SicMultiplate/SicRT/Equipments/AutoTransfer.cs

using System;
using System.Collections.Generic;
using System.IO;
using System.Linq;
using System.Windows.Media.Imaging;
using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.RecipeCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Sorter.Common;
using MECF.Framework.Common.DataCenter;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Jobs;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using SicRT.Equipments.Schedulers;
using SicRT.Modules.Schedulers;
using SicRT.Scheduler;


namespace SicRT.Modules
{
    public partial class AutoTransfer : SchedulerModuleFactory
    {
        public class TrayInfo
        {
            public int TrayModule { get; set; }
            public int TraySlot { get; set; }
            public int TrayProcessCount { get; set; }
        }

        private List<ControlJobInfo> _lstNeedMapJob = new List<ControlJobInfo>();
        private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
        private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
        private List<TrayInfo> _lstProcessedTrayInfo = new List<TrayInfo>();  //保存石墨盘的进入腔体的信息(最多4次工艺需要换盘)

        private int _maxTrayCount = 4;                      //可以同时运行的石墨盘总数
        private bool _cassProcessOnebyOne = false;          //Cassette是左右交互取片还是一个Cassette取完再取另一个
        private R_TRIG NotifyTrayExhausted = new R_TRIG();

        private R_TRIG _trigIsPumping = new R_TRIG();

        private const string LogSource = "Scheduler";
        private SchedulerDBCallback _dbCallback;

        public bool CassetteFromAToB => SC.GetValue<bool>("System.Scheduler.CassetteFromAToB");

        private bool _isCycleMode;
        private int _cycleSetPoint = 0;
        private int _cycledCount = 0;
        private int _cycledWafer = 0;
        private string _curRecipeName = "";
        private string _curSequenceName = "";

        private bool _isModuleErrorPrevious;
        private bool[] _isPMErrorPrevious = new bool[2];

        private string _timeBuffer1 { get; set; }
        private string _timeBuffer2 { get; set; }
        private string _timeBuffer3 { get; set; }

        private Dictionary<string, DateTime> _bufferWaferInfo = new Dictionary<string, DateTime>();

        Queue<Action> waferRobotActions = new Queue<Action>() { };
        Queue<Action> trayRobotActions = new Queue<Action>() { };
        Queue<Action> tmRobotActions = new Queue<Action>() { };

        public AutoTransfer()
        {
            _dbCallback = new SchedulerDBCallback();

            DATA.Subscribe("Scheduler.IsCycleMode", () => _isCycleMode);
            DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
            DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
            DATA.Subscribe("Scheduler.RecipeName", () => _curRecipeName);
            DATA.Subscribe("Scheduler.SequenceName", () => _curSequenceName);

            DATA.Subscribe("Scheduler.TimeBuffer1", () => _timeBuffer1);
            DATA.Subscribe("Scheduler.TimeBuffer2", () => _timeBuffer2);
            DATA.Subscribe("Scheduler.TimeBuffer3", () => _timeBuffer3);

            DATA.Subscribe("CassAL.LocalJobName", () =>
            {
                var jb = _lstControlJobs.FirstOrDefault(x => x.Module == "CassAL");
                if (jb != null)
                    return jb.Name;
                return "";
            });

            DATA.Subscribe("CassAL.LocalJobStatus", () =>
            {
                var jb = _lstControlJobs.FirstOrDefault(x => x.Module == "CassAL");
                if (jb != null)
                    return jb.State.ToString();
                return "";
            });

            DATA.Subscribe("CassAR.LocalJobName", () =>
            {
                var jb = _lstControlJobs.FirstOrDefault(x => x.Module == "CassAR");
                if (jb != null)
                    return jb.Name;
                return "";
            });

            DATA.Subscribe("CassAR.LocalJobStatus", () =>
            {
                var jb = _lstControlJobs.FirstOrDefault(x => x.Module == "CassAR");
                if (jb != null)
                    return jb.State.ToString();
                return "";
            });

            OP.Subscribe($"{ModuleName.TM}.ResetTask", (string cmd, object[] args) =>
            {
                _tmRobot.ResetTask();
                return true;
            });

            OP.Subscribe($"{ModuleName.EFEM}.ResetTask", (string cmd, object[] args) =>
            {
                _waferRobot.ResetTask();
                _trayRobot.ResetTask();
                return true;
            });

            OP.Subscribe($"{ModuleName.WaferRobot}.ResetTask", (string cmd, object[] args) =>
            {
                _waferRobot.ResetTask();
                return true;
            });

            OP.Subscribe($"{ModuleName.TrayRobot}.ResetTask", (string cmd, object[] args) =>
            {
                _trayRobot.ResetTask();
                return true;
            });

            waferRobotActions.Enqueue(MonitorWaferRobotCassettePlaceTask);
            waferRobotActions.Enqueue(MonitorWaferRobotCassettePickTask);
            waferRobotActions.Enqueue(MonitorWaferRobotUnLoadPickTask);
            waferRobotActions.Enqueue(MonitorWaferRobotAlignerPlaceTask);
            waferRobotActions.Enqueue(MonitorWaferRobotAlignerPickTask);
            waferRobotActions.Enqueue(MonitorWaferRobotLoadPlaceTask);

            trayRobotActions.Enqueue(MonitorTrayRobotLoadPlaceTask);
            trayRobotActions.Enqueue(MonitorTrayRobotLoadPickTask);
            trayRobotActions.Enqueue(MonitorTrayRobotCassettePlaceTask);
            trayRobotActions.Enqueue(MonitorTrayRobotCassettePickTask);

            tmRobotActions.Enqueue(MonitorTmRobotPMPlaceTask);
            tmRobotActions.Enqueue(MonitorTmRobotPMPickTask);
            tmRobotActions.Enqueue(MonitorTmRobotBufferPlaceTask);
            tmRobotActions.Enqueue(MonitorTmRobotBufferPickTask);
            tmRobotActions.Enqueue(MonitorTmRobotLoadPlaceTask);
            tmRobotActions.Enqueue(MonitorTmRobotLoadPickTask);
            tmRobotActions.Enqueue(MonitorTmRobotUnLoadPlaceTask);
            tmRobotActions.Enqueue(MonitorTmRobotUnLoadPickTask);
        }

        public bool HasJobRunning
        {
            get { return _lstControlJobs.Count > 0; }
        }


        public void Clear()
        {
            _tmRobot.ResetTask();
            _waferRobot.ResetTask();
            _trayRobot.ResetTask();

            foreach (var pm in _lstPms)
            {
                pm.ResetTask();
            }

            foreach (var cass in _lstWaferCassettes)
            {
                cass.ResetTask();
            }

            _cassetteBL.ResetTask();

            _load.ResetTask();
            _unload.ResetTask();
            _buffer.ResetTask();

            _lstControlJobs.Clear();
            _lstProcessJobs.Clear();
            _bufferWaferInfo.Clear();
        }

        public void ResetTask()
        {
            if(!_tmRobot.IsOnline)
            {
                _tmRobot.ResetTask();
            }
            
            if(!_waferRobot.IsOnline)
            {
                _waferRobot.ResetTask();
            }
           
            if(!_trayRobot.IsOnline)
            {
                _trayRobot.ResetTask();
            }
           
            if (!_load.IsOnline)
            {
                _load.ResetTask();
            }

            if (!_unload.IsOnline)
            {
                _unload.ResetTask();
            }

            if (!_buffer.IsOnline)
            {
                _buffer.ResetTask();
            }

            foreach (var pm in _lstPms)
            {
                if (!pm.IsOnline)
                {
                    pm.ResetTask();
                }
            }

            foreach (var cass in _lstWaferCassettes)
            {
                if (!cass.IsOnline)
                {
                    cass.ResetTask();
                }
            }

            if (!_cassetteBL.IsOnline)
            {
                _cassetteBL.ResetTask();
            }
        }

        public void GetConfig()
        {
            _cycledCount = 0;

            _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
            _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;


            _maxTrayCount = _lstPms.Count * 2;
        }

        public bool CreateJob(Dictionary<string, object> param)
        {
            string reason = "";
            string[] slotSequence = (string[])param["SlotSequence"];
            string jobId = (string)param["JobId"];
            string module = (string)param["Module"];
            bool autoStart = (bool)param["AutoStart"];
            string lotId = jobId;
            if (param.ContainsKey("LotId"))
                lotId = (string)param["LotId"];

            //if (CheckModuleHaveWaferWithNoJob(out reason))
            //{
            //    EV.PostWarningLog(LogSource, $"{reason}");
            //    return false;
            //}

            if (!ValidateSequence(slotSequence, out reason))
            {
                EV.PostWarningLog(LogSource, $"{reason}");
                return false;
            }

            if (slotSequence.Length != 25)
            {
                reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be 25";
                EV.PostWarningLog(LogSource, reason);
                return false;
            }

            if (string.IsNullOrEmpty(jobId))
            {
                jobId = "CJ_Local_" + module + DateTime.Now;
            }

            if (_lstControlJobs.Exists(x => x.Name == jobId))
            {
                reason = $"LotID : {jobId} already created";
                EV.PostWarningLog(LogSource, reason);
                return false;
            }

            ControlJobInfo cj = new ControlJobInfo();
            cj.Name = jobId;
            cj.Module = module;
            cj.LotName = jobId;
            cj.LotInnerId = Guid.NewGuid();
            cj.LotWafers = new List<WaferInfoRt>();
            cj.SetState(EnumControlJobState.WaitingForStart);

            Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
            Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
            Dictionary<string, string> indexSequence = new Dictionary<string, string>();

            bool enableGroupBySequence = SC.GetValue<bool>("System.Scheduler.GroupWaferBySequence");
            string WaferAssociationInfo = $"WaferAssociationInfo({module}):";
            for (int i = 0; i < 25; i++)
            {
                WaferAssociationInfo = WaferAssociationInfo + string.Format(" slot{0} -- {1};", i + 1, slotSequence[i]);
                if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
                    continue;

                string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
                indexSequence[groupName] = slotSequence[i];
                if (!seqSlot.ContainsKey(groupName))
                {
                    seqSlot[groupName] = new bool[25];
                }
                if (!seqSlotWafers.ContainsKey(groupName))
                {
                    seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
                }
                seqSlot[groupName][i] = true;

                if (!WaferManager.Instance.CheckHasWafer(module, i))
                {
                    reason = $"job wafer: {module} slot {i + 1} not in the carrier";
                    EV.PostWarningLog(LogSource, reason);
                    return false;
                }
                if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
                {
                    reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
                    EV.PostWarningLog(LogSource, reason);
                    return false;
                }

                var wafer = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
                if (wafer == null || wafer.IsEmpty)
                {
                    reason = $"specifies wafer: {module} slot {i + 1} not in the carrier";
                    EV.PostWarningLog(LogSource, reason);
                    return false;
                }
                if (wafer.ProcessState != EnumWaferProcessStatus.Idle)
                {
                    reason = $"specifies wafer: {module} slot {i + 1} process state is not idle";
                    EV.PostWarningLog(LogSource, reason);
                    return false;
                }
                if (wafer.ProcessJob != null)
                {
                    reason = $"specifies wafer: {module} slot {i + 1} ProcessJob is not null";
                    EV.PostWarningLog(LogSource, reason);
                    return false;
                }
                if (wafer.SubstE90Status != EnumE90Status.NeedProcessing)
                {
                    reason = $"specifies wafer: {module} slot {i + 1} SubstE90Status is not NeedProcessing";
                    EV.PostWarningLog(LogSource, reason);
                    return false;
                }

                seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
                cj.LotWafers.Add(WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i));
                WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).PPID = slotSequence[i];
            }

            //currentSlotSequenceList[module] = slotSequence.Reverse().ToList();
            EV.PostInfoLog(LogSource, WaferAssociationInfo);

            if (seqSlotWafers.Count == 0)
            {
                reason = $"Can not create job, no wafer assigned";
                EV.PostWarningLog(LogSource, reason);
                return false;
            }

            List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
            string[] seqs = seqSlot.Keys.ToArray();
            for (int i = 0; i < seqs.Length; i++)
            {
                ProcessJobInfo pj = new ProcessJobInfo();
                pj.Name = jobId + "_" + (i + 1);
                pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
                pj.ControlJobName = cj.Name;
                //pj.LotName = lotId;
                pj.SlotWafers = seqSlotWafers[seqs[i]];
                pj.SetState(EnumProcessJobState.Queued);

                //检查PM的状态
                if (!CheckSequencePmReady(pj.Sequence))
                {
                    return false;
                }
                //if (!CheckSequenceRecipeFileValid(pj.Sequence, out reason))
                //{
                //    reason = $"recipe file not valid in the sequence, {reason}";
                //    EV.PostWarningLog(LogSource, reason);
                //    return false;
                //}

                //if (!CheckSequenceOrderOk(pj.Sequence, out reason))
                //{
                //    reason = $"sequence path not valid, {reason}";
                //    EV.PostWarningLog(LogSource, reason);
                //    return false;
                //}

                pjs.Add(pj);
            }

            foreach (var pj in pjs)
            {
                cj.ProcessJobNameList.Add(pj.Name);
                _lstProcessJobs.Add(pj);
            }

            _lstControlJobs.Add(cj);

            int totalWafer = 0;
            foreach (var pj in pjs)
            {
                foreach (var pjSlotWafer in pj.SlotWafers)
                {
                    var wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
                    wafer.ProcessJob = pj;
                    WaferDataRecorder.SetCjInfo(wafer.InnerId.ToString(), cj.InnerId.ToString());
                    WaferDataRecorder.SetWaferSequence(wafer.InnerId.ToString(), pj.Sequence.Name);
                    WaferDataRecorder.SetWaferLotId(wafer.InnerId.ToString(), jobId);
                    WaferManager.Instance.UpdateWaferLotId(pjSlotWafer.Item1, pjSlotWafer.Item2, jobId);

                    totalWafer++;
                }
            }

            CarrierManager.Instance.DeleteCarrier(cj.Module);
            CarrierManager.Instance.CreateCarrier(cj.Module);
            CarrierManager.Instance.UpdateCarrierId(cj.Module, $"{cj.Module} {DateTime.Now}");
            CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
            JobDataRecorder.StartCJ(cj.InnerId.ToString(), carrier.InnerId.ToString(), cj.Name, cj.Module, cj.Module, totalWafer);
            return true;
        }

        private bool ValidateSequence(string[] seqs, out string reason)
        {
            reason = string.Empty;
            bool isAllSequenceNull = true;
            for (int i = 0; i < seqs.Length; i++)
            {
                if (string.IsNullOrEmpty(seqs[i]))
                    continue;
                var sequence = SequenceInfoHelper.GetInfo(seqs[i]);
                if ((sequence == null || sequence.Steps == null || sequence.Steps.Count == 0) && !string.IsNullOrEmpty(sequence.Name))
                {
                    reason = $"Invalid sequence {seqs[i]}";
                    return false;
                }

                isAllSequenceNull = false;

                if (sequence.Steps != null)
                {
                    int currentIndex = 0;
                    if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Aligner)
                    {
                        reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Aligner";
                        return false;
                    }
                    else
                    {
                        if (sequence.Steps[currentIndex].AlignAngle < 0 || sequence.Steps[currentIndex].AlignAngle > 360)
                        {
                            reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Aligner angle parameter is not valid";
                            return false;
                        }
                    }

                    currentIndex++;
                    if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Load)
                    {
                        reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Load";
                        return false;
                    }

                    currentIndex++;
                    if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Buffer)
                    {
                        reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Buffer";
                        return false;
                    }
                    else
                    {
                        //if (!sequence.Steps[currentIndex].StepParameter.ContainsKey("SlotSelection")
                        //    || string.IsNullOrEmpty(sequence.Steps[currentIndex].StepParameter["SlotSelection"].ToString())
                        //    || sequence.Steps[currentIndex].StepParameter["SlotSelection"].ToString().Contains("3"))
                        //{
                        //    reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Buffer SlotSelection parameter is not valid";
                        //    return false;
                        //}

