2023-03-28 13:24:11 +08:00
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using System;
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using System.Collections.Generic;
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using System.Text.RegularExpressions;
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using System.Xml;
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using Aitex.Common.Util;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.RecipeCenter;
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using Aitex.Core.RT.SCCore;
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using static Aitex.Core.RT.Device.PmDevices.DicMode;
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2023-04-13 15:35:13 +08:00
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namespace SicModules.PMs.RecipeExecutions
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2023-03-28 13:24:11 +08:00
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{
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public class RecipeDataColumn
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{
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public string disPlay { get; set; }
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public double maxNum { get; set; }
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public double minMum { get; set; }
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}
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public class RecipeParser
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{
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public static bool Parse(string recipeFile, string module, out RecipeHead recipeHead, out List<RecipeStep> recipeData, out string reason)
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{
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reason = string.Empty;
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recipeHead = new RecipeHead();
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recipeData = new List<RecipeStep>();
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string content = RecipeFileManager.Instance.LoadRecipe("", recipeFile, false);
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if (string.IsNullOrEmpty(content))
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{
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reason = $"{recipeFile} is not a valid recipe file";
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return false;
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}
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try
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{
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//获取工艺程序文件中允许的命令字符串列表
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//目的：如果工艺程序文件中含有规定之外的命令，则被禁止执行
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HashSet<string> recipeAllowedCommands = new HashSet<string>();
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XmlDocument rcpFormatDoc = new XmlDocument();
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string recipeSchema = PathManager.GetCfgDir() + @"\Recipe\Sic\Process\RecipeFormat.xml";
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rcpFormatDoc.Load(recipeSchema);
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XmlNodeList rcpItemNodeList = rcpFormatDoc.SelectNodes("/Aitex/TableRecipeFormat/Catalog/Group/Step");
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foreach (XmlElement item in rcpItemNodeList)
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recipeAllowedCommands.Add(item.Attributes["ControlName"].Value);
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//获取工艺程序文件中所有步的内容
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XmlDocument rcpDataDoc = new XmlDocument();
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rcpDataDoc.LoadXml(content);
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XmlNode nodeModule = rcpDataDoc.SelectSingleNode($"/Aitex/TableRecipeData/Module[@Name='{module}']");
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if (nodeModule == null)
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{
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reason = $"Recipe file does not contains step content for {module}";
