diff --git a/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml b/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml
index 3fd85358..d4a24719 100644
--- a/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml
+++ b/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml
@@ -599,38 +599,78 @@
   <IoHeartBeats classType="Aitex.Core.RT.Device.Devices.IoHeartBeat" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoHeartBeat id="HeartBeat" display="HeartBeat" schematicId="HeartBeat" aioType="float" ai="AI_HeartBeat" ao="AO_HeartBeat" />
   </IoHeartBeats>
-  <IoC2H4s classType="Aitex.Core.RT.Device.PmDevices.IoC2H4" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoC2H4 id="C2H4" display="" schematicId="" unit="" valve1="V58" valve2="V58s" valve3="V59" valve4="V60" valve5="V63" />
-  </IoC2H4s>
-  <IoHCls classType="Aitex.Core.RT.Device.PmDevices.IoHCl" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoHCl id="HCl" display="" schematicId="" unit="" valve1="V51" valve2="V51s" valve3="V54" valve4="V54s" />
-  </IoHCls>
-  <IoN2Dilutions classType="Aitex.Core.RT.Device.PmDevices.IoN2Dilution" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoN2Dilution id="N2Dilution" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V39" valve4="V39s" valve5="V61" />
-  </IoN2Dilutions>
   
-  <IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoN2HighDoping id="N2HighDoping" display="" schematicId="" unit=""   valve1="" valve2="V40" valve3="V40s" scBasePath="PM.{module}.MFC.Mfc5.IsInstalled"/>
-  </IoN2HighDopings>
-  
-  <IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoSiH4 id="SiH4" display="" schematicId="" unit="" valve1="V52" valve2="V52s" valve3="V55" valve4="V56" valve5="V62" />
-  </IoSiH4s>
-  <IoTCSs classType="Aitex.Core.RT.Device.PmDevices.IoTCS" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoTCS id="TCS" display="" schematicId="" unit="" valve1="V48" valve2="V48s" valve3="V49" valve4="V53" valve5="V53s" />
-  </IoTCSs>
-  <IoTMAs classType="Aitex.Core.RT.Device.PmDevices.IoTMA" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoTMA id="TMA" display="" schematicId="" unit="" valve1="V41" valve2="V42" valve3="V43" valve4="V43s" valve5="V45" />
-  </IoTMAs>
-  <IoSHArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoSHArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoSHArH2Switch id="SHArH2Switch" display="" schematicId="" unit="" valve1="V33" valve2="V33s" valve3="V35" valve4="V36" />
-  </IoSHArH2Switchs>
-  <IoPurgeArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoPurgeArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoPurgeArH2Switch id="PurgeArH2Switch" display="" schematicId="" unit="" valve1="V68" />
-  </IoPurgeArH2Switchs>
-  <IoV99s classType="Aitex.Core.RT.Device.PmDevices.IoV99" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoV99 id="Valve99" display="" schematicId="" unit="" valve1="V99" valve2="V99s" />
-  </IoV99s>
+  <RecipeValveActions classType="MECF.Framework.RT.EquipmentLibrary.PmDevices.RecipeValveAction" assembly="MECF.Framework.RT.EquipmentLibrary">
+    <RecipeValveAction id="C2H4" display="" schematicId="" unit="">
+      <Valve Name="V58"  Purge="false" Vent="true"  Run="true"  />
+      <Valve Name="V58s" Purge="true"  Vent="false" Run="false" />
+      <Valve Name="V59"  Purge="false" Vent="false" Run="true"  />
+      <Valve Name="V60"  Purge="true"  Vent="true"  Run="false" />
+      <Valve Name="V63"  Purge="true"  Vent="true"  Run="true"  />
+    </RecipeValveAction>
+    
+    <RecipeValveAction id="HCl" display="" schematicId="" unit="">
+      <Valve Name="V51"  Purge="false" Vent="true"  Run="true"  />
+      <Valve Name="V51s" Purge="true"  Vent="false" Run="false" />
+      <Valve Name="V54"  Purge="false" Vent="false" Run="true"  />
+      <Valve Name="V54s" Purge="true"  Vent="true"  Run="false" />
+    </RecipeValveAction>
+    
+    <RecipeValveAction id="N2Dilution" display="" schematicId="" unit="">
+      <Valve Name="V37"  Purge="true"  Vent="false" Run="false" />
+      <Valve Name="V39"  Purge="false" Vent="false" Run="true"  />
+      <Valve Name="V39s" Purge="true"  Vent="true"  Run="false" />
+      <Valve Name="V61"  Purge="true"  Vent="true"  Run="true"  />
+    </RecipeValveAction>
+
+    <RecipeValveAction id="N2HighDoping" display="" schematicId="" unit="">
+      <Valve Name="V40"  Purge="false" Vent="false" Run="true"  Close="false" />
+      <Valve Name="V40s" Purge="true"  Vent="true"  Run="false" Close="true"  />
+    </RecipeValveAction>
+
+    <RecipeValveAction id="SiH4" display="" schematicId="" unit="">
+      <Valve Name="V52"  Purge="false" Vent="true"  Run="true"  />