                        if (!sequence.Steps[currentIndex].StepParameter.ContainsKey("PurgeCount") || !sequence.Steps[currentIndex].StepParameter.ContainsKey("PumpDelayTime"))
                        {
                            reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Buffer PurgeCount or  PumpDelayTime parameter is not valid";
                            return false;
                        }
                    }


                    currentIndex++;
                    if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules.Any(pm => !ModuleHelper.IsPm(pm)))
                    {
                        reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be PM";
                        return false;
                    }

                    //if (sequence.Steps.Count == 7)
                    //{
                    //    currentIndex++;
                    //    if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Buffer)
                    //    {
                    //        reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Buffer";
                    //        return false;
                    //    }
                    //    else
                    //    {
                    //        if (!sequence.Steps[currentIndex].StepParameter.ContainsKey("SlotSelection")
                    //            || sequence.Steps[currentIndex].StepParameter["SlotSelection"].ToString() != "3")
                    //        {
                    //            reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Buffer SlotSelection parameter is not valid";
                    //            return false;
                    //        }

                    //        if (!sequence.Steps[currentIndex].StepParameter.ContainsKey("BufferType") || !sequence.Steps[currentIndex].StepParameter["BufferType"].ToString().Contains("Cooling"))
                    //        {
                    //            reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Buffer BufferType parameter is not valid";
                    //            return false;
                    //        }
                    //    }

                    //}

                    currentIndex++;
                    if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.UnLoad)
                    {
                        reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Unload";
                        return false;
                    }

                    currentIndex++;
                    if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Aligner)
                    {
                        reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Aligner";
                        return false;
                    }
                    else
                    {
                        if (sequence.Steps[0].AlignAngle < 0 || sequence.Steps[0].AlignAngle > 360)
                        {
                            reason = $"Invalid sequence {seqs[i]}, Aligner angle parameter is not valid";
                            return false;
                        }
                    }
                }
            }

            if (isAllSequenceNull)
            {
                reason = $"Invalid sequence, sequence are all null ";
                return false;
            }
            return true;
        }

        public bool CreateControlJob(string jobId, string module, List<string> pjIDs, bool isAutoStart)
        {
            if (_lstControlJobs.Exists(x => x.Name == jobId))
            {
                EV.PostWarningLog(LogSource, $"{jobId} is already created");
                return false;
            }

            if (!ModuleHelper.IsCassette(ModuleHelper.Converter(module)))
            {
                EV.PostWarningLog(LogSource, $"{module} should be Cassete");
                return false;
            }


            if (_lstProcessJobs.Count <= 0) //判断上一步ProcessJob是否创建成功
            {
                EV.PostWarningLog(LogSource, $"process job is not exist");
                return false;
            }

            ControlJobInfo cj = new ControlJobInfo();
            cj.Name = jobId;
            cj.Module = module;
            cj.LotName = jobId;
            cj.LotInnerId = Guid.NewGuid();
            cj.LotWafers = new List<WaferInfoRt>();
            cj.SetState(EnumControlJobState.WaitingForStart);


            int totalWafer = 0;
            foreach (var pjName in pjIDs)
            {
                var pj = _lstProcessJobs.FirstOrDefault(x => x.Name == pjName);
                if (pj == null)
                {
                    LOG.Info($"not find {pjName} while create control job");
                    continue;
                }


                var slotWafers = new List<Tuple<ModuleName, int>>();
                foreach (var slotWafer in pj.SlotWafers)
                {
                    var _module = GetModule(module);
                    if (!_module.HasWafer(slotWafer.Item2))
                    {
                        EV.PostWarningLog(LogSource, $"job wafer: {module} slot {slotWafer.Item2 + 1} not in the carrier");
                        return false;
                    }
                    if (!_module.CheckWaferStatus(slotWafer.Item2, WaferStatus.Normal))
                    {
                        EV.PostWarningLog(LogSource, $"job wafer: {module} slot {slotWafer.Item2 + 1} status is {_module.GetWaferInfo(slotWafer.Item2).Status}");
                        return false;
                    }
                    if (_module.GetWaferInfo(slotWafer.Item2).ProcessState != EnumWaferProcessStatus.Idle)
                    {
                        EV.PostWarningLog(LogSource, $"job wafer: {module} slot {slotWafer.Item2 + 1} process status is {_module.GetWaferInfo(slotWafer.Item2).ProcessState}");
                        return false;
                    }

                    slotWafers.Add(Tuple.Create(ModuleHelper.Converter(module), slotWafer.Item2));



                    totalWafer++;
                }

                pj.ControlJobName = cj.Name;

                cj.ProcessJobNameList.Add(pj.Name);
                pj.SlotWafers = slotWafers;
                foreach (var pjSlotWafer in pj.SlotWafers)
                {
                    var wafer = GetModule(pjSlotWafer.Item1).GetWaferInfo(pjSlotWafer.Item2);
                    cj.LotWafers.Add(wafer);
                    wafer.ProcessJob = pj;
                    wafer.ProcessJobID = pj.Sequence.Name;
                    WaferDataRecorder.SetCjInfo(wafer.InnerId.ToString(), cj.InnerId.ToString());
                    WaferDataRecorder.SetWaferSequence(wafer.InnerId.ToString(), pj.Sequence.Name);
                    WaferDataRecorder.SetWaferLotId(wafer.InnerId.ToString(), jobId);
                    WaferManager.Instance.UpdateWaferLotId(pjSlotWafer.Item1, pjSlotWafer.Item2, jobId);
                }
            }

            _lstControlJobs.Add(cj);

            CarrierManager.Instance.DeleteCarrier(cj.Module);
            CarrierManager.Instance.CreateCarrier(cj.Module);
            CarrierManager.Instance.UpdateCarrierId(cj.Module, $"{cj.Module} {DateTime.Now}");
            CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
            JobDataRecorder.StartCJ(cj.InnerId.ToString(), carrier.InnerId.ToString(), cj.Name, cj.Module, cj.Module, totalWafer);

            return true;
        }

        public bool CreateProcessJob(string jobId, string sequenceName, List<int> slotNumbers/*0 based*/, bool isAutoStart)
        {
            var sequenceInfo = SequenceInfoHelper.GetInfo(sequenceName);

            //模块顺序检查
            List<int> lstLoad = new List<int>();
            List<int> lstBuffer = new List<int>();
            List<int> lstUnLoad = new List<int>();
            List<int> lstPM = new List<int>();


            for (int i = 0; i < sequenceInfo.Steps.Count; i++)
            {
                if (sequenceInfo.Steps[i].StepModules.Count == 0)
                {
                    return false;
                }
                if (sequenceInfo.Steps[i].StepModules.Any(pm => ModuleHelper.IsPm(pm)))
                {
                    lstPM.Add(i);
                }
                if (sequenceInfo.Steps[i].StepModules.Any(load => load == ModuleName.Load || load == ModuleName.LoadLock))
                {
                    lstLoad.Add(i);
                }
                if (sequenceInfo.Steps[i].StepModules.Any(unload => unload == ModuleName.UnLoad))
                {
                    lstUnLoad.Add(i);
                }
                if (sequenceInfo.Steps[i].StepModules.Any(buff => buff == ModuleName.Buffer))
                {
                    lstBuffer.Add(i);
                }
            }

            if (lstPM.Count <= 0)
            {
                EV.PostWarningLog(LogSource, $"Sequence must have pm step info!");
                return false;
            }
            if (lstLoad.Count > 1)
            {
                EV.PostWarningLog(LogSource, $"Sequence can not contain {lstLoad.Count} Load Step!");
                return false;
            }
            if (lstUnLoad.Count > 1)
            {
                EV.PostWarningLog(LogSource, $"Sequence can not contain {lstUnLoad.Count} UnLoad Step!");
                return false;
            }
            if (lstBuffer.Count > 0)
            {
                foreach (int bufferId in lstBuffer)
                {
                    if (lstLoad.Count == 1)
                    {
                        if (bufferId < lstLoad[0])
                        {
                            EV.PostWarningLog(LogSource, $"Sequence Load Step Must Before Buffer Step!");
                            return false;
                        }
                    }
                    if (lstUnLoad.Count == 1)
                    {
                        if (bufferId > lstUnLoad[0])
                        {
                            EV.PostWarningLog(LogSource, $"Sequence Buffer Step Must Before UnLoad Step!");
                            return false;
                        }
                    }
                }
            }



            var slotWafers = new List<Tuple<ModuleName, int>>();
            foreach (var slot in slotNumbers)
            {
                slotWafers.Add(Tuple.Create(ModuleName.System, slot));
            }

            ProcessJobInfo pj = new ProcessJobInfo();
            pj.Name = jobId;
            pj.Sequence = sequenceInfo;
            pj.SlotWafers = slotWafers;
            pj.SetState(EnumProcessJobState.Queued);

            _lstProcessJobs.Add(pj);

            return true;
        }

        internal void StopJob(string jobName)
        {
            //ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            //if (cj == null)
            //{
            //    EV.PostWarningLog(LogSource, $"stop job rejected, not found job with id {jobName}");
            //    return;
            //}
            foreach (var cj in _lstControlJobs)
            {
                foreach (var pj in _lstProcessJobs)
                {
                    if (pj.ControlJobName == cj.Name)
                    {
                        pj.SetState(EnumProcessJobState.Stopping);
                    }
                }

                if (_cycleSetPoint > 0)
                {
                    _cycleSetPoint = _cycledCount;
                }
            }
        }

        internal void AbortJob(string jobName)
        {
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                EV.PostWarningLog(LogSource, $"abort job rejected, not found job with id {jobName}");
                return;
            }

            int unprocessed_cj = 0;
            int aborted_cj = 0;

            List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    pj.SetState(EnumProcessJobState.Aborting);
                    pjAbortList.Add(pj);

                    int unprocessed = 0;
                    int aborted = 0;
                    var wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
                    foreach (var waferInfo in wafers)
                    {
                        waferInfo.ProcessJob = null;
                        waferInfo.NextSequenceStep = 0;
                        if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
                        {
                            unprocessed++;
                            unprocessed_cj++;
                        }
                    }
                    JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
                }
            }

            foreach (var pj in pjAbortList)
            {
                _lstProcessJobs.Remove(pj);
            }

            _lstControlJobs.Remove(cj);

            _dbCallback.LotFinished(cj);
            JobDataRecorder.EndCJ(cj.InnerId.ToString(), aborted_cj, unprocessed_cj);
        }

        public void ResumeJob(string jobName)
        {
            //ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            //if (cj == null)
            //{
            //    EV.PostWarningLog(LogSource, $"resume job rejected, not found job with id {jobName}");
            //    return;
            //}

            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Paused)
                {
                    cj.SetState(EnumControlJobState.Executing);
                }
            }
        }

        internal void PauseJob(string jobName)
        {
            //ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            //if (cj == null)
            //{
            //    EV.PostWarningLog(LogSource, $"pause job rejected, not found job with id {jobName}");
            //    return;
            //}

            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing)
                {
                    cj.SetState(EnumControlJobState.Paused);
                }
            }
        }

        internal bool CheckSequencePmReady(SequenceInfo seqInfo)
        {
            if (seqInfo.Name != "")
            {
                foreach (var step in seqInfo.Steps)
                {
                    foreach (var moduleName in step.StepModules)
                    {
                        if (ModuleHelper.IsPm(moduleName))
                        {
                            var module = _lstPms.Find(x => x.Module == moduleName);

                            if (module != null)
                            {
                                if (module.IsError)
                                {
                                    EV.PostWarningLog("Scheduler", $"can not start job, {moduleName} is not be error");
                                    return false;
                                }

                                if (!module.IsOnline)
                                {
                                    EV.PostWarningLog("Scheduler", $"can not start job, {moduleName} is not be online");
                                    return false;
                                }

                                //if (module.IsService)
                                //{
                                //    EV.PostWarningLog("Scheduler", $"can not start job, {moduleName} is Service Mode");
                                //    return false;
                                //}
                            }
                            else
                            {
                                EV.PostWarningLog("Scheduler", "Sequence PM can not be null!");
                                return false;
                            }
                        }
                    }
                }
            }
            else
            {
                EV.PostWarningLog("Scheduler", "Sequence can not be null!");
                return false;
            }

            return true;
        }

        internal void StartJob(string jobName)
        {
            GetConfig();

            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                EV.PostWarningLog(LogSource, $"start job rejected, not found job with id {jobName}");
                return;
            }

            foreach (var needProcessWafer in cj.LotWafers)
            {
                if (CheckWaferNeedProcess((ModuleName)needProcessWafer.OriginStation, needProcessWafer.OriginSlot, ModuleName.PM1))
                {
                    if (_pm1.IsError)
                    {
                        EV.PostWarningLog("Scheduler", "can not start job, pm1 is in error");
                        return;
                    }

                    if (_pm1.IsService)
                    {
                        EV.PostWarningLog("Scheduler", "can no tstart job, PM1  is Service Mode");
                        return;
                    }
                }
                else if (CheckWaferNeedProcess((ModuleName)needProcessWafer.OriginStation, needProcessWafer.OriginSlot, ModuleName.PM2))
                {
                    if (_pm2.IsError)
                    {
                        EV.PostWarningLog("Scheduler", "can not start job, pm2 is in error");
                        return;
                    }

                    if (_pm2.IsService)
                    {
                        EV.PostWarningLog("Scheduler", "can no tstart job, PM2  is Service Mode");
                        return;
                    }
                }

