diff --git a/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml b/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml
index c7e1ae96..3fd85358 100644
--- a/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml
+++ b/Modules/Mainframe/Config/PM/PM1/DeviceModelPM1.xml
@@ -334,9 +334,9 @@
     <IoGasBoxTemp id="HeatTailPipe"   display="HeatTailPipe"   aiHeatTMA="AI_HeatTailPipe"   scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable=""/>
   </IoGasBoxTemps>
 
-  <IoPumps classType="SicModules.Devices.IoPump" assembly="SicModules">
-    <IoPump id="Pump1" module="" display="Pump" schematicId="Pump" unit="" aioType="" diRunning="DI_DryPump1Running" diAlarm="DI_DryPump1Alarm" diWarning="DI_DryPump1Warning"/>
-    <IoPump id="Pump2" module="" display="Pump2" schematicId="Pump2" unit="" aioType="" diRunning="DI_DryPump2Running" diAlarm="DI_DryPump2Alarm" diWarning="DI_DryPump2Warning" />
+  <IoPumps classType="Aitex.Core.RT.Device.Devices.IoPump" assembly="MECF.Framework.RT.EquipmentLibrary">
+    <IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType="" diDryPump1Running="DI_DryPump1Running" diDryPumpAlarm="DI_DryPump1Alarm" diDryPump1Warning="DI_DryPump1Warning" diPumpExhaustPress="DI_PumpExhaustPressSW" diDryPumpFlow="DI_DryPumpFlowSW" />
+    <IoPump id="Pump2" module="" display="Pump2" schematicId="Pump2" unit="" aioType="" diDryPump1Running="DI_DryPump2Running" diDryPumpAlarm="DI_DryPump2Alarm" diDryPump1Warning="DI_DryPump2Warning" diPumpExhaustPress="DI_PumpExhaustDPSW" diDryPumpFlow="DO_PMpumpFlowTemp" />
   </IoPumps>
   <IoPTOffsetAndKs classType="Aitex.Core.RT.Device.Devices.IoPTOffsetAndK" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoPTOffsetAndK id="PT1_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_Offset"   />
diff --git a/Modules/Mainframe/PMs/PMModuleDevice.cs b/Modules/Mainframe/PMs/PMModuleDevice.cs
index 096245e9..afcf9805 100644
--- a/Modules/Mainframe/PMs/PMModuleDevice.cs
+++ b/Modules/Mainframe/PMs/PMModuleDevice.cs
@@ -1018,6 +1018,10 @@ namespace SicModules.PMs
             {
                 lst = new List<string>() { "V31", "V32", "V35", "V36" };
             }
+            else if (eGroupName == IoGroupName.V30)
+            {
+                lst = new List<string>() { "V30" };
+            }
             else if (eGroupName == IoGroupName.V31)
             {
                 lst = new List<string>() { "V31" };
diff --git a/Modules/Mainframe/PMs/RecipeExecutions/RecipeParser.cs b/Modules/Mainframe/PMs/RecipeExecutions/RecipeParser.cs
index c5ca4f6b..898471c1 100644
--- a/Modules/Mainframe/PMs/RecipeExecutions/RecipeParser.cs
+++ b/Modules/Mainframe/PMs/RecipeExecutions/RecipeParser.cs
@@ -223,6 +223,7 @@ namespace SicModules.PMs.RecipeExecutions
                     dic.Remove("SHTotalFlow");
                     dic.Remove("SHTotalFlowSplitRatio");
                     //dic.Remove("SiSourTotalFlow");
+                    dic.Remove("HCLSourSplitRatio");
                     dic.Remove("SiSourSplitRatio");
                     //dic.Remove("CSourTotalFlow");
                     dic.Remove("CSourSplitRatio");
diff --git a/Modules/Mainframe/gitversion.json b/Modules/Mainframe/gitversion.json
index 80ad12f3..a85336fc 100644
--- a/Modules/Mainframe/gitversion.json
