2023-03-03 15:42:13 +08:00
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2023-07-03 16:20:30 +08:00
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# Sic Auto-GE 系统更新历史记录
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Auto-GE 自动通用版(适用有EFEM设备)
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2023-10-24 10:00:45 +08:00
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## 下次加入:PM offline 前加入install判断,未加载的PM腔不进行offline提示
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2023-10-20 16:45:19 +08:00
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## Version 1.1.31.51
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**2023-10-20**
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- Bug修复
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- 修改部分data绑定不保存数据库
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- 修复Interlock项: do-100 和 do-49触发前 di-9 必须为0
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- 修复 EFEM SlitValueRoutine 触发时提示文本缺失名称
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- 新特性
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- 新增配置对比功能,每次开RT时提示配置修改项,并在配置界面显示修改过的内容,并可以回退配置
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- 每次配置文件变更都有备份,也可从本地进行修复
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- interlock表更新 不同腔体开门时需要判断两个腔体压差在范围内
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2023-10-20 14:34:16 +08:00
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## Version 1.1.31.50
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**2023-10-20**
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2023-05-05 16:53:52 +08:00
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2023-10-20 14:34:16 +08:00
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- Bug修复
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- 新特性
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- 新增伊顿eaton UPS配置及监控,可在DEVICE界面查看
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2023-10-19 09:26:55 +08:00
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## Version 1.1.31.49
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**2023-10-19**
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- Bug修复
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- 新特性
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- 添加昂坤双通道获取温度
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- 昂坤添加测温参数可配置
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2023-10-18 17:13:23 +08:00
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## Version 1.1.31.48
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**2023-10-18**
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- Bug修复
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- 新特性
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- 删除PM Interlock配置的DI-29
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- PM K阀组增加V111控制
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2023-05-05 16:53:52 +08:00
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2023-09-25 17:27:48 +08:00
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## Version 1.1.31.46
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**2023-09-15**
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- Bug修复
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- 新特性
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- interlock_bypass分腔体单独控制
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- interlock表更新
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- 不同recipe的data曲线数据对比功能
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-
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2023-07-03 16:20:30 +08:00
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------
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2023-09-15 08:59:45 +08:00
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## Version 1.1.30.46
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2023-09-15 09:20:57 +08:00
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**2023-09-15**
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2023-09-15 08:59:45 +08:00
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- Bug修复
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- 电阻丝加热,当设置为Warning时Log不输出问题修改
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- 修改气体流量统计
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- 新特性
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- 添加PLC断联后自动重连,
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- 优化水温查询时对应的名称
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- 优化Charting查询对比功能,新增曲线可以上下左右移动对比
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2023-07-03 16:20:30 +08:00
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2023-08-29 12:20:37 +08:00
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## Version 1.1.29.45
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**2023-08-28**
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2023-08-22 17:59:49 +08:00
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- Bug修复
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2023-08-29 12:20:37 +08:00
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- 修正TM MFC60的Feedback和SetPoint差异超限后没有报警的问题
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2023-08-22 17:59:49 +08:00
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- 修正Aligner操作失败后,Aligner模组没有Alarm的问题
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2023-08-29 12:20:37 +08:00