            }

            //foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.WaitingForStart)
                {
                    cj.BeginTime = DateTime.Now;
                    cj.LotInnerId = Guid.NewGuid();
                    _dbCallback.LotCreated(cj);

                    cj.SetState(EnumControlJobState.Executing);
                }
            }

        }

        /// <summary>
        /// Start Auto Transfer
        /// </summary>
        /// <param name="objs"></param>
        /// <returns></returns>
        public Result Start(params object[] objs)
        {
            GetConfig();
            _cycledWafer = 0;
            _cycledCount = 0;

            bool hasPmOnline = false;

            foreach (var schedulerPm in _lstPms)
            {
                if (schedulerPm.IsOnline && !schedulerPm.IsError)
                {
                    hasPmOnline = true;
                    break;
                }
            }

            if (!hasPmOnline)
            {
                EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online and no error");
                return Result.FAIL;
            }

            if (!_tmRobot.IsOnline || _tmRobot.IsError)
            {
                EV.PostWarningLog("Scheduler", "can not change to auto mode, TM robot should be online and no error");
                return Result.FAIL;
            }

            return Result.RUN;
        }


        //Exhaust 耗尽
        public Result Monitor()
        {
            NotifyTrayExhausted.CLK = CheckTrayExhausted();
            if (NotifyTrayExhausted.Q)
            {
                EV.PostAlarmLog("System", "Tray ProcessCount Exhausted , No Tray for next Process !");
            }

            ControlJobInfo cjActive = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
            if (cjActive != null)
            {
                MonitorModuleTasks();
            }

            MonitorModuleError();

            MonitorJobTasks();

            return Result.RUN;
        }

        public Result MonitorJobTasks()
        {
            UpdateProcessJobStatus();

            UpdateControlJobStatus();

            StartNewJob();

            return Result.RUN;
        }

        protected bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
        {
            for (int i = 0; i < pj.SlotWafers.Count; ++i)
            {
                var wafer = GetModule(GetWaferReturnedCassette(pj.SlotWafers[i].Item1)).GetWaferInfo(pj.SlotWafers[i].Item2);
                if (wafer.IsEmpty)
                    return false;
                if (checkAllProcessed && GetModule(GetWaferReturnedCassette(pj.SlotWafers[i].Item1)).CheckWaferNeedProcess(pj.SlotWafers[i].Item2))
                    return false;
                if (wafer.ProcessJob == null || wafer.ProcessJob.InnerId != pj.InnerId)
                {
                    return false;
                }
            }

            return true;
        }

        private ModuleName GetWaferReturnedCassette(ModuleName moduleFrom)
        {
            if (CassetteFromAToB)
            {
                if (moduleFrom == ModuleName.CassAL)
                {
                    return ModuleName.CassAR;
                }
                else if (moduleFrom == ModuleName.CassAR)
                {
                    return ModuleName.CassAL;
                }

            }
            return moduleFrom;
        }

        protected bool CheckAllDummyWaferReturned()
        {
            foreach (var schedulerPm in _lstPms)
            {
                if (WaferManager.Instance.CheckWaferIsDummy(schedulerPm.Module, 0))
                    return false;
            }

            if (WaferManager.Instance.CheckWaferIsDummy(_tmRobot.Module, 0))
                return false;

            if (WaferManager.Instance.CheckWaferIsDummy(_tmRobot.Module, 1))
                return false;

            return true;
        }

        protected bool CheckAllPmCleaned(ProcessJobInfo pj)
        {
            foreach (var schedulerPm in _lstPms)
            {
                if (GetModule(schedulerPm.Module).CheckNeedRunClean(out _, out _))
                {
                    foreach (var sequenceStepInfo in pj.Sequence.Steps)
                    {
                        if (sequenceStepInfo.StepModules.Contains(schedulerPm.Module))
                            return false;
                    }
                }
            }


            return true;
        }

        private void UpdateProcessJobStatus()
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.State == EnumProcessJobState.Processing)
                {
                    if (CheckAllWaferReturned(pj, true) && CheckAllPmCleaned(pj) && CheckAllDummyWaferReturned())
                    {
                        if (_unload.IsAvailable && _buffer.IsAvailable && _tmRobot.IsAvailable && _load.IsAvailable
                            && _waferRobot.IsAvailable && _unload.NoTray(0)
                            && _trayRobot.IsAvailable && _tmRobot.NoTray(0)
                            && _load.NoTray(0) && _waferRobot.NoWafer(0) && _trayRobot.NoTray(0))
                        {
                            pj.SetState(EnumProcessJobState.ProcessingComplete);
                            JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
                        }
                    }
                }
                else if (pj.State == EnumProcessJobState.Stopping)
                {
                    if (CheckAllWaferReturned(pj, false) && CheckAllPmCleaned(pj) && CheckAllDummyWaferReturned())
                    {
                        if (_unload.IsAvailable && _buffer.IsAvailable && _tmRobot.IsAvailable && _load.IsAvailable
                            && _waferRobot.IsAvailable && _unload.NoTray(0)
                            && _trayRobot.IsAvailable && _tmRobot.NoTray(0)
                            && _load.NoTray(0) && _waferRobot.NoWafer(0) && _trayRobot.NoTray(0))
                        {
                            pj.SetState(EnumProcessJobState.ProcessingComplete);
                            JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
                        }
                    }
                }
            }
        }

        private void UpdateControlJobStatus()
        {
            if (_lstControlJobs.Count == 0)
                return;

            bool allControlJobComplete = true;
            List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing)
                {
                    bool allPjCompleted = true;
                    foreach (var pjName in cj.ProcessJobNameList)
                    {
                        var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                        if (pj == null)
                        {
                            LOG.Error($"Not find pj named {pjName} in {cj.Name}");
                            continue;
                        }
                        if (pj.State != EnumProcessJobState.Complete && pj.State != EnumProcessJobState.ProcessingComplete)
                        {
                            allPjCompleted = false;
                            break;
                        }
                    }

                    if (allPjCompleted)
                    {
                        cj.SetState(EnumControlJobState.Completed);
                        int unprocessed_cj = 0;
                        int aborted_cj = 0;

                        foreach (var pj in _lstProcessJobs)
                        {
                            if (pj.ControlJobName == cj.Name)
                            {
                                int unprocessed = 0;
                                int aborted = 0;
                                var wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
                                foreach (var waferInfo in wafers)
                                {
                                    waferInfo.ProcessJob = null;
                                    waferInfo.NextSequenceStep = 0;
                                    if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
                                    {
                                        unprocessed++;
                                        unprocessed_cj++;
                                    }
                                }
                                JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
                            }
                        }

                        JobDataRecorder.EndCJ(cj.InnerId.ToString(), aborted_cj, unprocessed_cj);
                        _dbCallback.LotFinished(cj);
                    }
                }

                if (cj.State == EnumControlJobState.Completed)
                {
                    cjRemoveList.Add(cj);
                }

                allControlJobComplete = allControlJobComplete && cj.State == EnumControlJobState.Completed;
            }

            //if (_isCycleMode && _cycledCount < _cycleSetPoint)
            //{
            //    int countPerCycle = 0;
            //    int countProcessed = 0;
            //    foreach (var pj in _lstProcessJobs)
            //    {
            //        foreach (var pjSlotWafer in pj.SlotWafers)
            //        {
            //            countPerCycle++;
            //            WaferInfo wafer = GetModule(pjSlotWafer.Item1).GetWaferInfo(pjSlotWafer.Item2);
            //            if (!wafer.IsEmpty && !GetModule(pjSlotWafer.Item1).CheckWaferNeedProcess(pjSlotWafer.Item2))
            //                countProcessed++;
            //        }
            //    }

            //    _cycledWafer = _cycledCount * countPerCycle + countProcessed;
            //    //StatsDataManager.Instance.SetValue(StatsNameTotalRunningWafer, _totalWaferWhenStart + _cycledWafer);

            //    if (allControlJobComplete)
            //    {
            //        _cycledCount++;

            //        if (_cycledCount < _cycleSetPoint)
            //        {
            //            foreach (var cj in _lstControlJobs)
            //            {
            //                cj.SetState(EnumControlJobState.Executing);
            //            }
            //            foreach (var pj in _lstProcessJobs)
            //            {
            //                pj.SetState(EnumProcessJobState.Queued);
            //                pj.InnerId = Guid.NewGuid();
            //                foreach (var pjSlotWafer in pj.SlotWafers)
            //                {
            //                    WaferInfo wafer = GetModule(pjSlotWafer.Item1).GetWaferInfo(pjSlotWafer.Item2);

            //                    wafer.ProcessJob = null;
            //                    wafer.NextSequenceStep = 0;
            //                    wafer.ProcessState = EnumWaferProcessStatus.Idle;
            //                }
            //            }
            //        }
            //    }

            //}

            foreach (var cj in cjRemoveList)
            {
                List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
                foreach (var pj in _lstProcessJobs)
                {
                    if (pj.ControlJobName == cj.Name)
                        pjRemoveList.Add(pj);
                }

                foreach (var pj in pjRemoveList)
                {
                    _lstProcessJobs.Remove(pj);
                }

                _lstControlJobs.Remove(cj);
            }

            //ControlJobInfo cjActived = null;
            //foreach (var cj in _lstControlJobs)
            //{
            //    if (cj.State == EnumControlJobState.Executing)
            //    {
            //        cjActived = cj;
            //        break;
            //    }
            //}
        }

        private void StartNewJob()
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing)
                {
                    foreach (var pjName in cj.ProcessJobNameList)
                    {
                        var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                        if (pj == null)
                        {
                            LOG.Error($"Not find pj named {pjName} in {cj.Name}");
                            continue;
                        }

                        if (pj.State == EnumProcessJobState.Queued)
                        {
                            ActiveProcessJob(pj);
                        }
                    }
                }
            }
        }

        public bool CheckAllJobDone()
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused)
                    return false;
            }
            if (_lstControlJobs.Count == 0)
            {
                return true;
            }
            return false;
        }

        private bool ActiveProcessJob(ProcessJobInfo pj)
        {
            foreach (var pjSlotWafer in pj.SlotWafers)
            {
                var wafer = GetModule(pjSlotWafer.Item1).GetWaferInfo(pjSlotWafer.Item2);
                wafer.ProcessJob = pj;
                wafer.NextSequenceStep = 0;

                WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
            }

            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);

            CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
            JobDataRecorder.StartPJ(pj.InnerId.ToString(), null, cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
            pj.SetState(EnumProcessJobState.Processing);

            return true;
        }

        public Result MonitorModuleTasks()
        {
            //TMRobot和UnLoad不能同时抽气
            _trigIsPumping.CLK = _unload.IsInPumping && _tmRobot.IsInPumping;
            if (_trigIsPumping.Q)
            {
                EV.PostAlarmLog("System", $"检测到 TM.IsInPumping,current Task is {_tmRobot.GetTask()}, _unload.IsInPumping,current Task is {_unload.GetTask()}");
            }

            MonitorPMTask();
            MonitorBufferTask();
            MonitorAlignerTask();

            MonitorTmRobotTask();
            MonitorWaferRobotTask();
            MonitorTrayRobotTask();

            MonitorLoadTask();
            MonitorUnLoadTask();

            return Result.RUN;
        }

        private void MonitorBufferTask()
        {
            if (!_buffer.IsAvailable)
            {
                return;
            }

            if (_buffer.FirstDetectTrayArrive(0)
               || _buffer.FirstDetectTrayArrive(1)
               || _buffer.FirstDetectTrayArrive(2))
            {
                _buffer.ResetPurgeStatus();
            }

            for (int i = 0; i < 3; i++)
            {
                bool canExcute = _buffer.HasWafer(i) && _buffer.CheckWaferNextStepIsThis(_buffer.Module, i);
                if (canExcute)
                {
                    var bufferWafer = _buffer.GetWaferInfo(i);

                   // int bufferSetValue = 0;
                    //if (!GetWaferSequenceNextValue(ModuleName.Buffer, i, "BufferType", out string strBufferType))
                    //{
                    //    continue;
                    //}
                    //if (!GetWaferSequenceNextValue(ModuleName.Buffer, i, "SetValue", out string strBufferSetValue))
                    //{
                    //    continue;
                    //}
                    if (!GetWaferSequenceNextValue(ModuleName.Buffer, i, "PurgeCount", out var strPurgeLoopCount))
                    {
                        continue;
                    }
                    if (!GetWaferSequenceNextValue(ModuleName.Buffer, i, "PumpDelayTime", out var strPurgePumpDelay))
                    {
                        continue;
                    }

                    //if (!Int32.TryParse(strBufferSetValue, out bufferSetValue)
                    //    || !int.TryParse(strPurgeLoopCount, out var purgeLoopCount)
                    //    || !int.TryParse(strPurgePumpDelay, out var purgePumpDelay))
                    //{
                    //    continue;
                    //}

                    if (!int.TryParse(strPurgeLoopCount, out var purgeLoopCount)
                       || !int.TryParse(strPurgePumpDelay, out var purgePumpDelay))
                    {
                        continue;
                    }

                    var wafer = _buffer.GetWaferInfo(i);
                    //分别判断冷却和加热方式温度是否达到
                    //if (strBufferType == "HeatByTemp")
                    //{
                    //    if (_bufferWaferInfo.ContainsKey(bufferWafer.InnerId.ToString()))
                    //    {
                    //        DateTime dtStartTime = _bufferWaferInfo[bufferWafer.InnerId.ToString()];
                    //        double pastTime = (DateTime.Now - dtStartTime).TotalSeconds;

                    //        //选择By温度1秒后再判断温度
                    //        if (pastTime > 1)
                    //        {
                    //            if (_buffer.GetTemperature() >= bufferSetValue)
                    //                wafer.NextSequenceStep++;
                    //            _bufferWaferInfo.Remove(bufferWafer.InnerId.ToString());
                    //        }
                    //    }
                    //    else
                    //    {
                    //        _bufferWaferInfo.Add(bufferWafer.InnerId.ToString(), DateTime.Now);
                    //    }
                    //}
                    //else if (strBufferType == "HeatByTime")
                    //{
                    //    if (_bufferWaferInfo.ContainsKey(bufferWafer.InnerId.ToString()))
                    //    {
                    //        DateTime dtStartTime = _bufferWaferInfo[bufferWafer.InnerId.ToString()];
                    //        double pastTime = (DateTime.Now - dtStartTime).TotalSeconds;