+++ b/Modules/Mainframe/gitversion.json
@@ -2,34 +2,34 @@
   "Major": 23,
   "Minor": 9,
   "Patch": 2,
-  "PreReleaseTag": "----------.604",
-  "PreReleaseTagWithDash": "-----------.604",
-  "PreReleaseLabel": "----------",
-  "PreReleaseLabelWithDash": "-----------",
-  "PreReleaseNumber": 604,
-  "WeightedPreReleaseNumber": 604,
+  "PreReleaseTag": "----multiplate-develop.605",
+  "PreReleaseTagWithDash": "-----multiplate-develop.605",
+  "PreReleaseLabel": "----multiplate-develop",
+  "PreReleaseLabelWithDash": "-----multiplate-develop",
+  "PreReleaseNumber": 605,
+  "WeightedPreReleaseNumber": 605,
   "BuildMetaData": null,
   "BuildMetaDataPadded": "",
-  "FullBuildMetaData": "Branch.----------.Sha.fa8d924e5cd15ec31fc1c3905779f33cf2bbeb33",
+  "FullBuildMetaData": "Branch.----multiplate-develop.Sha.fe58c9fac48cbe7bd4fb8d51d9a18e7777f94d1a",
   "MajorMinorPatch": "23.9.2",
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-  "LegacySemVer": "23.9.2-----------604",
-  "LegacySemVerPadded": "23.9.2-----------0604",
-  "AssemblySemVer": "23.9.2.604",
-  "AssemblySemFileVer": "23.9.2.604",
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-  "BranchName": "昂坤测温计算平均温度",
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-  "NuGetVersion": "23.9.2-----------0604",
-  "NuGetPreReleaseTagV2": "----------0604",
-  "NuGetPreReleaseTag": "----------0604",
+  "SemVer": "23.9.2-----multiplate-develop.605",
+  "LegacySemVer": "23.9.2-----multiplate-de605",
+  "LegacySemVerPadded": "23.9.2-----multiplate-d0605",
+  "AssemblySemVer": "23.9.2.605",
+  "AssemblySemFileVer": "23.9.2.605",
+  "FullSemVer": "23.9.2-----multiplate-develop.605",
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+  "EscapedBranchName": "----multiplate-develop",
+  "Sha": "fe58c9fac48cbe7bd4fb8d51d9a18e7777f94d1a",
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+  "NuGetVersion": "23.9.2-----multiplate-d0605",
+  "NuGetPreReleaseTagV2": "----multiplate-d0605",
+  "NuGetPreReleaseTag": "----multiplate-d0605",
   "VersionSourceSha": "c29389314a6af8abb1346677a53be6fe6b00379e",
-  "CommitsSinceVersionSource": 604,
-  "CommitsSinceVersionSourcePadded": "0604",
-  "UncommittedChanges": 9,
-  "CommitDate": "2024-07-03"
+  "CommitsSinceVersionSource": 605,
+  "CommitsSinceVersionSourcePadded": "0605",
+  "UncommittedChanges": 0,
+  "CommitDate": "2024-07-04"
 }
\ No newline at end of file
diff --git a/SicRT/gitversion.json b/SicRT/gitversion.json
index 80ad12f3..a85336fc 100644
--- a/SicRT/gitversion.json
+++ b/SicRT/gitversion.json
@@ -2,34 +2,34 @@
   "Major": 23,
   "Minor": 9,
   "Patch": 2,
-  "PreReleaseTag": "----------.604",
-  "PreReleaseTagWithDash": "-----------.604",
-  "PreReleaseLabel": "----------",
-  "PreReleaseLabelWithDash": "-----------",
-  "PreReleaseNumber": 604,
-  "WeightedPreReleaseNumber": 604,
+  "PreReleaseTag": "----multiplate-develop.605",
+  "PreReleaseTagWithDash": "-----multiplate-develop.605",
+  "PreReleaseLabel": "----multiplate-develop",
+  "PreReleaseLabelWithDash": "-----multiplate-develop",
+  "PreReleaseNumber": 605,
+  "WeightedPreReleaseNumber": 605,
   "BuildMetaData": null,
   "BuildMetaDataPadded": "",
-  "FullBuildMetaData": "Branch.----------.Sha.fa8d924e5cd15ec31fc1c3905779f33cf2bbeb33",
