860 lines
27 KiB
C#
860 lines
27 KiB
C#
using System;
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using System.Collections.Generic;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Routine;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MachineVision.Keyence;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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using SicModules.Devices;
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using SicModules.TMs;
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namespace SicModules.LLs.Routines
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{
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public class LoadLockBaseRoutine : ModuleRoutine, IRoutine
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{
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protected LoadLock LoadLockDevice
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{
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get { return _ll; }
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}
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protected TM TMDevice
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{
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get { return _tm; }
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}
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protected IoLift4 Lift
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{
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get { return _llLift; }
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}
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protected IoLoadRotation Rotation
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{
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get { return _llRotation; }
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}
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protected IoClaw WaferClaw
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{
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get { return _llWaferClaw; }
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}
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protected IoClaw TrayClaw
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{
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get { return _llTrayClaw; }
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}
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private LoadLock _ll = null;
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private TM _tm = null;
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private IoLift4 _llLift = null;
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private IoLoadRotation _llRotation = null;
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private IoClaw _llWaferClaw = null;
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private IoClaw _llTrayClaw = null;
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private KeyenceCVX300F _loadCCD = null;
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public IoSensor _loadTrayHomeSensor; //Tray<61><79>λ
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public IoSensor _loadWaferPlaced; //<2F><><EFBFBD>¶<EFBFBD><C2B6>䣬<EFBFBD><E4A3AC><EFBFBD>Wafer<65><72><EFBFBD><EFBFBD>
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public IoSensor _loadTrayPlaced; //<2F><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
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public LoadLockBaseRoutine() : base(ModuleName.LoadLock.ToString())
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{
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Module = ModuleName.LoadLock.ToString();
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_ll = DEVICE.GetDevice<SicLoadLock>($"{Module}.{Module}");
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_tm = DEVICE.GetDevice<SicTM>($"{ModuleName.System}.{ModuleName.TM}");
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_llLift = DEVICE.GetDevice<IoLift4>($"{Module}.LLLift");
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_llWaferClaw = DEVICE.GetDevice<IoClaw>($"{Module}.LLWaferClaw");
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_llTrayClaw = DEVICE.GetDevice<IoClaw>($"{Module}.LLTrayClaw");
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_llRotation = DEVICE.GetDevice<IoLoadRotation>("Load.Rotation");
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_loadCCD = DEVICE.GetDevice<KeyenceCVX300F>($"TM.KeyenceCVX300F");
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_loadTrayHomeSensor = DEVICE.GetDevice<IoSensor>($"TM.LoadTrayHomeSensor");
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_loadWaferPlaced = DEVICE.GetDevice<IoSensor>($"TM.LLWaferPlaced");
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_loadTrayPlaced = DEVICE.GetDevice<IoSensor>($"TM.LLTrayPresence");
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}
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public virtual Result Start(params object[] objs)
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{
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return Result.DONE;
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}
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public virtual Result Monitor()
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{
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return Result.DONE;
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}
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public virtual void Abort()
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{
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LoadLockDevice.SetSlowPumpValve(false, out _);
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LoadLockDevice.SetFastPumpValve(false, out _);
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LoadLockDevice.SetSlowVentValve(false, out _);
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}
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protected void LiftMove(int id, bool up, int timeout)
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{
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string note = up ? "Up" : "Down";
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Set {Module} Lift to {note}");
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if(up)
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{
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if (!Lift.MoveUp(out string reason))
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{
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Stop($"Set {Module} Lift to {note} failed:" + reason);
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return false;
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}
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}
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else
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{
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if (!Lift.MoveDown(out string reason))
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{
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Stop($"Set {Module} Lift to {note} failed:" + reason);
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return false;
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}
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}
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return true;
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}, () =>