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return false;
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}
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XmlElement nodeConfig = nodeModule.SelectSingleNode($"Config") as XmlElement;
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recipeHead.ProcessPurgeCount = (nodeConfig != null && nodeConfig.HasAttribute("StepNo")) ? nodeConfig.Attributes["StepNo"].Value : "";
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XmlNodeList stepNodeList = nodeModule.SelectNodes($"Step");
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for (int i = 0; i < stepNodeList.Count; i++)
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{
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var recipeStep = new RecipeStep();
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recipeData.Add(recipeStep);
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XmlElement stepNode = stepNodeList[i] as XmlElement;
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Dictionary<string, string> dic = new Dictionary<string, string>();
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//遍历Step节点
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foreach (XmlAttribute att in stepNode.Attributes)
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{
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if (recipeAllowedCommands.Contains(att.Name))
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{
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dic.Add(att.Name, att.Value);
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}
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}
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//遍历Step子节点中所有的attribute属性节点
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foreach (XmlElement subStepNode in stepNode.ChildNodes)
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{
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foreach (XmlAttribute att in subStepNode.Attributes)
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{
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if (recipeAllowedCommands.Contains(att.Name))
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{
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dic.Add(att.Name, att.Value);
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}
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}
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//遍历Step子节点的子节点中所有的attribute属性节点
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foreach (XmlElement subsubStepNode in subStepNode.ChildNodes)
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{
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foreach (XmlAttribute att in subsubStepNode.Attributes)
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{
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if (recipeAllowedCommands.Contains(att.Name))
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{
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dic.Add(att.Name, att.Value);
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}
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}
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}
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}
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recipeStep.StepName = dic["Name"];
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recipeStep.StepTime = Convert.ToDouble(dic["Time"]);
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recipeStep.EndBy = EnumEndByCondition.ByTime;
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if (dic.ContainsKey("Loop"))
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{
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string loopStr = dic["Loop"];
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recipeStep.IsLoopStartStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop\x20\d+\s*$").Success;
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recipeStep.IsLoopEndStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop End$").Success;
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if (recipeStep.IsLoopStartStep)
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recipeStep.LoopCount = Convert.ToInt32(loopStr.Replace("Loop", string.Empty));
