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更新dll，修改流量计算器 

添加Recipe参数配置项
This commit is contained in:
hanqiangqiang 2024-07-17 17:44:17 +08:00
parent 859ef96382
commit 5ed714934e
15 changed files with 137 additions and 105 deletions
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11
Modules/Mainframe/Config/Recipe/Sic/Process/RecipeFormat.xml
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@ -20,9 +20,9 @@
<Item DisplayName="H2" ControlName="H2" /> <Item DisplayName="H2" ControlName="H2" />
</Step> </Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carray Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="4. Carray Gas Flow (M41)" UnitName="sccm" ControlName="Mfc41.Ramp" InputMode="" Min="0" Max="1000000" Description=""/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="4. Carry Gas Flow (M41)" UnitName="sccm" ControlName="Mfc41.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="5. Carray Gas Flow (M42)" UnitName="sccm" ControlName="Mfc42.Ramp" InputMode="" Min="0" Max="1000000" Description=""/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="5. Carry Gas Flow (M42)" UnitName="sccm" ControlName="Mfc42.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="6. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/> <Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="6. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="7. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description=""> <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="7. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
<Item DisplayName="Ramp" ControlName="Ramp" /> <Item DisplayName="Ramp" ControlName="Ramp" />
@ -112,11 +112,8 @@
<Item DisplayName="Run" ControlName="Run" /> <Item DisplayName="Run" ControlName="Run" />
</Step> </Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
</Group>
<Group DisplayName="SH Flow->Si Source->HCL Flow">
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/> <Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. HCl Pre-Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. HCl Outer Flow (M43)" UnitName="sccm" ControlName="Mfc43.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M43.HClFlowsccm"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. HCl Outer Flow (M43)" UnitName="sccm" ControlName="Mfc43.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M43.HClFlowsccm"/>

44
Modules/Mainframe/gitversion.json
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@ -2,34 +2,34 @@
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55
SicRT/Config/System.sccfg
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@ -106,10 +106,20 @@
<config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" /> <config default="0" name="Min" description="Minimum Value" max="0" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
<config default="200000" name="Max" description="Maximum Value" max="200000" min="200000" paramter="" tag="" unit="sccm" type="Integer" visible="false" /> <config default="200000" name="Max" description="Maximum Value" max="200000" min="200000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
</configs> </configs>
<configs name="CarrayGasFlow(M40)"> <configs name="CarryGasFlow(M40)">
<config default="6000" name="Default" description="Default Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" /> <config default="10000" name="Default" description="Default Value" max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" />
<config default="0" name="Min" description="Minimum Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" /> <config default="0" name="Min" description="Minimum Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
<config default="100000" name="Max" description="Maximum Value" max="100000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" /> <config default="200000" name="Max" description="Maximum Value" max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
</configs>
<configs name="CarryGasFlow(M41)">
<config default="10000" name="Default" description="Default Value" max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" />
<config default="0" name="Min" description="Minimum Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
<config default="200000" name="Max" description="Maximum Value" max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
</configs>
<configs name="CarryGasFlow(M42)">
<config default="10000" name="Default" description="Default Value" max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" />
<config default="0" name="Min" description="Minimum Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
<config default="200000" name="Max" description="Maximum Value" max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
</configs> </configs>
<configs name="SHTotalFlowSplitRatio"> <configs name="SHTotalFlowSplitRatio">
<config default="33:100:88" name="Default" description="Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="true" /> <config default="33:100:88" name="Default" description="Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="true" />
@ -240,6 +250,7 @@
<config default="3000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" /> <config default="3000" name="Max" description="Maximum Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
</configs> </configs>
</configs> </configs>
<configs name="SHFlow_SiSource_HClFlow"> <configs name="SHFlow_SiSource_HClFlow">
<configs name="HClFlowMode "> <configs name="HClFlowMode ">
<config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent;Run" tag="ReadOnlySelection" unit="" type="String" visible="true" /> <config default="Purge" name="Default" description="Default Value" max="" min="" paramter="Purge;Vent;Run" tag="ReadOnlySelection" unit="" type="String" visible="true" />
@ -249,7 +260,31 @@
<config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" /> <config default="0" name="Min" description="Minimum Value" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
<config default="5000" name="Max" description="Maximum Value" max="5000" min="5000" paramter="" tag="" unit="sccm" type="Integer" visible="false" /> <config default="5000" name="Max" description="Maximum Value" max="5000" min="5000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
</configs> </configs>
<configs name="HCLSourceSplitRatio">
<config default="22:74:151" name="Default" description="Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="true" />
</configs>
<configs name="HClPreSplitFlow(M17)">
<config default="30000" name="Default" description="Default Value" max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" />
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
<config default="200000" name="Max" description="Maximum Value" max="200000" min="10000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
</configs>
<configs name="HClInnerFlow(M45)">
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="sccm" type="Integer" />
<config default="0" name="Min" description="Minimum Value" max="2000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
<config default="10000" name="Max" description="Maximum Value" max="10000" min="20000" paramter="" tag="" unit="sccm" type="Integer" visible="false" />
</configs>
<configs name="HClMiddleFlow(M44)">
<config default="1500" name="Default" description="Default Value" max="20000" min="0" paramter="" tag="" unit="mbar" type="Integer" />
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
<config default="10000" name="Max" description="Maximum Value" max="10000" min="10000" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
</configs>
<configs name="HClOuterFlow(M43)">
<config default="1500" name="Default" description="Default Value" max="10000" min="0" paramter="" tag="" unit="mbar" type="Integer" />
<config default="0" name="Min" description="Minimum Value" max="1000" min="0" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
<config default="10000" name="Max" description="Maximum Value" max="10000" min="10000" paramter="" tag="" unit="mbar" type="Integer" visible="false" />
</configs>
</configs> </configs>
<configs name="SHFlow_SiSource_SiSourceSplit"> <configs name="SHFlow_SiSource_SiSourceSplit">
<configs name="SiSourceSplitRatio"> <configs name="SiSourceSplitRatio">
<config default="33:100:88" name="Default" description="Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="true" /> <config default="33:100:88" name="Default" description="Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="true" />
@ -792,7 +827,7 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" /> <config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs> </configs>
<configs name="Mfc17"> <configs name="Mfc17">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" /> <config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" /> <config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
@ -895,37 +930,37 @@
</configs> </configs>
<configs name="Mfc40"> <configs name="Mfc40">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" /> <config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" /> <config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs> </configs>
<configs name="Mfc41"> <configs name="Mfc41">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" /> <config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" /> <config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs> </configs>
<configs name="Mfc42"> <configs name="Mfc42">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" /> <config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" /> <config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs> </configs>
<configs name="Mfc43"> <configs name="Mfc43">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" /> <config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" /> <config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs> </configs>
<configs name="Mfc44"> <configs name="Mfc44">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" /> <config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" /> <config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs> </configs>
<configs name="Mfc45"> <configs name="Mfc45">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" /> <config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" /> <config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" /> <config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs> </configs>

44
SicRT/gitversion.json
View File

@ -2,34 +2,34 @@
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