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{
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if(up)
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{
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return Lift.IsUp && !Lift.IsDown;
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}
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else
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{
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return !Lift.IsUp && Lift.IsDown;
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}
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"Set {Module} Lift to {note} Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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protected void MoveRelativeHome(int id, int timeout)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Set {Module} Rotation move relative home");
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if (!_llRotation.MoveRelativeHome(out string reason))
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{
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Stop($"Set {Module} Rotation move relative home:" + reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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protected void MoveLoadRotationHomeOffset(int id, float offset, int timeout)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Set {Module} Rotation move offset");
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if (!_llRotation.JogCW(offset, out string reason))
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{
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Stop($"Set {Module} Rotation move offset:" + reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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protected void WaitLoadRotationDone(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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//<2F><><EFBFBD><EFBFBD><EFBFBD>κζ<CEBA><CEB6><EFBFBD>
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return true;
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},
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() =>
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{
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//<2F><><EFBFBD>Rotation<6F><6E><EFBFBD>Error
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if (_llRotation.IsServoError)
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{
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Stop($"Set {Module} Rotation Servo Error");
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return null;
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}
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return !_llRotation.IsServoBusy;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT)
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{
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Stop($"Wait Load Rotation Done timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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protected void MoveOneCircle(int id,int timeout)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Set {Module} Rotation One Circle Wafter check sensor");
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if (!_llRotation.MoveOneCircle(out string reason))
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{
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Stop($"Set {Module} Rotation One Circle Wafter check sensor:" + reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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//Result WaitMoveOneCircleDoneResult;
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//protected Result WaitMoveOneCircleDone(int id, int timeout)
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//{
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// Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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// {
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// Notify($"Wait {Module} Rotation One Circle Wafter check sensor");
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// WaitMoveOneCircleDoneResult = Result.RUN;
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// return true;
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// }, () =>
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// {
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// //<2F><>δ<E2B5BD>ź<EFBFBD>Sensor<6F>ź<EFBFBD>
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// if (!_loadWaferPlaced.Value)
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// {
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// //ʧ<>ܺ<EFBFBD>Stop<6F><70><EFBFBD>
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// _llRotation.Stop(out _);
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// Stop($"Set {Module} Rotation One Circle Wafter check sensor fail [TM DI-35]");
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// WaitMoveOneCircleDoneResult = Result.VERIFYFAIL;
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// return true;
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// }
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// //<2F><><EFBFBD>Rotation<6F><6E><EFBFBD>Error
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// if (_llRotation.IsServoError)
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// {
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// //ʧ<>ܺ<EFBFBD>Stop<6F><70><EFBFBD>
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// _llRotation.Stop(out _);
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// Stop($"Set {Module} Rotation Servo Error");
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// WaitMoveOneCircleDoneResult = Result.VERIFYFAIL;
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// return true;
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// }
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// if (!_llRotation.IsServoBusy)
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// {
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// Notify($"{Module} Rotation One Circle Wafter check result ok");
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// WaitMoveOneCircleDoneResult = Result.Succeed;
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// return true;
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// }
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// return false;
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// }, timeout * 1000);
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// if (ret.Item1)
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// {
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// if (ret.Item2 == Result.FAIL)
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// {
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// throw (new RoutineFaildException());
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// }
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// else if (ret.Item2 == Result.TIMEOUT) //timeout
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// {
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// Stop($"Set {Module}Rotation One Circle Wafter check sensor Timeout, over {timeout} seconds");
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// throw (new RoutineFaildException());
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// }