                    //        if (i == 0)
                    //        {
                    //            _timeBuffer1 = pastTime > bufferSetValue ? "0" : (bufferSetValue - pastTime).ToString();
                    //        }
                    //        else if (i == 1)
                    //        {
                    //            _timeBuffer2 = pastTime > bufferSetValue ? "0" : (bufferSetValue - pastTime).ToString();
                    //        }
                    //        if (i == 2)
                    //        {
                    //            _timeBuffer3 = pastTime > bufferSetValue ? "0" : (bufferSetValue - pastTime).ToString();
                    //        }

                    //        if (pastTime > bufferSetValue)
                    //        {
                    //            wafer.NextSequenceStep++;
                    //            _bufferWaferInfo.Remove(bufferWafer.InnerId.ToString());
                    //        }
                    //    }
                    //    else
                    //    {
                    //        _bufferWaferInfo.Add(bufferWafer.InnerId.ToString(), DateTime.Now);
                    //    }
                    //}
                    //else if (strBufferType == "CoolingByTime")
                    //{
                    //    if (_bufferWaferInfo.ContainsKey(bufferWafer.InnerId.ToString()))
                    //    {
                    //        DateTime dtStartTime = _bufferWaferInfo[bufferWafer.InnerId.ToString()];
                    //        double pastTime = (DateTime.Now - dtStartTime).TotalSeconds;

                    //        if (i == 0)
                    //        {
                    //            _timeBuffer1 = pastTime > bufferSetValue ? "0" : (bufferSetValue - pastTime).ToString();
                    //        }
                    //        else if (i == 1)
                    //        {
                    //            _timeBuffer2 = pastTime > bufferSetValue ? "0" : (bufferSetValue - pastTime).ToString();
                    //        }
                    //        if (i == 2)
                    //        {
                    //            _timeBuffer3 = pastTime > bufferSetValue ? "0" : (bufferSetValue - pastTime).ToString();
                    //        }

                    //        if (pastTime > bufferSetValue)
                    //        {
                    //            wafer.NextSequenceStep++;
                    //            _bufferWaferInfo.Remove(bufferWafer.InnerId.ToString());
                    //        }
                    //    }
                    //    else
                    //    {
                    //        _bufferWaferInfo.Add(bufferWafer.InnerId.ToString(), DateTime.Now);
                    //    }
                    //}

                    // 如果TMRobot空闲，并且Buffer收到新盘，则根据Sequence配置进行Purge。
                    if (_tmRobot.IsAvailable && !_buffer.HasPurged)
                    {
                        _tmRobot.Purge(purgeLoopCount, purgePumpDelay);

                        _buffer.HasPurged = true;

                        wafer.NextSequenceStep++;
                    }

                    return;
                }
            }

        }

        private void MonitorLoadTask()
        {
            if (!_load.IsAvailable)
                return;

            if (!_tmRobot.IsAvailable && _tmRobot.Target == ModuleName.LoadLock) // 如果TMRobot正在操作LoadLock
                return;

            if (!_waferRobot.IsAvailable && _waferRobot.Target == ModuleName.LoadLock) // 如果WaferRobot正在操作LoadLock
                return;

            if (!_trayRobot.IsAvailable && _trayRobot.Target == ModuleName.LoadLock) // 如果TrayRobot正在操作LoadLock
                return;

            //第一种情况 : 有Wafer有Tray且Load Sequence还未执行
            if (_load.HasWafer(0) && _load.HasTrayAndNotExceedProcessCount(0) && _load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0))
            {
                if (!_load.CheckWaferTrayGrouped())
                {
                    _load.GroupWaferTray();
                    return;
                }

                _load.Purge(_load.GetWaferPurgeCount(0), _load.GetWaferPumpDelayTime(0));

                _load.GetWaferInfo(0).NextSequenceStep++;
                return;
            }
            //第二种情况：有Wafer有Tray且Load Sequence已执行
            else if (_load.HasWafer(0) && _load.HasTrayAndNotExceedProcessCount(0) && !_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0))
            {
                if (!_load.IsReadyForPick(ModuleName.TMRobot, 0))
                {
                    _load.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Pick, 0);
                    return;
                }
            }
            //第三种情况 : Load腔没盘,TMRobot/Buffer1/2/3中有次数用完的盘
            else if (_load.NoTray(0)
                    && ((_tmRobot.NoWafer(0) && _tmRobot.HasTrayAndExceedProcessCount(0))
                    || (_buffer.NoWafer(0) && _buffer.HasTrayAndExceedProcessCount(0))
                    || (_buffer.NoWafer(1) && _buffer.HasTrayAndExceedProcessCount(1))
                    || (_buffer.NoWafer(2) && _buffer.HasTrayAndExceedProcessCount(2))))
            {
                if (!_load.IsReadyForPlace(ModuleName.TMRobot, 0))
                {
                    _load.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0);
                    return;
                }
            }
            //第四种情况 ：Load腔没有Wafer且没有Tray
            else if (_load.NoWafer(0) && _load.NoTray(0))
            {
                if (!_load.IsReadyForPlace(ModuleName.WaferRobot, 0))
                {
                    _load.PrepareTransfer(ModuleName.WaferRobot, EnumTransferType.Place, 0);
                    return;
                }
            }
            //第五种情况 ：Load腔有次数用完的盘
            else if (_load.HasTrayAndExceedProcessCount(0))
            {
                if (!_load.IsReadyForPick(ModuleName.TrayRobot, 0))
                {
                    _load.PrepareTransfer(ModuleName.TrayRobot, EnumTransferType.Pick, 0);
                    return;
                }
            }
            else
            {
                bool IsTrayRobotPlace = false;

                foreach (var pm in _lstPms)
                {
                    if (_load.HasWafer(0) && _load.CheckWaferNeedProcess(0, pm.Module) && _load.NoTray(0))
                    {
                        if (CheckLoadWaferNeedCassetteTray(pm.Module))
                        {
                            IsTrayRobotPlace = true;
                            break;
                        }
                    }
                }

                if(IsTrayRobotPlace)
                {
                    //第六种情况 : 还没做工艺等TrayRobot来放
                    if (!_load.IsReadyForPlace(ModuleName.TrayRobot, 0))
                    {
                        _load.PrepareTransfer(ModuleName.TrayRobot, EnumTransferType.Place, 0);
                        return;
                    }
                }
                else
                {
                    //第七种情况 : 准备TMRobot来放Tray
                    if (!_load.IsReadyForPlace(ModuleName.TMRobot, 0))
                    {
                        _load.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0);
                        return;
                    }
                }
               
            }
        }

        private void MonitorUnLoadTask()
        {
            if (!_unload.IsAvailable)
            {
                return;
            }

            if (!_waferRobot.IsAvailable && _waferRobot.Target == ModuleName.UnLoad) // 如果WaferRobot正在操作UnLoad
                return;

            if (!_tmRobot.IsAvailable && _tmRobot.Target == ModuleName.UnLoad) // 如果TMRobot正在操作UnLoad
                return;

            // 重置UnLoad Purge和分离状态
            if (_unload.FirstDetectWaferArrive(0) || _unload.FirstDetectWaferLeave(0))
            {
                _unload.ResetPurgedAndSeparatedStatus();
            }

            // TM把Wafer和Tray放如UnLoad后，先冷却，再分离，然后取Tray前Purge
            if (_unload.HasWafer(0) && _unload.HasTray(0))
            {
                // 取Tray前Purge
                if (!_unload.CheckPurgedBeforeTrayPicking())
                {
                    if (_tmRobot.IsInPumping)
                        return;

                    _unload.PurgeBeforeTrayPicking(
                        _unload.GetWaferPurgeCount(0),
                        _unload.GetWaferPumpDelayTime(0));

                    return;
                }

                // Cooling
                if (!_unload.CheckCoolingCompleted())
                {
                    GetWaferSequenceCoolingTime(_unload.Module, 0, out var coolingTime);
                    _unload.Cooling(true, coolingTime);
                    return;
                }

                // 如果没分离，先分离
                if (!_unload.CheckWaferTraySeparated())
                {
                    _unload.SeparateWaferTray();
                    return;
                }
            }

            if (_unload.HasTray(0)) // UnLoad有Tray，先让TMRobot取Tray
            {
                if (_unload.CheckWaferTraySeparated())
                {
                    // 如果Sequence下一步是UnLoad,并且W&T已冷却和分离
                    if (!_unload.CheckPurgedBeforeTrayPicking())
                    {
                        if(_tmRobot.IsInPumping)
                        {
                            return;
                        }

                        _unload.PurgeBeforeTrayPicking(
                            _unload.GetWaferPurgeCount(0),
                            _unload.GetWaferPumpDelayTime(0));
                        return;
                    }

                    // 如果Tray拿走以前还没Purge，先Purge，在让TMRobot取Tray
                    if (!_unload.CheckPurgedBeforeTrayPicking())
                        return;

                    if (!_unload.IsReadyForPick(ModuleName.TMRobot, 0))
                    {
                        if (_tmRobot.IsInPumping)
                        {
                            return;
                        }

                        // UnLoad中有Tray，则准备好让TMRobot来取
                        _unload.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Pick, 0);
                        return;
                    }
                }
            }
            else if (_unload.HasWafer(0)) // 如果没Tray，下一步让WaferRobot取Wafer
            {
                if (_unload.CheckWaferTraySeparated())
                {
                    // 如果取Wafer前还未Purge，先Purge
                    if (!_unload.CheckPurgedBeforeWaferPicking() &&
                        _unload.CheckWaferNextStepIsThis(ModuleName.UnLoad, 0))
                    {
                        if (_tmRobot.IsInPumping)
                        {
                            return;
                        }

                        var cycle = _unload.GetWaferPurgeCount(0, "PurgeCountBeforeWaferPicking");
                        var pumpDelay = _unload.GetWaferPumpDelayTime(0, "PumpDelayTimeBeforeWaferPicking");
                        _unload.PurgeBeforeWaferPicking(cycle, pumpDelay);
                        _unload.GetWaferInfo(0).NextSequenceStep++;
                        return;
                    }

                    if (_unload.CheckPurgedBeforeWaferPicking()
                        && !_unload.IsReadyForPick(ModuleName.WaferRobot, 0))
                    {
                        if (_tmRobot.IsInPumping)
                        {
                            return;
                        }

                        // 准备好让WaferRobot来取
                        _unload.PrepareTransfer(ModuleName.WaferRobot, EnumTransferType.Pick, 0);
                    }
                }

                return;
            }
            else // 如果UnLoad里啥也没有，则准备好下次TMRobot喂 W&T
            {
                // 如果Wafer取完后还没有Purge，先Purge
                if (!_unload.CheckPurgedAfterWaferPicked())
                {
                    if (_tmRobot.IsInPumping)
                    {
                        return;
                    }

                    var cycle = _unload.GetWaferPurgeCount(0, "PurgeCountAfterWaferPicking");
                    var pumpDelay = _unload.GetWaferPumpDelayTime(0, "PumpDelayTimeAfterWaferPicking");

                    _unload.PurgeAfterWaferPicked(cycle, pumpDelay);
                }

                // 如果Wafer取完后还没有Purge，则终止后去操作。
                if (!_unload.CheckPurgedAfterWaferPicked())
                    return;

                if (!_unload.IsReadyForPlace(ModuleName.TMRobot, 0))
                {
                    if (_tmRobot.IsInPumping)
                    {
                        return;
                    }

                    _unload.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0);
                    return;
                }
            }
        }

        private void MonitorAlignerTask()
        {
            if (!_aligner.IsAvailable)
            {
                return;
            }

            if (_aligner.HasWafer(0) && _aligner.CheckWaferNextStepIsThis(ModuleName.Aligner, 0))
            {
                _aligner.Aligning();
                _aligner.GetWaferInfo(0).NextSequenceStep++;
            }
        }

        private void MonitorPMTask()
        {
            foreach (var pm in _lstPms)
            {
                if (!pm.IsAvailable)
                {
                    continue;
                }
                    
                if (pm.HasWafer(0))
                {
                    //if (pm.CheckNeedRunClean(out bool withWafer, out string recipe) && withWafer
                    //      && GetModule(pm.Module).GetWaferInfo(0).Status == WaferStatus.Dummy
                    //      && GetModule(pm.Module).GetWaferInfo(0).ProcessState == EnumWaferProcessStatus.Wait)
                    //{
                    //    pm.Process(recipe, true, withWafer);
                    //    continue;
                    //}

                    if (GetModule(pm.Module).CheckWaferNeedProcess(0, pm.Module))
                    {
                        var wafer = GetModule(pm.Module).GetWaferInfo(0);
                        if (pm.Process(wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].RecipeName, false, true))
                        {
                            GetModule(pm.Module).GetWaferInfo(0).NextSequenceStep++;
                            continue;
                        }
                    }
                    else
                    {
                        if (!pm.IsReadyForPick(ModuleName.TMRobot, 0))
                        {
                            pm.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Pick, 0);
                        }
                    }
                }
                else
                {
                    //if (GetModule(pm.Module).CheckNeedRunClean(out bool withWafer, out string recipe) && !withWafer)
                    //{
                    //    pm.Process(recipe, true, withWafer);
                    //    continue;
                    //}

                    if (!pm.IsReadyForPlace(ModuleName.TMRobot, 0))
                    {
                        pm.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0);
                    }
                }
            }
        }

        private void MonitorTmRobotTask()
        {
            if (!_tmRobot.IsAvailable)
                return;

            foreach (var pm in _lstPms)
            {
                if (pm.IsWaitTransfer(ModuleName.TMRobot))
                    pm.StopWaitTransfer(ModuleName.TMRobot);
            }

            if (_buffer.IsWaitTransfer(ModuleName.TMRobot))
                _buffer.StopWaitTransfer(ModuleName.TMRobot);

            if (_load.IsWaitTransfer(ModuleName.TMRobot))
                _load.StopWaitTransfer(ModuleName.TMRobot);

            if (_unload.IsWaitTransfer(ModuleName.TMRobot))
                _unload.StopWaitTransfer(ModuleName.TMRobot);


            if (!_tmRobot.IsAvailable)
                return;

            var act = tmRobotActions.Peek();
            act.Invoke();

            tmRobotActions.Enqueue(tmRobotActions.Dequeue());
        }

        private void MonitorWaferRobotTask()
        {
            foreach (var cass in _lstWaferCassettes)
            {
                if (cass.IsWaitTransfer(ModuleName.WaferRobot))
                    cass.StopWaitTransfer(ModuleName.WaferRobot);
            }

            if (_aligner.IsWaitTransfer(ModuleName.WaferRobot))
                _aligner.StopWaitTransfer(ModuleName.WaferRobot);

            if (_load.IsWaitTransfer(ModuleName.WaferRobot))
                _load.StopWaitTransfer(ModuleName.WaferRobot);

            if (_unload.IsWaitTransfer(ModuleName.WaferRobot))
                _unload.StopWaitTransfer(ModuleName.WaferRobot);


            if (!_waferRobot.IsAvailable)
                return;

            var act = waferRobotActions.Peek();
            act.Invoke();

            waferRobotActions.Enqueue(waferRobotActions.Dequeue());
        }

        private void MonitorTrayRobotTask()
        {
            if (_cassetteBL.IsWaitTransfer(ModuleName.TrayRobot))
                _cassetteBL.StopWaitTransfer(ModuleName.TrayRobot);

            if (_load.IsWaitTransfer(ModuleName.TrayRobot))
                _load.StopWaitTransfer(ModuleName.TrayRobot);


            if (!_trayRobot.IsAvailable)
            {
                return;
            }
                
            var act = trayRobotActions.Peek();
            act.Invoke();

            trayRobotActions.Enqueue(trayRobotActions.Dequeue());
        }

        private void MonitorTmRobotLoadPlaceTask()
        {
            if (!_load.IsAvailable || !_tmRobot.IsAvailable)
            {
                return;
            }