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2023-08-22 17:59:49 +08:00
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- 新特性
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2023-08-29 12:20:37 +08:00
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- Mfc Ror测试增加可选择多个Mfc同时测试功能
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2023-08-22 17:59:49 +08:00
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2023-08-15 15:59:08 +08:00
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## Version 1.1.29.44
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**2023-08-15**
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- Bug修复
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-
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- 新特性
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- Mfc Ror测试增加可选择多个Mfc同时测试功能
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2023-08-04 16:18:20 +08:00
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## Version 1.1.29.43
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**2023-08-03**
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- Bug修复
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- 修正DataLog重新查询数据曲线时,上次设定的Factor和Offset没有生效的问题
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- 修复Recipe StepNo等工艺过程数据没有存储到数据库导致无法查询的问题
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- 修正工艺过程数据(气体流量、耗电量)统计数值错误的问题
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- 修正系统配置中缺少配置项导致程序无法执行的问题
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- 修正 PM Operation视图中Heater电阻值显示精度不够的问题,现改为小数点后三位
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- 新特性
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- PM Process新增耗电量统计
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- 移除PSU2控制输出幅度限制的功能
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2023-08-01 15:49:13 +08:00
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## Version 1.1.28.42
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**2023-08-01**
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2023-07-05 11:04:19 +08:00
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- Bug修复
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- 无
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2023-07-28 11:39:19 +08:00
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- 新特性
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- PM Operation视图增加加热器电阻值显示
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- PM Process过程增加对加热器电阻值监测,当阻值超过上限后终止工艺
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2023-08-01 15:49:13 +08:00
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- PSU2增加控制量输出幅度限制,当温度超过1600度时,控制输出幅度限制到设定值
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2023-07-05 11:04:19 +08:00
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2023-08-01 15:49:13 +08:00
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## Version 1.1.27.41
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2023-07-24 11:19:40 +08:00
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**2023-07-24**
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- Bug修复
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- 1.解决保存新列产生的问题
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- 新特性
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-
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2023-07-24 09:17:13 +08:00
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## Version 1.1.27.40
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**2023-07-24**
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- Bug修复
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- 1.Mfc Ror属性Name增加DataMember
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- 新特性
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-
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2023-07-18 14:22:47 +08:00
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## Version 1.1.27.39
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**2023-07-18**
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- Bug修复
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- 1.解决Mfc Ror测试的问题
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- 新特性
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- 重新整理数据库代码
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2023-07-06 15:58:11 +08:00
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## Version 1.0.26.38
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**2023-07-03**
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- Bug修复
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- 修正升级软件时新增权限实际值和设置值不一致的问题
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- 新特性
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- Auto传盘逻辑更新为双腔传盘逻辑
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2023-07-03 16:20:30 +08:00
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2023-07-03 17:50:40 +08:00
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## Version 1.0.25.37
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**2023-07-03**
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2023-07-03 12:37:24 +08:00
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- Bug修复
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2023-07-03 16:20:30 +08:00
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- 修正TM和LL的LeakCheckRoutine无法执行的问题
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- 修正PM气体流量计算时,修正系数未生效的问题