+  "FullBuildMetaData": "Branch.----multiplate-develop.Sha.fe58c9fac48cbe7bd4fb8d51d9a18e7777f94d1a",
   "MajorMinorPatch": "23.9.2",
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-  "LegacySemVer": "23.9.2-----------604",
-  "LegacySemVerPadded": "23.9.2-----------0604",
-  "AssemblySemVer": "23.9.2.604",
-  "AssemblySemFileVer": "23.9.2.604",
-  "FullSemVer": "23.9.2-----------.604",
-  "InformationalVersion": "23.9.2-----------.604+Branch.----------.Sha.fa8d924e5cd15ec31fc1c3905779f33cf2bbeb33",
-  "BranchName": "昂坤测温计算平均温度",
-  "EscapedBranchName": "----------",
-  "Sha": "fa8d924e5cd15ec31fc1c3905779f33cf2bbeb33",
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-  "NuGetVersion": "23.9.2-----------0604",
-  "NuGetPreReleaseTagV2": "----------0604",
-  "NuGetPreReleaseTag": "----------0604",
+  "SemVer": "23.9.2-----multiplate-develop.605",
+  "LegacySemVer": "23.9.2-----multiplate-de605",
+  "LegacySemVerPadded": "23.9.2-----multiplate-d0605",
+  "AssemblySemVer": "23.9.2.605",
+  "AssemblySemFileVer": "23.9.2.605",
+  "FullSemVer": "23.9.2-----multiplate-develop.605",
+  "InformationalVersion": "23.9.2-----multiplate-develop.605+Branch.----multiplate-develop.Sha.fe58c9fac48cbe7bd4fb8d51d9a18e7777f94d1a",
+  "BranchName": "多片机/multiplate-develop",
+  "EscapedBranchName": "----multiplate-develop",
+  "Sha": "fe58c9fac48cbe7bd4fb8d51d9a18e7777f94d1a",
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+  "NuGetVersion": "23.9.2-----multiplate-d0605",
+  "NuGetPreReleaseTagV2": "----multiplate-d0605",
+  "NuGetPreReleaseTag": "----multiplate-d0605",
   "VersionSourceSha": "c29389314a6af8abb1346677a53be6fe6b00379e",
-  "CommitsSinceVersionSource": 604,
-  "CommitsSinceVersionSourcePadded": "0604",
-  "UncommittedChanges": 9,
-  "CommitDate": "2024-07-03"
+  "CommitsSinceVersionSource": 605,
+  "CommitsSinceVersionSourcePadded": "0605",
+  "UncommittedChanges": 0,
+  "CommitDate": "2024-07-04"
 }
\ No newline at end of file
diff --git a/SicSimulator/Instances/SimulatorSystem.cs b/SicSimulator/Instances/SimulatorSystem.cs
index 30f302ea..a58b732c 100644
--- a/SicSimulator/Instances/SimulatorSystem.cs
+++ b/SicSimulator/Instances/SimulatorSystem.cs
@@ -145,6 +145,7 @@ namespace SicSimulator.Instances
             IO.AO[$"{mod}.AO_ValveModeSetpoint"].Value = (float)2.222;
 
             IO.DI[$"{mod}.DI_ChamLidClosed"].Value = true;
+            IO.DI[$"{mod}.DI_DORPressVac2SW"].Value = true;
             IO.DI[$"{mod}.DI_ChamCabDoorClosed"].Value = true;
             IO.DI[$"{mod}.DI_ChamPressAboveATMSW"].Value = true;
             IO.DI[$"{mod}.DI_ChamAtSafeProcessPressSW"].Value = false;
diff --git a/SicSimulator/gitversion.json b/SicSimulator/gitversion.json
index 80ad12f3..a85336fc 100644
--- a/SicSimulator/gitversion.json
+++ b/SicSimulator/gitversion.json
@@ -2,34 +2,34 @@
   "Major": 23,
   "Minor": 9,
   "Patch": 2,
-  "PreReleaseTag": "----------.604",
-  "PreReleaseTagWithDash": "-----------.604",
-  "PreReleaseLabel": "----------",
-  "PreReleaseLabelWithDash": "-----------",
-  "PreReleaseNumber": 604,
-  "WeightedPreReleaseNumber": 604,
+  "PreReleaseTag": "----multiplate-develop.605",
+  "PreReleaseTagWithDash": "-----multiplate-develop.605",
+  "PreReleaseLabel": "----multiplate-develop",
+  "PreReleaseLabelWithDash": "-----multiplate-develop",
