1900 lines
57 KiB
C#
1900 lines
57 KiB
C#
using Aitex.Core.Common.DeviceData;
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using Aitex.Core.Util;
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using Aitex.Core.Utilities;
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using Caliburn.Micro;
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using MECF.Framework.UI.Client.CenterViews.Editors.Recipe;
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using MECF.Framework.UI.Client.ClientBase;
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using OpenSEMI.ClientBase;
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using System.Collections.Generic;
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using System.Collections.ObjectModel;
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using System.Windows.Input;
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using Aitex.Core.UI.MVVM;
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using System.Windows;
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using SicUI.Controls;
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using System.Windows.Media;
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using Aitex.Core.Common.DeviceData.IoDevice;
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using MECF.Framework.Common.Account.Permissions;
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using MECF.Framework.UI.Client.CenterViews.Editors;
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using MECF.Framework.Common.Aitex.Core.Common.DeviceData;
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namespace SicUI.Models.PMs
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{
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public class PMOperationViewModel : SicModuleUIViewModelBase, ISupportMultipleSystem
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{
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[Subscription("Status")]
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public string Status { get; set; }
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[Subscription("IsService")]
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public bool IsService { get; set; }
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public double mOpacity { get; set; }
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public bool TMAEnable { get; set; }
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#region Enable
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//维护模式
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public bool IsServiceMode => (Status == "Idle" || Status == "Safety" || Status == "VacIdle" || Status == "ProcessIdle" || Status == "Error" || Status == "ServiceIdle") && !IsOnline;
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public bool IsEnableGasMap => (Status == "Idle" || Status == "VacIdle" || Status == "ServiceIdle") && !IsOnline;
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public bool EnableProcessIdle => (Status == "Idle" || Status == "VacIdle" || Status == "ProcessIdle" || Status == "Safety");
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public bool VacIdleEnable => (Status == "Idle" || Status == "VacIdle" || Status == "ProcessIdle" || Status == "Safety");
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public bool EnableIdleRoutine => (Status == "Idle" || Status == "Safety" || Status == "VacIdle") && !IsOnline;
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public bool EnableIdle => (Status == "ProcessIdle" || Status == "VacIdle" || Status == "Safety" || Status == "Idle" || Status == "ServiceIdle") && !IsOnline;
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public bool EnableService => (Status == "Idle" || Status == "Safety" || Status == "VacIdle" || Status == "Error") && !IsOnline;
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public bool EnableExchangeMo => (Status == "Idle" || Status == "Safety" || Status == "VacIdle") && !IsOnline && IsService;
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public string LableStatue => IsService ? "Service" : Status;
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//LeakCheck后只能执行ATM Idle,其他Routine按钮不允许执行
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private bool EnableLeakCheck = true;
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public SolidColorBrush StatueLabelColor
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{
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get
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{
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if (IsService)
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{
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return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 50, 205, 50));
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}
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else
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{
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return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 255, 255, 255));
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}
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}
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}
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public Visibility VisbleOnlyIdle
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{
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get
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{
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return IsService ? Visibility.Visible : Visibility.Collapsed;
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}
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}
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#endregion
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#region MFC
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public double V90CountMFC => Mfc31Data.FeedBack + (V63.IsOpen ? Mfc25Data.FeedBack : 0) + (V62.IsOpen ? Mfc22Data.FeedBack : 0) + (V61.IsOpen ? Mfc19Data.FeedBack : 0);
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public double V89CountMFC => Mfc29Data.FeedBack + (V63.IsOpen ? Mfc26Data.FeedBack : 0) + (V62.IsOpen ? Mfc23Data.FeedBack : 0) + (V61.IsOpen ? Mfc20Data.FeedBack : 0);
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public double V88CountMFC => Mfc28Data.FeedBack + (V63.IsOpen ? Mfc15Data.FeedBack : 0) + (V62.IsOpen ? Mfc9Data.FeedBack : 0) + (V61.IsOpen ? Mfc2Data.FeedBack : 0);
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//PT4Data.OpenDegree > 0
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public double ACountMFC => (V25.IsOpen || V72.IsOpen) ?
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Mfc1Data.FeedBack +
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(!V39.IsOpen ? Mfc6Data.FeedBack : 0) +
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(!V40.IsOpen ? Mfc5Data.FeedBack : 0) +
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(!V41.IsOpen && V42.IsOpen && (V43s.IsOpen || V45.IsOpen) && TMAEnable ? Mfc7Data.FeedBack : 0) +
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(!V41.IsOpen && V42.IsOpen && TMAEnable ? Mfc8Data.FeedBack : 0) +
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(!V53.IsOpen ? (Mfc12Data.FeedBack + (V49.IsOpen || V48s.IsOpen ? Mfc10Data.FeedBack + Mfc11Data.FeedBack : 0)) : 0) +
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(!V54.IsOpen ? Mfc13Data.FeedBack : 0) +
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(V56.IsOpen && !V55.IsOpen ? Mfc14Data.FeedBack : 0) +
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(V60.IsOpen && !V59.IsOpen ? Mfc16Data.FeedBack : 0)
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: 0;
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public double BCountMFC => (V25.IsOpen || V72.IsOpen) ? Mfc3Data.FeedBack + Mfc4Data.FeedBack - Mfc6Data.FeedBack : 0;//PT1Data.OpenDegree > 0 ? Mfc3Data.FeedBack + Mfc4Data.FeedBack - Mfc6Data.FeedBack : 0;