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2023-07-03 17:50:40 +08:00
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- 修正ProcessExit时的输出信息等级,由Warning更改为Info
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- 修正ProcessMonitor窗口打开时,Logout时没有自动关闭该窗口的问题
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2023-07-03 12:37:24 +08:00
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- 新特性
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- 优化旁路互锁打开时的执行逻辑
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2023-07-03 16:20:30 +08:00
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- 禁止手动启动工艺
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- 禁止PM从Offline切换至Online
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- 禁止PM退出Service模式
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- LL Lid打开时输出信息等级由Warning更改为Info
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- PM Process结束,磁流体转速将为0后的输出信息等级由Warning更改为Info
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- 软件信息增加“Auto-GE”字串,指示当前版本为自动通用版
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2023-07-03 12:37:24 +08:00
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2023-06-30 11:15:15 +08:00
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## Version 1.0.23.35
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**2023-06-30**
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- Bug修复
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- 1:修正Seqence编辑器中无法保存Recipe的问题。
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- 2:修正Recipe编辑器修改StepTime后不刷新总时间,以及加载Recipe后Validate按钮不显示错误参数数量的问题。
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- 3:修正Recipe编辑器中的总时间显示不完全问题。
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- 4:修正AbortRoutine()方法列队为空时调用Peek()方法导致异常的问题。
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- 新特性
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- 1:添加MFC+气阀测试功能
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- 2:添加ROR测试功能
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2023-06-20 11:09:36 +08:00
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## Version 1.0.22.34
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**2023-06-20**
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- Bug修复
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- 无
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- 新特性
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- 1:控制V94和V96阀时,对应的控制MFC设置为0
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2023-06-02 11:40:27 +08:00
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## Version 1.0.21.33
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**2023-06-02**
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- Bug修复
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- 无
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- 新特性
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- 1:移植Coating
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- 2:修改测温,添加兼容性参数配置
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- 3:修正EFEM Online菜单标题显示为Buffer的错误
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- 4:修改库文件,IoTC支持PyroAuto和PyroFollow模式
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- 5:删除气阀和MFC联动功能,TM V60 , PM V96 V94
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2023-05-18 11:08:25 +08:00
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## Version 1.0.20.32
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**2023-05-18**
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- Bug修复
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- 修正寻边器无法完成寻边操作的问题
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- 新特性
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- 无
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2023-05-17 17:29:38 +08:00
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## Version 1.0.19.31
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2023-05-17 17:18:24 +08:00
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**2023-05-17**
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- Bug修复
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- 修正从WaferRobot从Aligner取Wafer后,Wafer被删除的问题
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- 修正Wafer拖放确认对话框箭头过长的问题
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- 新特性
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- 无
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2023-05-15 14:30:13 +08:00
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## Version 1.0.18.29
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**2023-05-15**
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- Bug修复
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- 修正上银巡边器无法Home的问题
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- 新特性
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- 无
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2023-05-15 09:32:36 +08:00
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## Version 1.0.17.28
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**2023-05-15**
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- Bug修复
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- 修正PM2卸载后相关设备仍然报警的问题
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- 修改PM主界面V87气阀鼠标悬浮绑定的提示
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- 修正Recipe编辑界面上的一些小问题
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- 新特性