+      <Valve Name="V52s" Purge="true"  Vent="false" Run="false" />
+      <Valve Name="V55"  Purge="false" Vent="false" Run="true"  />
+      <Valve Name="V56"  Purge="true"  Vent="true"  Run="false" />
+      <Valve Name="V62"  Purge="true"  Vent="true"  Run="true"  />
+    </RecipeValveAction>
+
+    <RecipeValveAction id="TCS" display="" schematicId="" unit="">
+      <Valve Name="V48"  Purge="false" Vent="true"  Run="true"  />
+      <Valve Name="V48s" Purge="false" Vent="true"  Run="true"  />
+      <Valve Name="V49"  Purge="true"  Vent="false" Run="false" />
+      <Valve Name="V53"  Purge="false" Vent="false" Run="true"  />
+      <Valve Name="V53s" Purge="true"  Vent="true"  Run="false" />
+    </RecipeValveAction>
+
+    <RecipeValveAction id="TMA" display="" schematicId="" unit="">
+      <Valve Name="V41"  Purge="false" Vent="false" Run="true"  />
+      <Valve Name="V42"  Purge="true"  Vent="true"  Run="false" />
+      <Valve Name="V43"  Purge="false" Vent="true"  Run="true"  />
+      <Valve Name="V43s" Purge="false" Vent="true"  Run="true"  />
+      <Valve Name="V45"  Purge="true"  Vent="false" Run="false" />
+    </RecipeValveAction>
+
+    <RecipeValveAction id="SHArH2Switch" display="" schematicId="" unit="">
+      <Valve Name="V33"  Ar="false" H2="true"  />
+      <Valve Name="V33s" Ar="true"  H2="false" />
+      <Valve Name="V35"  Ar="true"  H2="true"  />
+      <Valve Name="V36"  Ar="true"  H2="true"  />
+      <Valve Name="V64"  Ar="true"  H2="true"  />
+      <Valve Name="V65"  Ar="true"  H2="true"  />
+    </RecipeValveAction>
+
+    <RecipeValveAction id="PurgeArH2Switch" display="" schematicId="" unit="">
+      <Valve Name="V68"  Ar="false" H2="true" />
+    </RecipeValveAction>
+
+    <RecipeValveAction id="Valve99" display="" schematicId="" unit="">
+      <Valve Name="V99"  Purge="false" Vent="true"  />
+      <Valve Name="V99s" Purge="true"  Vent="false" />
+    </RecipeValveAction>
+  </RecipeValveActions>
+
   <IoInterLocks classType="Aitex.Core.RT.Device.Devices.IoInterLock" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoInterLock id="PMInterLock" display="" schematicId="" unit="" doLidOpenRoutineSucceed="DO_PurgeRoutineSucceed"
                  doLidCloseRoutineSucceed="DO_CleanRoutineSucceed" doProcessRunning="DO_ProcessRunning" doPreprocessRunning="DO_PreprocessRunning"
diff --git a/Modules/Mainframe/gitversion.json b/Modules/Mainframe/gitversion.json
index a85336fc..d0ed9c95 100644
--- a/Modules/Mainframe/gitversion.json
+++ b/Modules/Mainframe/gitversion.json
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\ No newline at end of file
diff --git a/SicRT/gitversion.json b/SicRT/gitversion.json
index a85336fc..d0ed9c95 100644
--- a/SicRT/gitversion.json
+++ b/SicRT/gitversion.json
@@ -2,34 +2,34 @@
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\ No newline at end of file
diff --git a/SicSimulator/gitversion.json b/SicSimulator/gitversion.json
index a85336fc..d0ed9c95 100644
--- a/SicSimulator/gitversion.json
+++ b/SicSimulator/gitversion.json
@@ -2,34 +2,34 @@
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diff --git a/SicUI/gitversion.json b/SicUI/gitversion.json
index a85336fc..d0ed9c95 100644
--- a/SicUI/gitversion.json
+++ b/SicUI/gitversion.json
@@ -2,34 +2,34 @@
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 }
\ No newline at end of file
diff --git a/ThirdParty/MECF.Framework/MECF.Framework.Common.dll b/ThirdParty/MECF.Framework/MECF.Framework.Common.dll
index 0b3bdfab..42bf72d4 100644
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diff --git a/ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll b/ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
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index 6f758a1f..f897e2e7 100644
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diff --git a/ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll b/ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
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diff --git a/ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll b/ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
index 425db955..e6e9b597 100644
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diff --git a/ThirdParty/MECF.Framework/Sicentury.Localization.dll b/ThirdParty/MECF.Framework/Sicentury.Localization.dll
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diff --git a/ThirdParty/MECF.Framework/zh/Sicentury.Localization.resources.dll b/ThirdParty/MECF.Framework/zh/Sicentury.Localization.resources.dll
index 8c8e6f63..130ed518 100644
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