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SicMultiplate
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传盘压力参数一键设置

This commit is contained in:
LAPTOP-9VQH4NI5\LCR 2023-04-26 11:27:40 +08:00
parent 63a839e558
commit 9d59aa3533
7 changed files with 62 additions and 5 deletions
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5
Modules/Mainframe/TMs/Routines/TMVentRoutine.cs
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@ -176,6 +176,11 @@ namespace SicModules.TMs.Routines
return Result.FAIL;
}
if (_slowFastVentSwitchPressure > _ventBasePressure)
{
_slowFastVentSwitchPressure = _ventBasePressure;
}
_swTimer.Restart();
Notify("Start");
return Result.RUN;

2
SicRT/Config/System.sccfg
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@ -1602,6 +1602,8 @@
</configs>
</configs>
<configs name="TM">
<config default="300" name="ProcessPressure" description="传盘压力基准" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="20" name="VacuumPressureBaseOffset" description="传盘压力Offset" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="192.168.1.102:102" name="SiemensIP" description="Siemens IP Address" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="S1500" name="SiemensType" visible="false" description="Siemens Type" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="960" name="AtmPressureBase" description="判断大气压的时候，压力值需要大于该值" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />

43
SicRT/Equipments/Systems/EquipmentManager.cs
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@ -33,6 +33,7 @@ using SicModules.UnLoads;
using Aitex.Core.RT.DBCore;
using MECF.Framework.UI.Core.TrayCoating;
using System.Data;
using Aitex.Core.RT.Log;
namespace SicRT.Equipments.Systems
{
@ -213,9 +214,51 @@ namespace SicRT.Equipments.Systems
_auto = new AutoTransfer();
_returnAll = new ReturnAllWafer();
SC.RegisterValueChangedCallback("TM.ProcessPressure", SetTansferPressure);
return true;
}
private void SetTansferPressure(object value)
{
try
{
double.TryParse(value.ToString(), out double dbValue);
double offset = SC.GetValue<double>("TM.VacuumPressureBaseOffset");
double basePressure = offset + dbValue;
SC.SetItemValue("TM.PressureBalance.BalancePressure", dbValue);
SC.SetItemValue("TM.VacuumPressureBase", basePressure);
SC.SetItemValue("TM.Purge.VentBasePressure", dbValue);
SC.SetItemValue("PM.VacuumPressureBase", basePressure);
SC.SetItemValue("PM.PM1.ProcessIdle.FinalPressure", value);
SC.SetItemValue("PM.PM1.PreProcess.ChamberPressure", value);
SC.SetItemValue("PM.PM2.ProcessIdle.FinalPressure", value);
SC.SetItemValue("PM.PM2.PreProcess.ChamberPressure", value);
SC.SetItemValue("LoadLock.VacuumPressureBase", basePressure);
SC.SetItemValue("LoadLock.Purge.VentBasePressure", value);
SC.SetItemValue("UnLoad.VacuumPressureBase", basePressure);
SC.SetItemValue("UnLoad.Purge.VentBasePressure", value);
}
catch (Exception ex)
{
EV.PostWarningLog("System", ex.Message);
}
}
private void InitModules()
{
var tm = new TMModule(ModuleName.TM);

2
SicRT/Properties/AssemblyInfo.cs
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@ -51,6 +51,6 @@ using System.Windows;
// 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
// 方法是按如下所示使用“*”: :
[assembly: AssemblyVersion("1.0.13.22")]
[assembly: AssemblyVersion("1.0.13.23")]

9
SicRT/ReleaseNotes.md
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@ -1,6 +1,15 @@

# Sic 系统更新历史记录
## Version 1.0.13.23
**2023-04-26**
- Bug修复
- 无
- 新特性
- 传盘压力参数一键设置
## Version 1.0.13.22
**2023-04-23**

4
SicSetup/Sic_Setup/Properties/AssemblyInfo.cs
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@ -31,6 +31,4 @@ using System.Runtime.InteropServices;
//
// You can specify all the values or you can default the Build and Revision Numbers
// by using the '*' as shown below:
// [assembly: AssemblyVersion("1.0.*")]
[assembly: AssemblyVersion("1.1.1.0")]
[assembly: AssemblyFileVersion("1.1.1.0")]
[assembly: AssemblyVersion("1.0.13.23")]

2
SicUI/Properties/AssemblyInfo.cs
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@ -54,5 +54,5 @@ using System.Windows;
// You can specify all the values or you can default the Build and Revision Numbers
// by using the '*' as shown below:
[assembly: AssemblyVersion("1.0.13.22")]
[assembly: AssemblyVersion("1.0.13.23")]