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开放机械手晶圆状态查询

This commit is contained in:
Han Qiang Qiang 2024-06-28 08:37:46 +08:00
parent cc3fcd2e29
commit acb370ddb6
6 changed files with 88 additions and 88 deletions
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4
Modules/Mainframe/TMs/Routines/TMRobotPickRoutine.cs
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@ -281,7 +281,7 @@ namespace SicModules.TMs.Routines
CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _pickTimeout);
CheckBeforePick((int)RoutineStep.CheckBeforePick, _target, _targetSlot, _blade);
RobotRequestWaferPresent((int)RoutineStep.BeforePickRequestWaferPresent, RobotDevice, _blade, _pickTimeout);
////CheckWaferInfoByRobotRQ((int)RoutineStep.AfterPickCheckWaferInfoByRobotSensor, RobotDevice, _blade, Module, _target.ToString(), 1000);
CheckWaferInfoByRobotRQ((int)RoutineStep.AfterPickCheckWaferInfoByRobotSensor, RobotDevice, _blade, Module, _target.ToString(), 1000);
WaitPMReadySensor((int)RoutineStep.WaitPMSensor, _target,5);
SetRobotExtendToDO((int)RoutineStep.SetRobortExtendToDo, _target, 2);
CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _pickTimeout);
@ -318,7 +318,7 @@ namespace SicModules.TMs.Routines
IsPicking = false;
TimeDelay((int)RoutineStep.TimeDelay2, 1);
RobotRequestWaferPresent((int)RoutineStep.RequestWaferPresent, RobotDevice, _blade, _pickTimeout);
////CheckWaferInfoByRobotRQ((int)RoutineStep.CheckWaferInfoByRobotSensor, RobotDevice, _blade, Module, _target.ToString(), 1000);
CheckWaferInfoByRobotRQ((int)RoutineStep.CheckWaferInfoByRobotSensor, RobotDevice, _blade, Module, _target.ToString(), 1000);
if (_requestAWCData)
{

4
Modules/Mainframe/TMs/Routines/TMRobotPlaceRoutine.cs
View File

@ -263,7 +263,7 @@ namespace SicModules.TMs.Routines
CheckBeforePlace((int)RoutineStep.CheckBeforePlace, _target, _targetSlot, _blade);
RobotRequestWaferPresent((int)RoutineStep.BeforePlaceRequestWaferPresent, RobotDevice, _blade, _placeTimeout);
////CheckWaferInfoByRobotRQ((int)RoutineStep.BeforePlaceCheckWaferInfoByRobotSensor, RobotDevice, _blade, Module, _target.ToString(), 10);
CheckWaferInfoByRobotRQ((int)RoutineStep.BeforePlaceCheckWaferInfoByRobotSensor, RobotDevice, _blade, Module, _target.ToString(), 10);
WaitPMReadySensor((int)RoutineStep.WaitPMSensor, _target, 5);
SetRobotExtendToDO((int)RoutineStep.SetRobortExtendToDo, _target, 2);
@ -304,7 +304,7 @@ namespace SicModules.TMs.Routines
IsPicking = false;
TimeDelay((int)RoutineStep.TimeDelay1, 1);
RobotRequestWaferPresent((int)RoutineStep.RequestWaferPresent, RobotDevice, _blade, _placeTimeout);
////CheckWaferInfoByRobotRQ((int)RoutineStep.CheckWaferInfoByRobotSensor, RobotDevice, _blade, Module, _target.ToString(), 10);
CheckWaferInfoByRobotRQ((int)RoutineStep.CheckWaferInfoByRobotSensor, RobotDevice, _blade, Module, _target.ToString(), 10);
if (_requestAWCData)
{

42
Modules/Mainframe/gitversion.json
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42
SicRT/gitversion.json
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42
SicSimulator/gitversion.json
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42
SicUI/gitversion.json
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