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SicMultiplate/Modules/Mainframe/Config/TM/interlock.xml

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Add project files.
2023-03-03 15:42:13 +08:00
<?xml version="1.0" ?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
<Action do="TM.DO_LoadSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-0">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="TM.DI_TMDryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="TM.DI_TMDryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_TMSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
Update from svn.
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
Add project files.
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<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
Update from svn.
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<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
Add project files.
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
Update from svn.
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
Update from svn.
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
Add project files.
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<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
Add project files.
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_BufferVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-4">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_UnloadSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-62">
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
Update from svn.
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<Limit di="TM.DI_TMSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
<Limit di="TM.DI_TMFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
Add project files.
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<Limit di="TM.DI_UnloadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-103"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
</Action>
<Action do="TM.DO_UnloadFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-61">
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_TMSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
<Limit di="TM.DI_TMFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
Add project files.
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<Limit di="TM.DI_UnloadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-103"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
</Action>
<Action do="TM.DO_UnloadVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-7">
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
Add project files.
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<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
</Action>
<Action do="TM.DO_TMCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-89">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-90">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-91">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMServoPressRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-92">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-93">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_LoadCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-94">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-95">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-96">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-97">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_UnLoadCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-98">
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_TMSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
<Limit di="TM.DI_TMFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
</Action>
<Action do="TM.DO_UnLoadLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-99">
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_TMSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
<Limit di="TM.DI_TMFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
</Action>
<Action do="TM.DO_UnLoadPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-100">
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
Update from svn.
2023-03-14 17:20:31 +08:00
<Limit di="TM.DI_TMSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
<Limit di="TM.DI_TMFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
</Action>
<Action do="TM.DO_UnLoadVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-101">
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
</Action>
<Action do="TM.DO_LoadDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit do="TM.DO_VacRobotExtenLoadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-19"/>
</Action>
<Action do="TM.DO_UnloadStationDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-11">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit do="TM.DO_VacRobotExtendUnloadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-20"/>
</Action>
<Action do="TM.DO_RectorADoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit do="TM.DO_VacRobotExtendPMAEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-21"/>
</Action>
<Action do="TM.DO_RectorBDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit do="TM.DO_VacRobotExtendPMBEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-22"/>
</Action>
<Action do="TM.DO_BufferStationDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-33">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit do="TM.DO_VacRobotExtendBufferEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-23"/>
</Action>
<Action do="TM.DO_UnloadSubStationDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-31">
<Limit di="TM.DI_UnloadStationGateINTK" value="false" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit do="TM.DO_ATMRobotExtendUnloadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-24"/>
</Action>
<Action do="TM.DO_LoadLSideDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-27">
<Limit do="TM.DO_ATMRobotExtendLoaLSideEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-25"/>
<Limit di="TM.DI_LoadLeftGateINTK" value="false" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="TM.DO_LoadRSideDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-29">
<Limit do="TM.DO_ATMRobotExtendLoaRSideEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-26"/>
<Limit di="TM.DI_LoadRightGateINTK" value="false" tip="" tip.zh-CN="" tip.en-US="DI-34"/>
</Action>
Update from svn.
2023-03-11 09:15:28 +08:00
<Action do="TM.DO_RectorADoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-14">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_PMAN2SwitchFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-201"/>
<Limit di="TM.DI_PMAHCLSwitchFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-202"/>
<Limit di="TM.DI_PMASiH4SwitchFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-203"/>
<Limit di="TM.DI_PMAC3H8SwitchFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-204"/>
修改TM的interlock DO-47 48 17 8 10 12 14 16 要求压差小于50
2023-09-28 14:38:55 +08:00
<Limit pollbool="TM.IsPressureAbs_TM_PMA_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
Update from svn.
2023-03-11 09:15:28 +08:00
</Action>
<Action do="TM.DO_RectorBDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-16">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_PMBN2SwitchFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-217"/>
<Limit di="TM.DI_PMBHCLSwitchFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-218"/>
<Limit di="TM.DI_PMBSiH4SwitchFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-219"/>
<Limit di="TM.DI_PMBC3H8SwitchFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-220"/>
修改TM的interlock DO-47 48 17 8 10 12 14 16 要求压差小于50
2023-09-28 14:38:55 +08:00
<Limit pollbool="TM.IsPressureAbs_TM_PMB_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
Update from svn.
