509 lines
18 KiB
C#
509 lines
18 KiB
C#
using System;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.DBCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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using SicModules.Devices;
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using SicModules.LLs;
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namespace SicModules.TMs
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{
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public class TMLeakCheckRoutine : ModuleRoutine, IRoutine
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{
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enum RoutineStep
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{
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SlowPump,
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FastPump,
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VaccumDelay,
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PumpDelay,
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CloseValves,
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CLoseSlowValue,
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Delay,
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CheckSlitValves,
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RunPumpRoutine,
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ContinuePump,
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ClosePumpValve,
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DoLeakCheck,
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DoLeakCheckDelay,
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CalcLeakCheck,
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StartLoop,
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LoopVent,
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LoopPump,
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StopLoop
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}
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private TMPumpRoutine _pumpRoutine;
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private TMVentRoutine _ventRoutine;
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private int _paramContinuePumpTime;
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private int _paramLeakCheckTime;
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private double _beginPressure;
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private double _pumpBasePressure;
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private double _slowFastPumpSwitchPressure;
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private int _slowPumpTimeout;
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private int _fastPumpTime;
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private int _routineTimeOut;
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private double _leakSpec;
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private int _purgeCount;
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private double _beginTime;
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private int _calTimes; //第几次计算LeakCheck的值（每60秒计算一次）
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private TM _tm;
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private IoSensor _bufferLid;
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private IoSensor _tmLid;
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private Devices.IoPump _pumpType;
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private LoadLock _ll;
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private IoSensor _preHeatLid;
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private IoInterLockEx _tmIoInterLock;
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private Stopwatch _swTimer = new Stopwatch();
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public int ElapsedTime
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{
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get { return _swTimer.IsRunning ? (int)(_swTimer.ElapsedMilliseconds / 1000) : 0; }
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}
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public TMLeakCheckRoutine() : base(ModuleName.TM.ToString())
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{
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Module = ModuleName.TM.ToString();
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Name = "Leak Check";
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_tm = DEVICE.GetDevice<TM>($"{ ModuleName.System.ToString()}.{ Module}");
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_ll = DEVICE.GetDevice<SicLoadLock>($"LoadLock.LoadLock");
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_bufferLid = DEVICE.GetDevice<IoSensor>($"Buffer.BufferLidClosed");
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_tmLid = DEVICE.GetDevice<IoSensor>($"TM.TMLidClosed");
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_pumpType = DEVICE.GetDevice<Devices.IoPump>($"TM.TMPump1");
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_preHeatLid = DEVICE.GetDevice<IoSensor>($"TM.PreHeatStationLidClosed");
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_tmIoInterLock = DEVICE.GetDevice<IoInterLockEx>("TM.IoInterLock");
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_pumpRoutine = new TMPumpRoutine();
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_ventRoutine = new TMVentRoutine();
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}
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internal void Init(int pumpTime, int leakCheckTime)
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{
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_paramContinuePumpTime = pumpTime;
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_paramLeakCheckTime = leakCheckTime;
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}
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internal void Init()
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{
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_paramContinuePumpTime = SC.GetValue<int>("TM.LeakCheck.PumpDelayTime"); ;
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_paramLeakCheckTime = SC.GetValue<int>("TM.LeakCheck.LeakCheckDelayTime"); ;
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}
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public Result Start(params object[] objs)
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{
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Reset();
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_swTimer.Restart();
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_pumpRoutine.Init(SC.GetValue<double>("TM.LeakCheck.PumpBasePressure"), SC.GetValue<int>("TM.LeakCheck.PumpDelayTime"));
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_ventRoutine.Init(SC.GetValue<double>("TM.LeakCheck.VentBasePressure"), SC.GetValue<int>("TM.LeakCheck.VentDelayTime"));
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string reason;
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if (!_tm.SetFastPumpValve(false, out reason) || !_tm.SetFastVentValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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if (SC.GetValue<bool>("System.IsATMMode"))
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{
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EV.PostInfoLog(Module, $"system in atm mode, {_tm.Module} pump skipped");
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return Result.DONE;
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}
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if (SC.ContainsItem("TM.RunPumpRoutineEventBelowBasePressure") && !SC.ContainsItem("TM.RunPumpRoutineEventBelowBasePressure"))
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{
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if (_tm.ChamberPressure < _pumpBasePressure)
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{