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else
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recipeStep.LoopCount = 0;
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}
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//if (recipeData.Count >= 2)
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//{
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// RecipeStep dummyStep = GetDummyStep(recipeData[recipeData.Count - 2].RecipeCommands, dic, module);
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// if (dummyStep.RecipeCommands.Count > 0)
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// {
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// dummyStep.IsDummyStep = true;
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// dummyStep.StepTime = 1; // 默认1秒
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// dummyStep.EndBy = EnumEndByCondition.ByTime;
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// recipeData.Insert(recipeData.Count - 1, dummyStep);
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// }
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//}
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#region Remove
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dic.Remove("StepNo");
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dic.Remove("Name");
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dic.Remove("Time");
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//Recipe Step去除Mfc30.Ramp
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dic.Remove("Mfc30.Ramp");
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HeaterControlMode PSUControlMode = (HeaterControlMode)Enum.Parse(typeof(HeaterControlMode), dic["TC1.SetHeaterMode"]);
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HeaterControlMode SCRControlMode = (HeaterControlMode)Enum.Parse(typeof(HeaterControlMode), dic["TC2.SetHeaterMode2"]);
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dic["TC1.SetHeaterMode"] = ((int)PSUControlMode).ToString();
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dic["TC2.SetHeaterMode2"] = ((int)SCRControlMode).ToString();
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//if (PSUControlMode == HeaterControlMode.Pyro)
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//{
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// dic.Remove("TC1.RecipeSetL1Ratio");
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// dic.Remove("TC1.RecipeSetL2Ratio");
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// dic.Remove("TC1.RecipeSetL3Ratio");
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//}
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//else if (PSUControlMode == HeaterControlMode.TC)
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//{
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// dic.Remove("TC1.RecipeSetL1Ratio");
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// dic.Remove("TC1.RecipeSetL2Ratio");
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// dic.Remove("TC1.RecipeSetL3Ratio");
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// dic.Remove("TC1.SetL1TargetSP");
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// dic.Remove("TC1.SetL3TargetSP");
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//}
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//Power模式不在移除TargetSP,也需要设置
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//if (PSUControlMode == HeaterControlMode.Power)
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//{
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// dic.Remove("TC1.SetL1TargetSP");
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// dic.Remove("TC1.SetL2TargetSP");
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// dic.Remove("TC1.SetL3TargetSP");
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//}
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//if (SCRControlMode == HeaterControlMode.Pyro)
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//{
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// dic.Remove("TC2.RecipeSetL1Ratio");
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// dic.Remove("TC2.RecipeSetL2Ratio");
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// dic.Remove("TC2.RecipeSetL3Ratio");