2023-03-11 09:15:28 +08:00
</Action>
<Action do="TM.DO_LoadDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-10">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
修改TM的interlock DO-47 48 17 8 10 12 14 16 要求压差小于50
2023-09-28 14:38:55 +08:00
<Limit pollbool="TM.IsPressureAbs_TM_Load_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
Update from svn.
2023-03-11 09:15:28 +08:00
</Action>
<Action do="TM.DO_UnloadStationDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-12">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
修改TM的interlock DO-47 48 17 8 10 12 14 16 要求压差小于50
2023-09-28 14:38:55 +08:00
<Limit pollbool="TM.IsPressureAbs_TM_Unload_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
Update from svn.
2023-03-11 09:15:28 +08:00
</Action>
<Action do="TM.DO_BufferStationDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-34">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
Add project files.
2023-03-03 15:42:13 +08:00
<Action do="TM.DO_LoadLSideDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-28">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_LoadPressureATM" value="true" tip="" tip.zh-CN="" tip.en-US="DI-90"/>
Add project files.
2023-03-03 15:42:13 +08:00
</Action>
<Action do="TM.DO_LoadRSideDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-30">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_LoadPressureATM" value="true" tip="" tip.zh-CN="" tip.en-US="DI-90"/>
Add project files.
2023-03-03 15:42:13 +08:00
</Action>
<Action do="TM.DO_VacRobotExtenLoadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
<Limit di="TM.DI_LoadLifterCYDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
<Limit di="TM.DI_LoadTrayCYOpend" value="true" tip="" tip.zh-CN="" tip.en-US="DI-69"/>
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_LoadDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-1"/>
Add project files.
2023-03-03 15:42:13 +08:00
</Action>
<Action do="TM.DO_VacRobotExtendUnloadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
<Limit di="TM.DI_UnloadStationDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-3"/>
<Limit di="TM.DI_UnloadStationLifterCYDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-75"/>
</Action>
<Action do="TM.DO_VacRobotExtendPMAEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
<Limit di="TM.DI_ReactorADoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-5"/>
</Action>
<Action do="TM.DO_VacRobotExtendPMBEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
<Limit di="TM.DI_ReactorBDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
</Action>
Update from svn.
2023-03-15 13:43:02 +08:00
Add project files.
2023-03-03 15:42:13 +08:00
<Action do="TM.DO_ATMRobotExtendUnloadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-24">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_UnloadSubStationDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
Add project files.
2023-03-03 15:42:13 +08:00
</Action>
<Action do="TM.DO_ATMRobotExtendLoaLSideEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-25">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_LoadPressureATM" value="true" tip="" tip.zh-CN="" tip.en-US="DI-90"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_LoadTrayCYOpend" value="true" tip="" tip.zh-CN="" tip.en-US="DI-69"/>
<Limit di="TM.DI_LoadLSideDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
</Action>
<Action do="TM.DO_ATMRobotExtendLoaRSideEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-26">
Update from svn.
2023-03-11 09:15:28 +08:00
<Limit di="TM.DI_LoadPressureATM" value="true" tip="" tip.zh-CN="" tip.en-US="DI-90"/>
Add project files.
2023-03-03 15:42:13 +08:00
<Limit di="TM.DI_LoadTrayCYOpend" value="true" tip="" tip.zh-CN="" tip.en-US="DI-69"/>
<Limit di="TM.DI_LoadLifterCYDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
<Limit di="TM.DI_LoadRSideDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
</Action>
修改TM的interlock DO-47 48 17 8 10 12 14 16 要求压差小于50
2023-09-28 14:38:55 +08:00
<Action do="TM.DO_TMToPMABanlance(V70_1)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-47">
<Limit pollbool="TM.IsPressureAbs_TM_PMA_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_TMToPMBBanlance(V70_2)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-48">
<Limit pollbool="TM.IsPressureAbs_TM_PMB_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_TMToUnloadBanlance" value="true" tip="" tip.zh-CN="" tip.en-US="DO-17">
<Limit pollbool="TM.IsPressureAbs_TM_Unload_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_TMLoadBanlance" value="true" tip="" tip.zh-CN="" tip.en-US="DO-8">
<Limit pollbool="TM.IsPressureAbs_TM_Load_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
Add project files.
2023-03-03 15:42:13 +08:00
</Interlock>