2023-03-03 15:42:13 +08:00
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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2023-04-13 15:35:13 +08:00
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using SicModules.EFEMs.Routines.Base;
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using SicModules.LLs.Routines;
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2023-03-03 15:42:13 +08:00
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2023-04-13 15:35:13 +08:00
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namespace SicModules.EFEMs.Routines
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2023-03-03 15:42:13 +08:00
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{
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public class TrayRobotPickRoutine : EfemBaseRoutine
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{
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/* Pick From Cassette,LoadLock(需要开门),Aligner/Unload(需要开门)
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* 1.判断目标是否有Wafer
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* 2.判断是否需要开门(包括气压等)
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* 3.判断顶针是否上升
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* 4.伸出,吸住
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* 5.ActionDone
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* 6.关门
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*
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*/
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//private LoadLock _loadLock;
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private EfemSlitValveRoutine _efemSlitValveOpenRoutine = new EfemSlitValveRoutine();
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private EfemSlitValveRoutine _efemSlitValveCloseRoutine = new EfemSlitValveRoutine();
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private LoadLockLiftRoutine _loadLockLiftDown = new LoadLockLiftRoutine();
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private ModuleName _source;
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private int _sourceSlot;
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private int _pickTimeout;
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enum RoutineStep
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{
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OpenSlitValve,
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SetLiftUp,
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CheckRobotReady,
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PickComplete,
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SetLiftDown,
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TimeDelay1,
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CloseSlitValve,
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SetExtendToDo,
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Pick,
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CheckTrayStatuBeforePick,
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ClearRobortExtendToDo
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}
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public TrayRobotPickRoutine()
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{
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Module = ModuleName.EFEM.ToString();
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Name = "TrayRobortPick";
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}
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public void Init(ModuleName source, int sourceSlot)
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{
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_source = source;
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_sourceSlot = sourceSlot;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (WaferManager.Instance.CheckHasTray(ModuleName.TrayRobot, 0))
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{
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Stop("Can not pick,TrayRobot has wafer");
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return Result.FAIL;
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}
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//Pick之前先,根据Sensor检测是否有盘
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if (!WaferManager.Instance.CheckHasTray(_source, _sourceSlot))
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{
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EV.PostWarningLog(Module, $"Can not pick, {_source} slot {_sourceSlot} no tray");
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return Result.FAIL;
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}
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if (TrayRobot.RobotState != RobotStateEnum.Idle)
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{
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EV.PostWarningLog(Module, $"Can not pick, WaferRobot is not Idle");
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return Result.FAIL;
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}
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if (_source == ModuleName.CassBL)
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{
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//检测凸片Sensor和有无Sensor
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if (_cassBLWaferConvex.Value)
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{
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EV.PostWarningLog(Module, $"Can not pick,{_source} check wafer convex");
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return Result.FAIL;
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}
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if (!_cassBL6Inch.Value)
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{
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EV.PostWarningLog(Module, $"Can not pick,{_source} sensor check no cassette");
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return Result.FAIL;
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}
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}
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if (_source == ModuleName.LoadLock && !_llLift.IsDown)
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{
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EV.PostWarningLog(Module, $"Can not pick,{_source} lift is not in down position!");
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return Result.FAIL;
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}
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_efemSlitValveOpenRoutine.Init(_source, ModuleName.TrayRobot, true);
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_efemSlitValveCloseRoutine.Init(_source, ModuleName.TrayRobot, false);
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_loadLockLiftDown.Init(false);
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_pickTimeout = SC.GetConfigItem($"{ModuleName.TrayRobot}.MotionTimeout").IntValue;
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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if (_source == ModuleName.LoadLock)
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{
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CheckRobotReady((int)RoutineStep.CheckRobotReady, TrayRobot, _pickTimeout);
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CheckTrayStatuBeforePick((int)RoutineStep.CheckTrayStatuBeforePick, TrayRobot, 10); //Pick前先检查
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _efemSlitValveOpenRoutine); //打开闸板阀
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SetTrayRobortExtendToDO((int)RoutineStep.SetExtendToDo, _source, 10); //设置ExtendToDO,用于检测InterLock
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Pick((int)RoutineStep.Pick, TrayRobot, _source, _sourceSlot, _pickTimeout);
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ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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ExecuteRoutine((int)RoutineStep.CloseSlitValve, _efemSlitValveCloseRoutine); //关闭闸板阀
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}
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else
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{
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CheckRobotReady((int)RoutineStep.CheckRobotReady, TrayRobot, _pickTimeout);
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CheckTrayStatuBeforePick((int)RoutineStep.CheckTrayStatuBeforePick, TrayRobot, 10); //Pick前先检查
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Pick((int)RoutineStep.Pick, TrayRobot, _source, _sourceSlot, _pickTimeout); //机械手到位,夹爪打开
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ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
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}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException ex)
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{
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LOG.Error(ex.ToString());
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return Result.FAIL;
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}
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Notify($"Finish");
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return Result.DONE;
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}
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public override void Abort()
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{
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TrayRobot.Abort();
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base.Abort();
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}
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}
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}
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