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// else
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// throw (new RoutineBreakException());
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// }
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// return WaitMoveOneCircleDoneResult;
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//}
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Result WaitMoveOneCircleDoneResult;
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public Queue<bool> DISensroQueuen = new Queue<bool>();
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protected Result WaitMoveOneCircleDone(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Wait {Module} Rotation One Circle Wafter check sensor");
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WaitMoveOneCircleDoneResult = Result.RUN;
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DISensroQueuen = new Queue<bool>();
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return true;
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}, () =>
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{
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DISensroQueuen.Enqueue(_loadWaferPlaced.Value);
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//<2F><>δ<E2B5BD>ź<EFBFBD>Sensor<6F>ź<EFBFBD>
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//if (!_loadWaferPlaced.Value)
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//{
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// //ʧ<>ܺ<EFBFBD>Stop<6F><70><EFBFBD>
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// _llRotation.Stop(out _);
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// Stop($"Set {Module} Rotation One Circle Wafter check sensor fail [TM DI-35]");
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// WaitMoveOneCircleDoneResult = Result.VERIFYFAIL;
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// return true;
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//}
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//<2F><><EFBFBD>Rotation<6F><6E><EFBFBD>Error
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if (_llRotation.IsServoError)
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{
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//ʧ<>ܺ<EFBFBD>Stop<6F><70><EFBFBD>
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_llRotation.Stop(out _);
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Stop($"Set {Module} Rotation Servo Error");
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return null;
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}
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if (!_llRotation.IsServoBusy)
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{
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//Notify($"{Module} Rotation One Circle Wafter check finish");
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WaitMoveOneCircleDoneResult = Result.Succeed;
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return true;
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}
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return false;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"Set {Module}Rotation One Circle Wafter check sensor Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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return WaitMoveOneCircleDoneResult;
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}
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protected void MoveHomePos(int id)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"{Module} Rotation move Home Pos");
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if (!_llRotation.MoveRelativeHome(out string reason))
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{
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Stop($"{Module} Rotation move Home Pos fail:" + reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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protected void MoveCCD1Pos(int id,int timeout)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"{Module} Rotation move CCD Pos1");
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if (!_llRotation.MoveCCD1Pos(out string reason))
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{
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Stop($"{Module} Rotation move CCD Pos1 fail:" + reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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protected void MoveCCD2Pos(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"{Module} Rotation move CCD Pos2");
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if (!_llRotation.MoveCCD2Pos(out string reason))
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{
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Stop($"{Module} Rotation move CCD Pos2 fail:" + reason);
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return false;
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}
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return true;
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}, () =>
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{
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if (!_llRotation.IsServoBusy)
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{
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return true;
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}
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return false;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"Set {Module} Rotation move CCD Pos2 Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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protected void ClawMove(int id, IoClaw _claw,bool claw, int timeout)
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{
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string note = claw ? "Clawing" : "Opening";
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Set {Module} {note}");
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if (!_claw.SetValue(claw, out string reason))
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{
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Stop($"Set {Module} {note} failed:" + reason);
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return false;
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}
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return true;
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}, () =>
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{
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return _claw.State == (claw ? ClawStateEnum.Clamp : ClawStateEnum.Open);
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"Set {Module} {note} Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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//public void CheckForelinePressure(int id,double basePressure, int timeout)
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//{
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// Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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// {
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// Notify($"Check {Module} foreline pressure under {basePressure} mbar");
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// return true;
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// }, () =>
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// {