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//}
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//else if (SCRControlMode == HeaterControlMode.TC)
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//{
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// dic.Remove("TC2.RecipeSetL1Ratio");
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// dic.Remove("TC2.RecipeSetL2Ratio");
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// dic.Remove("TC2.RecipeSetL3Ratio");
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//}
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if (SCRControlMode == HeaterControlMode.Power)
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{
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dic.Remove("TC2.SetL3TargetSP");
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}
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//if (dic["GRPurgeHCI"] == "Disable")
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//{
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// dic.Remove("Mfc30.Ramp");
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//}
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dic.Remove("SHTotalFlow");
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dic.Remove("SHTotalFlowSplitRatio");
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//dic.Remove("SiSourTotalFlow");
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dic.Remove("SiSourSplitRatio");
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//dic.Remove("CSourTotalFlow");
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dic.Remove("CSourSplitRatio");
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//dic.Remove("DopeTotalFlow");
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dic.Remove("N2ActualFlow");
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dic.Remove("DopeSplitRatio");
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dic.Remove("SHSuppTotalFlow");
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dic.Remove("SHInnerFlow");
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dic.Remove("SHMidFlow");
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dic.Remove("SHOutterFlow");
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//dic.Remove("GRPurgeHCI");
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//dic.Remove("TotalVentFlow");
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#endregion
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foreach (string key in dic.Keys)
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recipeStep.RecipeCommands.Add(key, dic[key]);
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}
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}
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catch (Exception ex)
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{
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LOG.Write(ex);
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reason = $"Recipe file content not valid, {recipeFile}, {ex.Message}";
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return false;
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}
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return true;
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}
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/// <summary>
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/// Check Run Vent Purge Switch, Add Dummy Step
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/// </summary>
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/// <param name="previousStep"></param>
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/// <param name="currentStep"></param>
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/// <returns></returns>
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private static RecipeStep GetDummyStep(Dictionary<string, string> previousStep, Dictionary<string, string> currentStep, string module)
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{
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RecipeStep step = new RecipeStep();
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List<string> lstFlowMode = new List<string>() { FlowMode.Run.ToString(), FlowMode.Vent.ToString() };
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bool isTotalVentFlowRunSwitch = false;