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EV.PostInfoLog(Module, $"{_tm.Module} already under pump base pressure");
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return Result.DONE;
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}
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}
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ModuleName[] modules = new ModuleName[] { ModuleName.LoadLock, ModuleName.PM1, ModuleName.PM2 };
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foreach (var moduleName in modules)
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{
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if (!_tm.CheckSlitValveClose(moduleName))
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{
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EV.PostAlarmLog(Module, $"Can not leakCheck, {moduleName} slit valve not closed");
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return Result.FAIL;
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}
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}
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_slowFastPumpSwitchPressure = SC.GetValue<double>("TM.Pump.SlowFastPumpSwitchPressure");
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_slowPumpTimeout = SC.GetValue<int>("TM.Pump.PumpSlowTimeout");
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_fastPumpTime = SC.GetValue<int>("TM.Pump.FastPumpTimeout");
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_pumpBasePressure = SC.GetValue<double>("TM.Pump.PumpBasePressure");
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_routineTimeOut = SC.GetValue<int>("TM.LeakCheck.RoutineTimeOut");
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_leakSpec = SC.GetValue<double>("TM.LeakCheck.LeakSpec");
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_purgeCount = SC.GetValue<int>("TM.LeakCheck.CyclePurgeCount");
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if (!_bufferLid.Value)
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{
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EV.PostAlarmLog(Module, $"Can not leakCheck,Buffer lid is not open");
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return Result.FAIL;
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}
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if (!_tmLid.Value)
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{
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EV.PostAlarmLog(Module, $"Can not leakCheck,TM lid is not open");
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return Result.FAIL;
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}
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if (_pumpType.IsAlarm)
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{
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EV.PostAlarmLog(Module, $"can not leakCheck,TM pump alarm");
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return Result.FAIL;
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}
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if (!_pumpType.IsRunning)
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{
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EV.PostAlarmLog(Module, $"can not leakCheck,TM pump is not running");
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return Result.FAIL;
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}
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if (!_tmIoInterLock.SetTMLeakCheckRoutineRunning(true, out reason))
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{
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EV.PostAlarmLog(Module, $"can not leakCheck,{reason}");
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return Result.FAIL;
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}
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Notify("Start");
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return Result.RUN;
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}
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public Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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Loop((int)RoutineStep.StartLoop, _purgeCount);
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ExecuteRoutine((int)RoutineStep.LoopPump, _pumpRoutine);
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ExecuteRoutine((int)RoutineStep.LoopVent, _ventRoutine);
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EndLoop((int)RoutineStep.StopLoop);
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OpenSlowPump((int)RoutineStep.SlowPump, _tm, _slowFastPumpSwitchPressure, _slowPumpTimeout);
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OpenFastPump((int)RoutineStep.FastPump, _tm, _pumpBasePressure, _fastPumpTime);
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TimeDelay((int)RoutineStep.VaccumDelay, _paramContinuePumpTime);
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CloseFastPump((int)RoutineStep.CloseValves, _tm);
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CloseSlowPump((int)RoutineStep.CLoseSlowValue, _tm);
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DoLeakCheck((int)RoutineStep.DoLeakCheck, _paramLeakCheckTime);
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//CalcLeackCheckPerMinute(_paramLeakCheckTime);
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TimeDelay((int)RoutineStep.DoLeakCheckDelay, _paramLeakCheckTime);
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CalcLeakCheck((int)RoutineStep.CalcLeakCheck, _paramLeakCheckTime);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_tmIoInterLock.DoTmLeakCheckRoutineRunning = false;
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_swTimer.Stop();
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return Result.DONE;
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}
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public void Abort()
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{
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Stop("Leak check aborted");
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_tmIoInterLock.DoTmLeakCheckRoutineRunning = false;
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_pumpRoutine.Abort();
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_ventRoutine.Abort();
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_swTimer.Stop();
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LeakCheckDataRecorder.Add((int)_swTimer.ElapsedMilliseconds / 1000, _beginPressure, _tm.ChamberPressure, 0, Result.FAIL.ToString(), "", Module);
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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public void CheckSlitValves(int id, TM tm)
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{
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Tuple<bool, Result> ret = Check(id, () =>
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{
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Notify("Check slit valve is all closed");
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ModuleName[] modules = new ModuleName[]
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{ModuleName.LoadLock, ModuleName.PM1, ModuleName.PM2};
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foreach (var m in modules)
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{
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if (!tm.CheckSlitValveClose(m))
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{
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Stop($"{m} slit valve not closed.");
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return false;
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}
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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}
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}
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public void DoLeakCheck(int id, double time)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Keep pressure for {time} seconds");