            //第二种情况 : Load腔无Tray,TMRobot上有使用次数用完的Tray
            bool canPlace = _tmRobot.HasTrayAndExceedProcessCount(0) && _tmRobot.NoWafer(0) && _load.NoTray(0);
            if (canPlace)
            {
                if (_load.IsReadyForPlace(ModuleName.TMRobot, 0))
                {
                    if(_unload.IsInPumping)
                    {
                        return;
                    }

                    if (_tmRobot.Place(_load.Module, 0, Hand.Blade1))
                    {
                        _load.WaitTransfer(ModuleName.TMRobot);
                        return;
                    }
                }
            }

            if (!_load.IsAvailable || !_tmRobot.IsAvailable)
            {
                return;
            }

            //第一种情况 : Load腔有Wafer需要Process,TMRobot上有使用次数未超的Tray
            canPlace = _tmRobot.HasTrayAndNotExceedProcessCount(0) && _tmRobot.NoWafer(0) && _load.NoTray(0) && _load.HasWafer(0)
                && _load.CheckWaferNeedProcess(0);
            if (canPlace)
            {
                if (_load.CheckWaferNeedProcess(0, _pm1.Module) && _tmRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 1)
                {
                    return;
                }
                    
                if (_load.CheckWaferNeedProcess(0, _pm2.Module) && _tmRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 0)
                {
                    return;
                }
                    
                if (_load.IsReadyForPlace(ModuleName.TMRobot, 0))
                {
                    if (_unload.IsInPumping)
                    {
                        return;
                    }

                    if (_tmRobot.Place(_load.Module, 0, Hand.Blade1))
                    {
                        _load.WaitTransfer(ModuleName.TMRobot);
                        return;
                    }
                }
            }
        }

        private void MonitorTmRobotLoadPickTask()
        {
            if (!_load.IsAvailable || !_tmRobot.IsAvailable)
            {
                return;
            }
                
            //pick TM无Tray,需要Process,下一个位置没有Tray
            bool canPick = _tmRobot.NoTray(0) && _load.CheckWaferNeedProcess(0) && !_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0) 
                && _load.CheckWaferNextStepModuleNoTray(0);
            if (canPick)
            {
                //需要完成组合和Purge
                if (!_load.CheckWaferTrayGrouped())
                {
                    return;
                }

                if (_load.IsReadyForPick(ModuleName.TMRobot, 0))
                {
                    if (_unload.IsInPumping)
                    {
                        return;
                    }

                    if (_tmRobot.Pick(_load.Module, 0, Hand.Blade1))
                    {
                        _load.WaitTransfer(ModuleName.TMRobot);
                        return;
                    }
                }
            }

        }

        private void MonitorTmRobotUnLoadPlaceTask()
        {
            if (!_unload.IsAvailable || !_tmRobot.IsAvailable)
            {
                return;
            }

            //place Robot有Wafer,UnLoad无Tray无Wafer
            bool canPlaceUnLoad = _tmRobot.HasWafer(0)
                && _tmRobot.HasTray(0)
                && _unload.NoTray(0)
                && _unload.NoWafer(0)
                && (_aligner.CheckWaferNextStepIsThis(ModuleName.TMRobot, 0) || _unload.CheckWaferNextStepIsThis(ModuleName.TMRobot, 0)
                || _tmRobot.CheckWaferSequenceStepDone(0));
                //&& _tmRobot.GetWaferInfo(0).ProcessState == EnumWaferProcessStatus.Completed;
            if (canPlaceUnLoad)
            {
                if (_unload.IsReadyForPlace(ModuleName.TMRobot, 0))
                {
                    if (_tmRobot.Place(_unload.Module, 0, Hand.Blade1))
                    {
                        _unload.WaitTransfer(ModuleName.TMRobot);
                        return;
                    }
                }
            }

        }

        private void MonitorTmRobotUnLoadPickTask()
        {
            if (!_unload.IsAvailable || !_tmRobot.IsAvailable)
            {
                return;
            }
               
            //pick UnLoad有Tray,TM无Tray,LoadLock没有Tray,UnLoad分离完成
            bool canPickUnLoad = _tmRobot.NoTray(0)
                && _tmRobot.NoWafer(0)
                && _unload.HasTray(0)
                && _load.NoTray(0);
            //&& _unload.GetWaferInfo(0).ProcessState == EnumWaferProcessStatus.Completed;
            if (canPickUnLoad)
            {
                //需要UnLoad把石墨盘和Wafer分离完成
                if (!_unload.CheckWaferTraySeparated())
                {
                    return;
                }

                if (_unload.IsReadyForPick(ModuleName.TMRobot, 0))
                {
                    if (_tmRobot.Pick(_unload.Module, 0, Hand.Blade1))
                    {
                        _unload.WaitTransfer(ModuleName.TMRobot);
                        return;
                    }
                }
            }
        }

        private void MonitorTmRobotBufferPlaceTask()
        {
            if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
            {
                return;
            }

            //place Buffer位置没有Tray,Robot有Wafer,下一步骤是Buffer
            bool canPalce = _tmRobot.HasWafer(0) && _tmRobot.HasTray(0) && _buffer.CheckWaferNextStepIsThis(ModuleName.TMRobot, 0);
            if (canPalce)
            {
                SlotItem bufferEmptySlot = null;

                if ((_tmRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 0)
                    && _tmRobot.CheckWaferNeedProcess(0, _pm1.Module)
                    && _buffer.NoTray(0)
                    && _buffer.NoWafer(0))
                {
                    bufferEmptySlot = new SlotItem(ModuleName.Buffer, 0);
                }
                else if ((_tmRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 1)
                         && _tmRobot.CheckWaferNeedProcess(0, _pm2.Module)
                         && _buffer.NoTray(1)
                         && _buffer.NoWafer(1))
                {
                    bufferEmptySlot = new SlotItem(ModuleName.Buffer, 1);
                }

                if (bufferEmptySlot != null)
                {
                    if (_buffer.IsReadyForPlace(ModuleName.TMRobot, bufferEmptySlot.Slot))
                    {
                        if (_tmRobot.Place(_buffer.Module, bufferEmptySlot.Slot, Hand.Blade1))
                        {
                            _buffer.WaitTransfer(ModuleName.TMRobot);
                            return;
                        }
                    }
                }
            }

            if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
            {
                return;
            }

            //place 完成工艺后的Tray放入Buffer中
            canPalce = _tmRobot.HasTray(0) && _tmRobot.NoWafer(0);
            if (canPalce)
            {
                if (_tmRobot.HasTrayAndExceedProcessCount(0) && _load.NoTray(0))
                    return;

                SlotItem bufferEmptySlot = null;

                if (_tmRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 0 && _buffer.NoTray(0) && _buffer.NoWafer(0) 
                    && !_load.CheckWaferNeedProcess(0, _pm1.Module)
                    && !_waferRobot.CheckWaferNeedProcess(0, _pm1.Module)
                    && !_aligner.CheckWaferNeedProcess(0, _pm1.Module))
                {
                    bufferEmptySlot = new SlotItem(ModuleName.Buffer, 0);
                }
                else if (_tmRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 1 && _buffer.NoTray(1) && _buffer.NoWafer(1) 
                    && !_load.CheckWaferNeedProcess(0, _pm2.Module)
                    && !_waferRobot.CheckWaferNeedProcess(0, _pm2.Module)
                    && !_aligner.CheckWaferNeedProcess(0, _pm2.Module))
                {
                    bufferEmptySlot = new SlotItem(ModuleName.Buffer, 1);
                }

                if (bufferEmptySlot != null)
                {
                    if (_buffer.IsReadyForPlace(ModuleName.TMRobot, bufferEmptySlot.Slot))
                    {
                        if (_tmRobot.Place(_buffer.Module, bufferEmptySlot.Slot, Hand.Blade1))
                        {
                            _buffer.WaitTransfer(ModuleName.TMRobot);
                            return;
                        }
                    }
                }
            }

            if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
            {
                return;
            }

            //place load有wafer有tray要process,需放到buffer3进行躲避
            canPalce = _tmRobot.HasTray(0) && _tmRobot.NoWafer(0) && _buffer.NoTray(2) && _buffer.NoWafer(2);
            if (canPalce)
            {
                if (_tmRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 0
                    && ((_load.HasTray(0) && _load.HasWafer(0) && _load.CheckWaferNeedProcess(0, _pm1.Module)) 
                    || (_buffer.HasTray(0) && _buffer.HasWafer(0))
                    ))
                {
                    if (_buffer.IsReadyForPlace(ModuleName.TMRobot, 2))
                    {
                        if (_tmRobot.Place(_buffer.Module, 2, Hand.Blade1))
                        {
                            _buffer.WaitTransfer(ModuleName.TMRobot);
                            return;
                        }
                    }
                }
                else if (_tmRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 1
                         && ((_load.HasTray(0) && _load.HasWafer(0) && _load.CheckWaferNeedProcess(0, _pm2.Module))
                         || (_buffer.HasTray(1) && _buffer.HasWafer(1))
                         ))
                {
                    if (_buffer.IsReadyForPlace(ModuleName.TMRobot, 2))
                    {
                        if (_tmRobot.Place(_buffer.Module, 2, Hand.Blade1))
                        {
                            _buffer.WaitTransfer(ModuleName.TMRobot);
                            return;
                        }
                    }
                }
            }
        }

        private void MonitorTmRobotBufferPickTask()
        {
            if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
            {
                return;
            }

            MonitorTmRobotBuffer1PickTask();
            MonitorTmRobotBuffer2PickTask();
            MonitorTmRobotBuffer3PickTask();
        }

        private void MonitorTmRobotBuffer1PickTask()
        {
            if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
            {
                return;
            }

            //第一种情况:Buffer1的Wafer需要去PM1腔工艺
            bool canPick = _tmRobot.NoTray(0) && _buffer.HasTray(0) && _buffer.HasWafer(0) && !_buffer.CheckWaferNextStepIsThis(ModuleName.Buffer, 0);
            if (canPick)
            {
                if (_pm1.CheckWaferNextStepIsThis(ModuleName.Buffer, 0))
                {
                    if (!_pm1.IsAvailable || _pm1.HasTray(0) || _pm1.HasWafer(0) || !_pm1.IsReadyForPlace(ModuleName.TMRobot, 0) ||
                        !_pm1.CheckBufferToPMTemp())
                        return;

                    if (_buffer.CheckWaferNextStepModuleNoTray(0))
                    {
                        if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                        {
                            if (_tmRobot.Pick(_buffer.Module, 0, Hand.Blade1))
                            {
                                _buffer.WaitTransfer(ModuleName.TMRobot);
                                return;
                            }
                        }
                    }

                }
            }

            if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
            {
                return;
            }

            //第二种情况：工艺开始时,如果Buffer中有Tray时,优先取Buffer中的Tray,而不是Cassette中Tray
            canPick = _tmRobot.NoTray(0)
                      &&  _load.IsAvailable
                      && _load.IsReadyForPlace(ModuleName.TMRobot, 0)
                      && _load.NoTray(0)
                      && _load.HasWafer(0)
                      && _load.CheckWaferNeedProcess(0,ModuleName.PM1);
            if (canPick)
            {
                //取Tray前判断Unload是否IsInPumping,否则就会发生TMRobot有Tray
                //在等Unload Pumping完成的情况
                if(_unload.IsInPumping)
                {
                    return;
                }

                if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                {
                    if (_tmRobot.Pick(_buffer.Module, 0, Hand.Blade1))
                    {
                        _buffer.WaitTransfer(ModuleName.TMRobot);
                        return;
                    }
                }
            }

        }

        private void MonitorTmRobotBuffer2PickTask()
        {
            if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
            {
                return;
            }

            //第一种情况:Buffer2的Wafer需要去PM2腔工艺
            bool canPick = _tmRobot.NoTray(0) && _buffer.HasTray(1) && _buffer.HasWafer(1) && !_buffer.CheckWaferNextStepIsThis(ModuleName.Buffer, 1);
            if (canPick)
            {
                if (_pm2.CheckWaferNextStepIsThis(ModuleName.Buffer, 1))
                {
                    if (!_pm2.IsAvailable || _pm2.HasTray(0) || _pm2.HasWafer(0) || !_pm2.IsReadyForPlace(ModuleName.TMRobot, 0) ||
                        !_pm2.CheckBufferToPMTemp())
                        return;

                    if (_buffer.CheckWaferNextStepModuleNoTray(1))
                    {
                        if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                        {
                            if (_tmRobot.Pick(_buffer.Module, 1, Hand.Blade1))
                            {
                                _buffer.WaitTransfer(ModuleName.TMRobot);
                                return;
                            }
                        }
                    }

                }
            }

            if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
            {
                return;
            }