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#region Flow Mode
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string previousSiH4FlowMode = previousStep["SiH4.SetValve"];
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string previousTCSFlowMode = previousStep["TCS.SetValve"];
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string previousHClFlowMode = previousStep["HCl.SetValve"];
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string previousC2H4FlowMode = previousStep["C2H4.SetValve"];
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string previousN2FlowMode = previousStep["N2Dilution.SetValve"];
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string previousN2HighFlowMode = previousStep["N2HighDoping.SetValve"];
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string previousTMAFlowMode = previousStep["TMA.SetValve"];
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string currentSiH4FlowMode = currentStep["SiH4.SetValve"];
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string currentTCSFlowMode = currentStep["TCS.SetValve"];
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string currentHClFlowMode = currentStep["HCl.SetValve"];
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string currentC2H4FlowMode = currentStep["C2H4.SetValve"];
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string currentN2FlowMode = currentStep["N2Dilution.SetValve"];
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string currentN2HighFlowMode = currentStep["N2HighDoping.SetValve"];
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string currentTMAFlowMode = currentStep["TMA.SetValve"];
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#endregion
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#region Check Si Source
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double previousSiSourTotalFlow = Convert.ToDouble(previousStep["SiSourTotalFlow"]);
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double previousTCSBubbHighFlow = Convert.ToDouble(previousStep["Mfc10.Ramp"]);
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double previousTCSBubbLowFlow = Convert.ToDouble(previousStep["Mfc11.Ramp"]);
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double previousTCSPushFlow = Convert.ToDouble(previousStep["Mfc12.Ramp"]);
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double previousHClFlow = Convert.ToDouble(previousStep["Mfc13.Ramp"]);
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double previousSiH4Flow = Convert.ToDouble(previousStep["Mfc14.Ramp"]);
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double TCSFlow = 0;
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double TCS_Eff = SC.GetValue<double>($"PM.{module}.Efficiency.TCS-Eff");
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if (currentTCSFlowMode == FlowMode.Run.ToString() || currentTCSFlowMode == FlowMode.Vent.ToString())
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TCSFlow = (previousTCSBubbHighFlow + previousTCSBubbLowFlow) * TCS_Eff + previousTCSPushFlow;
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else if (currentTCSFlowMode == FlowMode.Purge.ToString())
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TCSFlow = previousTCSBubbHighFlow + previousTCSBubbLowFlow + previousTCSPushFlow;
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bool isSiSourRunVentSwitch = false;
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if ((previousSiH4FlowMode != currentSiH4FlowMode) && lstFlowMode.Contains(previousSiH4FlowMode) && lstFlowMode.Contains(currentSiH4FlowMode))
|
|
|
|
|
|
{
|
|
|
|
|
|
isSiSourRunVentSwitch = true;
|
|
|
|
|
|
isTotalVentFlowRunSwitch = true;
|
|
|
|
|
|
step.RecipeCommands.Add("SiH4.SetValve", currentSiH4FlowMode);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if ((previousTCSFlowMode != currentTCSFlowMode) && lstFlowMode.Contains(previousTCSFlowMode) && lstFlowMode.Contains(currentTCSFlowMode))
|
|
|
|
|
|
{
|
|
|
|
|
|
isSiSourRunVentSwitch = true;
|
|
|
|
|
|
isTotalVentFlowRunSwitch = true;
|
|
|
|
|
|
step.RecipeCommands.Add("TCS.SetValve", currentTCSFlowMode);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if ((previousHClFlowMode != currentHClFlowMode) && lstFlowMode.Contains(previousHClFlowMode) && lstFlowMode.Contains(currentHClFlowMode))
