From 075139c8fbc22872102d5c202e71a1f256a69c95 Mon Sep 17 00:00:00 2001 From: HCL <1625932291@qq.com> Date: Fri, 8 Dec 2023 14:13:19 +0800 Subject: [PATCH] =?UTF-8?q?1.=E4=BF=AE=E6=94=B9=E4=B8=80=E4=BA=9B=E9=94=99?= =?UTF-8?q?=E8=AF=AF?= MIME-Version: 1.0 Content-Type: text/plain; charset=UTF-8 Content-Transfer-Encoding: 8bit --- Modules/Mainframe/EFEMs/Routines/TrayRobotPickRoutine.cs | 4 ++-- Modules/Mainframe/EFEMs/Routines/TrayRobotPlaceRoutine.cs | 4 ++-- Modules/Mainframe/EFEMs/Routines/WaferRobotPlaceRoutine.cs | 7 +++++-- 3 files changed, 9 insertions(+), 6 deletions(-) diff --git a/Modules/Mainframe/EFEMs/Routines/TrayRobotPickRoutine.cs b/Modules/Mainframe/EFEMs/Routines/TrayRobotPickRoutine.cs index 9202655a..5174b67a 100644 --- a/Modules/Mainframe/EFEMs/Routines/TrayRobotPickRoutine.cs +++ b/Modules/Mainframe/EFEMs/Routines/TrayRobotPickRoutine.cs @@ -114,7 +114,7 @@ namespace SicModules.EFEMs.Routines try { CheckRobotReady((int)RoutineStep.CheckRobotReady, TrayRobot, _pickTimeout); - if (SC.GetStringValue("WaferRobot.RobotType") != "SunwayRobot") + if (SC.GetStringValue("TrayRobot.RobotType") != "SunwayRobot") { CheckTrayStatuBeforePick((int)RoutineStep.CheckTrayStatuBeforePick, TrayRobot, 10); //Pick前先检查 } @@ -125,7 +125,7 @@ namespace SicModules.EFEMs.Routines SetTrayRobortExtendToDO((int)RoutineStep.SetExtendToDo, _source, 10); //设置ExtendToDO,用于检测InterLock } - if (SC.GetStringValue("WaferRobot.RobotType") == "SunwayRobot") + if (SC.GetStringValue("TrayRobot.RobotType") == "SunwayRobot") { ExtendForPick((int)RoutineStep.ExtendForPick, TrayRobot, _source, _sourceSlot, _pickTimeout); //机械手到位 } diff --git a/Modules/Mainframe/EFEMs/Routines/TrayRobotPlaceRoutine.cs b/Modules/Mainframe/EFEMs/Routines/TrayRobotPlaceRoutine.cs index b005909f..f955593c 100644 --- a/Modules/Mainframe/EFEMs/Routines/TrayRobotPlaceRoutine.cs +++ b/Modules/Mainframe/EFEMs/Routines/TrayRobotPlaceRoutine.cs @@ -160,7 +160,7 @@ namespace SicModules.EFEMs.Routines SetTrayRobortExtendToDO((int)RoutineStep.SetExtendToDo, _source, 10); //设置ExtendToDO,用于检测InterLock CheckRobotReady((int)RoutineStep.CheckRobotReady, TrayRobot, _placeTimeout); //判断机械手当前是否空闲 - if (SC.GetStringValue("WaferRobot.RobotType") == "SunwayRobot") + if (SC.GetStringValue("TrayRobot.RobotType") == "SunwayRobot") { ExtendForPlace((int)RoutineStep.ExtendForPlace, TrayRobot, _source, _sourceSlot, _placeTimeout); //伸出,关真空 } @@ -185,7 +185,7 @@ namespace SicModules.EFEMs.Routines CheckRobotReady((int)RoutineStep.CheckRobotReady, TrayRobot, _placeTimeout); //判断机械手当前是否空闲 SetTrayRobortExtendToDO((int)RoutineStep.SetExtendToDo, _source, 10); //设置ExtendToDO,用于检测InterLock - if (SC.GetStringValue("WaferRobot.RobotType") == "SunwayRobot") + if (SC.GetStringValue("TrayRobot.RobotType") == "SunwayRobot") { ExtendForPlace((int)RoutineStep.ExtendForPlace, TrayRobot, _source, _sourceSlot, _placeTimeout); //伸出,关真空 } diff --git a/Modules/Mainframe/EFEMs/Routines/WaferRobotPlaceRoutine.cs b/Modules/Mainframe/EFEMs/Routines/WaferRobotPlaceRoutine.cs index 883fb6b2..2a39a3ea 100644 --- a/Modules/Mainframe/EFEMs/Routines/WaferRobotPlaceRoutine.cs +++ b/Modules/Mainframe/EFEMs/Routines/WaferRobotPlaceRoutine.cs @@ -205,8 +205,11 @@ namespace SicModules.EFEMs.Routines ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo); TimeDelay((int)RoutineStep.TimeDelay1, 1); - CheckWaferStatuAfterPlace((int)RoutineStep.CheckWaferStatusByRq, WaferRobot, 10); //结束后检查Wafer - + if (SC.GetStringValue("WaferRobot.RobotType") != "SunwayRobot") + { + CheckWaferStatuAfterPlace((int)RoutineStep.CheckWaferStatusByRq, WaferRobot, 10); //结束后检查Wafer + } + ExecuteRoutine((int)RoutineStep.CloseSlitValve, _efemSlitValveCloseRoutine); //关闭闸板阀 } catch (RoutineBreakException)