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- 从10号机移至最新的Aligner驱动程序
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2023-05-08 17:42:54 +08:00
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## Version 1.0.16.27
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**2023-05-08**
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- Bug修复
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- 修正Alarm列表没有显示报警来源的问题
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- 修正EventLog、系统配置表格单元格内容对齐问题
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- 修正三色灯蜂鸣器手动关闭后,如果不按Reset按钮,则始终无法重新启用的问题
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- 新特性
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- 优化三色灯配置文件,现支持在配置文件中定义闪烁模式模板
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- 新增三色灯配置文件实时生效功能,现在修改三色灯配置文件后不需要重启软件,保存后立即生效
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2023-05-08 09:42:15 +08:00
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## Version 1.0.14.25
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**2023-05-05**
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- Bug修复
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- 修正信号塔蜂鸣器手动关闭后无法启用的问题
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- 新特性
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- 无
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|
2023-05-05 16:53:52 +08:00
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## Version 1.0.14.25
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**2023-05-05**
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- Bug修复
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- 无
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- 新特性
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- 优化三色灯控制效果
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|
|
2023-05-05 16:09:03 +08:00
|
|
|
|
## Version 1.0.13.24
|
|
|
|
|
|
|
|
|
|
**2023-05-05**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 无
|
|
|
|
|
- 新特性
|
|
|
|
|
- 从PM腔取放Tray时根据系统配置确定PSU和SCR打开或关闭
|
2023-03-15 13:43:02 +08:00
|
|
|
|
|
2023-04-26 11:27:40 +08:00
|
|
|
|
## Version 1.0.13.23
|
|
|
|
|
|
|
|
|
|
**2023-04-26**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 无
|
|
|
|
|
- 新特性
|
|
|
|
|
- 传盘压力参数一键设置
|
|
|
|
|
|
2023-04-23 15:25:20 +08:00
|
|
|
|
## Version 1.0.13.22
|
|
|
|
|
|
|
|
|
|
**2023-04-23**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 无
|
|
|
|
|
- 新特性
|
|
|
|
|
- 优化参数项,删除多余参数
|
|
|
|
|
- 修改水温Offset选项
|
|
|
|
|
- 添加Coating增长率,Tray数量为参数配置
|
|
|
|
|
- 修改仿真初始值
|
2023-04-19 18:06:10 +08:00
|
|
|
|
|
2023-04-20 17:01:49 +08:00
|
|
|
|
|
|
|
|
|
## Version 1.0.13.21
|
|
|
|
|
|
|
|
|
|
**2023-04-20**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 修正PM未安装时,仍然会触发报警的问题
|
|
|
|
|
- 新特性
|
|
|
|
|
- 更当水温报警相关参数变化时,实时生效,而不需要重启软件
|
|
|
|
|
- PM Heater界面的SCR Lower AE温度显示移至PSU Inner AE显示位置
|
|
|
|
|
- 优化PM Heater界面布局,移除多余的项目
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2023-04-20 11:03:03 +08:00
|
|
|
|
## Version 1.0.12.20
|
|
|
|
|
|
|
|
|
|
**2023-04-20**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 修正DataLog中的曲线图无法显示的问题
|
|
|
|
|
- 新特性
|
|
|
|
|
- 无
|
|
|
|
|
|
|
|
|
|
|
2023-04-19 18:06:10 +08:00
|
|
|
|
|
|
|
|
|
## Version 1.0.11.19
|
|
|
|
|
|
|
|
|
|
**2023-04-19**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 修正水温报警输出DO的有效电平,当发生报警时,输出低电平
|
|
|
|
|
- 新特性
|
|
|
|
|
- 无
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
## Version 1.0.10.18
|
|
|
|
|
|
|
|
|
|
**2023-04-19**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 修正主界面中LOG下拉框可能被撑大的问题
|
|
|
|
|
- 修正报警时蜂鸣器被自动关闭的问题
|
|
|
|
|
- 新特性
|
|
|
|
|
- 主窗口新增系统信息按钮,可查看发现日志和系统依赖库的版本信息
|
|
|
|
|
- 新增MFC和PC报警功能
|
|
|
|
|
- 新增系统配置中PC报警阈值设置
|
|
|
|
|
- 新增水温超温警告和报警功能,可在系统配置中设置Warn偏移值,使Warn阈值可以跟随Alarm阈值变动
|
|
|
|
|
- 优化水温显示窗口,产生警告或报警的项目会显示为橙色或红色
|
|
|
|
|
- 重新整理水温相关的DO、AI和系统配置项名称
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
## Version 1.0.9.17
|
2023-03-15 13:43:02 +08:00
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
**2023-03-22**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
- 新特性
|
|
|
|
|
- 合并PM,生成时会有XML文件路径问题
|
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
## Version 1.0.8.16
|
|
|
|
|
|
|
|
|
|
**2023-03-22**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
- 新特性
|
|
|
|
|
- 合并上银Tray和Wafer机械手,Tary继承Wafer
|
|
|
|
|
|
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
## Version 1.0.7.15
|
|
|
|
|
|
|
|
|
|
**2023-03-20**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 修改PM1的InterLock,
|
|
|
|
|
- 修改报警信息
|
|
|
|
|
- 修改仿真
|
|
|
|
|
- 修改测温硬件默认参数配置
|
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
2023-03-28 13:24:11 +08:00
|
|
|
|
|
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
## Version 1.0.6.14
|
|
|
|
|
|
|
|
|
|
**2023-03-20**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 从上层调用处修改PM屏蔽功能,屏蔽初始化和文件加载
|
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
2023-03-28 13:24:11 +08:00
|
|
|
|
|
|
|
|
|
|
|
|
|
|
## Version 1.0.5.13
|
|
|
|
|
|
|
|
|
|
**2023-03-20**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 删除之前此功能修改的代码
|
2023-04-15 13:53:02 +08:00
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
- 新特性
|
|
|
|
|
- 关闭阀门时,先关闭MFC,同时关闭阀门,已修改TM的 V77和MFC60,PM的MFC32 35~38,
|
|
|
|
|
|
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
## Version 1.0.4.12
|
|
|
|
|
|
|
|
|
|
**2023-03-16**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
- 新特性
|
|
|
|
|