|
|
|
|
|
|
{
|
|
|
|
|
|
isSiSourRunVentSwitch = true;
|
|
|
|
|
|
isTotalVentFlowRunSwitch = true;
|
|
|
|
|
|
step.RecipeCommands.Add("HCl.SetValve", currentHClFlowMode);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if (isSiSourRunVentSwitch)
|
|
|
|
|
|
{
|
|
|
|
|
|
double startM9Flow = previousSiSourTotalFlow - (currentSiH4FlowMode == FlowMode.Run.ToString() ? previousSiH4Flow : 0)
|
|
|
|
|
|
- (currentTCSFlowMode == FlowMode.Run.ToString() ? TCSFlow : 0) - (currentHClFlowMode == FlowMode.Run.ToString() ? previousHClFlow : 0);
|
|
|
|
|
|
|
|
|
|
|
|
step.RecipeCommands.Add("Mfc9.Ramp", startM9Flow.ToString("F1"));
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
#endregion
|
|
|
|
|
|
|
|
|
|
|
|
#region Check C Source
|
|
|
|
|
|
|
|
|
|
|
|
double previousCSourTotalFlow = Convert.ToDouble(previousStep["CSourTotalFlow"]);
|
|
|
|
|
|
double previousC2H4Flow = Convert.ToDouble(previousStep["Mfc16.Ramp"]);
|
|
|
|
|
|
|
|
|
|
|
|
bool isCSourRunVentSwitch = false;
|
|
|
|
|
|
|
|
|
|
|
|
if ((previousC2H4FlowMode != currentC2H4FlowMode) && lstFlowMode.Contains(previousC2H4FlowMode) && lstFlowMode.Contains(currentC2H4FlowMode))
|
|
|
|
|
|
{
|
|
|
|
|
|
isCSourRunVentSwitch = true;
|
|
|
|
|
|
isTotalVentFlowRunSwitch = true;
|
|
|
|
|
|
step.RecipeCommands.Add("C2H4.SetValve", currentC2H4FlowMode);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if (isCSourRunVentSwitch)
|
|
|
|
|
|
{
|
|
|
|
|
|
double startM15Flow = previousCSourTotalFlow - (currentC2H4FlowMode == FlowMode.Run.ToString() ? previousC2H4Flow : 0);
|
|
|
|
|
|
|
|
|
|
|
|
step.RecipeCommands.Add("Mfc15.Ramp", startM15Flow.ToString("F1"));
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
#endregion
|
|
|
|
|
|
|
|
|
|
|
|
#region Check Dope
|
|
|
|
|
|
|
|
|
|
|
|
double previousDopeTotalFlow = Convert.ToDouble(previousStep["DopeTotalFlow"]);
|
|
|
|
|
|
double previousN2HighFlow = Convert.ToDouble(previousStep["Mfc5.Ramp"]);
|
|
|
|
|
|
double previousDilutedN2Flow = Convert.ToDouble(previousStep["Mfc6.Ramp"]);
|
|
|
|
|
|
double previousTMABubbFlow = Convert.ToDouble(previousStep["Mfc7.Ramp"]);
|
|
|
|
|
|
double previousTMAPushFlow = Convert.ToDouble(previousStep["Mfc8.Ramp"]);
|
|
|
|
|
|
|
|
|
|
|
|
double TMAFlow = 0;
|
|
|
|
|
|
double TMA_Eff = SC.GetValue<double>($"PM.{module}.Efficiency.TMA-Eff");
|
|
|
|
|
|
if (currentTMAFlowMode == FlowMode.Run.ToString() || currentTMAFlowMode == FlowMode.Vent.ToString())
|
|
|
|
|
|
TMAFlow = previousTMABubbFlow * TMA_Eff + previousTMAPushFlow;
|
|
|
|
|
|
else if (currentTMAFlowMode == FlowMode.Purge.ToString())
|
|
|
|
|
|
TMAFlow = previousTMABubbFlow + previousTMAPushFlow;
|
|
|
|
|
|
|
|
|
|
|
|
bool isDopeRunVentSwitch = false;
|
|
|
|
|
|
|
|
|
|
|
|
if ((previousN2FlowMode != currentN2FlowMode) && lstFlowMode.Contains(previousN2FlowMode) && lstFlowMode.Contains(currentN2FlowMode))
|
|
|
|
|
|
{
|
|
|
|
|
|
isDopeRunVentSwitch = true;
|
|
|
|
|
|
isTotalVentFlowRunSwitch = true;
|
|
|
|
|
|
step.RecipeCommands.Add("N2Dilution.SetValve", currentN2FlowMode);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if ((previousN2HighFlowMode != currentN2HighFlowMode) && lstFlowMode.Contains(previousN2HighFlowMode) && lstFlowMode.Contains(currentN2HighFlowMode))
|
|
|
|
|
|
{
|
|
|
|
|
|
isDopeRunVentSwitch = true;
|
|
|
|
|
|
isTotalVentFlowRunSwitch = true;
|
|
|
|
|
|
step.RecipeCommands.Add("N2HighDoping.SetValve", currentN2HighFlowMode);
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
//#region M5 Control
|
|
|
|
|
|
|
|
|
|
|
|
//step.RecipeCommands.Add("Mfc5.SetMode", "Normal");
|
|
|
|
|
|
//step.RecipeCommands.Add("Mfc5.Ramp", (currentN2HighFlowMode == FlowMode.Run.ToString() ? currentN2HighFlow : 0).ToString("F1"));
|
|
|
|
|
|
|
|
|
|
|
|
//#endregion
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if (previousTMAFlowMode != currentTMAFlowMode && lstFlowMode.Contains(previousTMAFlowMode) && lstFlowMode.Contains(currentTMAFlowMode))
|
|
|
|
|
|
{
|
|
|
|
|
|
isDopeRunVentSwitch = true;
|
|
|
|
|
|
isTotalVentFlowRunSwitch = true;
|
|
|
|
|
|
step.RecipeCommands.Add("TMA.SetValve", currentTMAFlowMode);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if (isDopeRunVentSwitch)
|
|
|
|
|
|
{
|
|
|
|
|
|
double startM2Flow = previousDopeTotalFlow - (currentTMAFlowMode == FlowMode.Run.ToString() ? TMAFlow : 0)