            //第二种情况：工艺开始时,如果Buffer中有Tray时,优先取Buffer中的Tray,而不是Cassette中Tray
            canPick = _tmRobot.NoTray(0)
                      && _buffer.HasTray(1) 
                      && _buffer.NoWafer(1)
                      && _load.IsAvailable
                      && _load.IsReadyForPlace(ModuleName.TMRobot, 0)
                      && _load.NoTray(0)
                      && _load.HasWafer(0)
                      && _load.CheckWaferNeedProcess(0, ModuleName.PM2);
            if (canPick)
            {
                //取Tray前判断Unload是否IsInPumping,否则就会发生TMRobot有Tray
                //在等Unload Pumping完成的情况
                if (_unload.IsInPumping)
                {
                    return;
                }

                if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                {
                    if (_tmRobot.Pick(_buffer.Module, 1, Hand.Blade1))
                    {
                        _buffer.WaitTransfer(ModuleName.TMRobot);
                        return;
                    }
                }
            }
        }

        private void MonitorTmRobotBuffer3PickTask()
        {
            if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
            {
                return;
            }

            bool canPick = _tmRobot.NoTray(0) && _buffer.HasTray(2);
            if (canPick)
            {
                if (_buffer.GetWaferInfo(2).TrayOriginSlot % 2 == 0)
                {
                    //第一种情况 : buffer0位置没有tray，load有tray但不是去PM1的
                    if (_buffer.NoTray(0) && _load.HasTray(0) && !_load.CheckWaferNeedProcess(0, _pm1.Module))
                    {
                        if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                        {
                            if (_tmRobot.Pick(_buffer.Module, 2, Hand.Blade1))
                            {
                                _buffer.WaitTransfer(ModuleName.TMRobot);
                                return;
                            }
                        }
                    }
                    //第二种情况 : buffer0位置没有tray,load也没有tray,并且没有wafer,或者有wafer但是去PM1的
                    else if (_buffer.NoTray(0) && _load.NoTray(0) && (_load.CheckWaferNeedProcess(0, _pm1.Module) || _load.NoWafer(0)))
                    {
                        if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                        {
                            if (_tmRobot.Pick(_buffer.Module, 2, Hand.Blade1))
                            {
                                _buffer.WaitTransfer(ModuleName.TMRobot);
                                return;
                            }
                        }
                    }
                    //第三种情况 :buffer0位置有tray，但是pm1没有tray
                    else if (_buffer.HasTray(0) && !_buffer.CheckWaferNeedProcess(0, _pm1.Module) && _pm1.NoTray(0) && _pm1.NoWafer(0))
                    {
                        if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                        {
                            if (_tmRobot.Pick(_buffer.Module, 2, Hand.Blade1))
                            {
                                _buffer.WaitTransfer(ModuleName.TMRobot);
                                return;
                            }
                        }
                    } 
                }

                if (_buffer.GetWaferInfo(2).TrayOriginSlot % 2 == 1)
                {
                    //第一种情况 : buffer1位置没有tray，load有tray但不是去PM2的
                    if (_buffer.NoTray(1) && _load.HasTray(0) && !_load.CheckWaferNeedProcess(0, _pm2.Module))
                    {
                        if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                        {
                            if (_tmRobot.Pick(_buffer.Module, 2, Hand.Blade1))
                            {
                                _buffer.WaitTransfer(ModuleName.TMRobot);
                                return;
                            }
                        }
                    }
                    //第二种情况 : buffer1位置没有tray，load也没有tray，没有wafer，或者有wafer但是去PM2的
                    else if (_buffer.NoTray(1) && _load.NoTray(0) && (_load.CheckWaferNeedProcess(0, _pm2.Module) || _load.NoWafer(0)))
                    {
                        if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                        {
                            if (_tmRobot.Pick(_buffer.Module, 2, Hand.Blade1))
                            {
                                _buffer.WaitTransfer(ModuleName.TMRobot);
                                return;
                            }
                        }
                    }
                    //第三种情况 : buffer1位置有tray，但是pm2没有tray
                    else if (_buffer.HasTray(1) && !_buffer.CheckWaferNeedProcess(1, _pm2.Module) && _pm2.NoTray(0) && _pm2.NoWafer(0))
                    {
                        if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
                        {
                            if (_tmRobot.Pick(_buffer.Module, 2, Hand.Blade1))
                            {
                                _buffer.WaitTransfer(ModuleName.TMRobot);
                                return;
                            }
                        }
                    }
                }
            }
        }

        private void MonitorTmRobotPMPlaceTask()
        {
            if (!_tmRobot.IsAvailable)
            {
                return;
            }

            //第二种情况 : TMRobot有Tray，没有Wafer,对应Buffer有Tray,需放PM存盘
            bool canPlaceNoProcess = _tmRobot.NoWafer(0) && _tmRobot.HasTrayAndNotExceedProcessCount(0);
            if (canPlaceNoProcess)
            {
                foreach (var pm in _lstPms)
                {
                    int bufferIndex = 0;
                    if (pm == _pm2)
                    {
                        bufferIndex = 1;
                    }

                    if (_tmRobot.GetWaferInfo(0).TrayOriginSlot % 2 == bufferIndex
                         && _buffer.HasTray(bufferIndex)
                         && _buffer.NoWafer(bufferIndex)
                         && !_buffer.CheckWaferNeedProcess(bufferIndex, pm.Module)
                         && pm.IsAvailable
                         && pm.NoTray(0)
                         && pm.NoWafer(0)
                         && pm.CheckTempBelow900()
                         && pm.IsReadyForPlace(ModuleName.TMRobot, 0))
                    {
                        if (_tmRobot.Place(pm.Module, 0, Hand.Blade1))
                        {
                            pm.WaitTransfer(ModuleName.TMRobot);
                            return;
                        }
                    }
                }
            }



            if (!_tmRobot.IsAvailable)
            {
                return;
            }

            //第一种情况 : TMRobot有Wafer并且需要Process
            bool canPlace = _tmRobot.HasWafer(0) && _tmRobot.HasTray(0) && _tmRobot.CheckWaferNeedProcess(0);
            if (canPlace)
            {
                foreach (var pm in _lstPms)
                {
                    if (!pm.IsAvailable
                        || !GetModule(pm.Module).NoWafer(0)
                        || !pm.IsReadyForPlace(ModuleName.TMRobot, 0)
                        || !pm.CheckTempBelow900())
                        continue;

                    bool blade0Place = _tmRobot.HasWafer(0) && _tmRobot.CheckWaferNeedProcess(0, pm.Module) && pm.CheckWaferNextStepIsThis(ModuleName.TMRobot, 0);
                    if (blade0Place)
                    {
                        Hand placeBlade = Hand.Blade1;

                        if (_tmRobot.Place(pm.Module, 0, placeBlade))
                        {
                            pm.WaitTransfer(ModuleName.TMRobot);
                            return;
                        }
                    }
                }
            }

        }

        private void MonitorTmRobotPMPickTask()
        {
            if (!_tmRobot.IsAvailable)
            {
                return;
            }
                
            //第一种情况 : Wafer工艺结束后需取出
            if (_tmRobot.NoWafer(0) && _tmRobot.NoTray(0))
            {
                //Wafer取出后只能去Unload冷却，Buffer3有其他用途,冷却取消
                if (_unload.HasWafer(0) || _unload.HasTray(0) || !_unload.IsReadyForPlace(ModuleName.TMRobot, 0) || !_unload.IsAvailable)
                {
                    return;
                }

                Hand pickBlade = Hand.Blade1;

                ModuleName pickPm = ModuleName.System;

                bool canPickPM1 = false;
                bool canPickPM2 = false;

                if(_pm1.IsAvailable && _pm1.HasWafer(0) && _pm1.HasTray(0) && !_pm1.CheckWaferNeedProcess(0)
                    && _pm1.CheckPMToTMRobotTemp())
                {
                    canPickPM1 = true;
                }

                if (_pm2.IsAvailable && _pm2.HasWafer(0) && _pm2.HasTray(0) && !_pm2.CheckWaferNeedProcess(0)
                   && _pm2.CheckPMToTMRobotTemp())
                {
                    canPickPM2 = true;
                }

                if (canPickPM1 && !canPickPM2)
                {
                    pickPm = ModuleName.PM1;
                }
                else if (!canPickPM1 && canPickPM2)
                {
                    pickPm = ModuleName.PM2;
                }
                else if (canPickPM1 && canPickPM2)
                {
                    string pm1ProcessTime = SC.GetStringValue("PM.PM1.PostProcessEndTime");
                    string pm2ProcessTime = SC.GetStringValue("PM.PM2.PostProcessEndTime");

                    if (DateTime.TryParse(pm1ProcessTime, out DateTime dtPM1) 
                        && DateTime.TryParse(pm2ProcessTime, out DateTime dtPM2))
                    {
                        pickPm = dtPM1.CompareTo(dtPM2) <= 0 ? ModuleName.PM1 : ModuleName.PM2;
                    }
                    else
                    {
                        pickPm = ModuleName.PM1;
                    }
                }

                if (pickPm != ModuleName.System)
                {
                    SchedulerModule pm = GetModule(pickPm.ToString());
                    if (pm.IsReadyForPick(ModuleName.TMRobot, 0))
                    {
                        if (_tmRobot.Pick(pm.Module, 0, pickBlade))
                        {
                            pm.WaitTransfer(ModuleName.TMRobot);

                            return;
                        }
                    }
                }
            }

            if (!_tmRobot.IsAvailable)
            {
                return;
            }

            //第二种情况 : PM腔有Tray没Wafer，需取出到Buffer3
            if (_tmRobot.NoWafer(0) && _tmRobot.NoTray(0))
            {
                Hand pickBlade = Hand.Blade1;

                foreach (var pm in _lstPms)
                {
                    //增加温度低于900才能Pick的限制
                    if (!pm.IsAvailable
                        || pm.HasWafer(0)
                        || pm.NoTray(0)
                        || GetModule(pm.Module).CheckWaferNeedProcess(0, pm.Module)
                        || !pm.CheckTempBelow900()
                        || _buffer.HasTray(2)
                        || _buffer.HasWafer(2))
                        continue;

                    //如果对应的Buffer1/2有没超次数的Tray和无Wafer,则不取
                    int bufferIndex = 0;
                    if (pm == _pm2)
                    {
                        bufferIndex = 1;
                    }
                    if (_buffer.NoWafer(bufferIndex) && _buffer.HasTrayAndNotExceedProcessCount(bufferIndex))
                    {
                        return;
                    }

                    if (pm.IsReadyForPick(ModuleName.TMRobot, 0))
                    {
                        if (_tmRobot.Pick(pm.Module, 0, pickBlade))
                        {
                            pm.WaitTransfer(ModuleName.TMRobot);

                            return;
                        }
                    }

                }
            }

        }

        private void MonitorWaferRobotLoadPlaceTask()
        {
            if (!_waferRobot.IsAvailable || !_load.IsAvailable)
            {
                return;
            }

            //place Load没有Wafer,没有Tray,Robot有Wafer,步骤没有完成,
            //下一步不是Aligner (其它:SlitValve都关了,大气)
            bool canPlace = _waferRobot.HasWafer(0)
                         && _load.NoWafer(0)
                         && _load.NoTray(0)
                         && _waferRobot.GetWaferInfo(0).Status != WaferStatus.Dummy
                         && !_aligner.CheckWaferNextStepIsThis(ModuleName.WaferRobot, 0)
                         && _waferRobot.CheckWaferNeedProcess(0);
            if (canPlace)
            {
                if (_load.IsReadyForPlace(ModuleName.WaferRobot, 0))
                {
                    if (_waferRobot.Place(_load.Module, 0, Hand.Blade1))
                    {
                        _load.WaitTransfer(ModuleName.WaferRobot);
                        return;
                    }
                }
            }
        }

        private void MonitorWaferRobotUnLoadPickTask()
        {
            if (!_waferRobot.IsAvailable || !_unload.IsAvailable)
            {
                return;
            }

            //pick UnLoad有Wafer没有Tray,Robot没有Wafer,步骤都完成了或者下一步的模块没有片子  (其它:UnLoad 夹爪夹住,顶针下降,SlitValve都关了,大气)
            bool canPick = _waferRobot.NoWafer(0)
                && _unload.HasWafer(0)
                && _unload.NoTray(0)
                && (_unload.CheckWaferNextStepModuleNoWafer(0) || _unload.CheckWaferSequenceStepDone(0))
                && _unload.GetWaferInfo(0).Status != WaferStatus.Dummy;
            if (canPick)
            {
                //下一步是Aligner并且Aligner上不允许有片子
                if (_aligner.CheckWaferNextStepIsThis(ModuleName.UnLoad, 0))
                {
                    if (_aligner.HasWafer(0))
                    {
                        return;
                    }
                }

                if (_unload.IsReadyForPick(ModuleName.WaferRobot, 0))
                {
                    if (_waferRobot.Pick(_unload.Module, 0, Hand.Blade1))
                    {
                        _unload.WaitTransfer(ModuleName.WaferRobot);
                        return;
                    }
                }
            }
        }

        private void MonitorWaferRobotAlignerPlaceTask()
        {
            if (!_waferRobot.IsAvailable || !_aligner.IsAvailable)
            {
                return;
            }

            //place 任务还没完成,下一步是Aligner,Robot有片子,Aligner没片子
            bool canPlaceAligner = _aligner.NoWafer(0)
                && _waferRobot.HasWafer(0)
                && (_aligner.CheckWaferNextStepIsThis(ModuleName.WaferRobot, 0) || _waferRobot.CheckWaferSequenceStepDone(0))
                && _waferRobot.GetWaferInfo(0).Status != WaferStatus.Dummy;
            if (canPlaceAligner)
            {
                if (_aligner.IsReadyForPlace(ModuleName.WaferRobot, 0))
                {
                    if (_waferRobot.Place(_aligner.Module, 0, Hand.Blade1))
                    {
                        _aligner.WaitTransfer(ModuleName.WaferRobot);
                        return;
                    }
                }
            }
        }

        private void MonitorWaferRobotAlignerPickTask()
        {
            if (!_waferRobot.IsAvailable || !_aligner.IsAvailable)
            {
                return;
            }

            //pick Aligner wafer to Load
            bool canPickAligner = _aligner.HasWafer(0)
                && _waferRobot.NoWafer(0)
                && _aligner.GetWaferInfo(0).Status != WaferStatus.Dummy
                && !_aligner.CheckWaferNextStepIsThis(ModuleName.Aligner, 0)
                && _load.CheckWaferNextStepIsThis(ModuleName.Aligner, 0)
                && _load.IsReadyForPlace(ModuleName.WaferRobot, 0)
                && _load.IsAvailable;
            if (canPickAligner)
            {
                //需要运行工艺,Load不能有片子，Load不能有Tray
                if (_aligner.CheckWaferNeedProcess(0))
                {
                    if (_load.HasWafer(0)
                        || _load.HasTray(0)
                        || _tmRobot.HasTrayAndExceedProcessCount(0)
                        || _buffer.HasTrayAndExceedProcessCount(0)
                        || _buffer.HasTrayAndExceedProcessCount(1)
                        || _buffer.HasTrayAndExceedProcessCount(2))
                    {
                        return;
                    }
                }

                if (_aligner.IsReadyForPick(ModuleName.WaferRobot, 0))
                {
                    if (_waferRobot.Pick(_aligner.Module, 0, Hand.Blade1))
                    {
                        _aligner.WaitTransfer(ModuleName.WaferRobot);
                        return;
                    }
                }
            }