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//public double PC7Count => PT7Data.OpenDegree > 0 ? (V63.IsOpen ? Mfc15Data.FeedBack + (V59.IsOpen ? Mfc16Data.FeedBack : 0) - Mfc25Data.FeedBack - Mfc26Data.FeedBack : 0) : 0;
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//public double PC6Count => PT6Data.OpenDegree > 0 ? (V62.IsOpen ? Mfc9Data.FeedBack + (V54.IsOpen ? Mfc13Data.FeedBack : 0) + (V55.IsOpen ? Mfc14Data.FeedBack : 0)
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// + (V53.IsOpen ? (PT3Data.OpenDegree > 0 ? Mfc11Data.FeedBack + Mfc10Data.FeedBack + Mfc12Data.FeedBack : 0) : 0) - Mfc22Data.FeedBack - Mfc23Data.FeedBack : 0) : 0;
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//public double PC5Count => PT5Data.OpenDegree > 0 ? (V61.IsOpen ? Mfc2Data.FeedBack + (V39.IsOpen ? Mfc6Data.FeedBack : 0) + (V40.IsOpen ? Mfc5Data.FeedBack : 0) + (V41.IsOpen ? (PT2Data.OpenDegree > 0 ? Mfc7Data.FeedBack + Mfc8Data.FeedBack : 0) : 0) - Mfc19Data.FeedBack - Mfc20Data.FeedBack : 0) : 0;
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[Subscription("Mfc1.DeviceData")]
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public AITMfcData Mfc1Data { get; set; }
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[Subscription("Mfc2.DeviceData")]
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public AITMfcData Mfc2Data { get; set; }
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[Subscription("Mfc3.DeviceData")]
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public AITMfcData Mfc3Data { get; set; }
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[Subscription("Mfc4.DeviceData")]
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public AITMfcData Mfc4Data { get; set; }
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[Subscription("Mfc5.DeviceData")]
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public AITMfcData Mfc5Data { get; set; }
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[Subscription("Mfc6.DeviceData")]
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public AITMfcData Mfc6Data { get; set; }
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[Subscription("Mfc7.DeviceData")]
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public AITMfcData Mfc7Data { get; set; }
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[Subscription("Mfc8.DeviceData")]
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public AITMfcData Mfc8Data { get; set; }
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[Subscription("Mfc9.DeviceData")]
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public AITMfcData Mfc9Data { get; set; }
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[Subscription("Mfc10.DeviceData")]
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public AITMfcData Mfc10Data { get; set; }
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[Subscription("Mfc11.DeviceData")]
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public AITMfcData Mfc11Data { get; set; }
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[Subscription("Mfc12.DeviceData")]
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public AITMfcData Mfc12Data { get; set; }
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[Subscription("Mfc13.DeviceData")]
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public AITMfcData Mfc13Data { get; set; }
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[Subscription("Mfc14.DeviceData")]
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public AITMfcData Mfc14Data { get; set; }
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[Subscription("Mfc15.DeviceData")]
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public AITMfcData Mfc15Data { get; set; }
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[Subscription("Mfc16.DeviceData")]
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public AITMfcData Mfc16Data { get; set; }
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[Subscription("Mfc19.DeviceData")]
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public AITMfcData Mfc19Data { get; set; }
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[Subscription("Mfc20.DeviceData")]
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public AITMfcData Mfc20Data { get; set; }
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[Subscription("Mfc22.DeviceData")]
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public AITMfcData Mfc22Data { get; set; }
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[Subscription("Mfc23.DeviceData")]
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public AITMfcData Mfc23Data { get; set; }
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[Subscription("Mfc25.DeviceData")]
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public AITMfcData Mfc25Data { get; set; }
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[Subscription("Mfc26.DeviceData")]
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public AITMfcData Mfc26Data { get; set; }
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[Subscription("Mfc27.DeviceData")]
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public AITMfcData Mfc27Data { get; set; }
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[Subscription("Mfc28.DeviceData")]
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public AITMfcData Mfc28Data { get; set; }
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[Subscription("Mfc29.DeviceData")]
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public AITMfcData Mfc29Data { get; set; }
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[Subscription("Mfc40.DeviceData")]
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public AITMfcData Mfc40Data { get; set; }
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[Subscription("Mfc31.DeviceData")]
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public AITMfcData Mfc31Data { get; set; }
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[Subscription("Mfc32.DeviceData")]
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public AITMfcData Mfc32Data { get; set; }
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[Subscription("Mfc33.DeviceData")]
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public AITMfcData Mfc33Data { get; set; }
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[Subscription("Mfc35.DeviceData")]
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public AITMfcData Mfc35Data { get; set; }
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[Subscription("Mfc36.DeviceData")]
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public AITMfcData Mfc36Data { get; set; }
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[Subscription("Mfc37.DeviceData")]
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public AITMfcData Mfc37Data { get; set; }
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[Subscription("Mfc38.DeviceData")]
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public AITMfcData Mfc38Data { get; set; }
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#endregion
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#region Pressure
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[Subscription("Pressure1.DeviceData")]
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public AITPressureMeterData PT1Data { get; set; }
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[Subscription("Pressure2.DeviceData")]
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public AITPressureMeterData PT2Data { get; set; }
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[Subscription("Pressure3.DeviceData")]
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public AITPressureMeterData PT3Data { get; set; }
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[Subscription("Pressure4.DeviceData")]
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public AITPressureMeterData PT4Data { get; set; }
