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修改Recipe中MFC默认显示

This commit is contained in:
hanqiangqiang 2024-07-19 08:33:01 +08:00
parent 5ed714934e
commit cd1de6cfd5
1 changed files with 4 additions and 4 deletions
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8
SicRT/Config/Account/Account.xml
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@ -5,7 +5,7 @@
Header,3;Overview,3;Coating,3;TM,3;EFEM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;RoutineConfig,3;EventLog,3;RealTimeCharting,3;WaferHistory,3;DataHistory,3;
Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;MfcRorPM1,3;MfcTestPM1,3;
mainPM2,3;processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;MfcRorPM2,3;MfcTestPM2,3;Uid,1;Step,3;Name,3;Time,3;Growth Rate,3;
1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. Carray Gas Flow (M41),3;5. Carray Gas Flow (M42),3;
1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carry Gas Flow (M40),3;4. Carry Gas Flow (M41),3;5. Carry Gas Flow (M42),3;
6. SH Total Flow Split Ratio,3;7. Flow Set Mode,3;8. Pressure Set,3;9. Rotation Set,3;10. PSU Control Mode,3;
11. PSU Set Mode,3;12. SCR Control Mode,3;13. SCR Set Mode,3;14. PSU Inner Temp Set,3;15. PSU Middle Temp Set,3;16. PSU Outer Temp Set,3;17. SCR Temp Set,3;
18. PSU Inner Ratio Set,3;19. PSU Middle Ratio Set,3;20. PSU Outer Ratio Set,3;21. SCR Upper Ratio Set,3;22. SCR Middle Ratio Set,3;23. SCR Lower Ratio Set,3;
@ -31,7 +31,7 @@
Header,3;Overview,3;Coating,3;TM,3;EFEM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;RoutineConfig,3;EventLog,3;RealTimeCharting,3;WaferHistory,3;DataHistory,3;
Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;MfcRorPM1,3;MfcTestPM1,3;
mainPM2,3;processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;MfcRorPM2,3;MfcTestPM2,3;Uid,1;Step,3;Name,3;Time,3;Growth Rate,3;
1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. Carray Gas Flow (M41),3;5. Carray Gas Flow (M42),3;
1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carry Gas Flow (M40),3;4. Carry Gas Flow (M41),3;5. Carry Gas Flow (M42),3;
6. SH Total Flow Split Ratio,3;7. Flow Set Mode,3;8. Pressure Set,3;9. Rotation Set,3;10. PSU Control Mode,3;
11. PSU Set Mode,3;12. SCR Control Mode,3;13. SCR Set Mode,3;14. PSU Inner Temp Set,3;15. PSU Middle Temp Set,3;16. PSU Outer Temp Set,3;17. SCR Temp Set,3;
18. PSU Inner Ratio Set,3;19. PSU Middle Ratio Set,3;20. PSU Outer Ratio Set,3;21. SCR Upper Ratio Set,3;22. SCR Middle Ratio Set,3;23. SCR Lower Ratio Set,3;
@ -57,7 +57,7 @@
Header,3;Overview,3;Coating,3;TM,3;EFEM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;RoutineConfig,3;EventLog,3;RealTimeCharting,3;WaferHistory,3;DataHistory,3;
Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;MfcRorPM1,3;MfcTestPM1,3;
mainPM2,3;processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;MfcRorPM2,3;MfcTestPM2,3;Uid,1;Step,3;Name,3;Time,3;Growth Rate,3;
1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. Carray Gas Flow (M41),3;5. Carray Gas Flow (M42),3;
1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carry Gas Flow (M40),3;4. Carry Gas Flow (M41),3;5. Carry Gas Flow (M42),3;
6. SH Total Flow Split Ratio,3;7. Flow Set Mode,3;8. Pressure Set,3;9. Rotation Set,3;10. PSU Control Mode,3;
11. PSU Set Mode,3;12. SCR Control Mode,3;13. SCR Set Mode,3;14. PSU Inner Temp Set,3;15. PSU Middle Temp Set,3;16. PSU Outer Temp Set,3;17. SCR Temp Set,3;
18. PSU Inner Ratio Set,3;19. PSU Middle Ratio Set,3;20. PSU Outer Ratio Set,3;21. SCR Upper Ratio Set,3;22. SCR Middle Ratio Set,3;23. SCR Lower Ratio Set,3;
@ -83,7 +83,7 @@
Header,3;Overview,3;Coating,3;TM,3;EFEM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;RoutineConfig,3;EventLog,3;RealTimeCharting,3;WaferHistory,3;DataHistory,3;
Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;MfcRorPM1,3;MfcTestPM1,3;
mainPM2,3;processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;MfcRorPM2,3;MfcTestPM2,3;Uid,1;Step,3;Name,3;Time,3;Growth Rate,3;
1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. Carray Gas Flow (M41),3;5. Carray Gas Flow (M42),3;
1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carry Gas Flow (M40),3;4. Carry Gas Flow (M41),3;5. Carry Gas Flow (M42),3;
6. SH Total Flow Split Ratio,3;7. Flow Set Mode,3;8. Pressure Set,3;9. Rotation Set,3;10. PSU Control Mode,3;
11. PSU Set Mode,3;12. SCR Control Mode,3;13. SCR Set Mode,3;14. PSU Inner Temp Set,3;15. PSU Middle Temp Set,3;16. PSU Outer Temp Set,3;17. SCR Temp Set,3;
18. PSU Inner Ratio Set,3;19. PSU Middle Ratio Set,3;20. PSU Outer Ratio Set,3;21. SCR Upper Ratio Set,3;22. SCR Middle Ratio Set,3;23. SCR Lower Ratio Set,3;