID Timeout" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
|
||
<config default="1000" name="SleepTime" description="PID Sleep Time" max="3000" min="1" paramter="" tag="" unit="ms" type="Integer" visible="false" />
|
||
<config default="50" name="SuccessCount" description="Success Count" max="3000" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="10" name="BalanceMaxDiffPressure" description="Max Difference Pressure For current and Target Module" max="100" min="-100" paramter="" tag="" unit="" type="Double" visible="true" />
|
||
<config default="300" name="BalancePressure" description="Balance Pressure" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="300" name="VentTimeout" description="Vent Timeout" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="50" name="MfcFlow" description="MfcFlow" max="100000" min="1" paramter="" tag="" unit="" type="Double" />
|
||
<config default="300" name="WaitPressureAboveSetPointTimeout" description="Wait Pressure AboveSetPointTimeout" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="MFC">
|
||
<config default="1.5" name="MinScale" description="MFC Min Scale" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||
<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||
<configs name="Mfc60">
|
||
<config default="30000" name="N2Scale" description="Scale" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
|
||
<config default="Ar" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
</configs>
|
||
</configs>
|
||
<configs name="TMRobot">
|
||
<config default="10" name="PickTimeout" description="pick time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="GotoTimeout" description="Goto time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="HomeTimeout" description="home time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="MotionTimeout" description="Motion Time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="127.0.0.1:1102" name="Address" description="Robot IP,Defalut IP:192.168.1.101" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="10" name="PlaceTimeout" description="place time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="ExtendTimeout" description="extend time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="RetractTimeout" description="retract time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="ConnectTimeout" description="connect time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="Enable Log Message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="true" name="Blade1Enable" description="Blade1 Enable" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="true" name="Blade2Enable" description="Blade2 Enable" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="1" name="Blade2Slots" description="Slot数目" max="25" min="1" paramter="" tag="" unit="" type="Integer" visible="false" />
|
||
<config default="1" name="RobotSpeed" description="Robot速度, 1low 2 middle 3=high" max="3" min="1" paramter="" tag="" unit="" type="Integer" visible="false" />
|
||
</configs>
|
||
<configs name="EFEM" visible="false">
|
||
<config default="1020" name="AtmPressureBase" description="判断大气压的时候，压力值需要大于该值" max="1200" min="900" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="30" name="SlitValveMotionTimeout" description="闸板阀打开超时时间" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="50" name="MaxPressureDiffOpenSlitValve" description="闸板阀允许打开的最大压力差" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
</configs>
|
||
<configs name="WaferRobot" visible="false">
|
||
<config default="20" name="PickTimeout" description="pick time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="PlaceTimeout" description="place time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="GotoTimeout" description="Goto time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="HomeTimeout" description="home time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="MotionTimeout" description="Motion Time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="127.0.0.1:1103" name="Address" description="Robot ip,default 192.168.1.110 : 8001" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="20" name="ExtendTimeout" description="extend time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="RetractTimeout" description="retract time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="ConnectTimeout" description="connect time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="true" name="EnableLogMessage" description="Enable Log Message" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="true" name="Blade1Enable" description="Blade1 Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="true" name="Blade2Enable" description="Blade2 Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
</configs>
|
||
<configs name="TrayRobot" visible="false">
|
||
<config default="20" name="PickTimeout" description="pick time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="PlaceTimeout" description="place time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="GotoTimeout" description="Goto time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="HomeTimeout" description="home time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="MotionTimeout" description="Motion Time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="127.0.0.1:1104" name="Address" description="Robot ip,default 192.168.1.111 : 8001" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="20" name="ExtendTimeout" description="extend time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="20" name="RetractTimeout" description="retract time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="ConnectTimeout" description="connect time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="true" name="EnableLogMessage" description="Enable Log Message" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="true" name="Blade1Enable" description="Blade1 Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="true" name="Blade2Enable" description="Blade2 Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="9000" name="PickRMoveDistance" description="PickRMoveDistance" max="100000" min="-100000" paramter="" tag="" unit="" visible="true" type="Integer" />
|
||
<config default="-9000" name="PlaceRMoveDistance" description="PlaceRMoveDistance" max="100000" min="-100000" paramter="" tag="" unit="" visible="true" type="Integer" />
|
||
</configs>
|
||
<configs name="LoadLock">
|
||
