2023-03-28 13:24:11 +08:00
<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type= "Sic" xmlns:xsi= "http://www.w3.org/2001/XMLSchema-instance" >
<IoTCs classType= "Aitex.Core.RT.Device.Devices.IoTC" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoTC id= "TC1" display= "TC1" schematicId= "TC1" aioType= "float" aiL1WorkingOPFeedBack= "AI_PSUInnerWorkingOP" aiL2WorkingOPFeedBack= "AI_PSUMiddleWorkingOP" aiL3WorkingOPFeedBack= "AI_PSUOuterWorkingOP" aiL1PVFeedBack= "AI_PSUInnerPV" aiL2PVFeedBack= "AI_PSUMiddlePV" aiL3PVFeedBack= "AI_PSUOuterPV" diL1TempHighAlarmFeedBack= "DI_PSUInnerTempHAlarm" diL2TempHighAlarmFeedBack= "DI_PSUMiddleTempHAlarm" diL3TempHighAlarmFeedBack= "DI_PSUOuterTempHAlarm" diL1TempLowAlarmFeedBack= "DI_PSUInnerTempLAlarm" diL2TempLowAlarmFeedBack= "DI_PSUMiddleTempLAlarm" diL3TempLowAlarmFeedBack= "DI_PSUOuterTempLAlarm" aoHeaterModeSetPoint= "AO_PSUHeaterMode" aoPowerRefSetPoint= "AO_PSUPowerRef" aoL1RatioSetPoint= "AO_PSUInnerRatio" aoL2RatioSetPoint= "AO_PSUMiddleRatio" aoL3RatioSetPoint= "AO_PSUOuterRatio" aoL1RatedSetPoint= "AO_PSUInnerRatedValue" aoL2RatedSetPoint= "AO_PSUMiddleRatedValue" aoL3RatedSetPoint= "AO_PSUOuterRatedValue" aoL1LoopModeSetPoint= "AO_PSUInnerLoopMode" aoL2LoopModeSetPoint= "AO_PSUMiddleLoopMode" aoL3LoopModeSetPoint= "AO_PSUOuterLoopMode" aoL1TargetSPSetPoint= "AO_PSUInnerTargetSP" aoL2TargetSPSetPoint= "AO_PSUMiddleTargetSP" aoL3TargetSPSetPoint= "AO_PSUOuterTargetSP" aoL1TargetOPSetPoint= "AO_PSUInnerTargetOP" aoL2TargetOPSetPoint= "AO_PSUMiddleTargetOP" aoL3TargetOPSetPoint= "AO_PSUOuterTargetOP" aoL1RecipeValueSetPoint= "AO_PSUInnerRecipeValue" aoL2RecipeValueSetPoint= "AO_PSUMiddleRecipeValue" aoL3RecipeValueSetPoint= "AO_PSUOuterRecipeValue" aoL1InputTempSetPoint= "AO_PSUInnerPyroTemp" aoL2InputTempSetPoint= "AO_PSUMiddlePyroTemp" aoL3InputTempSetPoint= "AO_PSUOuterPyroTemp" aoTCPyroModeSetPoint= "AO_PSUTCPyroMode" aoL1VoltageLimited= "AO_PSUInnerVoltageLimited" aoL2VoltageLimited= "AO_PSUMiddleVoltageLimited" aoL3VoltageLimited= "AO_PSUOuterVoltageLimited" aoL1TempHighLimitSetPoint= "AO_PSUInnerTempHighLimit" aoL2TempHighLimitSetPoint= "AO_PSUMiddleTempHighLimit" aoL3TempHighLimitSetPoint= "AO_PSUOuterTempHighLimit" aoL1TempLowLimitSetPoint= "AO_PSUInnerTempLowLimit" aoL2TempLowLimitSetPoint= "AO_PSUMiddleTempLowLimit" aoL3TempLowLimitSetPoint= "AO_PSUOuterTempLowLimit" aiTtempCtrlTCIN= "AI_PSUTC" aoPSU1Y= "AO_PSU1Y" aoPSU2Y= "AO_PSU2Y" aoPSU3Y= "AO_PSU3Y" />
<IoTC id= "TC2" display= "TC2" schematicId= "TC2" aioType= "float" aiL1WorkingOPFeedBack= "AI_SCRUpperWorkingOP" aiL2WorkingOPFeedBack= "AI_SCRMiddleWorkingOP" aiL3WorkingOPFeedBack= "AI_SCRLowerWorkingOP" aiL1PVFeedBack= "AI_SCRUpperPV" aiL2PVFeedBack= "AI_SCRMiddlePV" aiL3PVFeedBack= "AI_SCRLowerPV" diL1TempHighAlarmFeedBack= "DI_SCRUpperTempHAlarm" diL2TempHighAlarmFeedBack= "DI_SCRMiddleTempHAlarm" diL3TempHighAlarmFeedBack= "DI_SCRLowerTempHAlarm" diL1TempLowAlarmFeedBack= "DI_SCRUpperTempLAlarm" diL2TempLowAlarmFeedBack= "DI_SCRMiddleTempLAlarm" diL3TempLowAlarmFeedBack= "DI_SCRLowerTempLAlarm" aoHeaterModeSetPoint= "AO_SCRHeaterMode" aoPowerRefSetPoint= "AO_SCRPowerRef" aoL1RatioSetPoint= "AO_SCRUpperRatio" aoL2RatioSetPoint= "AO_SCRMiddleRatio" aoL3RatioSetPoint= "AO_SCRLowerRatio" aoL1RatedSetPoint= "AO_SCRUpperRatedValue" aoL2RatedSetPoint= "AO_SCRMiddleRatedValue" aoL3RatedSetPoint= "AO_SCRLowerRatedValue" aoL1LoopModeSetPoint= "AO_SCRUpperLoopMode" aoL2LoopModeSetPoint= "AO_SCRMiddleLoopMode" aoL3LoopModeSetPoint= "AO_SCRLowerLoopMode" aoL1TargetSPSetPoint= "AO_SCRUpperTargetSP" aoL2TargetSPSetPoint= "AO_SCRMiddleTargetSP" aoL3TargetSPSetPoint= "AO_SCRLowerTargetSP" aoL1TargetOPSetPoint= "AO_SCRUpperTargetOP" aoL2TargetOPSetPoint= "AO_SCRMiddleTargetOP" aoL3TargetOPSetPoint= "AO_SCRLowerTargetOP" aoL1RecipeValueSetPoint= "AO_SCRUpperRecipeValue" aoL2RecipeValueSetPoint= "AO_SCRMiddleRecipeValue" aoL3RecipeValueSetPoint= "AO_SCRLowerRecipeValue" aoL1InputTempSetPoint= "AO_SCRUpperPyroTemp" aoL2InputTempSetPoint= "AO_SCRMiddlePyroTemp" aoL3InputTempSetPoint= "AO_SCRLowerPyroTemp" aoTCPyroModeSetPoint= "AO_SCRTCPyroMode" aoL1VoltageLimited= "AO_SCRUpperVoltageLimited" aoL2VoltageLimited= "AO_SCRMiddleVoltageLimited2" aoL3VoltageLimited= "AO_SCRLowerVoltageLimited" aoL1TempHighLimitSetPoint= "AO_SCRUpperTempHighLimit" aoL2TempHighLimitSetPoint= "AO_SCRMiddleTempHighLimit" aoL3TempHighLimitSetPoint= "AO_SCRLowerTempHighLimit" aoL1TempLowLimitSetPoint= "AO_SCRUpperTempLowLimit" aoL2TempLowLimitSetPoint= "AO_SCRMiddleTempLowLimit" aoL3TempLowLimitSetPoint= "AO_SCRLowerTempLowLimit" aiTtempCtrlTCIN= "AI_SCRTC" />
</IoTCs>
<IoOmronTemps classType= "Aitex.Core.RT.Device.Devices.IoOmronTemp" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoTC id= "OmronTemp" display= "OmronTemp" schematicId= "OmronTemp" aioType= "float" aoCH1= "" aoCH2= "" aoCH3= "" aoCH4= "" aoCH5= "" aoCH6= "" aoCH7= "" aoCH8= "" aoCH9= "" aoCH10= "" aoCH11= "" aoCH12= "" doLineHeaterEnable= "DO_LineHeaterEnable" />
</IoOmronTemps>
<IoPSUs classType= "Aitex.Core.RT.Device.Devices.IoPSU" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPSU id= "PSU1" display= "PSU1" schematicId= "PSU1" aioType= "float" aiOutputVoltage= "AI_PSU1OutputVoltage" aiOutputArms= "AI_PSU1OutputArms" aiOutputPower= "AI_PSU1OutputPower" aiSimVoltage= "AI_PSU1SimVoltage" aiSimArms= "AI_PSU1SimArms" doStatus= "DO_PSU1Enable" doReset= "DO_PSU1Reset" aoConstant= "AO_PSU1Constant" diStatus= "DI_InnerHeaterEnableFB" diAlarm= "DI_PSU1Alarm" AlarmText= "Alarm66 PSU1 Alarm[DI-320]" diCommunicationError= "DI_PSU1dpCommunicationError" commAlarmText= "" doHeatEnable= "DO_HeaterEnable" diHeatEnable= "DI_PSUEnableFB" doRelatedEnable= "DO_InnerHeaterEnable" />
<IoPSU id= "PSU2" display= "PSU2" schematicId= "PSU2" aioType= "float" aiOutputVoltage= "AI_PSU2OutputVoltage" aiOutputArms= "AI_PSU2OutputArms" aiOutputPower= "AI_PSU2OutputPower" aiSimVoltage= "AI_PSU2SimVoltage" aiSimArms= "AI_PSU2SimArms" doStatus= "DO_PSU2Enable" doReset= "DO_PSU2Reset" aoConstant= "AO_PSU2Constant" diStatus= "DI_MiddleHeaterEnableFB" diAlarm= "DI_PSU2Alarm" AlarmText= "Alarm67 PSU2 Alarm[DI-321]" diCommunicationError= "DI_PSU2dpCommunicationError" commAlarmText= "" doHeatEnable= "DO_HeaterEnable" diHeatEnable= "DI_PSUEnableFB" doRelatedEnable= "DO_MiddleHeaterEnable" />
<IoPSU id= "PSU3" display= "PSU3" schematicId= "PSU3" aioType= "float" aiOutputVoltage= "AI_PSU3OutputVoltage" aiOutputArms= "AI_PSU3OutputArms" aiOutputPower= "AI_PSU3OutputPower" iSimVoltage= "AI_PSU3SimVoltage" aiSimArms= "AI_PSU3SimArms" doStatus= "DO_PSU3Enable" doReset= "DO_PSU3Reset" aoConstant= "AO_PSU3Constant" diStatus= "DI_OuterHeaterEnableFB" diAlarm= "DI_PSU3Alarm" AlarmText= "Alarm68 PSU3 Alarm[DI-322]" diCommunicationError= "DI_PSU3dpCommunicationError" commAlarmText= "" doHeatEnable= "DO_HeaterEnable" diHeatEnable= "DI_PSUEnableFB" doRelatedEnable= "DO_OuterHeaterEnable" />
</IoPSUs>
<IoSCRs classType= "Aitex.Core.RT.Device.Devices.IoSCR" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSCR id= "SCR1" display= "SCR1" schematicId= "SCR1" aioType= "float" aiVoltage= "AI_SCR1Voltage" aiArms= "AI_SCR1Arms" aiPower= "AI_SCR1Power" diStatus= "DI_SCR1Status" doReset= "DO_SCR1Reset" doStatus= "DO_SCR1Enable" diAlarm= "DI_SCR1Alarm" AlarmText= "" />
<IoSCR id= "SCR2" display= "SCR2" schematicId= "SCR2" aioType= "float" aiVoltage= "AI_SCR2Voltage" aiArms= "AI_SCR2Arms" aiPower= "AI_SCR2Power" diStatus= "DI_SCR2Status" doReset= "DO_SCR2Reset" doStatus= "DO_SCR2Enable" diAlarm= "DI_SCR2Alarm" AlarmText= "" />
<IoSCR id= "SCR3" display= "SCR3" schematicId= "SCR3" aioType= "float" aiVoltage= "AI_SCR3Voltage" aiArms= "AI_SCR3Arms" aiPower= "AI_SCR3Power" diStatus= "DI_SCR3Status" doReset= "DO_SCR3Reset" doStatus= "DO_SCR3Enable" diAlarm= "DI_SCR3Alarm" AlarmText= "" />
</IoSCRs>
<IoUPSs classType= "Aitex.Core.RT.Device.Devices.IoUPS" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoUPS id= "UPS" display= "UPS" schematicId= "UPS" doEnable= "DO_UPSEnable" doLowBattery= "DO_UPSLowBattery" />
</IoUPSs>
<IoHeats classType= "Aitex.Core.RT.Device.Devices.IoHeat" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoHeat module= "" id= "PMHeatEnable" display= "HeatEnable" schematicId= "HeatEnable" diEnable= "DI_PSUEnableFB" doEnable= "DO_HeaterEnable" />
</IoHeats>
