172 lines
11 KiB
XML
172 lines
11 KiB
XML
<?xml version="1.0" ?>
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<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
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<Action do="TM.DO_LoadSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-0">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_TMSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
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<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
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<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-89">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-90">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-91">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMServoPressRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-92">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-93">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_LoadCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-94">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-95">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-96">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-97">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
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<Limit do="TM.DO_VacRobotExtenLoadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-19"/>
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</Action>
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<Action do="TM.DO_RectorADoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
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<Limit do="TM.DO_VacRobotExtendPMAEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-21"/>
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</Action>
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<Action do="TM.DO_RectorBDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
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<Limit do="TM.DO_VacRobotExtendPMBEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-22"/>
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</Action>
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<Action do="TM.DO_VacRobotExtenLoadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
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<Limit di="TM.DI_LoadDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-1"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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</Action>
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<Action do="TM.DO_VacRobotExtendUnloadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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</Action>
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<Action do="TM.DO_VacRobotExtendPMAEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
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<Limit di="TM.DI_ReactorADoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-5"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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</Action>
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<Action do="TM.DO_VacRobotExtendPMBEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
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<Limit di="TM.DI_ReactorBDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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</Action>
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<Action do="TM.DO_VacRobotExtendBufferEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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</Action>
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</Interlock>
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