<config default="false" name="EnableLift" description="是否带升降" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="true" name="IsVerifyDoorEnabled" visible="false" description="TM是否set atm door" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="120" name="PostTransferTimeout" description="post transfer time out" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="960" name="AtmPressureBase" description="判断大气压的时候，压力值需要大于该值" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="302" name="VacuumPressureBase" description="判断真空的时候，压力值需要小于该值" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1100" name="VentMaxPressure" description="腔体到达此压力自动关闭Vent阀门" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0.5" name="ForelinePressureBase" visible="false" description="抽气的时候，Foreline压力值需要小于该值" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="true" name="RunPumpRoutineEventBelowBasePressure" visible="false" description="即使在低压，仍然继续抽" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="100" name="WaitForelinePressureTimeout" visible="false" description="抽气的时候，foreline压力多久达不到底压，则报错" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="true" name="IsUpperSlotIn" visible="false" description="自动传盘时，上层Slot是否往TM传输" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="0" name="PressureOffset" visible="false" description="压力修正参数" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="2" name="ATMDoorDelay" visible="false" description="Open/Close ATM Door Delay Time" max="60" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
<config default="600" name="WaitPumpTimeout" description="等待真空泵的时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="180" name="DefaultCoolingTime" visible="false" description="默认在LL的冷却时间" max="10000" min="5" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="WarnTemprature" description="高于此温度需要报Warnning" max="900" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="10" name="HomeTimeout" description="home time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
|
||
<config default="10" name="LiftMoveTimeOut" description="LiftMoveTimeOut" max="600" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
|
||
<config default="10" name="ClawMoveTimeOut" description="ClawMoveTimeOut" max="600" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
|
||
<config default="true" name="EnableCCDCheck" description="Wafer和Tray组合后是否启用CCD检测" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="true" name="EnableDistanceSensorCheck" description="Wafer和Tray组合后是否启用测距Sensor检测" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
|
||
<config default="true" name="TrayPresenceCheckEnable" description="传盘后检查Load腔Tray是否存在 Sensor" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<configs name="Home">
|
||
<config default="250" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Pump">
|
||
<config default="100" name="SlowFastPumpSwitchPressure" description="抽气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1" name="PumpBasePressure" description="抽气的底压" max="100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="100" name="SlowPumpTimeout" description="慢抽抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="FastPumpTimeout" description="快抽抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="PumpDelayTime" description="抽气到底压后，继续抽气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="250" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Vent">
|
||
<config default="100" name="SlowFastVentSwitchPressure" description="充气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="980" name="VentBasePressure" description="充气的底压" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="100" name="SlowVentTimeout" description="慢充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="FastVentTimeout" description="快充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
|
||
<config default="10" name="VentDelayTime" description="充气到大气压后，继续充气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="250" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Purge">
|
||
<config default="3" name="CyclePurgeCount" description="来回循环的次数" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="1" name="PumpBasePressure" description="抽气的底压" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="抽气到底压后，继续抽气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="PumpTimeOut" description="抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="充气的底压" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="3" name="VentDelayTime" description="充气到大气压后，继续充气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="VentTimeOut" description="充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="LeakCheck">
|
||
<config default="1" name="CyclePurgeCount" description="来回循环的次数" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="1" name="PumpBasePressure" description="抽气的底压" max="100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="980" name="VentBasePressure" description="充气的底压" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="3" name="PumpDelayTime" description="抽气到底压后，继续抽气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="LeakCheckDelayTime" description="LeakCheck时，保持多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="0.5" name="LeakSpec" description="LeakSpec" max="100" min="0" paramter="" tag="" unit="mbar/min" type="Double" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="LoadRotation" visible="false">
|
||
<config default="0" name="CCD1Pos" description="CCD拍照位置1" max="360" min="-360" paramter="" tag="" unit="°" type="Double" />
|
||
<config default="0" name="CCD2Pos" description="CCD拍照位置2" max="360" min="-360" paramter="" tag="" unit="°" type="Double" />
|
||
<config default="0" name="HomeOffset" description="LoadRotation旋转电机原点偏移量" max="360" min="-360" paramter="" tag="" unit="°" type="Double" />
|
||
<config default="1" name="MoveHomeSpeed" description="Load旋转电机寻找相对原点转速" max="360" min="0" paramter="" tag="" unit="rpm" type="Double" />
|
||
<config default="1" name="MovePosSpeed" description="Load旋转电机移动位置转速" max="360" min="0" paramter="" tag="" unit="rpm" type="Double" />
|
||
<config default="60" name="RotationTimeOut" description="RotationTimeOut" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="95" name="DistanceSensorOKRatio" description="测距Sensor OK百分比" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="UnLoad" visible="false">
|
||
<config default="false" name="EnableLift" description="是否带升降" max="0" min="0" paramter="" tag="" unit="" visible="false" type="Bool" />