- 重新整理所有UI继承的UIViewModelBase类
|
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
|
|
|
|
|
2023-03-28 13:24:11 +08:00
|
|
|
|
## Version 1.0.3.11
|
|
|
|
|
|
|
|
|
|
**2023-03-15**
|
2023-03-15 13:43:02 +08:00
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 修改TMPurgeRoutine和TMVentRoutine时无气流BUG
|
|
|
|
|
- 调试仿真修改TM和PM对应的InterLock,根据InterLock需要的IO,设置仿真IO的初始值
|
|
|
|
|
- 添加昂坤测温通讯和使用流程简介,方便后续人员了解昂坤硬件使用机制
|
|
|
|
|
|
2023-03-15 13:43:02 +08:00
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
2023-03-15 13:43:02 +08:00
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
|
|
|
|
|
2023-03-14 17:20:31 +08:00
|
|
|
|
## Version 1.0.2.10
|
|
|
|
|
|
|
|
|
|
**2023-03-14**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 修改TM PM 的InteiLock
|
|
|
|
|
- PM DI55 56 57报警触发条件,修改仿真相应的初始值
|
|
|
|
|
- 删除MP DI58
|
|
|
|
|
|
2023-03-14 17:20:31 +08:00
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 添加测温Inner,
|
|
|
|
|
- 使用数据为空次数判断昂坤断联
|
|
|
|
|
- 分别添加昂坤软件断联和USB断联提示
|
|
|
|
|
- 界面添加Inner绑定显示
|
|
|
|
|
- 设置昂坤显示温度下限,低于下限显示固定值400
|
2023-03-14 17:20:31 +08:00
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
|
|
|
|
|
2023-03-14 17:20:31 +08:00
|
|
|
|
## Version 1.0.1.9
|
|
|
|
|
|
|
|
|
|
**2023-03-14**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
|
|
|
|
|
2023-03-14 17:20:31 +08:00
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 重新整理优化三色灯控制
|
2023-03-14 17:20:31 +08:00
|
|
|
|
|
2023-03-03 17:04:47 +08:00
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
2023-03-13 18:54:07 +08:00
|
|
|
|
## Version 1.0.1.8
|
|
|
|
|
|
|
|
|
|
**2023-03-09**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 修改PM DI10 DI11 InterLock的触发值,修改PM DI10 报警触发值
|
2023-03-13 18:54:07 +08:00
|
|
|
|
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 新特性
|
|
|
|
|
- 修改TM的PurgeRoutine和VentRoutine中,修改打开关闭MFC60相关设置,添加延时
|
2023-03-13 18:54:07 +08:00
|
|
|
|
|
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
2023-03-11 09:15:28 +08:00
|
|
|
|
## Version 1.0.1.7
|
|
|
|
|
|
|
|
|
|
**2023-03-09**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 修改TM DI6 InterLock的触发值
|
|
|
|
|
|
2023-03-11 09:15:28 +08:00
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- Aligner设置项,在初始化和设置后显示到界面是
|
2023-03-11 09:15:28 +08:00
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
|
|
|
|
|
2023-03-11 09:15:28 +08:00
|
|
|
|
## Version 1.0.1.6
|
|
|
|
|
|
|
|
|
|
**2023-03-08**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 修改InterLock
|
|
|
|
|
|
2023-03-11 09:15:28 +08:00
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 添加对UPS电源部分数据的采集
|
2023-03-11 09:15:28 +08:00
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
|
|
|
|
|
2023-03-11 09:15:28 +08:00
|
|
|
|
## Version 1.0.1.5
|
|
|
|
|
|
|
|
|
|
**2023-03-07**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 解决TMRobot向Unload Place过程中Unload可能PrepareTransfer的问题
|
|
|
|
|
|
2023-03-11 09:15:28 +08:00
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
2023-03-11 09:15:28 +08:00
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
|
|
|
|
|
2023-03-11 09:15:28 +08:00
|
|
|
|
## Version 1.0.1.4
|
|
|
|
|
|
|
|
|
|
**2023-03-06**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 无
|
2023-04-15 13:53:02 +08:00
|
|
|
|
|
2023-03-11 09:15:28 +08:00
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 新增昂坤测温,初步优化断联重连和提示
|
|
|
|
|
- 添加接口,整合AE和昂坤测温,上层调用
|
2023-03-11 09:15:28 +08:00
|
|
|
|
|
2023-03-03 17:04:47 +08:00
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
2023-03-03 17:31:08 +08:00
|
|
|
|
## Version 1.0.1.3
|
|
|
|
|
|
|
|
|
|
**2023-03-03**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 修正ENG模式下,一些页面没有显示ENG水印的问题。
|
|
|
|
|
- 新特性
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
2023-03-03 17:31:08 +08:00
|
|
|
|
|
|
|
|
|
|
2023-04-19 16:16:11 +08:00
|
|
|
|
|
2023-03-03 17:04:47 +08:00
|
|
|
|
## Version 1.0.1.2
|
|
|
|
|
|
|
|
|
|
**2023-03-03**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 无
|
2023-03-03 17:04:47 +08:00
|
|
|
|
- 新特性
|
|
|
|
|
- 增加ENG模式
|
|
|
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2023-04-19 16:16:11 +08:00
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2023-03-03 15:42:13 +08:00
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## Version 1.0.1.1
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**2023-03-01**
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- Bug修复
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2023-03-03 17:04:47 +08:00
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- 屏蔽PM后,界面不隐藏,状态不更新,显示运行日志BUG修复
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2023-03-03 15:42:13 +08:00
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- 新特性
|
2023-03-03 17:04:47 +08:00
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- 无
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2023-03-03 15:42:13 +08:00
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## Version 1.0.1.0
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**2023-03-01**
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2023-03-03 17:04:47 +08:00
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- Bug修复
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- 更新PM和TMinterlock信息,添加缺少的IO
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2023-03-03 15:42:13 +08:00
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- 新特性
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- 无
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2023-03-03 17:04:47 +08:00