|
|
|
|
|
|
- (currentN2FlowMode == FlowMode.Run.ToString() ? previousDilutedN2Flow + (currentN2HighFlowMode == FlowMode.Run.ToString() ? previousN2HighFlow : 0) : 0);
|
|
|
|
|
|
|
|
|
|
|
|
step.RecipeCommands.Add("Mfc2.Ramp", startM2Flow.ToString("F1"));
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
#endregion
|
|
|
|
|
|
|
|
|
|
|
|
#region Check Total Vent Flow
|
|
|
|
|
|
|
|
|
|
|
|
double previousTotalVentFlow = Convert.ToDouble(previousStep["TotalVentFlow"]);
|
|
|
|
|
|
double currentN2LowFlow = Convert.ToDouble(currentStep["Mfc4.Ramp"]);
|
|
|
|
|
|
double currentDiluFlowForN2 = Convert.ToDouble(currentStep["Mfc3.Ramp"]);
|
|
|
|
|
|
|
|
|
|
|
|
double currentSiSourTotalFlowForPurge = (currentSiH4FlowMode != FlowMode.Run.ToString() ? previousSiH4Flow : 0)
|
|
|
|
|
|
+ (currentTCSFlowMode != FlowMode.Run.ToString() ? TCSFlow : 0) + (currentHClFlowMode != FlowMode.Run.ToString() ? previousHClFlow : 0);
|
|
|
|
|
|
|
|
|
|
|
|
double currentCSourTotalFlowForPurge = currentC2H4FlowMode != FlowMode.Run.ToString() ? previousC2H4Flow : 0;
|
|
|
|
|
|
|
|
|
|
|
|
double N2Flow = (currentN2FlowMode != FlowMode.Run.ToString() ? previousDilutedN2Flow : 0) + (currentN2HighFlowMode != FlowMode.Run.ToString() ? previousN2HighFlow : 0);
|
|
|
|
|
|
|
|
|
|
|
|
double currentDopeTotalFlowForPurge = N2Flow + (currentTMAFlowMode != FlowMode.Run.ToString() ? TMAFlow : 0);
|
|
|
|
|
|
|
|
|
|
|
|
if (isTotalVentFlowRunSwitch)
|
|
|
|
|
|
{
|
|
|
|
|
|
double startM1Flow = previousTotalVentFlow - currentSiSourTotalFlowForPurge - currentCSourTotalFlowForPurge - currentDopeTotalFlowForPurge;
|
|
|
|
|
|
|
|
|
|
|
|
step.RecipeCommands.Add("Mfc1.Ramp", startM1Flow.ToString("F1"));
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
#endregion
|
|
|
|
|
|
|
|
|
|
|
|
return step;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public static bool CheckDataAvalible(string recipeFile, string module, out string strErrorInfo)
|
|
|
|
|
|
{
|
|
|
|
|
|
strErrorInfo = "";
|
|
|
|
|
|
return true;
|
|
|
|
|
|
|
|
|
|
|
|
Dictionary<string, RecipeDataColumn> lstRecipeDataColumn = new Dictionary<string, RecipeDataColumn>();
|
|
|
|
|
|
|
|
|
|
|
|
//获取模板的Double类型,并读取最大值最小值
|
|
|
|
|
|
var str = RecipeFileManager.Instance.GetRecipeFormatXml("Sic//Process");//LoadRecipeFormat();
|
|
|
|
|
|
XmlDocument doc = new XmlDocument();
|
|
|
|
|
|
try
|
|
|
|
|
|
{
|
|
|
|
|
|
doc.LoadXml(str);
|
|
|
|
|
|
XmlNode nodeRoot = doc.SelectSingleNode("TableRecipeFormat");
|
|
|
|
|
|
}
|
|
|
|
|
|
catch (Exception ex)
|
|
|
|
|
|
{
|
|
|
|
|
|
LOG.Write(ex);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
XmlNodeList nodes = doc.SelectNodes("TableRecipeFormat/Catalog/Group");
|
|
|
|
|
|
foreach (XmlNode node in nodes)
|
|
|
|
|
|
{
|
|
|
|
|
|
XmlNodeList childNodes = node.SelectNodes("Step");
|
|
|
|
|
|
foreach (XmlNode step in childNodes)
|
|
|
|
|
|
{
|
|
|
|
|
|
if (step.Attributes["InputType"].Value == "DoubleInput")
|
|
|
|
|
|
{
|
|
|
|
|
|
string recipeName = step.Attributes["ControlName"].Value;
|
|
|
|
|
|
if (recipeName == "Time")
|
|
|
|
|
|
{
|
|
|
|
|
|
continue;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
//MFC和PC的最大值读取MFC的设定
|
|
|
|
|
|
string displayText = new Regex(@"\(M\d+\)").Match(step.Attributes["DisplayName"].Value).Value;
|
|
|
|
|
|
string maxConfig = $"PM.{module}.RecipeConfig.{strAbc(node.Attributes["DisplayName"].Value)}.{strAbc(step.Attributes["DisplayName"].Value)}.Max";
|
|
|
|
|
|
string minConfig = $"PM.{module}.RecipeConfig.{strAbc(node.Attributes["DisplayName"].Value)}.{strAbc(step.Attributes["DisplayName"].Value)}.Min";
|
|
|
|
|
|
if (displayText.Contains("M"))
|
|
|
|
|
|
{
|
|
|
|
|
|
maxConfig = $"PM.{module}.MFC.Mfc{displayText.Replace("(M", "").Replace(")", "")}.N2Scale";
|
|
|
|
|
|
}
|
|
|
|
|
|
else
|
|
|
|
|
|
{
|
|
|
|
|
|
displayText = new Regex(@"\(PC\d+\)").Match(step.Attributes["DisplayName"].Value).Value;
|
|
|
|
|
|
if (displayText.Contains("PC"))
|
|
|
|
|
|
{
|
|
|
|
|
|
maxConfig = $"PM.{module}.PC.PC{displayText.Replace("(PC", "").Replace(")", "")}.Scale";
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
double max = 0;// GetDoubleValueByName("PM", maxConfig);
|
|
|
|
|
|
double mix = 0;// GetDoubleValueByName("PM", minConfig);
|
|
|
|
|
|