<IoValves classType= "Aitex.Core.RT.Device.Devices.IoValve" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoValve id= "V27" display= "PumpBypass" schematicId= "V27" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PumpBypassFB(V27)" doOpen= "DO_PumpBypass(V27)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V31" display= "H2Supply" schematicId= "V31" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SupplyFB(V31)" doOpen= "DO_H2Supply(V31)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V32" display= "ArSupply" schematicId= "V32" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_ArSupplyFB(V32)" doOpen= "DO_ArSupply(V32)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33" display= "H2ArSwitch" schematicId= "V33" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHH2/ArSwitchFB(V33)" doOpen= "DO_SHH2/ArSwitch(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33s" display= "H2ArSwitch" schematicId= "V33s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SHH2/ArSwitchFB(V33)" doOpen= "DO_SHH2/ArSwitch(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V35" display= "H2ArLine1" schematicId= "V35" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2ArLine1FB(V35)" doOpen= "DO_H2ArLine1(V35)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V36" display= "H2ArLine2" schematicId= "V36" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2ArLine2FB(V36)" doOpen= "DO_H2ArLine2(V36)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37" display= "N2.Switch" schematicId= "V37" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_N2SwitchFB(V37)" doOpen= "DO_N2Switch(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37s" display= "N2.Switch" schematicId= "V37s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_N2SwitchFB(V37)" doOpen= "DO_N2Switch(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39" display= "Diluted N2 Run" schematicId= "V39" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_DilutedN2Run/VentFB(V39)" doOpen= "DO_DilutedN2Run/Vent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39s" display= "Diluted N2 Vent" schematicId= "V39s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_DilutedN2Run/VentFB(V39)" doOpen= "DO_DilutedN2Run/Vent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40" display= "High N2 Run" schematicId= "V40" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_HighN2Run/VentFB(V40)" doOpen= "DO_HighN2Run/Vent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40s" display= "High N2 Vent" schematicId= "V40s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_HighN2Run/VentFB(V40)" doOpen= "DO_HighN2Run/Vent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V41" display= "TMA Run" schematicId= "V41" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMARunFB(V41)" doOpen= "DO_TMARun(V41)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V42" display= "TMA Vent" schematicId= "V42" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_TMAVentFB(V42)" doOpen= "DO_TMAVent(V42)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43" display= "TMARelease" schematicId= "V43" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMAReleaseFB(V43)" doOpen= "DO_TMARelease(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43s" display= "TMARelease" schematicId= "V43s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMAReleaseFB(V43)" doOpen= "DO_TMARelease(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V45" display= "TMABypass" schematicId= "V45" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_TMABypassFB(V45)" doOpen= "DO_TMABypass(V45)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46" display= "TMAVac" schematicId= "V46" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMAVacFB(V46)" doOpen= "DO_TMAVac(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46s" display= "TMAVac" schematicId= "V46s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMAVacFB(V46)" doOpen= "DO_TMAVac(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48" display= "TCSRelease" schematicId= "V48" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSReleaseFB(V48)" doOpen= "DO_TCSRelease(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48s" display= "TCSRelease" schematicId= "V48s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSReleaseFB(V48)" doOpen= "DO_TCSRelease(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V49" display= "TCSBypass" schematicId= "V49" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_TCSBypassFB(V49)" doOpen= "DO_TCSBypass(V49)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50" display= "TCSVac" schematicId= "V50" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSVacFB(V50)" doOpen= "DO_TCSVac(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50s" display= "TCSVac" schematicId= "V50s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSVacFB(V50)" doOpen= "DO_TCSVac(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51" display= "HCLSwitch" schematicId= "V51" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_HCLSwitchFB(V51)" doOpen= "DO_HCLSwitch(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51s" display= "HCLSwitch" schematicId= "V51s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_HCLSwitchFB(V51)" doOpen= "DO_HCLSwitch(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52" display= "SiH4Switch" schematicId= "V52" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SiH4SwitchFB(V52)" doOpen= "DO_SiH4Switch(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52s" display= "SiH4Switch" schematicId= "V52s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SiH4SwitchFB(V52)" doOpen= "DO_SiH4Switch(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53" display= "TCSRun" schematicId= "V53" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSRunVentFB" doOpen= "DO_TCSRun/Vent(V53)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53s" display= "TCSVent" schematicId= "V53s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_TCSRunVentFB" doOpen= "DO_TCSRun/Vent(V53)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54" display= "HCLRun" schematicId= "V54" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_HCLRun/VentFB(V54)" doOpen= "DO_HCLRun/Vent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54s" display= "HCLVent" schematicId= "V54s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_HCLRun/VentFB(V54)" doOpen= "DO_HCLRun/Vent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V55" display= "SiH4Run" schematicId= "V55" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SiH4RunFB(V55)" doOpen= "DO_SiH4Run(V55)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V56" display= "SiH4Vent" schematicId= "V56" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SiH4VentFB(V56)" doOpen= "DO_SiH4Vent(V56)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58" display= "C2H4Switch" schematicId= "V58" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_C2H4SwitchFB(V58)" doOpen= "DO_C2H4Switch(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58s" display= "C2H4Switch" schematicId= "V58s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_C2H4SwitchFB(V58)" doOpen= "DO_C2H4Switch(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V59" display= "C2H4Run" schematicId= "V59" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_C2H4RunFB(V59)" doOpen= "DO_C2H4Run(V59)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V60" display= "C2H4Vent" schematicId= "V60" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_C2H4VentFB(V60)" doOpen= "DO_C2H4Vent(V60)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V61" display= "DoppingFinal" schematicId= "V61" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_DoppingFinalFB(V61)" doOpen= "DO_DoppingFinal(V61)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V62" display= "SilaneFinal" schematicId= "V62" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SilaneFinalFB(V62)" doOpen= "DO_SilaneFinal(V62)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V63" display= "PropaneFinal" schematicId= "V63" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_PropaneFinalFB(V63)" doOpen= "DO_PropaneFinal(V63)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V68" display= "ChamBodyArPurge" schematicId= "V68" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_ChamBodyArPurgeFB(V68)" doOpen= "DO_ChamBodyArPurge(V68)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V69" display= "ReactorLeakCheck" schematicId= "V69" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_ReactorLeakCheckFB(V69)" doOpen= "DO_ReactorLeakCheck(V69)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V70" display= "TMPressBalance" schematicId= "V70" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMPressBalanceFB(V70)" doOpen= "DO_TMPressBalance(V70)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V72" display= "GasBoxVentPump" schematicId= "V72" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_GasBoxVentPumpFB(V72)" doOpen= "DO_GasBoxVentPump(V72)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V73" display= "MOVac" schematicId= "V73" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MOVacFB(V73)" doOpen= "DO_MOVac(V73)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V74" display= "GasboxLeakCheck" schematicId= "V74" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_GasboxLeakCheckFB(V74)" doOpen= "DO_GasboxLeakCheck(V74)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V75" display= "DORVac" schematicId= "V75" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_DORVacFB(V75)" doOpen= "DO_DORVac(V75)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V76" display= "DORRefill" schematicId= "V76" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_DORRefillFB(V76)" doOpen= "DO_DORRefill(V76)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V87" display= "SHPurgeFinal" schematicId= "V87" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHPurgeFinalFB(V87)" doOpen= "DO_SHPurgeFinal(V87)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V88" display= "OuterGasFinal" schematicId= "V88" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_OuterGasFinalFB(V88)" doOpen= "DO_OuterGasFinal(V88)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V89" display= "InnerGasFinal" schematicId= "V89" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_InnerGasFinalFB(V89)" doOpen= "DO_InnerGasFinal(V89)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V90" display= "MiddleGasFinal" schematicId= "V90" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MiddleGasFinalFB(V90)" doOpen= "DO_MiddleGasFinal(V90)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V91" display= "OpticPurgeFinal" schematicId= "V91" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_OpticPurgeFinalFB(V91)" doOpen= "DO_OpticPurgeFinal(V91)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V92" display= "GasRingPurgeFinal" schematicId= "V92" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_GasRingPurgeFinalFB(V92)" doOpen= "DO_GasRingPurgeFinal(V92)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V93" display= "ChamberPurgeFinal" schematicId= "V93" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_ChamberPurgeFinalFB(V93)" doOpen= "DO_ChamberPurgeFinal(V93)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V94" display= "RotationUpPurgeFinal" schematicId= "V94" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_RotationUpPurgeFinalFB(V94)" doOpen= "DO_RotationUpPurgeFinal(V94)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V95" display= "ConfinementRingFinal" schematicId= "V95" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_ConfinementRingFinalFB(V95)" doOpen= "DO_ConfinementRingFinal(V95)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V96" display= "HeaterWFFinal" schematicId= "V96" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_HeaterWFFinalFB(V96)" doOpen= "DO_HeaterWFFinal(V96)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V97" display= "CarryGasFinal" schematicId= "V97" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "" doOpen= "DO_CarryGasFinal(V97)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V111" display= "OpenLidPurge" schematicId= "V111" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "" doOpen= "DO_OpenLidPurge" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "EPV2" display= "EPV2" schematicId= "EPV2" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_EPV2-1FB" doOpen= "DO_EPV2" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "HeatEnable" display= "HeatEnable" schematicId= "HeatEnable" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PSUEnableFB" doOpen= "DO_HeaterEnable" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V99" display= "C2H4SwitchHTPurge" schematicId= "V99" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_C2H4SwitchHTPurge" doOpen= "DO_C2H4SwitchHTPurge" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V99s" display= "C2H4SwitchHTPurge" schematicId= "V99s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_C2H4SwitchHTPurge" doOpen= "DO_C2H4SwitchHTPurge" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V25" display= "GasBoxVentBypass" schematicId= "V99" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "" doOpen= "DO_GasBoxVentBypass(V25)" diCloseSensor= "" diOpenSensor= "" />
</IoValves>
<IoThrottleValves classType= "Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoThrottleValve id= "TV" display= "TV" schematicId= "TV" unit= "mbar" scBasePath= "PM.{module}" modeValuePressure= "5" modeValuePosition= "2" modeValueClose= "3" modeValueOpen= "4" aioType= "float" aiStatus= "AI_TVmode" aiPositionFeedback= "AI_ActualPositon" aiPressureFeedback= "AI_ActualPressure" aoPressureMode= "AO_ValveModeSetpoint" aoPositionSetPoint= "AO_SetpointPositon" aoPressureSetPoint= "AO_SetpointPressure" doTVValveEnable= "DO_TVEnable" diTVValveEnable= "" />
</IoThrottleValves>
<IoMfcs classType= "Aitex.Core.RT.Device.Devices.IoMFC" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoMfc3 id= "Mfc1" display= "Mfc1" schematicId= "Mfc1" unit= "sccm" aiActMode= "AI_M1ActMode" aoSetMode= "AO_M1CtrlMode" aiFlow= "AI_M1" aoFlow= "AO_M1" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC01Offline" AlarmText= "Alarm101 MFC01 Offline[DI-351]" />
<IoMfc3 id= "Mfc2" display= "Mfc2" schematicId= "Mfc2" unit= "sccm" aiActMode= "AI_M2ActMode" aoSetMode= "AO_M2CtrlMode" aiFlow= "AI_M2" aoFlow= "AO_M2" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC02Offline" AlarmText= "Alarm102 MFC02 Offline[DI-352]" />
<IoMfc3 id= "Mfc3" display= "Mfc3" schematicId= "Mfc3" unit= "sccm" aiActMode= "AI_M3ActMode" aoSetMode= "AO_M3CtrlMode" aiFlow= "AI_M3" aoFlow= "AO_M3" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC03Offline" AlarmText= "Alarm103 MFC03 Offline[DI-353]" />
<IoMfc3 id= "Mfc4" display= "Mfc4" schematicId= "Mfc4" unit= "sccm" aiActMode= "AI_M4ActMode" aoSetMode= "AO_M4CtrlMode" aiFlow= "AI_M4" aoFlow= "AO_M4" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC04Offline" AlarmText= "Alarm104 MFC04 Offline[DI-354]" />
<IoMfc3 id= "Mfc5" display= "Mfc5" schematicId= "Mfc5" unit= "sccm" aiActMode= "AI_M5ActMode" aoSetMode= "AO_M5CtrlMode" aiFlow= "AI_M5" aoFlow= "AO_M5" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC05Offline" AlarmText= "Alarm105 MFC05 Offline[DI-355]" />
<IoMfc3 id= "Mfc6" display= "Mfc6" schematicId= "Mfc6" unit= "sccm" aiActMode= "AI_M6ActMode" aoSetMode= "AO_M6CtrlMode" aiFlow= "AI_M6" aoFlow= "AO_M6" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC06Offline" AlarmText= "Alarm106 MFC06 Offline[DI-356]" />
<IoMfc3 id= "Mfc7" display= "Mfc7" schematicId= "Mfc7" unit= "sccm" aiActMode= "AI_M7ActMode" aoSetMode= "AO_M7CtrlMode" aiFlow= "AI_M7" aoFlow= "AO_M7" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC07Offline" AlarmText= "Alarm107 MFC07 Offline[DI-357]" />
<IoMfc3 id= "Mfc8" display= "Mfc8" schematicId= "Mfc8" unit= "sccm" aiActMode= "AI_M8ActMode" aoSetMode= "AO_M8CtrlMode" aiFlow= "AI_M8" aoFlow= "AO_M8" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC08Offline" AlarmText= "Alarm108 MFC08 Offline[DI-358]" />
<IoMfc3 id= "Mfc9" display= "Mfc9" schematicId= "Mfc9" unit= "sccm" aiActMode= "AI_M9ActMode" aoSetMode= "AO_M9CtrlMode" aiFlow= "AI_M9" aoFlow= "AO_M9" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC09Offline" AlarmText= "Alarm109 MFC09 Offline[DI-359]" />
<IoMfc3 id= "Mfc10" display= "Mfc10" schematicId= "Mfc10" unit= "sccm" aiActMode= "AI_M10ActMode" aoSetMode= "AO_M10CtrlMode" aiFlow= "AI_M10" aoFlow= "AO_M10" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC10Offline" AlarmText= "Alarm110 MFC10 Offline[DI-360]" />
<IoMfc3 id= "Mfc11" display= "Mfc11" schematicId= "Mfc11" unit= "sccm" aiActMode= "AI_M11ActMode" aoSetMode= "AO_M11CtrlMode" aiFlow= "AI_M11" aoFlow= "AO_M11" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC11Offline" AlarmText= "Alarm111 MFC11 Offline[DI-361]" />
<IoMfc3 id= "Mfc12" display= "Mfc12" schematicId= "Mfc12" unit= "sccm" aiActMode= "AI_M12ActMode" aoSetMode= "AO_M12CtrlMode" aiFlow= "AI_M12" aoFlow= "AO_M12" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC12Offline" AlarmText= "Alarm112 MFC12 Offline[DI-362]" />
<IoMfc3 id= "Mfc13" display= "Mfc13" schematicId= "Mfc13" unit= "sccm" aiActMode= "AI_M13ActMode" aoSetMode= "AO_M13CtrlMode" aiFlow= "AI_M13" aoFlow= "AO_M13" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC13Offline" AlarmText= "Alarm113 MFC13 Offline[DI-363]" />
<IoMfc3 id= "Mfc14" display= "Mfc14" schematicId= "Mfc14" unit= "sccm" aiActMode= "AI_M14ActMode" aoSetMode= "AO_M14CtrlMode" aiFlow= "AI_M14" aoFlow= "AO_M14" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC14Offline" AlarmText= "Alarm114 MFC14 Offline[DI-364]" />
<IoMfc3 id= "Mfc15" display= "Mfc15" schematicId= "Mfc15" unit= "sccm" aiActMode= "AI_M15ActMode" aoSetMode= "AO_M15CtrlMode" aiFlow= "AI_M15" aoFlow= "AO_M15" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC15Offline" AlarmText= "Alarm115 MFC15 Offline[DI-365]" />
<IoMfc3 id= "Mfc16" display= "Mfc16" schematicId= "Mfc16" unit= "sccm" aiActMode= "AI_M16ActMode" aoSetMode= "AO_M16CtrlMode" aiFlow= "AI_M16" aoFlow= "AO_M16" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC16Offline" AlarmText= "Alarm116 MFC16 Offline[DI-366]" />
<IoMfc3 id= "Mfc19" display= "Mfc19" schematicId= "Mfc19" unit= "sccm" aiActMode= "AI_M19ActMode" aoSetMode= "AO_M19CtrlMode" aiFlow= "AI_M19" aoFlow= "AO_M19" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC19Offline" AlarmText= "Alarm119 MFC19 Offline[DI-369]" />
<IoMfc3 id= "Mfc20" display= "Mfc20" schematicId= "Mfc20" unit= "sccm" aiActMode= "AI_M20ActMode" aoSetMode= "AO_M20CtrlMode" aiFlow= "AI_M20" aoFlow= "AO_M20" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC20Offline" AlarmText= "Alarm120 MFC20 Offline[DI-370]" />
<IoMfc3 id= "Mfc22" display= "Mfc22" schematicId= "Mfc22" unit= "sccm" aiActMode= "AI_M22ActMode" aoSetMode= "AO_M22CtrlMode" aiFlow= "AI_M22" aoFlow= "AO_M22" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC22Offline" AlarmText= "Alarm122 MFC22 Offline[DI-372]" />
<IoMfc3 id= "Mfc23" display= "Mfc23" schematicId= "Mfc23" unit= "sccm" aiActMode= "AI_M23ActMode" aoSetMode= "AO_M23CtrlMode" aiFlow= "AI_M23" aoFlow= "AO_M23" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC23Offline" AlarmText= "Alarm123 MFC23 Offline[DI-373]" />
<IoMfc3 id= "Mfc25" display= "Mfc25" schematicId= "Mfc25" unit= "sccm" aiActMode= "AI_M25ActMode" aoSetMode= "AO_M25CtrlMode" aiFlow= "AI_M25" aoFlow= "AO_M25" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC25Offline" AlarmText= "Alarm125 MFC25 Offline[DI-375]" />
<IoMfc3 id= "Mfc26" display= "Mfc26" schematicId= "Mfc26" unit= "sccm" aiActMode= "AI_M26ActMode" aoSetMode= "AO_M26CtrlMode" aiFlow= "AI_M26" aoFlow= "AO_M26" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC26Offline" AlarmText= "Alarm126 MFC26 Offline[DI-376]" />
<IoMfc3 id= "Mfc27" display= "Mfc27" schematicId= "Mfc27" unit= "sccm" aiActMode= "AI_M27ActMode" aoSetMode= "AO_M27CtrlMode" aiFlow= "AI_M27" aoFlow= "AO_M27" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC27Offline" AlarmText= "Alarm127 MFC27 Offline[DI-377]" />
<IoMfc3 id= "Mfc28" display= "Mfc28" schematicId= "Mfc28" unit= "sccm" aiActMode= "AI_M28ActMode" aoSetMode= "AO_M28CtrlMode" aiFlow= "AI_M28" aoFlow= "AO_M28" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC28Offline" AlarmText= "Alarm128 MFC28 Offline[DI-378]" />
<IoMfc3 id= "Mfc29" display= "Mfc29" schematicId= "Mfc29" unit= "sccm" aiActMode= "AI_M29ActMode" aoSetMode= "AO_M29CtrlMode" aiFlow= "AI_M29" aoFlow= "AO_M29" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC29Offline" AlarmText= "Alarm129 MFC29 Offline[DI-379]" />
<IoMfc3 id= "Mfc40" display= "Mfc40" schematicId= "Mfc40" unit= "sccm" aiActMode= "AI_M40ActMode" aoSetMode= "AO_M40CtrlMode" aiFlow= "AI_M40" aoFlow= "AO_M40" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "" AlarmText= "" />
