diff --git a/Modules/Mainframe/PMs/Routines/Base/PMBaseRoutine.cs b/Modules/Mainframe/PMs/Routines/Base/PMBaseRoutine.cs
index 5ba61c55..9b97fe0f 100644
--- a/Modules/Mainframe/PMs/Routines/Base/PMBaseRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/Base/PMBaseRoutine.cs
@@ -1604,48 +1604,6 @@ namespace SicModules.PMs.Routines.Base
             }
         }
 
-        protected void SetThrottlePressureAndWaitSetPoint(int id, IoThrottleValve2 _IoThrottle, double pressure, double _pmPressureMaxDiff, int timeout)
-        {
-            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
-            {
-                Notify($"Set Throttle pressure to {pressure} and wait");
-                string reason = String.Empty;
-
-                //将当前值赋值给设定值
-                _IoThrottle.PressureSetpoint = _IoThrottle.PressureFeedback;
-
-                if (!_IoThrottle.SetPressure(out reason, 0, new object[] { pressure }))
-                {
-                    Stop($"Set Throttle pressure to { pressure} failed, { reason}");
-                    return false;
-                }
-
-                return true;
-            },
-            () =>
-            {
-                return Math.Abs(_IoThrottle.PressureSetpoint - pressure) <= 1;
-            },
-            timeout * 1000);
-
-            if (ret.Item1)
-            {
-                if (ret.Item2 == Result.FAIL)
-                {
-                    throw (new RoutineFaildException());
-                }
-                else if (ret.Item2 == Result.TIMEOUT)
-                {
-                    Stop($"Set Throttle Pressure to {pressure} timeout, over {timeout} seconds");
-                    throw (new RoutineFaildException());
-                }
-                else
-                    throw (new RoutineBreakException());
-            }
-        }
-
-
-
         protected void SetThrottlePressureAndWait(int id, IoThrottleValve2 _IoThrottle, double pressure, double _pmPressureMaxDiff, int timeout)
         {
             Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
diff --git a/Modules/Mainframe/PMs/Routines/PMCleanRoutine.cs b/Modules/Mainframe/PMs/Routines/PMCleanRoutine.cs
index 23aed2cd..1b994065 100644
--- a/Modules/Mainframe/PMs/Routines/PMCleanRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMCleanRoutine.cs
@@ -326,7 +326,7 @@ namespace SicModules.PMs.Routines
                 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
 
                 //伺服压力设定值到0mbar
-                SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _throttleTimeout);
+                SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin);
 
                 //M2、M9、M15、M19-M40 MFC 5s ramp 到0
                 SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40, 0, 5);
diff --git a/Modules/Mainframe/PMs/Routines/PMLeakCheckRoutine.cs b/Modules/Mainframe/PMs/Routines/PMLeakCheckRoutine.cs
index dfc72461..a78137a7 100644
--- a/Modules/Mainframe/PMs/Routines/PMLeakCheckRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMLeakCheckRoutine.cs
@@ -359,13 +359,13 @@ namespace SicModules.PMs.Routines
                 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
 
                 //伺服压力设定值到0mbar
-                SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _throttleTimeout);
+                SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin);
 
                 //M2、M9、M15、M19-M40 MFC 3s ramp到0
                 SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40, 0, 3);
 
                 //等待腔体压力Pump到设定值
-                WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pressureMin, _pmPressureMaxDiff, _throttleTimeout);
+                WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pressureMin, _throttleTimeout);
 
                 TimeDelay((int)RoutineStep.TimeDelay8, 3);
 
diff --git a/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs b/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
index e58553f7..15c2f02a 100644
--- a/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
@@ -465,10 +465,10 @@ namespace SicModules.PMs.Routines
                     SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode_1, _IoThrottle, 5);
 
                     //伺服压力设定值到0mbar
-                    SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTV_1, _IoThrottle, _pumpBasePressure, _pressureMaxDiff, _throttleTimeout);
+                    SetThrottleToTargetAndNoWait((int)RoutineStep.SetTV_1, _IoThrottle, _pumpBasePressure);
 
