Recipe气阀操作类整理，修改上层配置
This commit is contained in:
Han Qiang Qiang
parent
f9e503b36c
commit
5104766304
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@ -599,38 +599,78 @@
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<IoHeartBeats classType="Aitex.Core.RT.Device.Devices.IoHeartBeat" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoHeartBeat id="HeartBeat" display="HeartBeat" schematicId="HeartBeat" aioType="float" ai="AI_HeartBeat" ao="AO_HeartBeat" />
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</IoHeartBeats>
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<IoC2H4s classType="Aitex.Core.RT.Device.PmDevices.IoC2H4" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoC2H4 id="C2H4" display="" schematicId="" unit="" valve1="V58" valve2="V58s" valve3="V59" valve4="V60" valve5="V63" />
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</IoC2H4s>
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<IoHCls classType="Aitex.Core.RT.Device.PmDevices.IoHCl" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoHCl id="HCl" display="" schematicId="" unit="" valve1="V51" valve2="V51s" valve3="V54" valve4="V54s" />
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</IoHCls>
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<IoN2Dilutions classType="Aitex.Core.RT.Device.PmDevices.IoN2Dilution" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoN2Dilution id="N2Dilution" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V39" valve4="V39s" valve5="V61" />
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</IoN2Dilutions>
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<IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoN2HighDoping id="N2HighDoping" display="" schematicId="" unit="" valve1="" valve2="V40" valve3="V40s" scBasePath="PM.{module}.MFC.Mfc5.IsInstalled"/>
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</IoN2HighDopings>
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<IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSiH4 id="SiH4" display="" schematicId="" unit="" valve1="V52" valve2="V52s" valve3="V55" valve4="V56" valve5="V62" />
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</IoSiH4s>
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<IoTCSs classType="Aitex.Core.RT.Device.PmDevices.IoTCS" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoTCS id="TCS" display="" schematicId="" unit="" valve1="V48" valve2="V48s" valve3="V49" valve4="V53" valve5="V53s" />
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</IoTCSs>
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<IoTMAs classType="Aitex.Core.RT.Device.PmDevices.IoTMA" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoTMA id="TMA" display="" schematicId="" unit="" valve1="V41" valve2="V42" valve3="V43" valve4="V43s" valve5="V45" />
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</IoTMAs>
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<IoSHArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoSHArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSHArH2Switch id="SHArH2Switch" display="" schematicId="" unit="" valve1="V33" valve2="V33s" valve3="V35" valve4="V36" />
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</IoSHArH2Switchs>
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<IoPurgeArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoPurgeArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPurgeArH2Switch id="PurgeArH2Switch" display="" schematicId="" unit="" valve1="V68" />
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</IoPurgeArH2Switchs>
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<IoV99s classType="Aitex.Core.RT.Device.PmDevices.IoV99" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoV99 id="Valve99" display="" schematicId="" unit="" valve1="V99" valve2="V99s" />
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</IoV99s>
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<RecipeValveActions classType="MECF.Framework.RT.EquipmentLibrary.PmDevices.RecipeValveAction" assembly="MECF.Framework.RT.EquipmentLibrary">
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<RecipeValveAction id="C2H4" display="" schematicId="" unit="">
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<Valve Name="V58" Purge="false" Vent="true" Run="true" />
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<Valve Name="V58s" Purge="true" Vent="false" Run="false" />
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<Valve Name="V59" Purge="false" Vent="false" Run="true" />
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<Valve Name="V60" Purge="true" Vent="true" Run="false" />
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<Valve Name="V63" Purge="true" Vent="true" Run="true" />
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</RecipeValveAction>
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<RecipeValveAction id="HCl" display="" schematicId="" unit="">
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<Valve Name="V51" Purge="false" Vent="true" Run="true" />
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<Valve Name="V51s" Purge="true" Vent="false" Run="false" />
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<Valve Name="V54" Purge="false" Vent="false" Run="true" />
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<Valve Name="V54s" Purge="true" Vent="true" Run="false" />
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</RecipeValveAction>
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<RecipeValveAction id="N2Dilution" display="" schematicId="" unit="">
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<Valve Name="V37" Purge="true" Vent="false" Run="false" />
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<Valve Name="V39" Purge="false" Vent="false" Run="true" />
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<Valve Name="V39s" Purge="true" Vent="true" Run="false" />
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<Valve Name="V61" Purge="true" Vent="true" Run="true" />
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</RecipeValveAction>
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<RecipeValveAction id="N2HighDoping" display="" schematicId="" unit="">
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<Valve Name="V40" Purge="false" Vent="false" Run="true" Close="false" />
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<Valve Name="V40s" Purge="true" Vent="true" Run="false" Close="true" />
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</RecipeValveAction>
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<RecipeValveAction id="SiH4" display="" schematicId="" unit="">
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<Valve Name="V52" Purge="false" Vent="true" Run="true" />
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<Valve Name="V52s" Purge="true" Vent="false" Run="false" />
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<Valve Name="V55" Purge="false" Vent="false" Run="true" />
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<Valve Name="V56" Purge="true" Vent="true" Run="false" />
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<Valve Name="V62" Purge="true" Vent="true" Run="true" />
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</RecipeValveAction>
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<RecipeValveAction id="TCS" display="" schematicId="" unit="">
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<Valve Name="V48" Purge="false" Vent="true" Run="true" />
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<Valve Name="V48s" Purge="false" Vent="true" Run="true" />
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<Valve Name="V49" Purge="true" Vent="false" Run="false" />
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<Valve Name="V53" Purge="false" Vent="false" Run="true" />
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<Valve Name="V53s" Purge="true" Vent="true" Run="false" />
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</RecipeValveAction>
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<RecipeValveAction id="TMA" display="" schematicId="" unit="">
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<Valve Name="V41" Purge="false" Vent="false" Run="true" />
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<Valve Name="V42" Purge="true" Vent="true" Run="false" />
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<Valve Name="V43" Purge="false" Vent="true" Run="true" />
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<Valve Name="V43s" Purge="false" Vent="true" Run="true" />
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<Valve Name="V45" Purge="true" Vent="false" Run="false" />
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</RecipeValveAction>
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<RecipeValveAction id="SHArH2Switch" display="" schematicId="" unit="">
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<Valve Name="V33" Ar="false" H2="true" />
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<Valve Name="V33s" Ar="true" H2="false" />
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<Valve Name="V35" Ar="true" H2="true" />
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<Valve Name="V36" Ar="true" H2="true" />
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<Valve Name="V64" Ar="true" H2="true" />
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<Valve Name="V65" Ar="true" H2="true" />
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</RecipeValveAction>
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<RecipeValveAction id="PurgeArH2Switch" display="" schematicId="" unit="">
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<Valve Name="V68" Ar="false" H2="true" />
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</RecipeValveAction>
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<RecipeValveAction id="Valve99" display="" schematicId="" unit="">
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<Valve Name="V99" Purge="false" Vent="true" />
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<Valve Name="V99s" Purge="true" Vent="false" />
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</RecipeValveAction>
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</RecipeValveActions>
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<IoInterLocks classType="Aitex.Core.RT.Device.Devices.IoInterLock" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoInterLock id="PMInterLock" display="" schematicId="" unit="" doLidOpenRoutineSucceed="DO_PurgeRoutineSucceed"
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doLidCloseRoutineSucceed="DO_CleanRoutineSucceed" doProcessRunning="DO_ProcessRunning" doPreprocessRunning="DO_PreprocessRunning"
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@ -2,34 +2,34 @@
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Reference in New Issue