+  "PreReleaseNumber": 605,
+  "WeightedPreReleaseNumber": 605,
   "BuildMetaData": null,
   "BuildMetaDataPadded": "",
-  "FullBuildMetaData": "Branch.----------.Sha.fa8d924e5cd15ec31fc1c3905779f33cf2bbeb33",
+  "FullBuildMetaData": "Branch.----multiplate-develop.Sha.fe58c9fac48cbe7bd4fb8d51d9a18e7777f94d1a",
   "MajorMinorPatch": "23.9.2",
-  "SemVer": "23.9.2-----------.604",
-  "LegacySemVer": "23.9.2-----------604",
-  "LegacySemVerPadded": "23.9.2-----------0604",
-  "AssemblySemVer": "23.9.2.604",
-  "AssemblySemFileVer": "23.9.2.604",
-  "FullSemVer": "23.9.2-----------.604",
-  "InformationalVersion": "23.9.2-----------.604+Branch.----------.Sha.fa8d924e5cd15ec31fc1c3905779f33cf2bbeb33",
-  "BranchName": "昂坤测温计算平均温度",
-  "EscapedBranchName": "----------",
-  "Sha": "fa8d924e5cd15ec31fc1c3905779f33cf2bbeb33",
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-  "NuGetVersion": "23.9.2-----------0604",
-  "NuGetPreReleaseTagV2": "----------0604",
-  "NuGetPreReleaseTag": "----------0604",
+  "SemVer": "23.9.2-----multiplate-develop.605",
+  "LegacySemVer": "23.9.2-----multiplate-de605",
+  "LegacySemVerPadded": "23.9.2-----multiplate-d0605",
+  "AssemblySemVer": "23.9.2.605",
+  "AssemblySemFileVer": "23.9.2.605",
+  "FullSemVer": "23.9.2-----multiplate-develop.605",
+  "InformationalVersion": "23.9.2-----multiplate-develop.605+Branch.----multiplate-develop.Sha.fe58c9fac48cbe7bd4fb8d51d9a18e7777f94d1a",
+  "BranchName": "多片机/multiplate-develop",
+  "EscapedBranchName": "----multiplate-develop",
+  "Sha": "fe58c9fac48cbe7bd4fb8d51d9a18e7777f94d1a",
+  "ShortSha": "fe58c9f",
+  "NuGetVersionV2": "23.9.2-----multiplate-d0605",
+  "NuGetVersion": "23.9.2-----multiplate-d0605",
+  "NuGetPreReleaseTagV2": "----multiplate-d0605",
+  "NuGetPreReleaseTag": "----multiplate-d0605",
   "VersionSourceSha": "c29389314a6af8abb1346677a53be6fe6b00379e",
-  "CommitsSinceVersionSource": 604,
-  "CommitsSinceVersionSourcePadded": "0604",
-  "UncommittedChanges": 9,
-  "CommitDate": "2024-07-03"
+  "CommitsSinceVersionSource": 605,
+  "CommitsSinceVersionSourcePadded": "0605",
+  "UncommittedChanges": 0,
+  "CommitDate": "2024-07-04"
 }
\ No newline at end of file
diff --git a/SicUI/Models/PMs/PMMotionViewModel.cs b/SicUI/Models/PMs/PMMotionViewModel.cs
index ba8041dd..0b032272 100644
--- a/SicUI/Models/PMs/PMMotionViewModel.cs
+++ b/SicUI/Models/PMs/PMMotionViewModel.cs
@@ -462,7 +462,7 @@ namespace SicUI.Models.PMs
 
         public void SetActualSpeed(object data)
         {
-            SetPMServoValue(data, 1000, 0, "SpindleSpeedRun");
+            SetPMServoValue(data, 1000, 0, "SetActualSpeed");
         }
 
         public void LoadAngleSet(object data)
diff --git a/SicUI/Models/PMs/PMOperationViewModel.cs b/SicUI/Models/PMs/PMOperationViewModel.cs
index 577a51cd..20b22392 100644
--- a/SicUI/Models/PMs/PMOperationViewModel.cs
+++ b/SicUI/Models/PMs/PMOperationViewModel.cs
@@ -561,7 +561,7 @@ namespace SicUI.Models.PMs
         #endregion
 
         #region Pump
-        [Subscription("Pump1.DeviceData")]
+        [Subscription("Pump.DeviceData")]
         public AITPumpData PumpData1 { get; set; }
 
         [Subscription("Pump2.DeviceData")]
diff --git a/SicUI/gitversion.json b/SicUI/gitversion.json
index 80ad12f3..a85336fc 100644
--- a/SicUI/gitversion.json
