diff --git a/Modules/Mainframe/Aligners/Routines/AlignerAlignRoutine.cs b/Modules/Mainframe/Aligners/Routines/AlignerAlignRoutine.cs
index aedffc20..23109acf 100644
--- a/Modules/Mainframe/Aligners/Routines/AlignerAlignRoutine.cs
+++ b/Modules/Mainframe/Aligners/Routines/AlignerAlignRoutine.cs
@@ -49,14 +49,7 @@ namespace SicModules.Aligners.Routines
 
                 CheckHaveWafer((int)RoutineStep.CheckWafer, 10);
 
-                OpenVacuum((int)RoutineStep.OpenVacuum, 3);
-
-                //移动到测量中心
-                AlignerMoveToMeasure((int)RoutineStep.MoveToMeasure, 20);
-
-                DoAliger((int)RoutineStep.Aligner, _alignerTimeOut);
-
-                CloseVacuum((int)RoutineStep.CloseVacuum, 3);
+                AlignerMove((int)RoutineStep.Aligner, _alignerTimeOut);
             }
             catch (RoutineBreakException)
             {
diff --git a/Modules/Mainframe/Aligners/Routines/Base/AlignerBaseRoutine.cs b/Modules/Mainframe/Aligners/Routines/Base/AlignerBaseRoutine.cs
index 8168e418..2ae5a86b 100644
--- a/Modules/Mainframe/Aligners/Routines/Base/AlignerBaseRoutine.cs
+++ b/Modules/Mainframe/Aligners/Routines/Base/AlignerBaseRoutine.cs
@@ -184,20 +184,14 @@ namespace SicModules.Aligners.Routines.Base
             }
         }
 
-        //寻边
-        protected void DoAliger(int id, int timeout)
+        protected void AlignerMove(int id, int timeout)
         {
-            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
+            var ret = ExecuteAndWait(id, () =>
             {
-                Notify($"Alinger");
-                _alignerDevice.Set("BAL");
-
+                Notify($"Align");
+                _alignerDevice.DoAliger();
                 return true;
-            }, () =>
-            {
-                return !_alignerDevice.IsBusy;
-
-            }, timeout * 1000);
+            }, () => !_alignerDevice.IsBusy, timeout * 1000);
 
             if (ret.Item1)
             {
@@ -205,71 +199,9 @@ namespace SicModules.Aligners.Routines.Base
                 {
                     throw (new RoutineFaildException());
                 }
-                else if (ret.Item2 == Result.TIMEOUT) 
+                else if (ret.Item2 == Result.TIMEOUT) //timeout
                 {
-                    Stop($"Aligner Alinger Timeout, over {timeout} seconds");
-                    throw (new RoutineFaildException());
-                }
-                else
-                    throw (new RoutineBreakException());
-            }
-        }
-
-        //打开真空
-        protected void OpenVacuum(int id, int timeout)
-        {
-            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
-            {
-                Notify($"Open Vacuum");
-                _alignerDevice.Set("CVN");
-
-                return true;
-            }, () =>
-            {
-                return !_alignerDevice.IsBusy;
-
-            }, timeout * 1000);
-
-            if (ret.Item1)
-            {
-                if (ret.Item2 == Result.FAIL)
-                {
-                    throw (new RoutineFaildException());
-                }
-                else if (ret.Item2 == Result.TIMEOUT) 
-                {
-                    Stop($"Aligner Open Vacuum Timeout, over {timeout} seconds");
-                    throw (new RoutineFaildException());
-                }
-                else
-                     throw (new RoutineBreakException());
-            }
-        }
-
-        //关闭真空
-        protected void CloseVacuum(int id, int timeout)
-        {
-            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
-            {
-                Notify($"Close Vacuum");
-                _alignerDevice.Set("CVF");
-
-                return true;
-            }, () =>
-            {
-                return !_alignerDevice.IsBusy;
-
-            }, timeout * 1000);
-
-            if (ret.Item1)
-            {
-                if (ret.Item2 == Result.FAIL)
-                {
-                    throw (new RoutineFaildException());
-                }
-                else if (ret.Item2 == Result.TIMEOUT)
-                {
-                    Stop($"Aligner Close Vacuum Timeout, over {timeout} seconds");
+                    Stop($"Aligner Align Timeout, over {timeout} seconds");
                     throw (new RoutineFaildException());
                 }
                 else
diff --git a/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml b/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml
index bfcb8fbd..d62ad077 100644
--- a/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml
+++ b/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml
@@ -415,7 +415,7 @@
     <IoSensor id="SensorPSU3dpCommunicationError"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSU3dpCommunicationError"  infoText="" warningText="" alarmText="Alarm76  PSU-3 dp Communication Error  [DI-332]" />
     <IoSensor id="SensorSCRdpCommunicationError"   module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCRdpCommunicationError"   infoText="" warningText="" alarmText="Alarm77  SCR dp Communication Error  [DI-333]" />
     <IoSensor id="SensorChamPressAboveATMSW2"      module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ChamPressAboveATMSW2"      infoText="" warningText="" alarmText="Alarm98 Chamber Press Above ATM  [DI-345]" />
-    <IoSensor id="SensorEtherCATcomError"          module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_EtherCATTcomError"         infoText="" warningText="" alarmText="Alarm99  EtherCATcomError  [DI-349]" />
+    <IoSensor id="SensorEtherCATcomError"          module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_EtherCATTcomError"         infoText="" warningText="" alarmText="" />
     <IoSensor id="SensorHearbeatTimeout"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_HearbeatTimeout"           infoText="" warningText="" alarmText="Alarm100  PM Hearbeat Timeout  [DI-350]" />
     <IoSensor id="SensorMFC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC01Offline" infoText="" warningText="" alarmText="Alarm101  MFC01 Offline  [DI-351]" />
     <IoSensor id="SensorMFC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC02Offline" infoText="" warningText="" alarmText="Alarm102  MFC02 Offline  [DI-352]" />