1.PM开腔时关闭V75后延时2s再打开V76阀
This commit is contained in:
parent
f8bae8eea8
commit
7aaf7e38f8
|
@ -69,7 +69,8 @@ namespace SicModules.PMs.Routines
|
||||||
TimeDelay1,
|
TimeDelay1,
|
||||||
TimeDelay2,
|
TimeDelay2,
|
||||||
TimeDelay3,
|
TimeDelay3,
|
||||||
TimeDelay4
|
TimeDelay4,
|
||||||
|
TimeDelay5,
|
||||||
}
|
}
|
||||||
|
|
||||||
public PMChamberMoveBodyRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
|
public PMChamberMoveBodyRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
|
||||||
|
@ -153,6 +154,7 @@ namespace SicModules.PMs.Routines
|
||||||
{
|
{
|
||||||
//开启V76
|
//开启V76
|
||||||
SetIoValueByName((int)RoutineStep.CloseTv75, "V75", false, 2);
|
SetIoValueByName((int)RoutineStep.CloseTv75, "V75", false, 2);
|
||||||
|
TimeDelay((int)RoutineStep.TimeDelay5, 2);
|
||||||
SetIoValueByName((int)RoutineStep.StepSetTv76, "V76", true, 2);
|
SetIoValueByName((int)RoutineStep.StepSetTv76, "V76", true, 2);
|
||||||
|
|
||||||
TimeDelay((int)RoutineStep.TimeDelay0, 2);
|
TimeDelay((int)RoutineStep.TimeDelay0, 2);
|
||||||
|
|
Loading…
Reference in New Issue