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[Subscription("Pressure5.DeviceData")]
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public AITPressureMeterData PT5Data { get; set; }
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[Subscription("Pressure6.DeviceData")]
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public AITPressureMeterData PT6Data { get; set; }
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[Subscription("Pressure7.DeviceData")]
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public AITPressureMeterData PT7Data { get; set; }
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[Subscription("PT1.DeviceData")]
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public AITPressureMeterData ChamPress { get; set; }
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[Subscription("PT2.DeviceData")]
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public AITPressureMeterData ForelinePress { get; set; }
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public string ChamPressFeedBack
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{
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get { return ChamPress.FeedBack.ToString(ChamPress.FormatString); }
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set { }
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}
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#endregion
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#region Valve
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[Subscription("V25.DeviceData")]
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public AITValveData V25 { get; set; }
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[Subscription("V27.DeviceData")]
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public AITValveData V27 { get; set; }
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[Subscription("V31.DeviceData")]
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public AITValveData V31 { get; set; }
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[Subscription("V32.DeviceData")]
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public AITValveData V32 { get; set; }
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[Subscription("V33.DeviceData")]
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public AITValveData V33 { get; set; }
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[Subscription("V33s.DeviceData")]
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public AITValveData V33s { get; set; }
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[Subscription("V35.DeviceData")]
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public AITValveData V35 { get; set; }
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[Subscription("V36.DeviceData")]
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public AITValveData V36 { get; set; }
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[Subscription("V37.DeviceData")]
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public AITValveData V37 { get; set; }
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[Subscription("V37s.DeviceData")]
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public AITValveData V37s { get; set; }
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[Subscription("V39.DeviceData")]
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public AITValveData V39 { get; set; }
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[Subscription("V39s.DeviceData")]
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public AITValveData V39s { get; set; }
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[Subscription("V40.DeviceData")]
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public AITValveData V40 { get; set; }
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[Subscription("V40s.DeviceData")]
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public AITValveData V40s { get; set; }
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[Subscription("V41.DeviceData")]
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public AITValveData V41 { get; set; }
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[Subscription("V41s.DeviceData")]
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public AITValveData V41s { get; set; }
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[Subscription("V42.DeviceData")]
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public AITValveData V42 { get; set; }
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[Subscription("V43.DeviceData")]
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public AITValveData V43 { get; set; }
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[Subscription("V43s.DeviceData")]
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public AITValveData V43s { get; set; }
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[Subscription("V45.DeviceData")]
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public AITValveData V45 { get; set; }
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[Subscription("V46.DeviceData")]
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public AITValveData V46 { get; set; }
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[Subscription("V46s.DeviceData")]
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public AITValveData V46s { get; set; }
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[Subscription("V48.DeviceData")]
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public AITValveData V48 { get; set; }
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[Subscription("V48s.DeviceData")]
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public AITValveData V48s { get; set; }
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[Subscription("V49.DeviceData")]
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public AITValveData V49 { get; set; }
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[Subscription("V50.DeviceData")]
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public AITValveData V50 { get; set; }
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[Subscription("V50s.DeviceData")]
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public AITValveData V50s { get; set; }
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[Subscription("V51.DeviceData")]
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public AITValveData V51 { get; set; }
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[Subscription("V51s.DeviceData")]
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public AITValveData V51s { get; set; }
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[Subscription("V52.DeviceData")]
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public AITValveData V52 { get; set; }
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[Subscription("V52s.DeviceData")]
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public AITValveData V52s { get; set; }
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[Subscription("V53.DeviceData")]
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public AITValveData V53 { get; set; }
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[Subscription("V53s.DeviceData")]
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public AITValveData V53s { get; set; }
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[Subscription("V54.DeviceData")]
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public AITValveData V54 { get; set; }
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[Subscription("V54s.DeviceData")]
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public AITValveData V54s { get; set; }
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[Subscription("V55.DeviceData")]
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public AITValveData V55 { get; set; }
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[Subscription("V56.DeviceData")]