<IoMfc3 id= "Mfc31" display= "Mfc31" schematicId= "Mfc31" unit= "sccm" aiActMode= "AI_M31ActMode" aoSetMode= "AO_M31CtrlMode" aiFlow= "AI_M31" aoFlow= "AO_M31" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC31Offline" AlarmText= "Alarm131 MFC31 Offline[DI-381]" />
<IoMfc3 id= "Mfc32" display= "Mfc32" schematicId= "Mfc32" unit= "sccm" aiActMode= "AI_M32ActMode" aoSetMode= "AO_M32CtrlMode" aiFlow= "AI_M32" aoFlow= "AO_M32" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC32Offline" AlarmText= "Alarm132 MFC32 Offline[DI-382]" />
<IoMfc3 id= "Mfc33" display= "Mfc33" schematicId= "Mfc33" unit= "sccm" aiActMode= "AI_M33ActMode" aoSetMode= "AO_M33CtrlMode" aiFlow= "AI_M33" aoFlow= "AO_M33" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC33Offline" AlarmText= "Alarm133 MFC33 Offline[DI-383]" />
<IoMfc3 id= "Mfc35" display= "Mfc35" schematicId= "Mfc35" unit= "sccm" aiActMode= "AI_M35ActMode" aoSetMode= "AO_M35CtrlMode" aiFlow= "AI_M35" aoFlow= "AO_M35" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC35Offline" AlarmText= "Alarm135 MFC35 Offline[DI-385]" />
<IoMfc3 id= "Mfc36" display= "Mfc36" schematicId= "Mfc36" unit= "sccm" aiActMode= "AI_M36ActMode" aoSetMode= "AO_M36CtrlMode" aiFlow= "AI_M36" aoFlow= "AO_M36" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC36Offline" AlarmText= "Alarm136 MFC36 Offline[DI-386]" />
<IoMfc3 id= "Mfc37" display= "Mfc37" schematicId= "Mfc37" unit= "sccm" aiActMode= "AI_M37ActMode" aoSetMode= "AO_M37CtrlMode" aiFlow= "AI_M37" aoFlow= "AO_M37" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC37Offline" AlarmText= "Alarm137 MFC37 Offline[DI-387]" />
<IoMfc3 id= "Mfc38" display= "Mfc38" schematicId= "Mfc38" unit= "sccm" aiActMode= "AI_M38ActMode" aoSetMode= "AO_M38CtrlMode" aiFlow= "AI_M38" aoFlow= "AO_M38" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC38Offline" AlarmText= "Alarm138 MFC38 Offline[DI-388]" />
</IoMfcs>
<IoPressureMeters classType= "Aitex.Core.RT.Device.Devices.IoPressure" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPressureMeter id= "Pressure1" display= "PC1" schematicId= "Pressure1" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC1Valve" aiActMode= "AI_PC1ActMode" aoSetMode= "AO_PC1CtrlMode" aiValue= "AI_PressCtrl1" aoValue= "AO_PressCtrl1" formatString= "0.0" diAlarm= "DI_PC01Offline" AlarmText= "Alarm141 PC1 Offline[DI-391]" />
<IoPressureMeter id= "Pressure2" display= "PC2" schematicId= "Pressure2" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC2Valve" aiActMode= "AI_PC2ActMode" aoSetMode= "AO_PC2CtrlMode" aiValue= "AI_PressCtrl2" aoValue= "AO_PressCtrl2" formatString= "0.0" diAlarm= "DI_PC02Offline" AlarmText= "Alarm142 PC2 Offline[DI-392]" />
<IoPressureMeter id= "Pressure3" display= "PC3" schematicId= "Pressure3" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC3Valve" aiActMode= "AI_PC3ActMode" aoSetMode= "AO_PC3CtrlMode" aiValue= "AI_PressCtrl3" aoValue= "AO_PressCtrl3" formatString= "0.0" diAlarm= "DI_PC03Offline" AlarmText= "Alarm143 PC3 Offline[DI-393]" />
<IoPressureMeter id= "Pressure4" display= "PC4" schematicId= "Pressure4" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC4Valve" aiActMode= "AI_PC4ActMode" aoSetMode= "AO_PC4CtrlMode" aiValue= "AI_PressCtrl4" aoValue= "AO_PressCtrl4" formatString= "0.0" diAlarm= "DI_PC04Offline" AlarmText= "Alarm144 PC4 Offline[DI-394]" />
<IoPressureMeter id= "Pressure5" display= "PC5" schematicId= "Pressure5" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC5Valve" aiActMode= "AI_PC5ActMode" aoSetMode= "AO_PC5CtrlMode" aiValue= "AI_PressCtrl5" aoValue= "AO_PressCtrl5" formatString= "0.0" diAlarm= "DI_PC05Offline" AlarmText= "Alarm145 PC5 Offline[DI-395]" />
<IoPressureMeter id= "Pressure6" display= "PC6" schematicId= "Pressure6" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC6Valve" aiActMode= "AI_PC6ActMode" aoSetMode= "AO_PC6CtrlMode" aiValue= "AI_PressCtrl6" aoValue= "AO_PressCtrl6" formatString= "0.0" diAlarm= "DI_PC06Offline" AlarmText= "Alarm146 PC6 Offline[DI-396]" />
<IoPressureMeter id= "Pressure7" display= "PC7" schematicId= "Pressure7" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC7Valve" aiActMode= "AI_PC7ActMode" aoSetMode= "AO_PC7CtrlMode" aiValue= "AI_PressCtrl7" aoValue= "AO_PressCtrl7" formatString= "0.0" diAlarm= "DI_PC07Offline" AlarmText= "Alarm147 PC7 Offline[DI-397]" />
2023-05-05 11:42:39 +08:00
<IoPressureMeter id= "PT1" display= "PT1" schematicId= "PT1" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_ActualPressure" aoValue= "" formatString= "0.0" />
2023-03-28 13:24:11 +08:00
<IoPressureMeter id= "PT2" display= "PT2" schematicId= "PT2" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_ForelinePress" aoValue= "" formatString= "0.0" />
</IoPressureMeters>
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp classType= "Aitex.Core.RT.Device.Devices.IoSensorWaterFlowTemp" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSensorWaterFlowTemp id= "SHFlowTemp" module= "" display= "SHFlow Temp" schematicId= "SHFlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_SHFlowTemp"
doAlarmHigh="DO_SHFlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="SHFlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration"/>
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp id= "ChamTopFlowTemp" module= "" display= "ChamTopFlowTemp" schematicId= "ChamTopFlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_ChamTopFlowTemp"
doAlarmHigh="DO_ChamTopFlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="ChamTopFlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration" />
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp id= "ChamMiddleFlow1Temp" module= "" display= "ChamMiddleFlow1 Temp" schematicId= "ChamMiddleFlow1Temp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_ChamMiddleFlow1Temp"
doAlarmHigh="DO_ChamMiddleFlow1Temp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="ChamMiddleFlow1Temp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration"/>
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp id= "ChamMiddleFlow2Temp" module= "" display= "ChamMiddleFlow2 Temp" schematicId= "ChamMiddleFlow2Temp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_ChamMiddleFlow2Temp"
doAlarmHigh="DO_ChamMiddleFlow2Temp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="ChamMiddleFlow2Temp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration" />
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp id= "ChamBottomFlowTemp" module= "" display= "ChamBottomFlow Temp" schematicId= "ChamBottomFlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_ChamBottomFlowTemp"
doAlarmHigh="DO_ChamBottomFlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="ChamBottomFlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration" />
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp id= "ChamBottomPlateTemp" module= "" display= "ChamBottomPlateTemp" schematicId= "ChamBottomPlateTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_ChamBottomPlateTemp"
doAlarmHigh="DO_ChamBottomPlateTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="ChamBottomPlateFlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration"/>
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp id= "PowerRod1FlowTemp" module= "" display= "PowerRod1Flow Temp" schematicId= "PowerRod1FlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_PowerRod1FlowTemp"
doAlarmHigh="DO_PowerRod1FlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="PowerRod1FlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration" />
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp id= "PowerRod2FlowTemp" module= "" display= "PowerRod2Flow Temp" schematicId= "PowerRod2FlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_PowerRod2FlowTemp"
doAlarmHigh="DO_PowerRod2FlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="PowerRod2FlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration"/>
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<IoSensorWaterFlowTemp id= "ForelineFlowTemp" module= "" display= "Foreline Flow Temp" schematicId= "ForelineFlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_ForelineFlow2SW"
doAlarmHigh="DO_ForelineFlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="ForelineFlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration" />
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<IoSensorWaterFlowTemp id= "ElectrodeWFlowTemp" module= "" display= "Electrode-W Flow Temp" schematicId= "ElectrodeWFlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_ElectrodeWFlowTemp"
doAlarmHigh="DO_ElectrodeWFlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="InSituFlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration" />
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp id= "TMPumpFlowTemp" module= "" display= "TMPumpFlowTemp" schematicId= "TMPumpFlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_TMPumpFIowSW"
doAlarmHigh="DO_TMPump1and2FlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="TMPumpFlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration" />
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<IoSensorWaterFlowTemp id= "TMTopLidFlowTemp" module= "" display= "TMTopLidFlow Temp" schematicId= "TMTopLidFlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_TMTopLidFlowTemp"
doAlarmHigh="DO_TMTopLidFlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="TMTopLidFlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration" />
2023-04-19 10:08:30 +08:00
<IoSensorWaterFlowTemp id= "TransformerFlowTemp" module= "" display= "TransformerFlow Temp" schematicId= "TransformerFlowTemp" unit= "℃"
2023-04-19 09:59:23 +08:00
ai="AI_TransformerFlowTemp"
doAlarmHigh="DO_TransformerFlowTemp"
scBasePath="PM.{module}.CoolingWater"
scAlarmHigh="TransformerFlowTemp"
scWarningOffset="WarningOffset"
scFilterDuration="FilterDuration" />
