<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="2. SH Total Flow"UnitName="sccm"ControlName="SHTotalFlow"InputMode=""Min="0"Max="1000000"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="3. Carray Gas Flow (M40)"UnitName="sccm"ControlName="Mfc40.Ramp"InputMode=""Min="0"Max="1000000"Description=""/>
<StepModuleName=""DeviceType=""InputType="Set3RatioInput"DisplayName="4. SH Total Flow Split Ratio"UnitName=""ControlName="SHTotalFlowSplitRatio"/>
<StepModuleName=""DeviceType=""InputType="ReadOnlySelection"DisplayName="5. Flow Set Mode"UnitName=""ControlName="FlowSetMode"Description="">
<StepModuleName=""DeviceType=""InputType="ReadOnlySelection"DisplayName="8. PSU Control Mode"UnitName=""ControlName="TC1.SetHeaterMode"Description="">
<ItemDisplayName="Power"ControlName="Power"/>
<ItemDisplayName="Pyro"ControlName="Pyro"/>
</Step>
<StepModuleName=""DeviceType=""InputType="ReadOnlySelection"DisplayName="9. PSU Set Mode"UnitName=""ControlName="SusHeaterSetMode"Description="">
<ItemDisplayName="Ramp"ControlName="Ramp"/>
<ItemDisplayName="Jump"ControlName="Jump"/>
</Step>
<StepModuleName=""DeviceType=""InputType="ReadOnlySelection"DisplayName="10. SCR Control Mode"UnitName=""ControlName="TC2.SetHeaterMode2"Description="">
<ItemDisplayName="Power"ControlName="Power"/>
<ItemDisplayName="Pyro"ControlName="Pyro"/>
</Step>
<StepModuleName=""DeviceType=""InputType="ReadOnlySelection"DisplayName="11. SCR Set Mode"UnitName=""ControlName="WWHeaterSetMode"Description="">
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="16. PSU Inner Ratio Set"UnitName="%"ControlName="TC1.RecipeSetL1Ratio"InputMode=""Min="0"Max="100"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="17. PSU Middle Ratio Set"UnitName="%"ControlName="TC1.RecipeSetL2Ratio"InputMode=""Min="0"Max="100"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="18. PSU Outer Ratio Set"UnitName="%"ControlName="TC1.RecipeSetL3Ratio"InputMode=""Min="0"Max="100"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="19. SCR Upper Ratio Set"UnitName="%"ControlName="TC2.RecipeSetL1Ratio"InputMode=""Min="0"Max="100"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="20. SCR Middle Ratio Set"UnitName="%"ControlName="TC2.RecipeSetL2Ratio"InputMode=""Min="0"Max="100"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="21. SCR Lower Ratio Set"UnitName="%"ControlName="TC2.RecipeSetL3Ratio"InputMode=""Min="0"Max="100"Description=""/>
</Group>
</Catalog>
<CatalogDisplayName="StepInfo">
<GroupDisplayName="SH Flow->Si Source->Si Source Total Flow">
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="22. Si Source Total Flow"UnitName="sccm"ControlName="SiSourTotalFlow"InputMode=""Min="0"Max="10000"Description=""/>
<StepModuleName=""DeviceType=""InputType="Set3RatioInput"DisplayName="32. Si Source Split Ratio"UnitName=""ControlName="SiSourSplitRatio"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="33. Si Source Push Pressure (PC6)"UnitName="mbar"ControlName="Pressure6.Ramp"InputMode=""Min="0"Max="10000"Description="PC6.SiSourcePushPressure"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="34. Si Source Inner Flow (M23)"UnitName="sccm"ControlName="Mfc23.Ramp"InputMode=""Min="0"Max="10000"IsColumnEditable="false"Description="M23.SiSourceInnerFlow"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="35. Si Source Middle Flow (M22)"UnitName="sccm"ControlName="Mfc22.Ramp"InputMode=""Min="0"Max="10000"IsColumnEditable="false"Description="M22.SiSourceMiddleFlow"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="36. Si Source Outer Flow (M9)"UnitName="sccm"ControlName="Mfc9.Ramp"InputMode=""Min="0"Max="10000"IsColumnEditable="false"Description="M9.SiSourceOuterFlow"/>