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public AITValveData V56 { get; set; }
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[Subscription("V58.DeviceData")]
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public AITValveData V58 { get; set; }
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[Subscription("V58s.DeviceData")]
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public AITValveData V58s { get; set; }
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[Subscription("V59.DeviceData")]
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public AITValveData V59 { get; set; }
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[Subscription("V60.DeviceData")]
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public AITValveData V60 { get; set; }
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[Subscription("V61.DeviceData")]
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public AITValveData V61 { get; set; }
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[Subscription("V62.DeviceData")]
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public AITValveData V62 { get; set; }
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[Subscription("V63.DeviceData")]
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public AITValveData V63 { get; set; }
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//[Subscription("V64.DeviceData")]
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//public AITValveData V64 { get; set; }
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//[Subscription("V65.DeviceData")]
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//public AITValveData V65 { get; set; }
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[Subscription("V68.DeviceData")]
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public AITValveData V68 { get; set; }
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[Subscription("V69.DeviceData")]
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public AITValveData V69 { get; set; }
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[Subscription("V70.DeviceData")]
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public AITValveData V70 { get; set; }
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[Subscription("V72.DeviceData")]
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public AITValveData V72 { get; set; }
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[Subscription("V73.DeviceData")]
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public AITValveData V73 { get; set; }
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[Subscription("V74.DeviceData")]
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public AITValveData V74 { get; set; }
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[Subscription("V75.DeviceData")]
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public AITValveData V75 { get; set; }
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[Subscription("V76.DeviceData")]
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public AITValveData V76 { get; set; }
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[Subscription("V87.DeviceData")]
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public AITValveData V87 { get; set; }
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[Subscription("V88.DeviceData")]
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public AITValveData V88 { get; set; }
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[Subscription("V89.DeviceData")]
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public AITValveData V89 { get; set; }
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[Subscription("V90.DeviceData")]
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public AITValveData V90 { get; set; }
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[Subscription("V91.DeviceData")]
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public AITValveData V91 { get; set; }
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[Subscription("V92.DeviceData")]
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public AITValveData V92 { get; set; }
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[Subscription("V93.DeviceData")]
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public AITValveData V93 { get; set; }
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[Subscription("V94.DeviceData")]
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public AITValveData V94 { get; set; }
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[Subscription("V95.DeviceData")]
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public AITValveData V95 { get; set; }
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[Subscription("V96.DeviceData")]
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public AITValveData V96 { get; set; }
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[Subscription("V97.DeviceData")]
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public AITValveData V97 { get; set; }
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[Subscription("V111.DeviceData")]
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public AITValveData V111 { get; set; }
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[Subscription("V99.DeviceData")]
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public AITValveData V99 { get; set; }
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[Subscription("V99s.DeviceData")]
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public AITValveData V99s { get; set; }
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[Subscription("EPV2.DeviceData")]
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public AITValveData EPV2 { get; set; }
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#endregion
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#region Temp
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[Subscription("TC2.L3InputTempSetPoint")]
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public float SCRL3InputTemp { get; set; }
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|
[Subscription("TC1.L1InputTempSetPoint")]
|
|
public float L1InputTemp { get; set; }
|
|
|
|
|
|
[Subscription("TC1.L2InputTempSetPoint")]
|
|
public float L2InputTemp { get; set; }
|
|
|
|
[Subscription("TC1.L3InputTempSetPoint")]
|
|
public float L3InputTemp { get; set; }
|
|
|
|
#endregion
|
|
|
|
#region CoolingWater Temp Data
|
|
[Subscription("FlowTemp1.DeviceData")]
|
|
public AITWaterFlowData FlowTemp1 { get; set; }
|
|
|
|
[Subscription("FlowTemp2.DeviceData")]
|
|
public AITWaterFlowData FlowTemp2 { get; set; }
|
|
|
|
[Subscription("FlowTemp3.DeviceData")]
|
|
public AITWaterFlowData FlowTemp3 { get; set; }
|
|
|
|
[Subscription("FlowTemp4.DeviceData")]
|
|
public AITWaterFlowData FlowTemp4 { get; set; }
|
|
|
|
[Subscription("FlowTemp5.DeviceData")]
|
|
public AITWaterFlowData FlowTemp5 { get; set; }
|
|
|
|
[Subscription("FlowTemp6.DeviceData")]
|
|
public AITWaterFlowData FlowTemp6 { get; set; }
|
|
|
|
[Subscription("FlowTemp7.DeviceData")]
|
|
public AITWaterFlowData FlowTemp7 { get; set; }
|
|
|
|
[Subscription("FlowTemp8.DeviceData")]
|
|
public AITWaterFlowData FlowTemp8 { get; set; }
|
|
|
|
[Subscription("FlowTemp9.DeviceData")]
|
|
public AITWaterFlowData FlowTemp9 { get; set; }
|
|
|
|
[Subscription("FlowTemp10.DeviceData")]
|
|
public AITWaterFlowData FlowTemp10 { get; set; }
|
|
|
|
[Subscription("FlowTemp11.DeviceData")]
|
|
public AITWaterFlowData FlowTemp11 { get; set; }
|
|
|
|
[Subscription("FlowTemp12.DeviceData")]
|
|
public AITWaterFlowData FlowTemp12 { get; set; }
|
|
|
|
[Subscription("FlowTemp13.DeviceData")]
|
|
public AITWaterFlowData FlowTemp13 { get; set; }
|
|
|
|
[Subscription("FlowTemp14.DeviceData")]
|
|
public AITWaterFlowData FlowTemp14 { get; set; }
|
|
|
|
#endregion
|
|
|
|
#region Pump
|
|
[Subscription("Pump.DeviceData")]
|
|
public AITPumpData PumpData { get; set; }
|
|
|
|
//[Subscription("PMDRYVacuumPump.DeviceDataMP")]
|
|
