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SicMultiplate
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1.PM开腔时关闭V75后延时2s再打开V76阀

This commit is contained in:
HCL 2024-10-08 17:06:30 +08:00
parent f8bae8eea8
commit 7aaf7e38f8
1 changed files with 3 additions and 1 deletions
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4
Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs
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@ -69,7 +69,8 @@ namespace SicModules.PMs.Routines
TimeDelay1,
TimeDelay2,
TimeDelay3,
TimeDelay4
TimeDelay4,
TimeDelay5,
}
public PMChamberMoveBodyRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
@ -153,6 +154,7 @@ namespace SicModules.PMs.Routines
{
//开启V76
SetIoValueByName((int)RoutineStep.CloseTv75, "V75", false, 2);
TimeDelay((int)RoutineStep.TimeDelay5, 2);
SetIoValueByName((int)RoutineStep.StepSetTv76, "V76", true, 2);
TimeDelay((int)RoutineStep.TimeDelay0, 2);