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// return LoadLockDevice.ForelinePressure <= basePressure;
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// }, timeout * 1000);
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// if (ret.Item1)
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// {
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// if (ret.Item2 == Result.FAIL)
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// {
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// throw (new RoutineFaildException());
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// }
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// else if (ret.Item2 == Result.TIMEOUT) //timeout
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// {
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// Stop($"{Module} foreline pressure can not lower than {basePressure} in {timeout} seconds");
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// throw (new RoutineFaildException());
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// }
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// else
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// throw (new RoutineBreakException());
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// }
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//}
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public void SlowPump(int id, double switchPressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {Module} slow pump valve to {switchPressure} mbar");
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if (!LoadLockDevice.SetSlowPumpValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return LoadLockDevice.ChamberPressure <= switchPressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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LoadLockDevice.SetSlowPumpValve(false, out string _);
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Stop($"{Module} pressure can not pump to {switchPressure} in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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||
}
|
||
}
|
||
|
||
public void FastPump(int id, double basePressure, int timeout)
|
||
{
|
||
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
||
{
|
||
Notify($"Open {Module} fast pump valve to {basePressure} mbar");
|
||
|
||
if (!LoadLockDevice.SetFastPumpValve(true, out string reason))
|
||
{
|
||
Stop(reason);
|
||
return false;
|
||
}
|
||
|
||
return true;
|
||
}, () =>
|
||
{
|
||
return LoadLockDevice.ChamberPressure <= basePressure;
|
||
|
||
}, timeout * 1000);
|
||
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else if (ret.Item2 == Result.TIMEOUT) //timeout
|
||
{
|
||
LoadLockDevice.SetSlowPumpValve(false, out string _);
|
||
LoadLockDevice.SetFastPumpValve(false, out string _);
|
||
|
||
Stop($"{Module} pressure can not pump to {basePressure} in {timeout} seconds");
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void CloseSlowPumpValve(int id)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
Notify($"Close {Module} slow pump valve");
|
||
|
||
if (!LoadLockDevice.SetSlowPumpValve(false, out string reason))
|
||
{
|
||
Stop(reason);
|
||
return false;
|
||
}
|
||
|
||
return true;
|
||
});
|
||
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void CloseFastPumpValve(int id)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
Notify($"Close {Module} fast pump valve");
|
||
|
||
if (!LoadLockDevice.SetFastPumpValve(false, out string reason))
|
||
{
|
||
Stop(reason);
|
||
return false;
|
||
}
|
||
|
||
return true;
|
||
});
|
||
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void SlowVent(int id,double switchPressure, int timeout)
|
||
{
|
||
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
||
{
|
||
Notify($"Open {Module} slow vent valve to {switchPressure} mbar");
|
||
|
||
if (!LoadLockDevice.SetSlowVentValve(true, out string reason))
|
||
{
|
||
Stop(reason);
|
||
return false;
|
||
}
|
||
|
||
return true;
|
||
}, () =>
|
||
{
|
||
return LoadLockDevice.ChamberPressure >= switchPressure;
|
||
|
||
}, timeout * 1000);
|
||
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else if (ret.Item2 == Result.TIMEOUT) //timeout
|
||
{
|
||
LoadLockDevice.SetSlowVentValve(false, out string _);
|
||
|
||
Stop($"{Module} pressure can not vent to {switchPressure} mbar in {timeout} seconds");
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void SlowVent(int id,double switchPressure, double pressureDiff, int timeout)
|
||
{
|
||
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
||
{
|
||
Notify($"Open {Module} slow vent valve to {switchPressure} mbar");
|
||
|
||
if (!_ll.SetSlowVentValve(true, out string reason))
|
||
{
|
||
Stop(reason);
|
||
return false;
|
||
}
|
||
|
||
return true;
|
||
}, () =>
|
||
{
|
||
return LoadLockDevice.ChamberPressure >= switchPressure - pressureDiff;
|
||
|
||
}, timeout * 1000);
|
||
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else if (ret.Item2 == Result.TIMEOUT) //timeout
|
||
{
|
||
_ll.SetSlowVentValve(false, out string _);
|
||
|
||
Stop($"{Module} pressure can not vent to {switchPressure} mbar in {timeout} seconds");
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void CloseVentValveAndWait(int id, int timeout = 3)
|
||
{
|
||
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
||
{
|
||
Notify($"Close {Module} slow vent valve");
|
||
|
||
if (!LoadLockDevice.SetSlowVentValve(false, out string reason))
|
||
{
|
||
Stop(reason);
|
||
return false;
|
||
}
|
||
|
||
return true;
|
||
}, () =>
|
||
{
|
||
return LoadLockDevice.CheckSlowVentValve(false);
|
||
|
||
}, timeout * 1000);
|
||
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else if (ret.Item2 == Result.TIMEOUT)
|
||
{
|
||
Stop($"Close {Module} slow vent valve in {timeout} seconds");
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void CloseVentValve(int id)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
Notify($"Close {Module} slow vent valve");
|
||
|
||
if (!LoadLockDevice.SetSlowVentValve(false, out string reason))
|
||
{
|
||
Stop(reason);
|
||
return false;
|
||
}
|
||
|
||
return true;
|
||
});
|
||
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void CCDModeSet(int id)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
Notify($"Set CCD Mode to 0");
|
||
_loadCCD.RunR0();
|
||
|
||
return true;
|
||
});
|
||
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
Result CCDTriggerResult;
|
||
public Result CCDTrigger(int id,int timeout)
|
||
{
|
||
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
||
{
|
||
Notify($"Load CCD Check Trigger");
|
||
|
||
_loadCCD.ClearResult();
|
||
_loadCCD.GetResult(1);
|
||
CCDTriggerResult = Result.RUN;
|
||
return true;
|
||
}, () =>
|
||
{
|
||
if(_loadCCD._sResult != "")
|
||
{
|
||
if(_loadCCD._sResult.Contains("OK"))
|
||
{
|
||
//Notify($"Load CCD Check Result OK");
|
||
CCDTriggerResult = Result.Succeed;
|
||
return true;
|
||
}
|
||
else
|
||
{
|
||
//Stop($"Load CCD Check Result NG");
|
||
CCDTriggerResult = Result.VERIFYFAIL;
|
||
return true;
|
||
}
|
||
}
|
||
|
||
return false;
|
||
|
||
}, timeout * 1000);
|
||
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
return Result.VERIFYFAIL;
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else if (ret.Item2 == Result.TIMEOUT) //timeout
|
||
{
|
||
Stop($"Load CCD receive result in {timeout} seconds");
|
||
return Result.VERIFYFAIL;
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
|
||
return CCDTriggerResult;
|
||
}
|
||
|
||
}
|
||
}
|