//public AITPumpData PumpDataMP { get; set; }
|
|
|
|
//[Subscription("PMDRYVacuumPump.DeviceDataBP")]
|
|
//public AITPumpData PumpDataBP { get; set; }
|
|
|
|
#endregion
|
|
|
|
#region Sensor
|
|
|
|
[Subscription("SensorChamLidClosed.DeviceData")]
|
|
public AITSensorData Sensor1 { get; set; }
|
|
|
|
[Subscription("CleanRoutineSucceed.DeviceData")]
|
|
public AITSensorData CleanRoutineSucceed { get; set; }
|
|
|
|
//[Subscription("Sensor2.DeviceData")]
|
|
//public AITSensorData Sensor2 { get; set; }
|
|
|
|
//[Subscription("SensorChamBodyOTSW.DeviceData")]
|
|
//public AITSensorData Sensor3 { get; set; }
|
|
|
|
[Subscription("SensorChamCabDoorClosed.DeviceData")]
|
|
public AITSensorData Sensor4 { get; set; }
|
|
|
|
[Subscription("SensorChamPressAboveATMSW.DeviceData")]
|
|
public AITSensorData Sensor5 { get; set; }
|
|
|
|
[Subscription("SensorChamAtSafeProcessPressSW.DeviceData")]
|
|
public AITSensorData Sensor6 { get; set; }
|
|
|
|
//[Subscription("Sensor7.DeviceData")]
|
|
//public AITSensorData Sensor7 { get; set; }
|
|
|
|
[Subscription("SensorDORPressATMSW.DeviceData")]
|
|
public AITSensorData Sensor8 { get; set; }
|
|
|
|
[Subscription("SensorHeaterTempBelow900CSW.DeviceData")]
|
|
public AITSensorData Sensor9 { get; set; }
|
|
|
|
[Subscription("SensorConfinementRingUp.DeviceData")]
|
|
public AITSensorData Sensor10 { get; set; }
|
|
|
|
////[Subscription("Sensor11.DeviceData")]
|
|
////public AITSensorData Sensor11 { get; set; }
|
|
|
|
////[Subscription("Sensor12.DeviceData")]
|
|
////public AITSensorData Sensor12 { get; set; }
|
|
|
|
////[Subscription("Sensor13.DeviceData")]
|
|
////public AITSensorData Sensor13 { get; set; }
|
|
|
|
////[Subscription("Sensor14.DeviceData")]
|
|
////public AITSensorData Sensor14 { get; set; }
|
|
|
|
////[Subscription("Sensor15.DeviceData")]
|
|
////public AITSensorData Sensor15 { get; set; }
|
|
|
|
////[Subscription("Sensor16.DeviceData")]
|
|
////public AITSensorData Sensor16 { get; set; }
|
|
|
|
////[Subscription("Sensor17.DeviceData")]
|
|
////public AITSensorData Sensor17 { get; set; }
|
|
|
|
////[Subscription("Sensor18.DeviceData")]
|
|
////public AITSensorData Sensor18 { get; set; }
|
|
|
|
////[Subscription("Sensor19.DeviceData")]
|
|
////public AITSensorData Sensor19 { get; set; }
|
|
|
|
////[Subscription("Sensor20.DeviceData")]
|
|
////public AITSensorData Sensor20 { get; set; }
|
|
|
|
////[Subscription("Sensor21.DeviceData")]
|
|
////public AITSensorData Sensor21 { get; set; }
|
|
|
|
[Subscription("SensorPMH2DetectorSW.DeviceData")]
|
|
public AITSensorData Sensor22 { get; set; }
|
|
|
|
[Subscription("SensorGBHCLDetectorSW.DeviceData")]
|
|
public AITSensorData Sensor23 { get; set; }
|
|
|
|
[Subscription("SensorGBDoorClosed.DeviceData")]
|
|
public AITSensorData Sensor24 { get; set; }
|
|
|
|
[Subscription("SensorDryPumpAlarm.DeviceData")]
|
|
public AITSensorData Sensor25 { get; set; }
|
|
|
|
[Subscription("SensorPumpExhaustPressSW.DeviceData")]
|
|
public AITSensorData Sensor26 { get; set; }
|
|
|
|
[Subscription("SensorPumpExhaustDPSW.DeviceData")]
|
|
public AITSensorData Sensor27 { get; set; }
|
|
|
|
[Subscription("SensorScrubberIntlkSW.DeviceData")]
|
|
public AITSensorData Sensor28 { get; set; }
|
|
|
|
[Subscription("SensorFacilityIntlkSW.DeviceData")]
|
|
public AITSensorData Sensor29 { get; set; }
|
|
|
|
[Subscription("SensorReactorWaterLeakSW.DeviceData")]
|
|
public AITSensorData Sensor30 { get; set; }
|
|
|
|
[Subscription("SensorGBWaterLeakSW.DeviceData")]
|
|
public AITSensorData Sensor33 { get; set; }
|
|
|
|
[Subscription("SensorPRWaterLeakSW.DeviceData")]
|
|
public AITSensorData Sensor34 { get; set; }
|
|
|
|
|
|
|
|
#endregion
|
|
|
|
|
|
#region Total Gas Flow
|
|
|
|
public double InputGasFlowCount1 => (V97.IsOpen ? Mfc40Data.FeedBack : 0)
|
|
+ (V91.IsOpen ? Mfc33Data.FeedBack : 0)
|
|
+ (V87.IsOpen ? Mfc27Data.FeedBack : 0)
|
|
+ (V90.IsOpen ? Mfc31Data.FeedBack : 0)
|
|
+ (V90.IsOpen ? Mfc25Data.FeedBack : 0)
|
|
+ (V90.IsOpen ? Mfc22Data.FeedBack : 0)
|
|
+ (V90.IsOpen ? Mfc19Data.FeedBack : 0)
|
|
+ (V89.IsOpen ? Mfc29Data.FeedBack : 0)
|
|
+ (V89.IsOpen ? Mfc26Data.FeedBack : 0)
|
|
+ (V89.IsOpen ? Mfc23Data.FeedBack : 0)
|
|
+ (V89.IsOpen ? Mfc20Data.FeedBack : 0)
|
|
+ (V88.IsOpen ? Mfc28Data.FeedBack : 0)
|
|
+ (V88.IsOpen ? Mfc15Data.FeedBack : 0)
|
|
+ (V88.IsOpen ? Mfc9Data.FeedBack : 0)
|
|
+ (V88.IsOpen ? Mfc2Data.FeedBack : 0);
|
|
|
|
public double InputGasFlowCount2 => V92.IsOpen ? Mfc32Data.FeedBack : 0;
|
|
|
|
public double InputGasFlowCount3 => (V96.IsOpen ? Mfc38Data.FeedBack : 0)
|
|
+ (V95.IsOpen ? Mfc37Data.FeedBack : 0)
|
|
+ (V94.IsOpen ? Mfc36Data.FeedBack : 0)
|
|
+ (V93.IsOpen ? Mfc35Data.FeedBack : 0)
|
|
+ (V92.IsOpen ? Mfc32Data.FeedBack : 0);
|
|
|
|
|
|
|
|
|
|
public double InputGasFlowTotal =>
|
|
InputGasFlowCount1 + InputGasFlowCount2 + InputGasFlowCount3;
|
|
|
|
#endregion
|
|
|
|
|
|
[Subscription("PSU1.AllHeatEnable")]
|
|
public bool AllHeatEnable { get; set; }
|
|
|
|
//底部温度和侧壁功率
|
|
[Subscription("TC1.TempCtrlTCIN")]
|
|
public float TC1Temp2 { get; set; }
|
|
|
|
[Subscription("SCR1.PowerFeedBack")]
|
|
public float SCR1Power { get; set; }
|
|
|
|
[Subscription("SCR2.PowerFeedBack")]
|
|
public float SCR2Power { get; set; }
|
|
|
|
[Subscription("SCR3.PowerFeedBack")]
|
|
public float SCR3Power { get; set; }
|
|
|
|
[Subscription("SCR1.DeviceData")]
|
|
public IoPsuData SCR1Data { get; set; }
|
|
|
|
[Subscription("SCR2.DeviceData")]
|
|
public IoPsuData SCR2Data { get; set; }
|
|
|
|
[Subscription("SCR3.DeviceData")]
|
|
public IoPsuData SCR3Data { get; set; }
|
|
|
|
|
|
[Subscription("PSU1.DeviceData")]
|
|
public IoPsuData PSU1Data { get; set; }
|
|
|
|
[Subscription("PSU2.DeviceData")]
|
|
public IoPsuData PSU2Data { get; set; }
|
|
|
|
[Subscription("PSU3.DeviceData")]
|
|
public IoPsuData PSU3Data { get; set; }
|
|
|
|
[Subscription("PSU1.OutputPowerFeedBack")]
|
|
public float PSU1Power { get; set; }
|
|
|
|
[Subscription("PSU2.OutputPowerFeedBack")]
|
|
public float PSU2Power { get; set; }
|
|
|
|
[Subscription("PSU3.OutputPowerFeedBack")]
|
|
public float PSU3Power { get; set; }
|
|
|
|
|
|
|
|
[Subscription("PMServo.ActualSpeedFeedback")]
|
|
public float ActualSpeedFeedback { get; set; }
|
|
|
|
|
|
[Subscription("PSU1.OutputArmsFeedBack")]
|
|
public float OutputArmsFeedBack { get; set; }
|
|
|
|
public string PSUArmStr => OutputArmsFeedBack.ToString("0.0");
|
|
|
|
[Subscription("PSU1.OutputPowerFeedBack")]
|
|
public float OutputPowerFeedBack { get; set; }
|
|
|
|
public string PSUPowerStr => OutputPowerFeedBack.ToString("0.0");
|
|
|
|
[Subscription("GasConnector.GasConnectorTightenFeedback")]
|
|
public bool IsGasConnectorTighten { get; set; }
|
|
|
|
|
|
|
|
[Subscription("TV.DeviceData")]
|
|
public AITThrottleValveData TV { get; set; }
|
|
|
|
[Subscription("SHLid.Status")]
|
|
public string SHLidStatus { get; set; }
|
|
|
|
public Visibility SHLidIsOpen
|
|
{
|
|
get
|
|
{
|
|
if (SHLidStatus == "Loosen") return Visibility.Hidden;
|
|
return Visibility.Visible;
|
|
}
|
|
}
|
|
|
|
public string LidTopColor
|
|
{
|
|
get
|
|
{
|
|
if (SHLidStatus == "Unknown") return "Yellow";
|
|
if (SHLidStatus == "Error") return "Red";
|
|
return "DimGray";
|
|
}
|
|
}
|
|
|
|
[Subscription("BottomSection.Status")]
|
|
public string BottomSectionStatus { get; set; }
|
|
|
|
[Subscription("ChamberLiftPin.UpFeedback")]
|
|
public bool UpFeedback { get; set; }
|
|
|
|
[Subscription("ChamberLiftPin.DownFeedback")]
|
|
public bool DownFeedback { get; set; }
|
|
|
|
[Subscription("ChamberLiftPin.State")]
|
|
public string LiftStatus
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
|
|
public bool IsLiftUpEnable
|
|
{
|
|
get { return IsPMIdle && LiftStatus != "Up" && !IsOnline; }
|
|
}
|
|
public bool IsLiftDownEnable
|
|
{
|
|
get { return IsPMIdle && LiftStatus != "Down" && !IsOnline; }
|
|
}
|
|
|
|
[Subscription("ChamberDoor.State")]
|
|
public string ChamberDoorState { get; set; }
|
|
|
|
public bool IsChamberDoorOpenEnable