|
||
<config default="true" name="IsVerifyDoorEnabled" description="TM是否set atm door" max="0" min="0" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
<config default="120" name="PostTransferTimeout" description="post transfer time out" max="1000" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="960" name="AtmPressureBase" description="判断大气压的时候，压力值需要大于该值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="302" name="VacuumPressureBase" description="判断真空的时候，压力值需要小于该值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1100" name="VentMaxPressure" description="腔体到达此压力自动关闭Vent阀门" max="1500" min="800" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="0.5" name="ForelinePressureBase" description="抽气的时候，Foreline压力值需要小于该值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="true" name="RunPumpRoutineEventBelowBasePressure" description="即使在低压，仍然继续抽" max="0" min="0" paramter="" tag="" unit="" visible="true" type="Bool" />
|
||
<config default="100" name="WaitForelinePressureTimeout" visible="false" description="抽气的时候，foreline压力多久达不到底压，则报错" max="1100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="true" name="IsUpperSlotIn" description="自动传盘时，上层Slot是否往TM传输" max="0" min="0" paramter="" tag="" unit="" visible="false" type="Bool" />
|
||
<config default="0" name="PressureOffset" visible="false" description="压力修正参数" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="2" name="ATMDoorDelay" visible="false" description="Open/Close ATM Door Delay Time" max="60" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
<config default="600" name="WaitPumpTimeout" description="等待真空泵的时间" max="9999" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<!--<config default="180" name="DefaultCoolingTime" description="默认在Unload的冷却时间" max="9999" min="0" paramter="" tag="" unit="s" type="Integer" />-->
|
||
<config default="100" name="WarnTemprature" description="高于此温度需要报Warnning" max="900" min="0" paramter="" tag="" unit="s" type="Double" />
|
||
<config default="10" name="HomeTimeout" description="home time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="LiftMoveTimeOut" description="LiftMoveTimeOut" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="ClawMoveTimeOut" description="ClawMoveTimeOut" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<configs name="Home">
|
||
<config default="250" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Pump">
|
||
<config default="100" name="SlowFastPumpSwitchPressure" description="抽气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="1" name="PumpBasePressure" description="抽气的底压" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="100" name="SlowPumpTimeout" description="慢抽抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="FastPumpTimeout" description="快抽抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="PumpDelayTime" description="抽气到底压后，继续抽气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="250" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Vent">
|
||
<config default="100" name="SlowFastVentSwitchPressure" description="充气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="980" name="VentBasePressure" description="充气的底压" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="100" name="SlowVentTimeout" description="慢充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="FastVentTimeout" description="快充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="VentDelayTime" description="充气到大气压后，继续充气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="250" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="Purge">
|
||
<config default="3" name="CyclePurgeCount" description="来回循环的次数" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="1" name="PumpBasePressure" description="抽气的底压" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="10" name="PumpDelayTime" description="抽气到底压后，继续抽气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="PumpTimeOut" description="抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="980" name="VentBasePressure" description="充气的底压" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double" />
|
||
<config default="3" name="VentDelayTime" description="充气到大气压后，继续充气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="100" name="VentTimeOut" description="充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="LeakCheck">
|
||
<config default="1" name="CyclePurgeCount" description="来回循环的次数" max="100" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="PumpTimeout" description="Pump超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="VentTimeout" description="Vent超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="LoopPumpDelayTime" description="循环抽气到底压后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="LoopVentDelayTime" description="循环充气到高压后保持时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="3" name="PumpDelayTime" description="抽气到底压后，继续抽气多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="300" name="LeakCheckDelayTime" description="LeakCheck时，保持多长时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="0.5" name="LeakSpec" description="LeakSpec" max="100" min="0" paramter="" tag="" unit="mbar/min" type="Double" />
|
||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
</configs>
|
||
<configs name="Buffer" visible="false">
|
||
<config default="100" name="WarnTemprature" description="高于此温度需要报Warnning" max="900" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="100" name="PickTemprature" description="从Buffer取盘温度需要低于该数值" max="900" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
<config default="900" name="TMVentBufferTempMax" description="TM Vent时Buffer温度需低于该数值" max="900" min="0" paramter="" tag="" unit="℃" type="Double" />
|
||
</configs>
|
||
<configs name="NSXBreakerII" visible="false">
|
||
<config default="false" name="EnableDevice" description="NSX Breaker install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="COM34" name="Address" description="NSX Breaker address,default COM34" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="NSX Breaker device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="NSX Breaker log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<!--<configs name="TempOmron"><config default="false" name="EnableDevice" description="Temp Omron install" max="" min="" paramter="" tag="" unit="" type="Bool" /><config default="COM36" name="Address" description="Temp Omron address" max="" min="" paramter="" tag="" unit="" type="String" /><config default="1" name="DeviceAddress" description="Temp Omron device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" /><config default="false" name="EnableLogMessage" description="Temp Omron log message" max="" min="" paramter="" tag="" unit="" type="Bool" /><config default="1" name="Modules" description="Module Count" max="5" min="0" paramter="" tag="" unit="" type="Integer" /><config default="1" name="TempWarnMaxDiff" description="Max different between actual value and set value" max="90" min="0" paramter="" tag="" unit="" type="Integer" /></configs>-->