            //pick Aligner wafer to Cassette
            bool canPick = _aligner.HasWafer(0)
                && _waferRobot.NoWafer(0)
                && _aligner.GetWaferInfo(0).Status != WaferStatus.Dummy
                && !_aligner.CheckWaferNextStepIsThis(ModuleName.Aligner, 0)
                && _aligner.CheckWaferSequenceStepDone(0);
            if (canPick)
            {
                if (_aligner.IsReadyForPick(ModuleName.WaferRobot, 0))
                {
                    if (_waferRobot.Pick(_aligner.Module, 0, Hand.Blade1))
                    {
                        _aligner.WaitTransfer(ModuleName.WaferRobot);
                        return;
                    }
                }
            }
        }

        private void MonitorWaferRobotCassettePlaceTask()
        {
            if (!_waferRobot.IsAvailable)
            {
                return;
            }

            //place 任务完成了,Robot有片子,Cassette没有片子
            bool canPlaceCassette = _waferRobot.HasWafer(0)
                && _waferRobot.GetWaferInfo(0).Status != WaferStatus.Dummy
                && _waferRobot.CheckWaferSequenceStepDone(0);
            if (canPlaceCassette)
            {
                var wafer = _waferRobot.GetWaferInfo(0);
                if (GetWaferReturnedCassette((ModuleName)wafer.OriginStation) == ModuleName.CassAL)
                {
                    if (_cassetteAL.IsAvailable && _cassetteAL.IsReadyForPlace(ModuleName.WaferRobot, wafer.OriginSlot))
                    {
                        if (_waferRobot.Place(_cassetteAL.Module, wafer.OriginSlot, Hand.Blade1))
                        {
                            _cassetteAL.WaitTransfer(ModuleName.WaferRobot);
                            return;
                        }
                    }
                }
                else if (GetWaferReturnedCassette((ModuleName)wafer.OriginStation) == ModuleName.CassAR)
                {
                    if (_cassetteAR.IsAvailable && _cassetteAR.IsReadyForPlace(ModuleName.WaferRobot, wafer.OriginSlot))
                    {
                        if (_waferRobot.Place(_cassetteAR.Module, wafer.OriginSlot, Hand.Blade1))
                        {
                            _cassetteAR.WaitTransfer(ModuleName.WaferRobot);
                            return;
                        }
                    }
                }
            }


        }

        private void MonitorWaferRobotCassettePickTask()
        {
            if (!_waferRobot.IsAvailable)
            {
                return;
            }
               
            //pick Robot没有片子,下一步的模块没有片子
            bool canPick = _waferRobot.NoWafer(0);
            SlotItem position = GetWaferInJobQueue();
            if (canPick && position != null)
            {
                //下一步是Aligner并且Aligner上不允许有片子
                if (_aligner.CheckWaferNextStepIsThis(position.Module, position.Slot) && _aligner.HasWafer(0))
                {
                    return;
                }

                //如果Load腔有Wafer或者Load/TMRobot/Buffer有已用完次数的Tray,
                //则WaferRobot不能从Cassette取Wafer
                else if ( _load.HasWafer(0)
                         || !_load.IsAvailable
                         || !_load.IsReadyForPlace(ModuleName.WaferRobot,0)
                         || _load.HasTrayAndExceedProcessCount(0)
                         || _tmRobot.HasTrayAndExceedProcessCount(0))
                {
                    return;
                }

                //超过可以运行的石墨盘最大数
                if (GetRunWaferCount() >= _maxTrayCount)
                {
                    return;
                }

                //每个腔超过2个Wafer则不在取Wafer
                if(CheckWaferNeedProcess(position.Module,position.Slot,_pm1.Module))
                {
                    if (GetRunWaferCount(_pm1.Module) >= 2)
                    {
                        return;
                    }
                }

                if(CheckWaferNeedProcess(position.Module, position.Slot, _pm2.Module))
                {
                    if (GetRunWaferCount(_pm2.Module) >= 2)
                    {
                        return;
                    }
                }

                if (position.Module == ModuleName.CassAL)
                {
                    if (_cassetteAL.IsAvailable && _cassetteAL.IsReadyForPick(ModuleName.WaferRobot, 0))
                    {
                        if (_waferRobot.Pick(position.Module, position.Slot, Hand.Blade1))
                        {
                            _cassetteAL.WaitTransfer(ModuleName.WaferRobot);
                            return;
                        }
                    }
                }
                else if (position.Module == ModuleName.CassAR)
                {
                    if (_cassetteAR.IsAvailable && _cassetteAR.IsReadyForPick(ModuleName.WaferRobot, 0))
                    {
                        if (_waferRobot.Pick(position.Module, position.Slot, Hand.Blade1))
                        {
                            _cassetteAR.WaitTransfer(ModuleName.WaferRobot);
                            return;
                        }
                    }
                }

            }
        }

        private void MonitorTrayRobotLoadPlaceTask()
        {
            if (!_trayRobot.IsAvailable || !_load.IsAvailable)
            {
                return;
            }

            if (GetCurrentTrayCount() >= _maxTrayCount)
            {
                return;
            }

            //place Load没有Tray,有Wafer未完成
            bool canPlace = _load.NoTray(0)
                && _trayRobot.HasTrayAndNotExceedProcessCount(0)
                && _load.HasWafer(0)
                && _load.CheckWaferNeedProcess(0);
            if (canPlace)
            {
                if ( _trayRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 0 && _load.CheckWaferNeedProcess(0,_pm2.Module))
                {
                    return;
                }

                if ( _trayRobot.GetWaferInfo(0).TrayOriginSlot % 2 == 1 && _load.CheckWaferNeedProcess(0,_pm1.Module))
                {
                    return;
                }

                //TMRobot有Tray无Wafer也不能放
                if (_tmRobot.NoWafer(0) && _tmRobot.HasTray(0))
                {
                    return;
                }

                if (_load.IsReadyForPlace(ModuleName.TrayRobot, 0))
                {
                    if (_trayRobot.Place(_load.Module, 0, Hand.Blade1))
                    {
                        _load.WaitTransfer(ModuleName.TrayRobot);
                        return;
                    }
                }
            }

        }

        private void MonitorTrayRobotLoadPickTask()
        {
            if (!_trayRobot.IsAvailable || !_load.IsAvailable)
            {
                return;
            }

            //pick Load有Tray,且Tray次数已使用完
            bool canPick = _load.HasTrayAndExceedProcessCount(0);
            if (canPick)
            {
                SlotItem emptyTraySlot = GetTrayOrignSlot(ModuleName.LoadLock, 0);// GetEmptyTraySlot(13); //先取Wafer再取石墨盘
                if (emptyTraySlot != null && _load.HasTrayAndExceedProcessCount(0))
                {
                    if (_load.IsReadyForPick(ModuleName.TrayRobot, 0))
                    {
                        if (_trayRobot.Pick(_load.Module, 0, Hand.Blade1))
                        {
                            _load.WaitTransfer(ModuleName.TrayRobot);
                            return;
                        }
                    }
                }
            }

        }

        private void MonitorTrayRobotCassettePlaceTask()
        {
            if (!_trayRobot.IsAvailable || !_cassetteBL.IsAvailable)
            {
                return;
            }

            //place Robot有盘 其它逻辑跟Load的Pick一致
            bool canPlace = _trayRobot.HasTrayAndExceedProcessCount(0)
                            || _load.HasTray(0)
                            || (GetWaferInJobQueue() == null && _aligner.NoWafer(0) && _waferRobot.NoWafer(0) && _load.NoWafer(0));
            if (canPlace)
            {
                SlotItem slotItem = GetTrayOrignSlot(ModuleName.TrayRobot, 0); 
                if (slotItem != null)
                {
                    if (_cassetteBL.IsReadyForPlace(ModuleName.TrayRobot, slotItem.Slot))
                    {
                        if (_trayRobot.Place(slotItem.Module, slotItem.Slot, Hand.Blade1))
                        {
                            _cassetteBL.WaitTransfer(ModuleName.TrayRobot);
                            return;
                        }
                    }
                }
            }

        }

        private void MonitorTrayRobotCassettePickTask()
        {
            if (!_trayRobot.IsAvailable || !_cassetteBL.IsAvailable)
            {
                return;
            }

            //各个腔体运行的石墨盘总数小于设定值
            if (GetCurrentTrayCount() >= _maxTrayCount)
            {
                return;
            }

            foreach (var pm in _lstPms)
            {
                if(_load.HasWafer(0) && _load.CheckWaferNeedProcess(0, pm.Module) && _load.NoTray(0) && _trayRobot.NoTray(0))
                {
                    if(CheckLoadWaferNeedCassetteTray(pm.Module))
                    {
                        int usedForWhichPM = 0;
                        if(pm == _pm2)
                        {
                            usedForWhichPM = 1;
                        }

                        SlotItem slotItem = GetTraySlot(8, usedForWhichPM);
                        if (slotItem != null)
                        {
                            if (_cassetteBL.IsReadyForPick(ModuleName.TrayRobot, slotItem.Slot))
                            {
                                if (_trayRobot.Pick(slotItem.Module, slotItem.Slot, Hand.Blade1))
                                {
                                    _cassetteBL.WaitTransfer(ModuleName.TrayRobot);
                                    return;
                                }
                            }
                        }


                    }
                }

            }

        }

        private bool CheckLoadWaferNeedCassetteTray(ModuleName pm)
        {
            if (pm == ModuleName.PM1)
            {
                if ((_buffer.HasTray(0) && _buffer.NoWafer(0))
                    || (_pm1.HasTray(0) && _pm1.NoWafer(0)))
                {
                    return false;
                }
            }

            if (pm == ModuleName.PM2)
            {
                if ((_buffer.HasTray(1) && _buffer.NoWafer(1))
                    || (_pm2.HasTray(0) && _pm2.NoWafer(0)))
                {
                    return false;
                }
            }

            List<Tuple<ModuleName, int>> modules = new List<Tuple<ModuleName, int>>()
            {
                new Tuple<ModuleName, int>(ModuleName.Buffer,0),
                new Tuple<ModuleName, int>(ModuleName.Buffer,1),
                new Tuple<ModuleName, int>(ModuleName.Buffer,2),
                new Tuple<ModuleName, int>(ModuleName.TMRobot,0),
                new Tuple<ModuleName, int>(ModuleName.PM1,0),
                new Tuple<ModuleName, int>(ModuleName.PM2,0),
            };

            foreach (var module in modules)
            {
                if (CheckHasTrayAndNoWaferByModule(module.Item1, module.Item2, pm))
                {
                    return false;
                }
            }

            return true;
        }

        /// <summary>
        /// 获得Buffer的方式和数值
        /// </summary>
        /// <param name="module"></param>
        /// <param name="slot"></param>
        /// <param name="coolingType"></param>
        /// <param name="setValue"></param>
        /// <returns></returns>
        private bool GetWaferSequenceNextValue(ModuleName module, int slot, string nodeName, out string nodeValue)
        {
            nodeValue = "";

            if (!GetModule(module).HasWafer(slot))
                return false;

            var wafer = GetModule(module).GetWaferInfo(slot);

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(module))
                return false;

            nodeValue = wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter[nodeName].ToString();
            if (String.IsNullOrEmpty(nodeValue))
            {
                return false;
            }
            return true;
        }

        private bool GetWaferSequenceCurrentValue(ModuleName module, int slot, string nodeName, out string nodeValue)
        {
            nodeValue = "";

            if (!GetModule(module).HasWafer(slot))
                return false;

            var wafer = GetModule(module).GetWaferInfo(slot);

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep - 1].StepModules.Contains(module))
                return false;

            nodeValue = wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep - 1].StepParameter[nodeName].ToString();
            if (String.IsNullOrEmpty(nodeValue))
            {
                return false;
            }
            return true;
        }

        private bool GetWaferSequenceCoolingTime(ModuleName module, int slot, out int coolingTime)
        {
            coolingTime = 0;

            if (!WaferManager.Instance.CheckHasWafer(module, slot))
                return false;

            var wafer = WaferManager.Instance.GetWafer(module, slot);

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(module))
                return false;

            if (!int.TryParse(wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["CoolingTime"].ToString(),
                    out coolingTime))
            {
                coolingTime = 0;
                //coolingTime = SC.GetValue<int>("Unload.DefaultCoolingTime");
                //EV.PostWarningLog("Scheduler", $"Sequence step Unload cooling time is not valid, instead with the SC default value {coolingTime} seconds");

                return false;
            }

            return true;
        }

        private bool CheckHasTrayAndNoWafer(List<Tuple<ModuleName, int>> needCheckPositions)
        {
            foreach (var positionTuple in needCheckPositions)
            {
                var module = GetModule(positionTuple.Item1);
                if (module.HasTray(positionTuple.Item2) && module.NoWafer(positionTuple.Item2))
                {
                    return true;
                }
            }
            return false;
        }

        private bool CheckHasTrayAndNoWaferByModule(ModuleName moduleName, int slot,ModuleName pmModule)
        {
            var module = GetModule(moduleName);

            if((module.GetWaferInfo(slot).TrayOriginSlot % 2 == 0 && pmModule == ModuleName.PM1)
                || (module.GetWaferInfo(slot).TrayOriginSlot % 2 == 1 && pmModule == ModuleName.PM2))
            {
                if (module.HasTray(slot) && module.NoWafer(slot))
                {
                    return true;
                }
            }

            return false;
        }

        private bool CheckTrayExhausted()
        {
            return !(_buffer.HasTrayAndNotExceedProcessCount(0)
                     | _buffer.HasTrayAndNotExceedProcessCount(1)
                     | _buffer.HasTrayAndNotExceedProcessCount(2)
                     | _cassetteBL.HasTrayAndNotExceedProcessCount(0)
                     | _cassetteBL.HasTrayAndNotExceedProcessCount(1)
                     | _cassetteBL.HasTrayAndNotExceedProcessCount(2)
                     | _cassetteBL.HasTrayAndNotExceedProcessCount(3)
                     | _cassetteBL.HasTrayAndNotExceedProcessCount(4)
                     | _cassetteBL.HasTrayAndNotExceedProcessCount(5)
                     | _cassetteBL.HasTrayAndNotExceedProcessCount(6)
                     | _cassetteBL.HasTrayAndNotExceedProcessCount(7)
                     | _load.HasTrayAndNotExceedProcessCount(0)
                     | _unload.HasTrayAndNotExceedProcessCount(0)
                     | _tmRobot.HasTrayAndNotExceedProcessCount(0)
                     | _trayRobot.HasTrayAndNotExceedProcessCount(0)
                     | _pm1.HasTrayAndNotExceedProcessCount(0)
                     | _pm2.HasTrayAndNotExceedProcessCount(0));
        }

        public bool CheckBufferWaferHasJob()
        {
            var wafer = _buffer.GetWaferInfo(0);

            if (wafer.IsEmpty)
            {
                return false;
            }
            if (wafer.ProcessJob == null)
            {
                return false;
            }