2023-04-19 10:08:30 +08:00
</IoSensorWaterFlowTemp>
2023-03-28 13:24:11 +08:00
<IoPumps classType= "Aitex.Core.RT.Device.Devices.IoPump" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPump id= "Pump" module= "" display= "Pump" schematicId= "Pump" unit= "" aioType= "" diDryPumpAlarm= "DI_DryPumpAlarm" diPumpExhaustPress= "DI_PumpExhaustPressSW" diDryPumpFlow= "DI_DryPumpFlowSW" diDryPump1Running= "DI_DryPump1Running" diDryPump1Warning= "DI_DryPump1Warning" />
</IoPumps>
<IoPTOffsetAndKs classType= "Aitex.Core.RT.Device.Devices.IoPTOffsetAndK" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPTOffsetAndK id= "PT1OffsetAndK" module= "" display= "PT1" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT1_Offset" aoK= "AO_PT1_K" />
<IoPTOffsetAndK id= "PT2OffsetAndK" module= "" display= "PT2" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT2_Offset" aoK= "AO_PT2_K" />
2023-04-23 08:55:39 +08:00
<IoPTOffsetAndK id= "U1_Water" module= "" display= "U1" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI3_Offset" />
<IoPTOffsetAndK id= "U2_Water" module= "" display= "U2" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI4_Offset" />
<IoPTOffsetAndK id= "U3_Water" module= "" display= "U3" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI5_Offset" />
<IoPTOffsetAndK id= "U4_Water" module= "" display= "U4" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI2_Offset" />
<IoPTOffsetAndK id= "U5_Water" module= "" display= "U5" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI6_Offset" />
<IoPTOffsetAndK id= "U6_Water" module= "" display= "U6" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI7_Offset" />
<IoPTOffsetAndK id= "U7_Water" module= "" display= "U7" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI8_Offset" />
<IoPTOffsetAndK id= "U8_Water" module= "" display= "U8" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI9_Offset" />
<IoPTOffsetAndK id= "U9_Water" module= "" display= "U9" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI10_Offset" />
<IoPTOffsetAndK id= "U10_Water" module= "" display= "U10" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI11_Offset" />
<IoPTOffsetAndK id= "U11_Water" module= "" display= "U11" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI12_Offset" />
<IoPTOffsetAndK id= "U12_Water" module= "" display= "U12" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI14_Offset" />
<IoPTOffsetAndK id= "U13_Water" module= "" display= "U13" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI15_Offset" />
<IoPTOffsetAndK id= "U14_Water" module= "" display= "U14" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI13_Offset" />
2023-03-28 13:24:11 +08:00
</IoPTOffsetAndKs>
<DoSensors classType= "Aitex.Core.RT.Device.Devices.DoSensor" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<DoSensor id= "CleanRoutineSucceed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_CleanRoutineSucceed" infoText= "" warningText= "" alarmText= "" />
</DoSensors>
<IoSensors classType= "Aitex.Core.RT.Device.Devices.IoSensor" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSensor id= "SensorChamPressAboveATMSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamPressAboveATMSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamAtSafeProcessPressSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamAtSafeProcessPressSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPMATMSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PMATMSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorHeaterTempBelow900CSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_HeaterTempLowLimitSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorConfinementRingUp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ConfinementRingUp" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSusceptorAtSafeSpeed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SusceptorAtSafeSpeed" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamLidPushButtonLocal" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamLidPushButtonLocal" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorConfinementRingDown" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ConfinementRingDown" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamCabDoorClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamCabDoorClosed" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorDORPressATMSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_DORPressATMSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorInletTotalFlowLowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_InletTotalFlowLowSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorInletTotalFlowHighSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_InletTotalFlowHighSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorGBDoorClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBDoorClosed" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorTCSAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TCSAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorReactorWaterLeakSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ReactorWaterLeakSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorTMFlow1SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_Spare4" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorReactorHCLDetectorSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ReactorHCLDetectorSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorUPS1Enable" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_UPS1Enable" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorUPS2Enable" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_UPS2Enable" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorUPS1LowBattery" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_UPS1LowBattery" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorUPS2LowBattery" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_UPS2LowBattery" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorGBWaterLeakSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBWaterLeakSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorDryPump1Warning" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_DryPump1Warning" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorEMOStatusSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_EMOStatusSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPRWaterLeakSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PowerRackWaterLeakSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSHLidClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SHLidClosed" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMiddleLidClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_MiddleLidClosed" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSU1Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PSU1Status" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSU2Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PSU2Status" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSU3Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PSU3Status" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCR1Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SCR1Status" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCR2Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SCR2Status" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCR3Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SCR3Status" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSUInnerTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUInnerTempHAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSUMiddleTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUMiddleTempHAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSUOuterTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUOuterTempHAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCRUpperTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRUpperTempHAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCRMiddleTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRMiddleTempHAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCRLowerTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRLowerTempHAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamLidClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamLidClosed" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMiddleFlow2SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamMiddleFlow2SW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorHeaterTempUp1680CSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_HeaterTempUpLimitSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSHFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SHFlowSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamTopFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamTopFlowSW" infoText= "" warningText= "" alarmText= "" />
2023-04-19 14:34:13 +08:00
<IoSensor id= "SensorChamMiddleFlow1SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamMiddleFlow1SW" infoText= "" warningText= "" alarmText= "" />
2023-03-28 13:24:11 +08:00