+++ b/SicUI/gitversion.json
@@ -2,34 +2,34 @@
   "Major": 23,
   "Minor": 9,
   "Patch": 2,
-  "PreReleaseTag": "----------.604",
-  "PreReleaseTagWithDash": "-----------.604",
-  "PreReleaseLabel": "----------",
-  "PreReleaseLabelWithDash": "-----------",
-  "PreReleaseNumber": 604,
-  "WeightedPreReleaseNumber": 604,
+  "PreReleaseTag": "----multiplate-develop.605",
+  "PreReleaseTagWithDash": "-----multiplate-develop.605",
+  "PreReleaseLabel": "----multiplate-develop",
+  "PreReleaseLabelWithDash": "-----multiplate-develop",
+  "PreReleaseNumber": 605,
+  "WeightedPreReleaseNumber": 605,
   "BuildMetaData": null,
   "BuildMetaDataPadded": "",
-  "FullBuildMetaData": "Branch.----------.Sha.fa8d924e5cd15ec31fc1c3905779f33cf2bbeb33",
+  "FullBuildMetaData": "Branch.----multiplate-develop.Sha.fe58c9fac48cbe7bd4fb8d51d9a18e7777f94d1a",
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+  "NuGetVersion": "23.9.2-----multiplate-d0605",
+  "NuGetPreReleaseTagV2": "----multiplate-d0605",
+  "NuGetPreReleaseTag": "----multiplate-d0605",
   "VersionSourceSha": "c29389314a6af8abb1346677a53be6fe6b00379e",
-  "CommitsSinceVersionSource": 604,
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-  "UncommittedChanges": 9,
-  "CommitDate": "2024-07-03"
+  "CommitsSinceVersionSource": 605,
+  "CommitsSinceVersionSourcePadded": "0605",
+  "UncommittedChanges": 0,
+  "CommitDate": "2024-07-04"
 }
\ No newline at end of file
diff --git a/ThirdParty/MECF.Framework/MECF.Framework.Common.dll b/ThirdParty/MECF.Framework/MECF.Framework.Common.dll
index a052301c..0b3bdfab 100644
Binary files a/ThirdParty/MECF.Framework/MECF.Framework.Common.dll and b/ThirdParty/MECF.Framework/MECF.Framework.Common.dll differ
diff --git a/ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll b/ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
index 5860a5d2..e300c2b2 100644
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diff --git a/ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll b/ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
index f51f5a84..5d7e4132 100644
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diff --git a/ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll b/ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
index 48c5c90f..6f758a1f 100644
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diff --git a/ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll b/ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
index 2e146010..cf5be858 100644
Binary files a/ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll and b/ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll differ
diff --git a/ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll b/ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
index 877fe723..425db955 100644
Binary files a/ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll and b/ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll differ
diff --git a/ThirdParty/MECF.Framework/zh/Sicentury.Localization.resources.dll b/ThirdParty/MECF.Framework/zh/Sicentury.Localization.resources.dll
index d8bd4676..8c8e6f63 100644
Binary files a/ThirdParty/MECF.Framework/zh/Sicentury.Localization.resources.dll and b/ThirdParty/MECF.Framework/zh/Sicentury.Localization.resources.dll differ