|
|
{
|
|
get { return IsPMIdle && ChamberDoorState != "Open" && !IsOnline; }
|
|
}
|
|
public bool IsChamberDoorCloseEnable
|
|
{
|
|
get { return IsPMIdle && ChamberDoorState != "Close" && !IsOnline; }
|
|
}
|
|
|
|
public string DoorColor
|
|
{
|
|
get
|
|
{
|
|
if (ChamberDoorState == "Unknown") return "Yellow";
|
|
if (ChamberDoorState == "Error") return "Red";
|
|
return "DimGray";
|
|
}
|
|
}
|
|
|
|
|
|
|
|
[Subscription("VentValve.DeviceData")]
|
|
public AITValveData VentValve { get; set; }
|
|
|
|
[Subscription("Gas1Valve.DeviceData")]
|
|
public AITValveData Gas1Valve { get; set; }
|
|
|
|
[Subscription("Gas2Valve.DeviceData")]
|
|
public AITValveData Gas2Valve { get; set; }
|
|
|
|
[Subscription("Gas3Valve.DeviceData")]
|
|
public AITValveData Gas3Valve { get; set; }
|
|
|
|
[Subscription("Gas4Valve.DeviceData")]
|
|
public AITValveData Gas4Valve { get; set; }
|
|
|
|
[Subscription("FinalValve.DeviceData")]
|
|
public AITValveData FinalValve { get; set; }
|
|
|
|
[Subscription("ElectricalCoolingValve.DeviceData")]
|
|
public AITValveData ElectricalCoolingValve { get; set; }
|
|
|
|
[Subscription("ChamberLidCoolingValve.DeviceData")]
|
|
public AITValveData ChamberLidCoolingValve { get; set; }
|
|
|
|
[Subscription("MicrowaveCoolingValve.DeviceData")]
|
|
public AITValveData MicrowaveCoolingValve { get; set; }
|
|
|
|
[Subscription("RF.DeviceData")]
|
|
public AITRfData RfData { get; set; }
|
|
|
|
[Subscription("Microwave.DeviceData")]
|
|
public AITRfData MicrowaveData { get; set; }
|
|
|
|
[Subscription("ChamberHeater.DeviceData")]
|
|
public AITHeaterData ChamberHeaterData { get; set; }
|
|
|
|
[Subscription("ThrottleValve.DeviceData")]
|
|
public AITThrottleValveData ThrottleValveData { get; set; }
|
|
|
|
[Subscription("ChamberPressure.DeviceData")]
|
|
public AITPressureMeterData ChamberPressure { get; set; }
|
|
|
|
//[Subscription("CDAPressure.DeviceData")]
|
|
//public AITPressureMeterData CDAPressure { get; set; }
|
|
|
|
[Subscription("ChamberMonitorPressure.DeviceData")]
|
|
public AITPressureMeterData ChamberMonitorPressure { get; set; }
|
|
|
|
//[Subscription("Gas1Pressure.DeviceData")]
|
|
//public AITPressureMeterData Gas1PressureData { get; set; }
|
|
|
|
//[Subscription("Gas2Pressure.DeviceData")]
|
|
//public AITPressureMeterData Gas2PressureData { get; set; }
|
|
|
|
//[Subscription("Gas3Pressure.DeviceData")]
|
|
//public AITPressureMeterData Gas3PressureData { get; set; }
|
|
|
|
//[Subscription("Gas4Pressure.DeviceData")]
|
|
//public AITPressureMeterData Gas4PressureData { get; set; }
|
|
|
|
|
|
[Subscription("SensorEmo.DeviceData")]
|
|
public AITSensorData SensorEmo { get; set; }
|
|
|
|
[Subscription("SensorLidClosed.DeviceData")]
|
|
public AITSensorData SensorLidClosed { get; set; }
|
|
|
|
[Subscription("SensorDoor1Open.DeviceData")]
|
|
public AITSensorData SensorDoor1Open { get; set; }
|
|
|
|
[Subscription("SensorDoor2Open.DeviceData")]
|
|
public AITSensorData SensorDoor2Open { get; set; }
|
|
|
|
[Subscription("SensorDoor3Open.DeviceData")]
|
|
public AITSensorData SensorDoor3Open { get; set; }
|
|
|
|
[Subscription("SensorDoor4Open.DeviceData")]
|
|
public AITSensorData SensorDoor4Open { get; set; }
|
|
|
|
[Subscription("SensorVentFlowSwitch.DeviceData")]
|
|
public AITSensorData SensorVentFlowSwitch { get; set; }
|
|
|
|
[Subscription("SensorVacuumSwitch.DeviceData")]
|
|
public AITSensorData SensorVacuumSwitch { get; set; }
|
|
|
|
[Subscription("MainPump.DeviceData")]
|
|
public AITPumpData MainPumpData { get; set; }
|
|
|
|
[Subscription("SelectedRecipeName")]
|
|
public string SelectedRecipeName
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
|
|
public string SelectedRecipeNameDisplay
|
|
{
|
|
get
|
|
{
|
|
if (string.IsNullOrEmpty(SelectedRecipeName))
|
|
return string.Empty;
|
|
return SelectedRecipeName.Substring("Sic\\Process\\".Length);
|
|
}
|
|
}
|
|
|
|
[Subscription("StepName")]
|
|
public string RecipeStepName { get; set; }
|
|
|
|
[Subscription("StepNumber")]
|
|
public string RecipeStepNumber { get; set; }
|
|
|
|
[Subscription("ElapseTime")]
|
|
public double RecipeElapseTime { get; set; }
|
|
|
|
[Subscription("IsOnline")]
|
|
public bool IsOnline { get; set; }
|
|
public string OnlineState => IsOnline ? "Online" : "Offline";
|
|
public string OnlineButtomContent => IsOnline ? "Offline" : "Online";
|
|
|
|
public bool IsOnlineEnable
|
|
{
|
|
get { return IsPMIdle && !IsOnline; }
|
|
}
|
|
public bool IsOfflineEnable
|
|
{
|
|
get { return IsPMIdle && IsOnline; }
|
|
}
|
|
|
|
[Subscription("Status")]
|
|
public string PMStatus { get; set; }
|
|
public string PMStatusBackground
|
|
{
|
|
get { return ModuleStatusBackground.GetStatusBackground(PMStatus); }
|
|
}
|
|
public bool IsAbortEnable
|
|
{
|
|
get { return !IsPMIdle && PMStatus != "Init" && !IsPMError; }
|
|
}
|
|
public bool IsPMError
|
|
{
|
|
get { return PMStatus == "Error"; }
|
|
}
|
|
|
|
public bool IsPMIdle
|
|
{
|
|
get { return PMStatus == "Idle"; }
|
|
}
|
|
|
|
public bool IsEnableOperation
|
|
{
|
|
get
|
|
{
|
|
return PMStatus == "Idle" && !IsOnline;
|
|
}
|
|
}
|
|
|
|
public bool IsHomed => PMStatus != "Init";
|
|
public bool IsStartButtonEnable => PMStatus == "Idle" && !IsOnline;
|
|
public bool IsSkipButtonEnable => PMStatus == "Process" && !IsOnline;
|
|
public bool IsStopButtonEnable => PMStatus == "Process" && !IsOnline;
|
|
|
|
public WaferInfo PMWafer
|
|
{
|
|
get
|
|
{
|
|
if (ModuleManager.ModuleInfos[Module].WaferManager.Wafers.Count > 0)
|
|
return ModuleManager.ModuleInfos[Module].WaferManager.Wafers[0];
|
|
return new WaferInfo();
|
|
}
|
|
}
|
|
|
|
public string Module => SystemName;
|
|
|
|
|
|
public bool IsEnableOnline
|
|
{
|
|
get { return !IsOnline; }
|
|
}
|
|
|
|
public bool IsEnableOffline
|
|
{
|
|
get { return IsOnline; }
|
|
}
|
|
#region MoveSpeed
|
|
|
|
private const double movespeed = 0;
|
|
public double V31MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V31.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V32MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V32.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V33MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V33.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V33sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V33s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V35MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V35.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V36MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V36.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V37sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V37s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V37MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V37.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
|
|