<IoSensor id= "SensorChamBottomFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamBottomFlowSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorTMPump2FlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamBottomPlateSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPowerRodFlow1SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PowerRod1FlowSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPowerRodFlow2SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PowerRod2FlowSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorForelineFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ForelineFlow2SW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorInSituFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ElectrodeWFlowSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorTMPump1FlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TMPumpFIowSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorTransformerFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TransformerFlowSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorTMFlow2SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_Spare3" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPMH2DetectorSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PMH2DetectorSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorGBHCLDetectorSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBHCLDetectorSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorGBExhaustDPSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBExhaustDPSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorGasPipeTempCtrlAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GasPipeTempCtrlAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorDryPumpAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_DryPumpAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPumpExhaustPressSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PumpExhaustPressSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPMAExhaustDPSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PMAExhaustDPSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPumpExhaustDPSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PumpExhaustDPSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorScrubberIntlkSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ScrubberIntlkSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorFacilityIntlkSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_FacilityIntlkSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorServoDriverFaultSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ServoDriverFaultSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorGN2InletPressSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_GN2InletPressSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorArInletPressSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ArInletPressSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorH2PressureSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_H2PressureSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorGBH2DetectorSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBH2DetectorSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorDryPump1Running" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_DryPump1Running" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorFacilityWarningSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_FacilityWarningSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMainCBStatusSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_MainCBStatusSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorProcessStopSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ProcessStopSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSU1Alarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSU1Alarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSU2Alarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSU2Alarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSU3Alarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSU3Alarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCR1Alarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCR1Alarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCR2Alarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCR2Alarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCR3Alarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCR3Alarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSUTCDPCommunicationError" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUdpCommunicationError" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCRTCDPCommunicationError" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRTCDPCommunicationError" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSU1dpCommunicationError" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSU1dpCommunicationError" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSU2dpCommunicationError" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSU2dpCommunicationError" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSU3dpCommunicationError" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSU3dpCommunicationError" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCRdpCommunicationError" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRdpCommunicationError" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorHearbeatTimeout" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_HearbeatTimeout" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC01Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC01Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC02Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC02Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC03Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC03Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC04Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC04Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC05Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC05Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC06Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC06Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC09Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC09Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC10Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC10Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC11Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC11Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC12Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC12Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC13Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC13Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC14Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC14Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC15Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC15Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC16Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC16Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC19Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC19Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC20Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC20Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC22Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC22Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC23Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC23Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC26Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC26Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC27Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC27Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC28Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC28Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC29Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC29Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC31Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC31Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC32Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC32Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC33Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC33Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC35Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC35Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC36Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC36Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC37Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC37Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC38Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC38Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC40Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC40Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPC01Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PC01Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPC02Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PC02Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPC03Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PC03Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPC04Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PC04Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPC05Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PC05Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPC06Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PC06Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPC07Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PC07Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorReactorSuspectorCheck" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ReactorSuspectorCheck" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorDORPressVacSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_DORPressVacSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorShutterUpLimitSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ShutterUpLimitSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorShutterDownLimitSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ShutterDownLimitSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorTransformerOTSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_TransformerOTSW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorManualLidOPLocal" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ManualLidOPLocal" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorManualLidUpPB" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ManualLidUpPB" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorManualLidDownPB" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ManualLidDownPB" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorManualLidUpLockPB" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ManualLidUpLockPB" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorManualLidForwardPB" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ManualLidForwardPB" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorManualLidBackwardPB" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ManualLidBackwardPB" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamMoveBodyUp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamMoveBodyUp" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamMoveBodyUpLatchFW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamMoveBodyUpLatchFW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamMoveBodyDown" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamMoveBodyDown" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamMoveBodyFront" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamMoveBodyFront" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamMoveBodyEnd" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamMoveBodyEnd" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamMoveBodyEndLatchBW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamMoveBodyEndLatchBW" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSHGasConnectorLoosen" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SHGasConnectorLoosen" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSHGasConnectorTighten" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SHGasConnectorTighten" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSHLidLoosen" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SHLidLoosen" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSHLidTighten" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SHLidTighten" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSHLidSwingLock" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SHLidSwingLock" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSHLidSwingUnlock" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SHLidSwingUnlock" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMiddleLidLoosen" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MiddleLidLoosen" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMiddleLidTighten" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MiddleLidTighten" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMiddleLidSwingLock" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MiddleLidSwingLock" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMiddleLidSwingUnlock" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MiddleLidSwingUnlock" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorServoReady" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ServoReady" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSUInnerTempLAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUInnerTempLAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSUMiddleTempLAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUMiddleTempLAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorPSUOuterTempLAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUOuterTempLAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCRUpperTempLAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRUpperTempLAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCRMiddleTempLAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRMiddleTempLAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorSCRLowerTempLAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRLowerTempLAlarm" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorConfinementRingServoON" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ConfinementRingServoON" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorConfinementRingServoError" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ConfinementRingServoError" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamPressAboveATMSW2" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamPressAboveATMSW2" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorEtherCATcomError" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_EtherCATcomError" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC25Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC25Offline" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorMFC34Offline" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_MFC34Offline" infoText= "" warningText= "" alarmText= "" />
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<IoSensor id= "SensorSHFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_SHFlowTemp" infoText= "" warningText= "" alarmText= "Alarm45 SH Cooling Water Temp Over Temp -U1 [DO196]" />
<IoSensor id= "SensorChamTopFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_ChamTopFlowTemp" infoText= "" warningText= "" alarmText= "Alarm46 Chamber Top Cooling Water Over Temp -U2 [DO197]" />
<IoSensor id= "SensorChamMiddleFlow1Temp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_ChamMiddleFlow1Temp" infoText= "" warningText= "" alarmText= "Alarm47 Chamber Middle Flow1 Cooling Water Over Temp -U3 [DO198]" />
<IoSensor id= "SensorChamMiddleFlow2Temp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_ChamMiddleFlow2Temp" infoText= "" warningText= "" alarmText= "Alarm48 Chamber Middle Flow2 Cooling Water Over Temp -U4 [DO195]" />
<IoSensor id= "SensorChamBottomFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_ChamBottomFlowTemp" infoText= "" warningText= "" alarmText= "Alarm49 Chamber Bottom Cooling Water Over Temp -U5 [DO199]" />
<IoSensor id= "SensorChamBottomPlateTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_ChamBottomPlateTemp" infoText= "" warningText= "" alarmText= "Alarm50 Spare Cooling Water Over Temp -U6 [DO200]" />
<IoSensor id= "SensorPowerRod1FlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_PowerRod1FlowTemp" infoText= "" warningText= "" alarmText= "Alarm51 Power Rod1 Cooling Water Over Temp -U7 [DO201]" />
<IoSensor id= "SensorPowerRod2FlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_PowerRod2FlowTemp" infoText= "" warningText= "" alarmText= "Alarm52 Power Rod2 Cooling Water Over Temp -U8 [DO202]" />
<IoSensor id= "SensorForelineFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_ForelineFlowTemp" infoText= "" warningText= "" alarmText= "Alarm53 Foreline Cooling Water Over Temp -U9 [DO203]" />
<IoSensor id= "SensorElectrodeWFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_ElectrodeWFlowTemp" infoText= "" warningText= "" alarmText= "Alarm54 Electrode-W Cooling Water Over Temp -U10 [DO204]" />
<IoSensor id= "SensorTMPumpFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_TMPump1and2FlowTemp" infoText= "" warningText= "" alarmText= "Alarm55 TMPump1 Cooling Water Over Temp -U11 [DO205]" />
<IoSensor id= "SensorTransformerFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_TransformerFlowTemp" infoText= "" warningText= "" alarmText= "Alarm58 Transformer Cooling Water Over Temp -U14 [DO206]" />
<IoSensor id= "SensorTMTopLidFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_TMTopLidFlowTemp" infoText= "" warningText= "" alarmText= "Alarm56 TMTopLid Cooling Water Over Temp -U12 [DO207]" />
<IoSensor id= "SensorPyroCommunicationError" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_PyroCommunicationError" infoText= "" warningText= "" alarmText= "" />
2023-03-28 13:24:11 +08:00
<IoSensor id= "SensorTC1PyroWarmMaxDiff" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_TC1PyroWarmMaxDiff" infoText= "" warningText= "" alarmText= "" />
<IoSensor id= "SensorTC1AETempRasisingFast" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_TC1AETempRasisingFast" infoText= "" warningText= "" alarmText= "" />
</IoSensors>
<SicServos classType= "Aitex.Core.RT.Device.Devices.SicServo" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<SicServo id= "PMServo" module= "" display= "PMServo" schematicId= "PMServo" unit= "" aioType= "float" aiActualSpeed= "AI_ActualSpeed" aiActualCurrent= "AI_ActualCurrent" aiAccSpeed= "AI_ActualspeedACC" aiDecSpeed= "AI_ActualspeedDEC" aoActualSpeedSetPoint= "AO_SpindleSpeed" aoAccSpeedSetPoint= "AO_SpindleACC" aoDecSpeedSetPoint= "AO_SpindleDEC" diServoReady= "DI_ServoReady" diServoError= "DI_ServoDriverFaultSW" doServoEnable= "DO_ServoEnable" doServoInital= "DO_ServoInitial" doServoReset= "DO_ServoReset" />
</SicServos>
<SicAETemps classType= "Aitex.Core.RT.Device.Devices.SicAETemp" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<SicAETemp id= "PMAETemp" module= "" display= "PMAETemp" schematicId= "PMAETemp" doPyroCommunicationError= "DO_PyroCommunicationError" EnableLogMessage= "True" />
</SicAETemps>
<IoSignalTowers classType= "Aitex.Core.RT.Device.Devices.IoSignalTower" assembly= "MECF.Framework.RT.EquipmentLibrary" >
2023-05-05 11:42:39 +08:00
<IoSignalTower id= "SignalTower" module= "PM2" display= "SignalTower" schematicId= "PMSignalTower" eventFile= "PM1_SignalTower.xml"
doGreen="DO_TowerGreen" doYellow="DO_TowerYellow" doRed="DO_TowerRed" doBuzzer="DO_Buzzer"
aoBuzzerBlinkFreq="AO_BuzzerBlinkFreqHz"/>
2023-03-28 13:24:11 +08:00
</IoSignalTowers>