                     //等待腔体压力Pump到设定值
-                    WaitChamberPressDownTo((int)RoutineStep.WaitTV_1, _pumpBasePressure, _pressureMaxDiff, _throttleTimeout);
+                    WaitChamberPressDownTo((int)RoutineStep.WaitTV_1, _pumpBasePressure, _throttleTimeout);
                 }
 
                 //关闭蝶阀,再关闭EPV2
@@ -532,10 +532,10 @@ namespace SicModules.PMs.Routines
                     SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode_2, _IoThrottle, 5);
 
                     //伺服压力设定值到0mbar
-                    SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTV_2, _IoThrottle, _pumpBasePressure, _pressureMaxDiff, _throttleTimeout);
+                    SetThrottleToTargetAndNoWait((int)RoutineStep.SetTV_2, _IoThrottle, _pumpBasePressure);
 
                     //等待腔体压力Pump到设定值
-                    WaitChamberPressDownTo((int)RoutineStep.WaitTV_2, _pumpBasePressure, _pressureMaxDiff, _throttleTimeout);
+                    WaitChamberPressDownTo((int)RoutineStep.WaitTV_2, _pumpBasePressure, _throttleTimeout);
                 }
 
                 //计算
diff --git a/Modules/Mainframe/PMs/Routines/PMPumpRoutine.cs b/Modules/Mainframe/PMs/Routines/PMPumpRoutine.cs
index 1b60e7ef..f2fd5bf3 100644
--- a/Modules/Mainframe/PMs/Routines/PMPumpRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMPumpRoutine.cs
@@ -222,13 +222,13 @@ namespace SicModules.PMs.Routines
                 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
 
                 //伺服压力设定值到0mbar
-                SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout);
+                SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure);
 
                 //M2、M9、M15、M19-M40 MFC 3s ramp到0
                 SetMfcByGroup((int)RoutineStep.SetM2to40, MfcGroupName.M2toM40, 0, 3);
 
                 //等待腔体压力Pump到设定值
-                WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure, _pmPressureMaxDiff,_throttleTimeout);
+                WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure,_throttleTimeout);
 
                 //蝶阀设置为位置模式,开度设置为最大
                 SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
diff --git a/Modules/Mainframe/PMs/Routines/PMPurgeRoutine.cs b/Modules/Mainframe/PMs/Routines/PMPurgeRoutine.cs
index 6aa33eeb..3fa06dfc 100644
--- a/Modules/Mainframe/PMs/Routines/PMPurgeRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMPurgeRoutine.cs
@@ -349,7 +349,7 @@ namespace SicModules.PMs.Routines
                 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
 
                 //伺服压力设定值到0mbar
-                SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout);
+                SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure);
 
                 //M2、M9、M15、M19-M40 MFC 5s ramp 到0
                 SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40, 0, 5);
diff --git a/Modules/Mainframe/PMs/Routines/PMVacIdleRoutine.cs b/Modules/Mainframe/PMs/Routines/PMVacIdleRoutine.cs
index c9d5cb06..7ad9abe7 100644
--- a/Modules/Mainframe/PMs/Routines/PMVacIdleRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMVacIdleRoutine.cs
@@ -222,13 +222,13 @@ namespace SicModules.PMs.Routines
                 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
 
                 //伺服压力设定值到0mbar
-                SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _vacPumpBasePressure, _pmPressureMaxDiff, _throttleTimeout);
+                SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _vacPumpBasePressure);
 
                 //M2、M9、M15、M19-M40 MFC 3s ramp到0
                 SetMfcByGroup((int)RoutineStep.SetM2to40, MfcGroupName.M2toM40, 0, 3);
 
                 //等待腔体压力Pump到设定值
-                WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _vacPumpBasePressure, _pmPressureMaxDiff,_throttleTimeout);
+                WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _vacPumpBasePressure,_throttleTimeout);
 
                 //蝶阀设置为位置模式,开度设置为最大
                 SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);