public double V43MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V43.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V45MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V45.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V46MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V46.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V46sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V46s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V46_46sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V46.Feedback || V46s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V43sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V43s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V48MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V48.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V50MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V50.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V50sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V50s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V50_50sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V50.Feedback || V50s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V49MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V49.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V48sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V48s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V51MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V51.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V51sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V51s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V51_51sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V51.Feedback || V51s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V52MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V52.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V52sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V52s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V52_52sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V52.Feedback || V52s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V58MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V58.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V58sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V58s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V58_58sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V58.Feedback || V58s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V53sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V53s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V54sMoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V54s.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V56MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V56.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V60MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V60.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V59MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V59.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V53MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V53.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V54MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V54.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V55MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V55.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V61MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V61.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V62MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V62.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V63MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V63.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V62_63MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V62.Feedback || V63.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V68MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V68.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
|
|
public double V69MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V69.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V70MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V70.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V72MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V72.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V73MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V73.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V74MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V74.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V75MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V75.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
public double V76MoveSpeed
|
|
{
|
|
get
|
|
{
|
|
if (V76.Feedback) return movespeed;
|
|
else return 0;
|
|
}
|
|
}
|
|
|
|
|
|
#endregion
|
|
|
|
[IgnorePropertyChange]
|
|
public string TVModeSetPoint
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
[IgnorePropertyChange]
|
|
public string TVPositionSetPoint
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
[IgnorePropertyChange]
|
|
public string TVPressureSetPoint
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
[IgnorePropertyChange]
|
|
public string Gas1MfcSetPoint
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
[IgnorePropertyChange]
|
|
public string Gas2MfcSetPoint
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
[IgnorePropertyChange]
|
|
public string Gas3MfcSetPoint
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
[IgnorePropertyChange]
|
|
public string Gas4MfcSetPoint
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
[IgnorePropertyChange]
|
|
public string MicrowavePowerSetPoint
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
[IgnorePropertyChange]
|
|
public string RfPowerSetPoint
|
|
{
|
|
get;
|
|
set;
|
|
}
|
|
|
|
public string LabelU11 { get; set; }
|
|
public string LabelU12 { get; set; }
|
|
public string LabelU13 { get; set; }
|
|
|
|
public ICommand CmdTvEnable { get; set; }
|
|
public ICommand CmdTvReset { get; set; }
|
|
public ICommand CmdTvPostionToZero { get; set; }
|
|
public ICommand CmdTurnGasValve { get; set; }
|
|
public ICommand CmdSetMfcFlow { get; set; }
|
|
|
|
public PMOperationViewModel()
|
|
{
|
|
this.DisplayName = "Operation";
|
|
CmdTvEnable = new DelegateCommand<object>(PerformCmdTvEnable);
|
|
CmdTvReset = new DelegateCommand<object>(PerformCmdTvReset);
|
|
CmdTurnGasValve = new DelegateCommand<object>(PerformCmdTurnGasValve);
|
|
CmdSetMfcFlow = new DelegateCommand<object>(PerformCmdSetMfcFlow);
|
|
}
|
|
|
|
private void SetLabels()
|
|
{
|
|
if (Module == "PM1")
|
|
{
|
|
LabelU11 = "TMPump1Flow(U11)";
|
|
LabelU12 = "Spare1(U12)";
|
|
LabelU13 = "Spare2(U13)";
|
|
}
|
|
else if (Module == "PM2")
|
|
{
|
|
LabelU11 = "Spare1(U11)";
|
|
LabelU12 = "Spare2(U12)";
|
|
LabelU13 = "Spare3(U13)";
|
|
}
|
|
else
|
|
{
|
|
//Wrong Module
|
|
}
|
|
}
|
|
private void PerformCmdTvEnable(object data)
|
|
{
|
|
var pair = (KeyValuePair<string, string>)data;
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.TV.SetTVValveEnable", pair.Value);
|
|
}
|
|
private void PerformCmdTvReset(object data)
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.TV.SetTVReset", true);
|
|
}
|
|
private void PerformCmdTurnGasValve(object data)
|
|
{
|
|
var pair = (KeyValuePair<string, string>)data;
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.{pair.Key}.{AITValveOperation.GVTurnValve}", pair.Value);
|
|
}
|
|
private void PerformCmdSetMfcFlow(object param)
|
|
{
|
|
object[] args = (object[])param; //0:devicename, 1:operation, 2:args
|
|
if (args.Length == 3)
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{args[0]}.Ramp", args[2]);
|
|
}
|
|
}
|
|
protected override void OnActivate()
|
|
{
|
|
base.OnActivate();
|
|
|
|
//var serviceMode = QueryDataClient.Instance.Service.GetConfig("System.IsServiceControlMode");
|
|
//EnableServiceControl = (bool)serviceMode;
|
|
this.SetLabels();
|
|
|
|
TMAEnable = (bool)QueryDataClient.Instance.Service.GetConfig($"PM.{Module}.TMAEnable");
|
|
mOpacity = TMAEnable ? 1 : 0.2;
|
|
}
|
|
|
|
protected override void OnInitialize()
|
|
{
|
|
base.OnInitialize();
|
|
base.InitPM();
|
|
|
|
//权限
|
|
var roleID = BaseApp.Instance.UserContext.Role.RoleId;
|
|
reactorStatusEnable = RoleAccountProvider.Instance.GetMenuPermission(roleID, "PM1.Main.ReactorStatus") == MenuPermissionEnum.MP_READ_WRITE;
|
|
reactorServiceEnable = RoleAccountProvider.Instance.GetMenuPermission(roleID, "PM1.Main.ReactorService") == MenuPermissionEnum.MP_READ_WRITE;
|
|
|
|
|
|
}
|
|
|
|
private bool reactorStatusEnable;
|
|
public bool ReactorStatusEnable
|
|
{
|
|
get
|
|
{
|
|
return reactorStatusEnable;
|
|
}
|
|
}
|
|
|
|
private bool reactorServiceEnable;
|
|
public bool ReactorServiceEnable
|
|
{
|
|
get
|
|
{
|
|
return reactorServiceEnable;
|
|
}
|
|
}
|
|
|
|
public void MoveLiftPinUp()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.ChamberLiftPin.MoveUp");
|
|
}
|
|
|
|
public void MoveLiftPinDown()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.ChamberLiftPin.MoveDown");
|
|
}
|
|
|
|
public void BottomSectionUp()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.BottomSection.Up");