if (displayText.Contains("M"))
|
|
|
|
|
|
{
|
|
|
|
|
|
max = GetDoubleValueByName("PM", maxConfig);
|
|
|
|
|
|
mix = max * GetDoubleValueByName("PM", $"PM.{module}.MFC.MinScale") / 100.0;
|
|
|
|
|
|
}
|
|
|
|
|
|
else
|
|
|
|
|
|
{
|
|
|
|
|
|
max = GetDoubleValueByName("PM", maxConfig);
|
|
|
|
|
|
mix = GetDoubleValueByName("PM", minConfig);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
lstRecipeDataColumn.Add(recipeName, new RecipeDataColumn() { maxNum = max, minMum = mix, disPlay = step.Attributes["DisplayName"].Value });
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
string content = RecipeFileManager.Instance.LoadRecipe("", recipeFile, false);
|
|
|
|
|
|
if (string.IsNullOrEmpty(content))
|
|
|
|
|
|
{
|
|
|
|
|
|
return false;
|
|
|
|
|
|
}
|
|
|
|
|
|
//获取工艺程序文件中所有步的内容
|
|
|
|
|
|
XmlDocument rcpDataDoc = new XmlDocument();
|
|
|
|
|
|
rcpDataDoc.LoadXml(content);
|
|
|
|
|
|
|
|
|
|
|
|
XmlNode nodeModule = rcpDataDoc.SelectSingleNode($"/Aitex/TableRecipeData/Module[@Name='{module}']");
|
|
|
|
|
|
if (nodeModule == null)
|
|
|
|
|
|
{
|
|
|
|
|
|
return false;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
XmlNodeList stepNodeList = nodeModule.SelectNodes($"Step");
|
|
|
|
|
|
for (int i = 0; i < stepNodeList.Count; i++)
|
|
|
|
|
|
{
|
|
|
|
|
|
XmlElement stepNode = stepNodeList[i] as XmlElement;
|
|
|
|
|
|
string stepNo = "";
|
|
|
|
|
|
foreach (XmlAttribute att in stepNode.Attributes)
|
|
|
|
|
|
{
|
|
|
|
|
|
//att.Name, att.Value
|
|
|
|
|
|
if (att.Name == "StepNo")
|
|
|
|
|
|
{
|
|
|
|
|
|
stepNo = att.Value;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if (lstRecipeDataColumn.ContainsKey(att.Name))
|
|
|
|
|
|
{
|
|
|
|
|
|
double cValue = 0;
|
|
|
|
|
|
double maxValue = lstRecipeDataColumn[att.Name].maxNum;
|
|
|
|
|
|
double minValue = lstRecipeDataColumn[att.Name].minMum;
|
|
|
|
|
|
string columnDisplay = lstRecipeDataColumn[att.Name].disPlay;
|
|
|
|
|
|
if (!double.TryParse(att.Value, out cValue))
|
|
|
|
|
|
{
|
|
|
|
|
|
strErrorInfo += "\r\n" + $"Step[{stepNo}]: Column [{columnDisplay}] value [{att.Value}] is incorrect numerical format";
|
|
|
|
|
|
}
|
|
|
|
|
|
else if (cValue > maxValue || cValue < minValue)
|
|
|
|
|
|
{
|
|
|
|
|
|
strErrorInfo += "\r\n" + $"Step {stepNo} {columnDisplay}: value {cValue} is out of range {minValue}-{maxValue}";
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if (!String.IsNullOrEmpty(strErrorInfo))
|
|
|
|
|
|
{
|
|
|
|
|
|
return false;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
/// <summary>
|
|
|
|
|
|
/// 去除小数点、箭头、括号（含括号里的内容）、横杠
|
|
|
|
|
|
/// </summary>
|
|
|
|
|
|
/// <param name="DisplayName"></param>
|
|
|
|
|
|
/// <returns></returns>
|
|
|
|
|
|
private static string strAbc(string DisplayName)
|
|
|
|
|
|
{
|
|
|
|
|
|
string displayname = DisplayName;
|
|
|
|
|
|
if (Regex.IsMatch(displayname.Substring(0, 1), @"^[+-]?\d*[.]?\d*$"))
|
|
|
|
|
|
{
|
|
|
|
|
|
displayname = displayname.Remove(0, displayname.IndexOf(".") + 1);//去除序号
|
|
|
|
|
|
}
|
|
|
|
|
|
displayname = displayname.Trim().Replace(" ", "").Replace(".", "").Replace("->", "_").Replace("-", "");
|
|
|
|
|
|
if (displayname.Contains("(") && displayname.Contains(")"))
|
|
|
|
|
|
{
|
|
|
|
|
|
displayname = displayname.Remove(displayname.IndexOf("("), displayname.IndexOf(")") - displayname.IndexOf("(") + 1);
|
|
|
|
|
|
}
|
|
|
|
|
|
return displayname;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private static double GetDoubleValueByName(string module, string name)
|
|
|
|
|
|
{
|
|
|
|
|
|
try
|
|
|
|
|
|
{
|
|
|
|
|
|
SCConfigItem item = SC.GetConfigItem(name);
|
|
|
|
|
|
if (item != null)
|
|
|
|
|
|
{
|
|
|
|
|
|
if (item.Type == "Integer")
|
|
|
|
|
|
{
|
|
|
|
|
|
return item.IntValue;
|
|
|
|
|
|
}
|
|
|
|
|
|
else if (item.Type == "Double")
|
|
|
|
|
|
{
|
|
|
|
|
|
return item.DoubleValue;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
if (name.EndsWith(".Default"))
|
|
|
|
|
|
{
|
|
|
|
|
|
return 0;
|
|
|
|
|
|
}
|
|
|
|
|
|
else if (name.EndsWith(".Min"))
|
|
|
|
|
|
{
|
|
|
|
|
|
return 0;
|
|
|
|
|
|
}
|
|
|
|
|
|
else if (name.EndsWith(".Max"))
|
|
|
|
|
|
{
|
|
|
|
|
|
return 10000;
|
|
|
|
|
|
}
|
|
|
|
|
|
return 0;
|
|
|
|
|
|
|
|
|
|
|
|
}
|
|
|
|
|
|
catch
|
|
|
|
|
|
{
|
|
|
|
|
|
return 0;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