</Group>
<GroupDisplayName="SH Flow->C Source->C Source Total Flow">
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="37. C Source Total Flow"UnitName="sccm"ControlName="CSourTotalFlow"InputMode=""Min="0"Max="10000"Description=""/>
<StepModuleName=""DeviceType=""InputType="Set3RatioInput"DisplayName="42. C Source Split Ratio"UnitName=""ControlName="CSourSplitRatio"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="43. C Source Push Pressure (PC7)"UnitName="mbar"ControlName="Pressure7.Ramp"InputMode=""Min="0"Max="10000"Description="PC7.CSourcePushPressure"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="44. C Source Inner Flow (M26)"UnitName="sccm"ControlName="Mfc26.Ramp"InputMode=""Min="0"Max="10000"IsColumnEditable="false"Description="M26.CSourceInnerFlow"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="45. C Source Middle Flow (M25)"UnitName="sccm"ControlName="Mfc25.Ramp"InputMode=""Min="0"Max="10000"IsColumnEditable="false"Description="M25.CSourceMidFlow"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="46. C Source Outer Flow (M15)"UnitName="sccm"ControlName="Mfc15.Ramp"InputMode=""Min="0"Max="10000"IsColumnEditable="false"Description="M15.CSourceOuterFlow"/>
</Group>
<GroupDisplayName="SH Flow->Dope->Dope Total Flow">
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="47. Dope Total Flow"UnitName="sccm"ControlName="DopeTotalFlow"InputMode=""Min="0"Max="10000"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="49. N2 Actual Flow"UnitName="sccm"ControlName="N2ActualFlow"InputMode=""Min="0"Max="10000"Description="N2ActualFlow"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="53. N2 Post Dilut Pressure (PC1)"UnitName="mbar"ControlName="Pressure1.Ramp"InputMode=""Min="0"Max="10000"Description="PC1.N2PostDiluPres"/>
<StepModuleName=""DeviceType=""InputType="FlowModeSelection"DisplayName="54. N2 High Flow Mode"UnitName=""ControlName="N2HighDoping.SetValve"Description="N2 HIGH FLOW MODE">
<ItemDisplayName="Purge"ControlName="Purge"/>
<ItemDisplayName="Vent"ControlName="Vent"/>
<ItemDisplayName="Run"ControlName="Run"/>
</Step>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="55. N2 High Flow (M5)"UnitName="sccm"ControlName="Mfc5.Ramp"InputMode=""Min="0"Max="10000"Description="M5.N2HighFlow"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="65. SH Push Total Flow"UnitName="sccm"ControlName="SHSuppTotalFlow"InputMode=""Min="0"Max="10000"IsColumnEditable="false"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="66. SH Inner Flow"UnitName="sccm"ControlName="SHInnerFlow"InputMode=""Min="0"Max="10000"IsColumnEditable="false"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="67. SH Middle Flow"UnitName="sccm"ControlName="SHMidFlow"InputMode=""Min="0"Max="10000"IsColumnEditable="false"Description=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="68. SH Outer Flow"UnitName="sccm"ControlName="SHOutterFlow"InputMode=""Min="0"Max="10000"DIsColumnEditable="false"escription=""/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="72. SH Purge Flow (M27)"UnitName="sccm"ControlName="Mfc27.Ramp"InputMode=""Min="0"Max="10000"Description="M27.SHPurgeFlow"/>
<StepModuleName=""DeviceType=""InputType="DoubleInput"DisplayName="79. Total Vent Flow"UnitName="sccm"ControlName="TotalVentFlow"InputMode=""Min="0"Max="10000"Description=""/>