Interlock新增DO-175
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@ -2456,6 +2456,7 @@
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<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
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<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
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<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
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<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
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</Action>
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<Action do="PM1.DO_PostProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-184">
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<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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