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2023-03-03 15:42:13 +08:00
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## Version 1.0.0.9
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**2023-02-28**
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- Bug修复
|
2023-03-03 17:04:47 +08:00
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- 根据Wafer夹爪信号让Load传Tray和Wafer信息,解决撞机风险
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2023-03-03 15:42:13 +08:00
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- 新特性
|
2023-03-03 17:04:47 +08:00
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- Purge最大时间改为100000s
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- PM Mfc14量程改为660
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2023-03-03 15:42:13 +08:00
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## Version 1.0.0.8
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**2023-02-15**
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- Bug修复
|
2023-03-03 17:04:47 +08:00
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- 修改水路IO名称和Interlock
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2023-03-03 15:42:13 +08:00
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- 新特性
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- 无
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## Version 1.0.0.7
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**2023-02-15**
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- Bug修复
|
2023-03-03 17:04:47 +08:00
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- 添加TM机械手报错信息解析
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2023-03-03 15:42:13 +08:00
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- 新特性
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- 无
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## Version 1.0.0.6
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**2023-02-14**
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2023-04-15 13:53:02 +08:00
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- Bug修复
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- 修正PM执行Recipe时报StepUid找不到执行函数的问题
|
2023-03-03 15:42:13 +08:00
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- 新特性
|
2023-03-03 17:04:47 +08:00
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|
2023-04-15 13:53:02 +08:00
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- PM Purge结束增加是否打开
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- 增加PM SCREnable Interlock
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- 增加PM Service模式下不准切换Online
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- ProcessAbort Rounite中增加等待MFC流量到达再往下执行
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- ProcessAbort Routine中增加关闭V72,打开V25流程
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- 优化电阻检测名称
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- TM界面所有Module Online及Offline按钮权限放开
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- 删除VacIdle参数
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|
- 修改PM气路图的V72阀的气路走向错误
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|
- 重新整理PM MO Change TMA/TCS Routine
|
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|
|
- PM Vent及ToAtmIdle Routine MFC使用动态流量
|
2023-03-03 15:42:13 +08:00
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## Version 1.0.0.5
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|
**2023-02-13**
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|
- Bug修复
|
2023-03-03 17:04:47 +08:00
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|
|
- AE的历史数据从Charting拉不出来
|
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|
|
- AE的数据不在PM模块,ProcessHistory中没有AE的数据
|
|
|
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|
|
- 新特性
|
2023-03-03 15:42:13 +08:00
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|
|
- 无
|
|
|
|
|
|
|
|
|
|
## Version 1.0.0.4
|
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|
**2023-02-11**
|
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|
|
|
|
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|
|
- Bug修复
|
|
|
|
|
- 无
|
2023-04-15 13:53:02 +08:00
|
|
|
|
|
2023-03-03 15:42:13 +08:00
|
|
|
|
- 新特性
|
|
|
|
|
- Overview界面中将TrayCassette从WaferCassette中分离,独立显示在界面右侧
|
|
|
|
|
## Version 1.0.0.3
|
|
|
|
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|
|
**2023-02-09**
|
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|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 修改Unload和TM共用泵Interlock问题
|
2023-04-15 13:53:02 +08:00
|
|
|
|
|
2023-03-03 15:42:13 +08:00
|
|
|
|
- 新特性
|
|
|
|
|
- 无
|
|
|
|
|
|
|
|
|
|
|
2023-04-15 13:53:02 +08:00
|
|
|
|
## Version 1.0.0.2
|
|
|
|
|
**2023-01-28 **
|
2023-03-03 15:42:13 +08:00
|
|
|
|
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- Bug修复
|
|
|
|
|
- 优化HWinRobot通讯,执行Pick和Place指令之前先查询控制器ERR。
|
|
|
|
|
- 修正HwinRobot命令返回?后无法正确读取Error信息的问题。
|
2023-03-03 15:42:13 +08:00
|
|
|
|
|
2023-04-15 13:53:02 +08:00
|
|
|
|
- 新特性
|
|
|
|
|
- 无
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
## Version 1.0.0.1
|
|
|
|
|
**2023-01-28**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 修改权限相关默认值
|
|
|
|
|
|
|
|
|
|
- 新特性
|
|
|
|
|
- 无
|
|
|
|
|
|
|
|
|
|
## Version 1.0.0.0
|
|
|
|
|
**2023-01-11**
|
|
|
|
|
|
|
|
|
|
- Bug修复
|
|
|
|
|
- 无
|
|
|
|
|
|
|
|
|
|
- 新特性
|
|
|
|
|
- 修改Unload和TM共用泵,涉及UI/Interlock及AutoRun流程
|
|
|
|
|
- 取消CoolingAndPurge Routine,Cooling和Purge分开
|