153 lines
4.6 KiB
C#
153 lines
4.6 KiB
C#
using System;
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using System.Threading;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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namespace SicModules.TMs.Routines
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{
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public class TMVerifySlitValveRoutine : ModuleRoutine, IRoutine
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{
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enum RoutineStep
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{
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VerifySlitValve,
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}
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private TM _tm;
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public TMVerifySlitValveRoutine() : base(ModuleName.TM.ToString())
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{
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Module = ModuleName.TM.ToString();
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Name = "Verify Slit Valve Status";
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_tm = DEVICE.GetDevice<TM>($"{ ModuleName.System.ToString()}.{ Module}");
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}
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public void Init()
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{
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}
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public Result Start(params object[] objs)
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{
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Reset();
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Notify("Start");
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return Result.RUN;
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}
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public Result Monitor()
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{
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try
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{
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VerifySlitValve((int)RoutineStep.VerifySlitValve, _tm);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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public void Abort()
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{
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}
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public void VerifySlitValve(int id, TM tm)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Check slot valve status {tm.Name}");
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ModuleName[] lstModule = new ModuleName[] { ModuleName.LoadLock, ModuleName.PM1, ModuleName.PM2 };
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foreach (var moduleName in lstModule)
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{
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if (_tm.CheckSlitValveOpen(moduleName))
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{
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if (!CheckPressureCondition(tm, moduleName.ToString(), out string reason))
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{
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EV.PostWarningLog(Module, $"Can not set {moduleName} slit valve open, {reason}");
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continue;
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}
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if (!_tm.SetSlitValve(moduleName, true, out reason))
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{
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EV.PostWarningLog(Module, $"Can not set {moduleName} slit valve open, {reason}");
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}
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}
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else
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{
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if (_tm.CheckSlitValveClose(moduleName))
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{
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if (!_tm.SetSlitValve(moduleName, false, out string reason))
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{
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EV.PostWarningLog(Module, $"Can not set {moduleName} slit valve close, {reason}");
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}
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}
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}
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Thread.Sleep(500);
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}
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return true;
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});
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if (ret.Item1)
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{
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throw (new RoutineBreakException());
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}
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}
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public bool CheckPressureCondition( TM tm, string target, out string reason)
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{
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reason = string.Empty;
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double tmPressure = tm.ChamberPressure;
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double targetPressure = 0.0;
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if (ModuleHelper.IsLoadLock(target))
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{
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LoadLock ll = DEVICE.GetDevice<LoadLock>($"{target}.{target}");
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targetPressure = ll.ChamberPressure;
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}
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else if (ModuleHelper.IsPm(target))
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{
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PM pm = DEVICE.GetDevice<PM>(target);
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targetPressure = pm.ChamberPressure;
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}
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else
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{
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reason = ($"{target} not define pressure condition");
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return false;
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}
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double maxPressureDiffOpenSlitValve = SC.GetValue<double>("TM.MaxPressureDiffOpenSlitValve");
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double pressureDiff = Math.Abs(tmPressure - targetPressure);
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if (pressureDiff > maxPressureDiffOpenSlitValve)
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{
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reason = ($"pressure difference {pressureDiff:F3} between TM and {target} exceed tolerance {maxPressureDiffOpenSlitValve}");
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return false;
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}
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return true;
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}
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}
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}
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