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_beginTime = _swTimer.ElapsedMilliseconds;
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_beginPressure = _tm.ChamberPressure;
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_calTimes = 1;
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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//Tuple<bool, Result> ret = Delay(id, () =>
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// {
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// Notify($"Keep pressure for {time} seconds");
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// _beginPressure = _tm.ChamberPressure;
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// return true;
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// }, time * 1000);
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//if (ret.Item1)
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//{
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// if (ret.Item2 == Result.RUN)
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// {
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// throw (new RoutineBreakException());
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// }
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//}
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}
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public void CalcLeackCheckPerMinute(int time)
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{
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//大于LeakCheck时间,
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if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= time)
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{
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int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
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double endPressure = _tm.ChamberPressure;
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double leakSpan = endPressure - _beginPressure;
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double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
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if (leakRate > _leakSpec)
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{
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LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module);
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EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
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}
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else
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{
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LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module);
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EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
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}
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}
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else
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{
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if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= 60 * _calTimes)
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{
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_calTimes++;
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int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
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double endPressure = _tm.ChamberPressure;
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double leakSpan = endPressure - _beginPressure;
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double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
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if (leakRate > _leakSpec)
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{
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EV.PostInfoLog(Module, $"Leak check Failed Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2} ,Rate over {_leakSpec}");
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throw (new RoutineFaildException());
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}
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EV.PostInfoLog(Module, $"Leak check Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2}");
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}
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throw (new RoutineBreakException());
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}
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}
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public void CalcLeakCheck(int id, int time)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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double endPressure = _tm.ChamberPressure;
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double leakSpan = endPressure - _beginPressure;
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double leakRate = (endPressure - _beginPressure) / (time / 60.0);
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if (leakRate > _leakSpec)
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{
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LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), Module, Module);
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EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
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return false;
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}
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else
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{
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LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), Module, Module);
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EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
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return true;
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}
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});
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}
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public void OpenSlowPump(int id, TM tm, double basePressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {tm.Name} slow pump valve");
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if (!tm.SetSlowPumpValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return tm.ChamberPressure <= basePressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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tm.SetFastPumpValve(false, out string _);
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Stop($"{tm.Name} pressure can not pump to {basePressure} in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CloseSlowPump(int id, TM tm)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Close {tm.Name} pump valves");
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if (!_tm.SetSlowPumpValve(false, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void OpenFastPump(int id, TM tm, double basePressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {tm.Name} pump valve");
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if (!tm.SetFastPumpValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return tm.ChamberPressure <= basePressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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tm.SetFastPumpValve(false, out string _);
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Stop($"{tm.Name} pressure can not pump to {basePressure} in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CloseFastPump(int id, TM tm)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Close {tm.Name} pump valves");
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if (!_tm.SetFastPumpValve(false, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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