diff --git a/Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs b/Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs
index 5803de77..58d66139 100644
--- a/Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs
@@ -69,7 +69,8 @@ namespace SicModules.PMs.Routines
             TimeDelay1,
             TimeDelay2,
             TimeDelay3,
-            TimeDelay4
+            TimeDelay4,
+            TimeDelay5,
         }
 
         public PMChamberMoveBodyRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
@@ -153,6 +154,7 @@ namespace SicModules.PMs.Routines
             {
                 //开启V76
                 SetIoValueByName((int)RoutineStep.CloseTv75, "V75", false, 2);
+                TimeDelay((int)RoutineStep.TimeDelay5, 2);
                 SetIoValueByName((int)RoutineStep.StepSetTv76, "V76", true, 2);
 
                 TimeDelay((int)RoutineStep.TimeDelay0, 2);