            ProcessJobInfo pj = _lstProcessJobs.Find(x => x.InnerId == wafer.ProcessJob.InnerId);
            if (pj == null)
            {
                return false;
            }

            return true;

        }

        public bool CheckWaferProcessModuleIsAvailable(ModuleName waferModule, int waferSlot)
        {
            var wafer = GetModule(waferModule).GetWaferInfo(waferSlot);

            if (wafer.IsEmpty)
                return false;

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            //foreach (var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
            //{
            //if (GetModule(module).NoWafer(0)
            //        && _lstPms.Find(x => x.Module == module).IsAvailable
            //        && !CheckNeedRunClean(module, out bool _, out string _))
            //        return true;
            //}

            foreach (var step in wafer.ProcessJob.Sequence.Steps)
            {
                foreach (var module in step.StepModules)
                {
                    if (module.ToString().StartsWith("PM")
                        && GetModule(module).NoWafer(0)
                        && _lstPms.Find(x => x.Module == module).IsAvailable
                        && !GetModule(module).CheckNeedRunClean(out bool _, out string _))
                        return true;
                }
            }

            return false;
        }


        private SlotItem GetWaferInJobQueue()
        {
            List<Tuple<ModuleName, int>> processingWafers = new List<Tuple<ModuleName, int>>();
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing)
                {
                    foreach (var pj in _lstProcessJobs)
                    {
                        if (pj.ControlJobName == cj.Name && pj.State == EnumProcessJobState.Processing)
                        {
                            foreach (var pjSlotWafer in pj.SlotWafers)
                            {
                                if (pjSlotWafer.Item1 == ModuleName.CassAL || pjSlotWafer.Item1 == ModuleName.CassAR)
                                {
                                    processingWafers.Add(pjSlotWafer);
                                }
                            }
                        }
                    }
                }
            }

            if (processingWafers.Count > 0)
            {
                processingWafers = processingWafers.OrderBy(x => x.Item1).ThenBy(x => x.Item2).ToList();

                if (SC.GetValue<bool>("System.Scheduler.IsRunInParallelMode"))
                {
                    return SortByParallelMode(processingWafers);
                }
                else
                {
                    return SortBySerialMode(processingWafers);
                }
            }

            return null;
        }

        private SlotItem SortBySerialMode(List<Tuple<ModuleName, int>> processingWafers)
        {
            foreach (var pjSlotWafer in processingWafers)
            {
                if (pjSlotWafer.Item1 == ModuleName.CassAL || pjSlotWafer.Item1 == ModuleName.CassAR)
                {
                    if (GetModule(pjSlotWafer.Item1).CheckWaferNeedProcess(pjSlotWafer.Item2, _pm1.Module))
                    {
                        if (GetRunWaferCount(_pm1.Module) < 2)
                        {
                            return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
                        }
                        else
                        {
                            return null;
                        }
                    }
                    else if (GetModule(pjSlotWafer.Item1).CheckWaferNeedProcess(pjSlotWafer.Item2, _pm2.Module))
                    {
                        if (GetRunWaferCount(_pm2.Module) < 2)
                        {
                            return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
                        }
                        else
                        {
                            return null;
                        }
                    }
                }
            }

            return null;
        }

        private SlotItem SortByParallelMode(List<Tuple<ModuleName, int>> processingWafers)
        {
            foreach (var pjSlotWafer in processingWafers)
            {
                if (pjSlotWafer.Item1 == ModuleName.CassAL || pjSlotWafer.Item1 == ModuleName.CassAR)
                {
                    if (GetModule(pjSlotWafer.Item1).CheckWaferNeedProcess(pjSlotWafer.Item2, _pm1.Module))
                    {
                        if (GetRunWaferCount(_pm1.Module) < 2 && GetRunWaferCount(_pm1.Module) <= GetRunWaferCount(_pm2.Module))
                        {
                            return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
                        }
                    }
                    else if (GetModule(pjSlotWafer.Item1).CheckWaferNeedProcess(pjSlotWafer.Item2, _pm2.Module))
                    {
                        if (GetRunWaferCount(_pm2.Module) < 2 && GetRunWaferCount(_pm2.Module) <= GetRunWaferCount(_pm1.Module))
                        {
                            return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
                        }
                    }
                }
            }

            return SortBySerialMode(processingWafers);
        }

        private SlotItem GetTraySlot(int slotCount, int usedForWhichPM)
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing)
                {
                    for (int i = 0; i < slotCount; i++)
                    {
                        if (_cassetteBL.HasTrayAndNotExceedProcessCount(i) && i % 2 == usedForWhichPM)
                        {
                            return new SlotItem(ModuleName.CassBL, i);
                        }
                    }
                }
            }
            return null;
        }

        private SlotItem GetTrayOrignSlot(ModuleName module, int slot)
        {
            var wafer = GetModule(module).GetWaferInfo(slot);
            if (wafer != null && GetModule(module).HasTray(slot) && _cassetteBL.NoTray(wafer.TrayOriginSlot))
            {
                return new SlotItem(ModuleName.CassBL, wafer.TrayOriginSlot);
            }
            return null;
        }

        //private SlotItem GetEmptyTraySlot(int slotCount)
        //{
        //    foreach (var cj in _lstControlJobs)
        //    {
        //        if (cj.State == EnumControlJobState.Executing)
        //        {
        //            for (int i = 0; i < slotCount; i++)
        //            {
        //if (_cassetteBL.NoTray(i))
        //                {
        //                    return new SlotItem(ModuleName.CassBL, i);
        //                }
        //            }
        //        }
        //    }
        //    return null;
        //}

        ///// <summary>
        ///// 获取空位置
        ///// </summary>
        ///// <param name="isHeat"></param>
        ///// <returns></returns>
        //private SlotItem GetEmptyBufferSlot(WaferInfo wafer)
        //{
        //    foreach (var cj in _lstControlJobs)
        //    {
        //        if (cj.State == EnumControlJobState.Executing)
        //        {
        //            string strSots = wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["SlotSelection"].ToString();
        //            if (strSots == null)
        //            {
        //                return null;
        //            }

        //            string[] slots = strSots.Split(',');
        //            for (int i = 0; i < slots.Length; i++)
        //            {
        //                int slot = 0;
        //                if (Int32.TryParse(slots[i], out slot))
        //                {
        //                    if (_buffer.NoTray(slot - 1))
        //                    {
        //                        return new SlotItem(ModuleName.Buffer, slot - 1);
        //                    }
        //                }
        //            }
        //        }
        //    }
        //    return null;
        //}

        /// <summary>
        /// 获取各个模块的Wafer总数量
        /// </summary>
        /// <returns></returns>
        private int GetRunWaferCount()
        {
            int waferCount = 0;
            if (_load.HasWafer(0))
            {
                waferCount++;
            }
            if (_unload.HasWafer(0))
            {
                waferCount++;
            }
            if (_tmRobot.HasWafer(0))
            {
                waferCount++;
            }
            foreach (SchedulerPM pm in _lstPms)
            {
                if (GetModule(pm.Module).HasWafer(0))
                {
                    waferCount++;
                }
            }
            for (int i = 0; i < 3; i++)
            {
                if (_buffer.HasWafer(i))
                {
                    waferCount++;
                }
            }
            return waferCount;
        }

        private int GetRunWaferCount(ModuleName processIn)
        {
            int waferCount = 0;
            if (_load.HasWafer(0) && (_load.CheckWaferNeedProcess(0, processIn) || _load.GetWaferInfo(0).SubstHists.Select(x => x.locationID).Contains(processIn.ToString())))
            {
                waferCount++;
            }

            if (_unload.HasWafer(0) && (_unload.CheckWaferNeedProcess(0, processIn) || _unload.GetWaferInfo(0).SubstHists.Select(x => x.locationID).Contains(processIn.ToString())))
            {
                waferCount++;
            }

            if (_tmRobot.HasWafer(0) && (_tmRobot.CheckWaferNeedProcess(0, processIn) || _tmRobot.GetWaferInfo(0).SubstHists.Select(x => x.locationID).Contains(processIn.ToString())))
            {
                waferCount++;
            }

            if (GetModule(processIn).HasWafer(0) && (GetModule(processIn).CheckWaferNeedProcess(0, processIn) || GetModule(processIn).GetWaferInfo(0).SubstHists.Select(x => x.locationID).Contains(processIn.ToString())))
            {
                waferCount++;
            }

            for (int i = 0; i < 3; i++)
            {
                if (_buffer.HasWafer(i) && (_buffer.CheckWaferNeedProcess(i, processIn) || _buffer.GetWaferInfo(i).SubstHists.Select(x => x.locationID).Contains(processIn.ToString())))
                {
                    waferCount++;
                }
            }
            return waferCount;
        }

        private int GetCurrentTrayCount()
        {
            int trayCount = 0;
            if (_load.HasTray(0))
            {
                trayCount++;
            }

            if (_unload.HasTray(0))
            {
                trayCount++;
            }

            if (_tmRobot.HasTray(0))
            {
                trayCount++;
            }

            foreach (SchedulerPM pm in _lstPms)
            {
                if (GetModule(pm.Module).HasTray(0))
                {
                    trayCount++;
                }
            }

            for (int i = 0; i < 3; i++)
            {
                if (_buffer.HasTray(i))
                {
                    trayCount++;
                }
            }

            return trayCount;
        }

        private int GetCurrentWaferCount()
        {
            int waferCountDiv = 0;
            int cassWaferCount = 0;
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing)
                {
                    foreach (var pj in _lstProcessJobs)
                    {
                        if (pj.ControlJobName == cj.Name && pj.State == EnumProcessJobState.Processing)
                        {
                            cassWaferCount += pj.SlotWafers.Count;
                            foreach (var pjSlotWafer in pj.SlotWafers)
                            {
                                var module = GetModule(pjSlotWafer.Item1);
                                if (module.HasWafer(pjSlotWafer.Item2) && !module.CheckWaferNeedProcess(pjSlotWafer.Item2))
                                {
                                    waferCountDiv++;
                                }
                            }
                        }
                    }
                }
            }

            return cassWaferCount - waferCountDiv;

            //int waferCount = 0;
            //if (_load.HasWafer(0))
            //{
            //    waferCount++;
            //}
            //for (int i = 0; i < 3; i++)
            //{
            //if (_buffer.HasWafer(i))
            //    {
            //        waferCount++;
            //    }
            //}

            //if (_waferRobot.CheckWaferNeedProcess(0) )
            //{
            //    waferCount++;
            //}
            //if (_aligner.CheckWaferNeedProcess(0) )
            //{
            //    waferCount++;
            //}

            //for (int i=0;i<25;i++)
            //{
            //    if (CheckWaferNeedProcess(ModuleName.CassAL, i))
            //    {
            //        waferCount++;
            //    }
            //    if (CheckWaferNeedProcess(ModuleName.CassAR, i))
            //    {
            //        waferCount++;
            //    }
            //}
            //return waferCount;
        }

        public Result MonitorModuleError()
        {
            bool isModuleError = false;
            bool[] isPMError = new bool[2];

            for (int i = 0; i < isPMError.Length; i++)
            {
                isPMError[i] = false;
            }

            if (_tmRobot.IsError)
                isModuleError = true;

            for (int i = 0; i < _lstPms.Count; i++) // PM出错，不影响其他腔体的传片
            {
                if (_lstPms[i].IsError)
                    isPMError[i] = true;
            }

            if (isModuleError && !_isModuleErrorPrevious)
            {

            }
            else if (!isModuleError && _isModuleErrorPrevious)
            {
                Reset();
            }

            for (int i = 0; i < _lstPms.Count; i++)
            {
                if (!isPMError[i] && _isPMErrorPrevious[i])
                {
                    _lstPms[i].ResetTask();
                }

                _isPMErrorPrevious[i] = isPMError[i];
            }

            _isModuleErrorPrevious = isModuleError;

            return Result.RUN;
        }

        private bool CheckModuleHaveWaferWithNoJob(out string reason)
        {
            reason = "";
            if (_lstControlJobs.Count > 0)
            {
                reason = "lstControlJobs.Count > 0";
                return false;
            }
            else
            {
                if (_buffer.HasWafer(0) || _buffer.HasWafer(1) || _buffer.HasWafer(2))
                {
                    reason = $"Buffer have wafer!";
                    EV.PostWarningLog(LogSource, reason);
                    return true;
                }

                if (_tmRobot.HasWafer(0))
                {
                    reason = $"TmRobot have wafer!";
                    EV.PostWarningLog(LogSource, reason);
                    return true;

                }
                if (_aligner.HasWafer(0))
                {
                    reason = $"Aligner have wafer!";
                    EV.PostWarningLog(LogSource, reason);
                    return true;

                }
                if (_waferRobot.HasWafer(0))
                {
                    reason = $"WaferRobot have wafer!";
                    EV.PostWarningLog(LogSource, reason);
                    return true;
                }
                if (_load.HasWafer(0))
                {
                    reason = $"Load have wafer!";
                    EV.PostWarningLog(LogSource, reason);
                    return true;

                }
                if (_load.HasTray(0))
                {
                    reason = $"Load have Tray!";
                    EV.PostWarningLog(LogSource, reason);
                    return true;
                }
                if (_unload.HasWafer(0))
                {
                    reason = $"UnLoad have wafer!";
                    EV.PostWarningLog(LogSource, reason);
                    return true;
                }
                if (_unload.HasTray(0))
                {
                    reason = $"UnLoad have Tray!";
                    EV.PostWarningLog(LogSource, reason);
                    return true;
                }

                return false;
            }
        }

        private bool CheckWaferNeedProcess(ModuleName module, int waferSlot, ModuleName processIn = ModuleName.System)
        {
            var wafer = WaferManager.Instance.GetWafer(module, waferSlot);

            if(wafer == null)
            {
                return false;
            }

            if (wafer.IsEmpty)
                return false;

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.Sequence.Steps == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count || wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules == null)
                return false;

            //if (processIn != ModuleName.System && !wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(processIn))
            //    return false;

            for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
            {
                foreach (var stepModule in wafer.ProcessJob.Sequence.Steps[i].StepModules)
                {
                    if (ModuleHelper.IsPm(stepModule))
                    {
                        if (processIn != ModuleName.System)
                        {
                            return stepModule == processIn ? true : false;
                        }
                        else
                        {
                            return true;
                        }
                    }
                }
            }

            return false;
        }

    }
}