<IoChamberMoveBodys classType= "Aitex.Core.RT.Device.Devices.IoChamberMoveBody" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoChamberMoveBody id= "ChamberMoveBody" module= "" display= "ChamberMoveBody" schematicId= "ChamberMoveBody" unit= "" aioType= "" diUpFaceback= "DI_ChamMoveBodyUp" diDownFaceback= "DI_ChamMoveBodyDown" diFront= " DI_ChamMoveBodyFront" diEndFaceback= "DI_ChamMoveBodyEnd" doUpSetpoint= "DO_ChamMoveBodyUp" doDownSetpoint= "DO_ChamMoveBodyDown" doUpBrake= "DO_ChamMoveBodyUpAirBrake" doForward= "DO_ChamMoveBodyForward" doBackward= "DO_ChamMoveBodyBackward" doForwardLatch= "DO_ChamMoveBodyBrakerForward" doBackwardLatch= "DO_ChamMoveBodyBrakerBackward" diForwardLatch= "DI_ChamMoveBodyUpLatchFW" diBackwardLatch= "DI_ChamMoveBodyEndLatchBW" diRemote= "DI_ChamLidPushButtonLocal" diLock= "DI_ManualLidUpPB" diUpDownEnable= "DI_ChamMoveBodyUpDownEnableFB" doUpDownEnable= "DO_ChamMoveBodyUpDownEnable" />
</IoChamberMoveBodys>
<IoGasConnectors classType= "Aitex.Core.RT.Device.Devices.IoGasConnector" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoGasConnector id= "GasConnector" module= "" display= "GasConnector" schematicId= "GasConnector" unit= "" aioType= "" diGasConnectorLoosen= "DI_SHGasConnectorLoosen" diGasConnectorTighten= "DI_SHGasConnectorTighten" doGasConnectorLoosen= "DO_SHGasConnectorLoosen" doGasConnectorTighten= "DO_SHGasConnectorTighten" />
</IoGasConnectors>
<IoLids classType= "Aitex.Core.RT.Device.Devices.IoLid" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoLid id= "SHLid" module= "" display= "SH Lid" schematicId= "SHLid" unit= "" aioType= "" diLoosenFaceback= "DI_SHLidLoosen" diTightenFaceback= "DI_SHLidTighten" diClosedFaceback= "DI_SHLidClosed" doLoosenSetpoint= "DO_SHLidLoosen" doTightenSetpoint= "DO_SHLidTighten" />
<IoLid id= "MiddleLid" module= "" display= "Middle Lid" schematicId= "MiddleLid" unit= "" aioType= "" diLoosenFaceback= "DI_MiddleLidLoosen" diTightenFaceback= "DI_MiddleLidTighten" diClosedFaceback= "DI_MiddleLidClosed" doLoosenSetpoint= "DO_MiddleLidLoosen" doTightenSetpoint= "DO_MiddleLidTighten" />
</IoLids>
<IoLidSwings classType= "Aitex.Core.RT.Device.Devices.IoLidSwing" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoLidSwing id= "SHLidSwing" module= "" display= "SH Lid Swing" schematicId= "SHLidSwing" unit= "" aioType= "" diLidLockFaceback= "DI_SHLidSwingLock" diLidUnlockFaceback= "DI_SHLidSwingUnlock" doLidLockSetpoint= "DO_SHLidSwingLock" doLidUnlockSetpoint= "DO_SHLidSwingUnlock" />
<IoLidSwing id= "MiddleLidSwing" module= "" display= "Middle Lid Swing" schematicId= "MiddleLidSwing" unit= "" aioType= "" diLidLockFaceback= "DI_MiddleLidSwingLock" diLidUnlockFaceback= "DI_MiddleLidSwingUnlock" doLidLockSetpoint= "DO_MiddleLidSwingLock" doLidUnlockSetpoint= "DO_MiddleLidSwingUnlock" />
</IoLidSwings>
<IoConfinementRings classType= "Aitex.Core.RT.Device.Devices.IoConfinementRing" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoConfinementRing id= "ConfinementRing" module= "" display= "ConfinementRing" schematicId= "ConfinementRing" unit= "" aioType= "" diRingDownFaceback= "DI_ConfinementRingDown" diRingUpFaceback= "DI_ConfinementRingUp" diRingDone= "DI_ConfinementRingDone" diRingServoOn= "DI_ConfinementRingServoOn" diRingHomed= "DI_ConfinementRingHomed" diRingBusy= "DI_ConfinementRingBusy" diRingServoError= "DI_ConfinementRingServoError" doRingServoOn= "DO_ConfinementRingServoOn" doRingJogUp= "DO_ConfinementRingJogUp" doRingJogDown= "DO_ConfinementRingJogDown" doRingStop= "DO_ConfinementRingStop" doRingTeachUp= "DO_ConfinementRingUpPosTeach" doRingTeachDown= "DO_ConfinementRingDownPosTeach" doRingMoveUp= "DO_ConfinementRingMoveUp" doRingMoveDown= "DO_ConfinementRingMoveDown" aiRingCurPos= "AI_ConfinementRingCurPos" aiRingUpPos= "AI_ConfinementRingUpPos" aiRingDownPos= "AI_ConfinementRingDownPos" aoRingMode= "AO_ConfinementRingMode" aoRingSpeed= "AO_ConfinementRingSpeed" aoRingDistance= "AO_ConfinementRingDistance" doRingServoReset= "DO_ConfinementRingServoReset" aoRingUpPos= "AO_ConfinementRingUpPos" aoRingDownPos= "AO_ConfinementRingDownPos" />
</IoConfinementRings>
<IoHeartBeats classType= "Aitex.Core.RT.Device.Devices.IoHeartBeat" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoHeartBeat id= "HeartBeat" display= "HeartBeat" schematicId= "HeartBeat" aioType= "float" ai= "AI_HeartBeat" ao= "AO_HeartBeat" />
</IoHeartBeats>
<IoC2H4s classType= "Aitex.Core.RT.Device.PmDevices.IoC2H4" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoC2H4 id= "C2H4" display= "" schematicId= "" unit= "" valve1= "V58" valve2= "V58s" valve3= "V59" valve4= "V60" valve5= "V63" />
</IoC2H4s>
<IoHCls classType= "Aitex.Core.RT.Device.PmDevices.IoHCl" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoHCl id= "HCl" display= "" schematicId= "" unit= "" valve1= "V51" valve2= "V51s" valve3= "V54" valve4= "V54s" />
</IoHCls>
<IoN2Dilutions classType= "Aitex.Core.RT.Device.PmDevices.IoN2Dilution" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoN2Dilution id= "N2Dilution" display= "" schematicId= "" unit= "" valve1= "V37" valve2= "V37s" valve3= "V39" valve4= "V39s" valve5= "V61" />
</IoN2Dilutions>
<IoN2HighDopings classType= "Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoN2HighDoping id= "N2HighDoping" display= "" schematicId= "" unit= "" valve1= "V37" valve2= "V37s" valve3= "V40" valve4= "V40s" />
</IoN2HighDopings>
<IoSiH4s classType= "Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSiH4 id= "SiH4" display= "" schematicId= "" unit= "" valve1= "V52" valve2= "V52s" valve3= "V55" valve4= "V56" valve5= "V62" />
</IoSiH4s>
<IoTCSs classType= "Aitex.Core.RT.Device.PmDevices.IoTCS" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoTCS id= "TCS" display= "" schematicId= "" unit= "" valve1= "V48" valve2= "V48s" valve3= "V49" valve4= "V53" valve5= "V53s" />
</IoTCSs>
<IoTMAs classType= "Aitex.Core.RT.Device.PmDevices.IoTMA" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoTMA id= "TMA" display= "" schematicId= "" unit= "" valve1= "V41" valve2= "V42" valve3= "V43" valve4= "V43s" valve5= "V45" />
</IoTMAs>
<IoSHArH2Switchs classType= "Aitex.Core.RT.Device.PmDevices.IoSHArH2Switch" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSHArH2Switch id= "SHArH2Switch" display= "" schematicId= "" unit= "" valve1= "V33" valve2= "V33s" valve3= "V35" valve4= "V36" />
</IoSHArH2Switchs>
<IoPurgeArH2Switchs classType= "Aitex.Core.RT.Device.PmDevices.IoPurgeArH2Switch" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPurgeArH2Switch id= "PurgeArH2Switch" display= "" schematicId= "" unit= "" valve1= "V68" />
</IoPurgeArH2Switchs>
<IoV99s classType= "Aitex.Core.RT.Device.PmDevices.IoV99" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoV99 id= "Valve99" display= "" schematicId= "" unit= "" valve1= "V99" valve2= "V99s" />
</IoV99s>
<IoInterLocks classType= "Aitex.Core.RT.Device.Devices.IoInterLock" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoInterLock id= "PMInterLock" display= "" schematicId= "" unit= "" doLidOpenRoutineSucceed= "DO_PurgeRoutineSucceed"
doLidCloseRoutineSucceed="DO_CleanRoutineSucceed" doProcessRunning="DO_ProcessRunning" doPreprocessRunning="DO_PreprocessRunning"
doCyclePurgeRoutineRunning="DO_CyclePurgeRoutineRunning" doExchangeMoRoutineRunning="DO_ExchangeMoRoutineRunning"
doLidCloseRoutineRunning="DO_CleanRoutineRunning" doLidOpenRoutineRunning="DO_PurgeRoutineRunning"
doPumpDownRoutineRunning="DO_PumpRoutineRunning" doVentRoutineRunning="DO_VentRoutineRunning"
doPostProcessRunning="DO_PostProcessRunning" diServoDriverFaultSW="DI_ServoDriverFaultSW" diH2PressureSW="DI_H2PressureSW"
doVACTransferAllowed="DO_VACTransferAllowed" doATMTransferAllowed="DO_ATMTransferAllowed" doProcessIdleRunning="DO_ProcessIdleRunning"
doATMIdleRoutineRunning="DO_ATMIdleRoutineRunning" doVACIdleRoutineRunning="DO_VACIdleRoutineRunning" diPSU1Status="DI_PSU1Status"
diPSU2Status="DI_PSU2Status" diPSU3Status="DI_PSU3Status" diSCR1Status="DI_SCR1Status" diSCR2Status="DI_SCR2Status" diSCR3Status="DI_SCR3Status"
doPSU1Enable="DO_PSU1Enable" doPSU2Enable="DO_PSU2Enable" doPSU3Enable="DO_PSU3Enable" doSCR1Enable="DO_SCR1Enable"
doSCR2Enable="DO_SCR2Enable" doSCR3Enable="DO_SCR3Enable" doTCSSupply="DO_TCSFluidInfusion" aiTempCtrl1="AI_PSUTC"
doReactorATMTransferReady="DO_ReactorATMTransferReady" doReactorVACTransferReady="DO_ReactorVACTransferReady" diPMATMSW="DI_PMATMSW"
aiActualSpeed="AI_ActualSpeed" diPSUEnable="DI_PSUEnableFB" diHeaterTempBelow900CSW="DI_HeaterTempLowLimitSW"
doPMASlitDoorClosed="DO_SlitVlvClosed" diChamLidClosed="DI_ChamLidClosed" diConfinementRingDown="DI_ConfinementRingDown"
2023-05-05 11:42:39 +08:00
aiChamPress="AI_ActualPressure" doReactorPressRisingRate="DO_ReactorPressRisingRateFast" doUPSLowBattery="DO_UPSLowBattery"
2023-03-28 13:24:11 +08:00
doChamMiddleFlow2Temp="DO_ChamMiddleFlow2Temp"
doSHFlowTemp="DO_SHFlowTemp"
doChamTopFlowTemp="DO_ChamTopFlowTemp"
doChamMiddleFlow1Temp="DO_ChamMiddleFlow1Temp"
doChamBottomFlowTemp="DO_ChamBottomFlowTemp"
doSpare1FlowTemp="DO_ChamBottomPlateTemp"
doPowerRod1FlowTemp="DO_PowerRod1FlowTemp"
doPowerRod2FlowTemp="DO_PowerRod2FlowTemp"
doForelineFlowTemp ="DO_ForelineFlowTemp"
doElectrodeWFlowTemp="DO_ElectrodeWFlowTemp"
doSpare2FlowTemp="DO_Spare2FlowTemp"
doTransformerFlowTemp="DO_TransformerFlowTemp"
doSpare3FlowTemp="DO_Spare3FlowTemp"
doSpare4FlowTemp="DO_Spare4FlowTemp"
aiChamMiddleFlow2Temp="AI_ChamMiddleFlow2Temp" aiSHFlowTemp="AI_SHFlowTemp" aiChamTopFlowTemp="AI_ChamTopFlowTemp"
aiChamMiddleFlowTemp="AI_ChamMiddleFlow1Temp" aiChamBottomFlowTemp="AI_ChamBottomFlowTemp" aiBottomPlateFlowTemp="AI_SpareFlowTemp"
aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp" aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp" aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp"
aiTMPump1FlowTemp="AI_TMPumpFIowSW" aiTMPump2FlowTemp="AI_ChamBottomPlateTemp" aiTransformerFlowTemp="AI_TransformerFlowTemp"
aiForelineFlowTemp="AI_ForelineFlow2SW" aiTMTopLidTemp="AI_Spare3" aiTMBufferFlowTemp="AI_Spare4"/>
</IoInterLocks>
</DeviceModelDefine>