|
||
<!--<configs name="PMDRYVacuumPump"><config default="false" name="EnableDevice" description="DRYVacuum Pump install" max="" min="" paramter="" tag="" unit="" type="Bool" /><config default="COM41" name="Address" description="DRYVacuum Pump address" max="" min="" paramter="" tag="" unit="" type="String" /><config default="1" name="DeviceAddress" description="DRYVacuum Pump device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" /><config default="1000" name="DelayTime" description="DRYVacuum Pump Delay When Soft On" max="1000" min="0" paramter="" tag="" unit="" type="Integer" /><config default="false" name="EnableLogMessage" description="DRYVacuum Pump log message" max="" min="" paramter="" tag="" unit="" type="Bool" /></configs>-->
|
||
<configs name="TMDRYVacuumPump" visible="false">
|
||
<config default="false" name="EnableDevice" description="DRYVacuum Pump install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="COM45" name="Address" description="DRYVacuum Pump address" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1000" name="DelayTime" description="DRYVacuum Pump Delay When Soft On" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="1" name="DeviceAddress" description="DRYVacuum Pump device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="DRYVacuum Pump log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<!--<configs name="NAISServo"><config default="false" name="EnableDevice" description="NAIS Servo install" max="" min="" paramter="" tag="" unit="" type="Bool" /><config default="COM40" name="Address" description="NAIS Servo address" max="" min="" paramter="" tag="" unit="" type="String" /><config default="1" name="DeviceAddress" description="NAIS Servo device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" /><config default="false" name="EnableLogMessage" description="NAIS Servo log message" max="" min="" paramter="" tag="" unit="" type="Bool" /><config default="120" name="HomeTimeout" description="Home Timeout" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" /><config default="120" name="UpTimeout" description="Up Timeout" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" /><config default="120" name="DownTimeout" description="Down Timeout" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" /></configs>-->
|
||
<configs name="KeyenceCVX300F" visible="false">
|
||
<config default="false" name="EnableDevice" description="KeyenceCVX300F install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="192.168.1.130:8500" name="Address" description="KeyenceCVX300F IP address,default IP : 192.168.1.130:8500 " max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="8500" name="Port" description="KeyenceCVX300F port num" max="9999999" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="1" name="DeviceAddress" description="KeyenceCVX300F device address" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="true" name="EnableLogMessage" description="KeyenceCVX300F log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<configs name="HiWinAligner" visible="false">
|
||
<config default="false" name="EnableDevice" description="HiWin aligner install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="COM1" name="Address" description="HiWin aligner address,default COM36" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="HiWin aligner device address" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="true" name="EnableLogMessage" description="HiWin aligner log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="10" name="AlignerTimeout" description="ALigner time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
<config default="10" name="AlignerMoveToCenterTimeOut" description="ALigner time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
||
</configs>
|
||
<configs name="P116PIDTC" visible="false">
|
||
<config default="false" name="EnableDevice" description="Temp Omron install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="COM36" name="Address" description="Temp Omron address" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="Temp Omron device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="Temp Omron log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="1" name="Modules" description="Module Count" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="1" name="TempWarnMaxDiff" description="Max different between actual value and set value" max="90" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
</configs>
|
||
<configs name="AETemp">
|
||
<config default="false" name="EnableDevice" description="Vacuometer install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="192.168.1.104:1001" name="Address" description="Vacuometer address,default IP:192.168.1.104:1001" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="1" name="DeviceAddress" description="Vacuometer device address" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="Vacuometer log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="IsThreePoint" description="内中外三点测温方式" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
<configs name="AKunTemp">
|
||
<config default="false" name="EnableDevice" description="AKunTemp install" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="192.168.1.103:53888" name="Address" description="AKunTemp IP Address,default IP:192.168.1.103:53888" max="" min="" paramter="" tag="" unit="" type="String" />
|
||
<config default="500" name="OnTimer" description="AKun温度采集周期毫秒" max="2000" min="100" paramter="" tag="" unit="ms" type="Integer" />
|
||
<config default="10" name="IntegrationTime" description="AKunTemp温度值平滑时间" max="10000" min="1" paramter="" tag="" unit="ms" type="Integer" />
|
||
<config default="false" name="EnableLogMessage" description="AKunTemp log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
<config default="false" name="IsThreePoint" description="内中外三点测温方式" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||
</configs>
|
||
</root> |