From 7aaf7e38f8fa58f90a12ab77297b348fb5ccf3bb Mon Sep 17 00:00:00 2001
From: HCL <1625932291@qq.com>
Date: Tue, 8 Oct 2024 17:06:30 +0800
Subject: [PATCH] =?UTF-8?q?1.PM=E5=BC=80=E8=85=94=E6=97=B6=E5=85=B3?=
 =?UTF-8?q?=E9=97=ADV75=E5=90=8E=E5=BB=B6=E6=97=B62s=E5=86=8D=E6=89=93?=
 =?UTF-8?q?=E5=BC=80V76=E9=98=80?=
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---
 Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs | 4 +++-
 1 file changed, 3 insertions(+), 1 deletion(-)

diff --git a/Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs b/Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs
index 5803de77..58d66139 100644
--- a/Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs
@@ -69,7 +69,8 @@ namespace SicModules.PMs.Routines
             TimeDelay1,
             TimeDelay2,
             TimeDelay3,
-            TimeDelay4
+            TimeDelay4,
+            TimeDelay5,
         }
 
         public PMChamberMoveBodyRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
@@ -153,6 +154,7 @@ namespace SicModules.PMs.Routines
             {
                 //开启V76
                 SetIoValueByName((int)RoutineStep.CloseTv75, "V75", false, 2);
+                TimeDelay((int)RoutineStep.TimeDelay5, 2);
                 SetIoValueByName((int)RoutineStep.StepSetTv76, "V76", true, 2);
 
                 TimeDelay((int)RoutineStep.TimeDelay0, 2);