|
|
}
|
|
|
|
public void BottomSectionDown()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.BottomSection.Down");
|
|
}
|
|
|
|
public void OpenChamberDoor()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.ChamberDoor.Open");
|
|
}
|
|
|
|
public void CloseChamberDoor()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.ChamberDoor.Close");
|
|
}
|
|
|
|
public void SetOnline()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.PutOnline");
|
|
}
|
|
|
|
public void SetOffline()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.PutOffline");
|
|
}
|
|
|
|
public void OnOffline()
|
|
{
|
|
if (IsOnline)
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.SetOffline");
|
|
}
|
|
else
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.SetOnline");
|
|
}
|
|
}
|
|
|
|
public void Home()
|
|
{
|
|
var selection = DialogBox.ShowDialog(DialogButton.Yes | DialogButton.Cancel, DialogType.CONFIRM,
|
|
"Are you sure perform the operation Home");
|
|
if (selection == DialogButton.Yes)
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.Home");
|
|
}
|
|
}
|
|
|
|
public void Reset()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.Reset");
|
|
|
|
//清除GEM报警
|
|
InvokeClient.Instance.Service.DoOperation("GEM_ClearModuleAlarm", Module);
|
|
}
|
|
|
|
public void ToService()
|
|
{
|
|
var selection = DialogBox.ShowDialog(DialogButton.Yes | DialogButton.Cancel, DialogType.CONFIRM,
|
|
"Are you sure perform the operation Service");
|
|
if (selection == DialogButton.Yes)
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.SetToServiceIdle");
|
|
}
|
|
}
|
|
|
|
public bool ShowChoosenDialog(string strInfo)
|
|
{
|
|
ChooseDialogBoxViewModel dialog = new ChooseDialogBoxViewModel();
|
|
dialog.DisplayName = "Tips";
|
|
dialog.InfoStr = strInfo;
|
|
|
|
|
|
WindowManager wm = new WindowManager();
|
|
bool? bret = wm.ShowDialog(dialog);
|
|
if (!bret.HasValue || !bret.Value)
|
|
{
|
|
return false;
|
|
}
|
|
return true;
|
|
}
|
|
|
|
public void SelectRecipe()
|
|
{
|
|
var dialog = new RecipeSelectDialogViewModel();
|
|
dialog.DisplayName = "Select Recipe";
|
|
|
|
|
|
var wm = new WindowManager();
|
|
var bret = wm.ShowDialog(dialog);
|
|
if ((bool)bret)
|
|
{
|
|
var array = dialog.DialogResult.Split(new char[] { '\\' });
|
|
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SelectRecipe", dialog.DialogResult);
|
|
}
|
|
}
|
|
|
|
public void Start()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.RunRecipe", SelectedRecipeName);
|
|
}
|
|
|
|
public void Skip()
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.RecipeSkipStep");
|
|
}
|
|
|
|
|
|
protected override void InvokeAfterUpdateProperty(Dictionary<string, object> data)
|
|
{
|
|
base.InvokeAfterUpdateProperty(data);
|
|
}
|
|
|
|
public void SetTVMode()
|
|
{
|
|
if (string.IsNullOrEmpty(TVModeSetPoint))
|
|
{
|
|
DialogBox.ShowWarning("Select TV mode first");
|
|
return;
|
|
}
|
|
|
|
PressureCtrlMode mode = PressureCtrlMode.Undefined;
|
|
switch (TVModeSetPoint)
|
|
{
|
|
case "Pressure":
|
|
mode = PressureCtrlMode.TVPressureCtrl;
|
|
break;
|
|
case "Position":
|
|
mode = PressureCtrlMode.TVPositionCtrl;
|
|
break;
|
|
case "Close":
|
|
mode = PressureCtrlMode.TVClose;
|
|
break;
|
|
default:
|
|
DialogBox.ShowWarning($"Invalid TV mode {TVModeSetPoint}");
|
|
break;
|
|
}
|
|
|
|
InvokeClient.Instance.Service.DoOperation($"{ThrottleValveData.Module}.{ThrottleValveData.DeviceName}.{AITThrottleValveOperation.SetMode}", mode.ToString());
|
|
}
|
|
|
|
public void SetTVPosition()
|
|
{
|
|
if (string.IsNullOrEmpty(TVPositionSetPoint) || !float.TryParse(TVPositionSetPoint, out float setpoint))
|
|
{
|
|
DialogBox.ShowWarning($"Invalid value {TVPositionSetPoint}");
|
|
return;
|
|
}
|
|
|
|
InvokeClient.Instance.Service.DoOperation($"{ThrottleValveData.Module}.{ThrottleValveData.DeviceName}.{AITThrottleValveOperation.SetPosition}", setpoint.ToString());
|
|
}
|
|
|
|
public void SetTVPressure()
|
|
{
|
|
if (string.IsNullOrEmpty(TVPressureSetPoint) || !float.TryParse(TVPressureSetPoint, out float setpoint))
|
|
{
|
|
DialogBox.ShowWarning($"Invalid value {TVPressureSetPoint}");
|
|
return;
|
|
}
|
|
|
|
InvokeClient.Instance.Service.DoOperation($"{ThrottleValveData.Module}.{ThrottleValveData.DeviceName}.{AITThrottleValveOperation.SetPressure}", setpoint.ToString());
|
|
}
|
|
|
|
public void SetMfcFlow(int index)
|
|
{
|
|
string gasLine = "";
|
|
string value = "";
|
|
if (index == 1)
|
|
{
|
|
value = Gas1MfcSetPoint;
|
|
gasLine = "GasLine1";
|
|
}
|
|
else if (index == 2)
|
|
{
|
|
value = Gas2MfcSetPoint;
|
|
gasLine = "GasLine2";
|
|
}
|
|
else if (index == 3)
|
|
{
|
|
value = Gas3MfcSetPoint;
|
|
gasLine = "GasLine3";
|
|
}
|
|
else if (index == 4)
|
|
{
|
|
value = Gas4MfcSetPoint;
|
|
gasLine = "GasLine4";
|
|
}
|
|
|
|
if (string.IsNullOrEmpty(gasLine) || string.IsNullOrEmpty(value) || !float.TryParse(value, out float setpoint))
|
|
{
|
|
DialogBox.ShowWarning($"Invalid value {value}");
|
|
return;
|
|
}
|
|
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.{gasLine}.Flow", setpoint.ToString());
|
|
|
|
}
|
|
public void SetMicrowavePower()
|
|
{
|
|
if (string.IsNullOrEmpty(MicrowavePowerSetPoint) || !float.TryParse(MicrowavePowerSetPoint, out float setpoint))
|
|
{
|
|
DialogBox.ShowWarning($"Invalid value {MicrowavePowerSetPoint}");
|
|
return;
|
|
}
|
|
|
|
InvokeClient.Instance.Service.DoOperation($"{MicrowaveData.Module}.{MicrowaveData.DeviceName}.{AITRfOperation.SetPower}", setpoint.ToString());
|
|
}
|
|
public void SetRfPower()
|
|
{
|
|
if (string.IsNullOrEmpty(RfPowerSetPoint) || !float.TryParse(RfPowerSetPoint, out float setpoint))
|
|
{
|
|
DialogBox.ShowWarning($"Invalid value {RfPowerSetPoint}");
|
|
return;
|
|
}
|
|
|
|
InvokeClient.Instance.Service.DoOperation($"{RfData.Module}.{RfData.DeviceName}.{AITRfOperation.SetPower}", setpoint.ToString());
|
|
}
|
|
|
|
//Routine操作统一为一个函数
|
|
public void PMOperation(string strPMOP)
|
|
{
|
|
if (strPMOP == "LeakCheck")
|
|
{
|
|
EnableLeakCheck = false;
|
|
}
|
|
|
|
if (!IsGasConnectorTighten)
|
|
{
|
|
DialogBox.ShowDialog(DialogButton.OK, DialogType.CONFIRM,
|
|
"Gas Connector is not Tighten,can not Execute Opearation");
|
|
|
|
return;
|
|
}
|
|
|
|
//有些特殊处理
|
|
if (strPMOP.Contains("ToProcessIdle"))
|
|
{
|
|
if (IsService)
|
|
{
|
|
DialogBox.ShowError("Unable to enter ProcessIdle in Service Mode.");
|
|
return;
|
|
}
|
|
|
|
//如果加热Enable未打开则返回
|
|
if (!AllHeatEnable)
|
|
{
|
|
ShowChoosenDialog("1.Make sure the HeatEnable is turned on!");
|
|
return;
|
|
}
|
|
if (!CleanRoutineSucceed.Value)
|
|
{
|
|
ShowChoosenDialog("3.Make sure the DO_CleanRoutineSucceed[DO-173]!");
|
|
return;
|
|
}
|
|
|
|
if (!V94.SetPoint || !V96.SetPoint)
|
|
{
|
|
ShowChoosenDialog("Final valve not full open, please perform ATM Idle");
|
|
return;
|
|
}
|
|
}
|
|
|
|
if (strPMOP.Contains("TMA"))
|
|
{
|
|
if (!ShowChoosenDialog("1.Make sure the TMA tap has turned off \r\n2.Make sure the confinement in up position!\r\n3.Press OK to continue! "))
|
|
{
|
|
return;
|
|
}
|
|
}
|
|
|
|
if (strPMOP.Contains("TCS"))
|
|
{
|
|
if (!ShowChoosenDialog("1.Make sure the TCS tap has turned off \r\n2.Make sure the confinement in up position!\r\n3.Press OK to continue! "))
|
|
{
|
|
return;
|
|
}
|
|
}
|
|
|
|
//Abort不需要弹框提示
|
|
if (strPMOP.Contains("Abort"))
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.{strPMOP}");
|
|
return;
|
|
}
|
|
|
|
//去除strPMOP中To关键字
|
|
string strCleanTo = strPMOP.Replace("To", "");
|
|
var selection = DialogBox.ShowDialog(DialogButton.Yes | DialogButton.Cancel, DialogType.CONFIRM, $"Are you sure perform the operation {strCleanTo}");
|
|
if (selection == DialogButton.Yes)
|
|
{
|
|
if (strPMOP.Contains("ExchangeMO"))
|
|
{
|
|
string strMOType = strPMOP.Replace("ExchangeMO", "");
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.ExchangeMO", $"{strMOType}");
|
|
}
|
|
else
|
|
{
|
|
InvokeClient.Instance.Service.DoOperation($"{Module}.{strPMOP}");
|
|
}
|
|
}
|
|
}
|
|
|
|
}
|
|
}
|